1. A substrate processing method for forming an oxynitride film by nitriding an oxide film formed on a silicon substrate surface, comprising:
a nitridation processing step, said nitridation processing step exciting a nitrogen gas with plasma and nitriding said oxide film by radicals or ions formed with excitation of said nitrogen gas with said plasma,
said nitridation processing step causing release of oxygen from said oxide film with said nitridation,
said nitridation processing step being conducted by setting a resident time of said oxygen in a processing space in which said silicon substrate is held to be 2 seconds or less.
2. The substrate processing method as claimed in claim 1, wherein said plasma is excited by a microwave.
3. The substrate processing method as claimed in claim 1, wherein said nitridation processing is conducted at a substrate temperature of less than 500\xb0 C.
4. The substrate processing method as claimed in claim 1, wherein said nitridation processing is conducted by setting an electron temperature of said plasma to be 2 eV or less.
5. The substrate processing method as claimed in claim 1, wherein said nitridation processing step is conducted by setting an electron temperature of said plasma to 1 eV or less.
6. The substrate processing method as claimed in claim 1, wherein said nitridation processing step is conducted by setting an electron temperature of said plasma to 0.9 eV or less.
7. The substrate processing method as claimed in claim 1, wherein said nitridation processing step is conducted by setting said resident time of oxygen in said processing space to 1.78 seconds or less.
8. The substrate processing method as claimed in claim 1, wherein said nitridation processing is conducted by setting said resident time of oxygen in said processing space to 1 second or less.
9. The substrate processing method as claimed in claim 1, wherein said nitridation processing step is conducted by setting said resident time of oxygen in said processing space to 0.86 seconds or less.
10. The substrate processing method as claimed in claim 1, wherein said nitridation processing is conducted at said substrate temperature of 100\xb0 C. or more.
11. The substrate processing method as claimed in claim 1, wherein said nitridation processing step is conducted by setting said substrate temperature to a range of 250\u2013400\xb0 C.
12. The substrate processing method as claimed in claim 1, wherein said nitridation processing is conducted by setting a processing pressure in a processing space to 110 Pa or more.
13. The substrate processing method as claimed in claim 12, wherein said processing space is defined by said silicon substrate and a microwave window facing thereto, said nitridation processing being conducted by introducing a microwave into said processing space via said microwave window.
14. The substrate processing method as claimed in claim 13, wherein said microwave is supplied from a radial line slot antenna coupled to said microwave window.
15. The substrate processing method as claimed in claim 1, wherein said plasma is formed by supplying a microwave of 1 GHz or more but not exceeding 10 GHz to a mixed gas of a rare gas and nitrogen.
16. The substrate processing method as claimed in
claim 15, wherein said rare gas is selected from the group consisting of He, Ar, Kr, Ne and Xe.
17. The substrate processing method as claimed in claim 15, wherein said rare gas is an Ar gas.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An intra-picture prediction coding method comprising:
determining, according to an amount of resources provided for intra-picture prediction coding, one or more intra-picture prediction method candidates that are candidates for an intra-picture prediction method for performing intra-picture prediction on a current block;
executing intra-picture prediction on the current block using intra-picture prediction methods specified by the determined intra-picture prediction method candidates, and generating an intra-picture predictive image;
generating a difference image between an input image that includes the current block, and the generated intra-picture predictive image, the difference image having difference values, each indicating a difference between each pixel in the input image and each pixel in the intra-picture predictive image, as each pixel value;
calculating an evaluation value indicating coding efficiency, in the case where coding is performed based on the generated difference image using each intra-picture prediction method candidate based on which the difference image is generated;
determining an intra-picture prediction method for coding the current block from among the intra-picture prediction method candidates, based on the evaluation values calculated for each of the intra-picture prediction method candidates; and
coding intra-picture prediction method information indicating the determined intra-picture prediction method, and the difference image generated based on the intra-picture predictive image on which intra-picture prediction is performed using the determined intra-picture prediction method.
2. The intra-picture prediction coding method according to claim 1,
wherein the intra-picture prediction method is an intra-picture prediction mode indicating how to use decoded pixels in order to generate the intra-picture predictive image, the decoded pixels being adjacent to the current block and already coded,
in the determination of said one or more intra-picture prediction method candidates, intra-picture prediction mode candidates are determined according to the amount of resources, and
in the determination of the intra-picture prediction method, an intra-picture prediction mode for coding the current block is determined from among the intra-picture prediction mode candidates based on the evaluation value.
