1. A method of patterning a magnetic thin film, comprising:
using a chemical transformation of a portion of the magnetic thin film to transform said portion to be non-magnetic and electrically insulating.
2. The method of claim 1, further comprising:
using photolithography to provide a mask over said portion of the magnetic thin film to be preserved.
3. Te method of claim 2, further comprising:
converting said portion of said magnetic thin film by a reactive plasma.
4. The method of claim 1, wherein said using said chemical transformation comprises using a fluorine-based reactive plasma.
5. The method of claim 4, wherein said fluorine-based reactive plasma comprises any of NF3, CF4, SF6, CHF3.
6. The method of claim 3, wherein a pressure used in said converting is within a range of about 10 mT to about 30 mT.
7. The method of claim 3, wherein said portion of said magnetic thin film comprises any of Permalloy\u2122, and alloys of nickel, iron, and cobalt, and said converting comprising converting said any of Permalloy\u2122 and alloys of nickel, iron, and cobalt, to a fluorine-containing film.
8. The method of claim 7, wherein said fluorine-containing film is non-ferromagnetic.
9. The method of claim 7, wherein said fluorine-containing film is non-magnetic.
10. The method of claim 7, wherein said fluorine-containing film is electrically insulating.
11. The method of claim 2, wherein said mask comprises a photoresist.
12. The method of claim 2, wherein said mask comprises a hard mask patterned layer comprising one of diamond-like carbon (DLC), TiN, and TaN.
13. The method of claim 1, further comprising:
producing a functioning magnetic device.
14. The method of claim 1, wherein said using said chemical transformation is performed at room temperature.
15. The method of claim 3, wherein said reactive plasma includes a fluorocarbon.
16. The method of claim 3, wherein said reactive plasma includes argon.
17