3. The intra-picture prediction coding method according to claim 2,
wherein in the determination of the intra-picture prediction method candidates, an edge direction of an image within the current block is extracted, and the intra-picture prediction mode candidates are determined based on the edge direction.
4. The intra-picture prediction coding method according to claim 3,
wherein in the determination of said one or more intra-picture prediction method candidates, an intra-picture prediction mode that performs prediction in a direction similar to the edge direction is preferentially determined as the intra-picture prediction mode candidate.
5. The intra-picture prediction coding method according to claim 2,
wherein in the determination of said one or more intra-picture prediction method candidates, an intra-picture prediction mode that does not have a direction of prediction is preferentially determined as the intra-picture prediction mode candidate.
6. The intra-picture prediction coding method according to claim 2,
wherein in the determination of said one or more intra-picture prediction method candidates, a predetermined intra-picture prediction mode is preferentially determined as the intra-picture prediction mode candidate depending on whether coding is performed on a frame basis or on a field basis.
7. The intra-picture prediction coding method according to claim 2,
wherein in the determination of said one or more intra-picture prediction method candidates, a predetermined intra-picture prediction mode is preferentially determined as the intra-picture prediction mode candidate based on a length-to-width ratio of a picture on which coding is performed at lower resolution.
8. The intra-picture prediction coding method according to claim 1,
wherein the intra-picture prediction method is an intra-picture prediction unit that is a block size of the current block, and
in the determination of said one or more intra-picture prediction method candidates, intra-picture prediction unit candidates are determined according to the amount of resources, and
in the determination of the intra-picture prediction method, an intra-picture prediction unit is determined from among the intra-picture prediction unit candidates based on the evaluation value.
9. The intra-picture prediction coding method according to claim 8,
wherein in the determination of said one or more intra-picture prediction method candidates, one or more intra-picture prediction mode candidates that are candidates for an intra-picture prediction mode, the intra-picture prediction mode indicating how to use decoded pixels in order to generate the intra-picture predictive image is determined for each intra-picture prediction unit based on the amount of resources, and the decoded pixels being adjacent to the current block and already coded, and
in the determination of the intra-picture prediction method, an intra-picture prediction mode is determined from among the intra-picture prediction mode candidates based on the evaluation value.
10. The intra-picture prediction method according to claim 1,
wherein in the determination of said one or more intra-picture prediction method candidates, a method of determining the intra-picture prediction method candidates is selected from among a plurality of determination methods based on the amount of resources.
11. The intra-picture prediction coding method according to claim 1,
wherein in the determination of said one or more intra-picture prediction method candidates, a number of the intra-picture prediction method candidates is changed according to the amount of resources.
12. The intra-picture prediction coding method according to claim 1,
wherein in the determination of said one or more intra-picture prediction method candidates, it is judged that the amount of resources increases as a product of a number of pixels in horizontal direction and a number of pixels in vertical direction of an input picture to be coded gets smaller, and the intra-picture prediction method candidates are determined according to the product.
13. The intra-picture prediction coding method according to claim 12,
wherein in the determination of said one or more intra-picture prediction method candidates, the number of intra-picture prediction method candidates increases as the product of the number of pixels in horizontal direction and the number of pixels in vertical direction gets smaller.
14. The intra-picture prediction coding method according to claim 1,
wherein in the determination of said one or more intra-picture prediction method candidates, it is judged that the amount of resources increases as a number of frames or fields to be coded per unit time for an input picture to be coded gets smaller, and the intra-picture prediction method candidates are determined according to the number of frames or fields.
15. The intra-picture prediction coding method according to claim 14,
wherein in the determination of said one or more intra-picture prediction method candidates, the number of intra-picture prediction method candidates increases as the number of frames or fields gets smaller.
16. The intra-picture prediction coding method according to claim 1,
wherein in the determination of said one or more intra-picture prediction method candidates, it is judged that the amount of resources for picture prediction types provided for the input picture to be coded increases in the following order: a prediction type B of performing inter-picture prediction for generating a predictive image with reference to one or more pictures; a prediction type P of performing inter-picture prediction for generating a predictive image with reference to one picture; and a prediction type I of not performing inter-picture prediction, and the intra-picture prediction method candidates are determined based on the picture prediction type.
17. The intra-picture prediction method according to claim 16,
wherein in the determination of said one or more intra-picture prediction method candidates, the number of intra-picture prediction method candidates gradually increases in the order of the prediction types of B, P, and I.
18. An intra-picture prediction coding apparatus comprising:
an intra-picture prediction method candidate determination unit operable to determine, according to an amount of resources provided for intra-picture prediction coding, one or more intra-picture prediction method candidates that are candidates for an intra-picture prediction method for performing intra-picture prediction on a current block;
an intra-picture prediction execution unit operable to execute intra-picture prediction on the current block using intra-picture prediction methods specified by the intra-picture prediction method candidates determined by the intra-picture prediction method candidate determination unit, and generate an intra-picture predictive image;
a prediction difference calculation unit operable to generate a difference image between an input image that includes the current block, and the intra-picture predictive image generated by the intra-picture prediction execution unit, the difference image having difference values, each indicating a difference between each pixel in the input image and each pixel in the intra-picture predictive image, as each pixel value;
a coding efficiency evaluation unit operable to calculate an evaluation value indicating coding efficiency, in the case where coding is performed based on the evaluation value calculated by the coding efficiency calculation unit using each intra-picture prediction method candidate based on which the difference image is generated;
an intra-picture prediction method determination unit operable to determine an intra-picture prediction method for coding the current block from among the intra-picture prediction method candidates, based on the evaluation values calculated for each of the intra-picture prediction method candidates by the coding efficiency evaluation unit;
a coding unit operable to code intra-picture prediction method information indicating the intra-picture prediction method determined by the intra-picture prediction method determination unit, and the difference image generated based on the intra-picture predictive image on which intra-picture prediction is performed using the intra-picture prediction method determined by the intra-picture prediction method determination unit.
19. A program for intra-picture prediction coding an input image to be coded, the program causing a computer to execute:
determining, according to an amount of resources provided for the intra-picture prediction coding, one or more intra-picture prediction method candidates that are candidates for an intra-picture prediction method for performing intra-picture prediction on a current block;
executing intra-picture prediction on the current block using intra-picture prediction methods specified by the determined intra-picture prediction method candidates, and generating an intra-picture predictive image;
generating a difference image between an input image that includes the current block, and the generated intra-picture predictive image, the difference image having difference values, each indicating a difference between each pixel in the input image and each pixel in the intra-picture predictive image, as each pixel value;
calculating an evaluation value indicating coding efficiency, in the case where coding is performed based on the generated difference image using each intra-picture prediction method candidate based on which the difference image is generated;
determining an intra-picture prediction method for coding the current block from among the intra-picture prediction method candidates, based on the evaluation values calculated for each of the intra-picture prediction method candidates; and
coding intra-picture prediction method information indicating the determined intra-picture prediction method, and the difference image generated based on the intra-picture predictive image on which intra-picture prediction is performed using the determined intra-picture prediction method.
20. An integrated circuit comprising:
an intra-picture prediction method candidate determination unit operable to determine, according to an amount of resources provided for intra-picture prediction coding, one or more intra-picture prediction method candidates that are candidates for an intra-picture prediction method for performing intra-picture prediction on a current block;
an intra-picture prediction execution unit operable to execute intra-picture prediction on the current block using intra-picture prediction methods specified by the intra-picture prediction method candidates determined by the intra-picture prediction method candidate determination unit, and generate an intra-picture predictive image;
a prediction difference calculation unit operable to generate a difference image between an input image that includes the current block, and the intra-picture predictive image generated by the intra-picture prediction execution unit, the difference image having difference values, each indicating a difference between each pixel in the input image and each pixel in the intra-picture predictive image, as each pixel value;
a coding efficiency evaluation unit operable to calculate an evaluation value indicating coding efficiency, in the case where coding is performed based on the difference image generated by the prediction calculation unit using each intra-picture prediction method candidate based on which the difference image is generated;
an intra-picture prediction method determination unit operable to determine an intra-picture prediction method for coding the current block from among the intra-picture prediction method candidates, based on the evaluation values calculated for each of the intra-picture prediction method candidates by the coding efficiency evaluation unit;
a coding unit operable to code intra-picture prediction method information indicating the intra-picture prediction method determined by the intra-picture prediction method determination unit, and the difference image generated based on the intra-picture predictive image on which intra-picture prediction is performed using the intra-picture prediction method determined by the intra-picture prediction method determination unit.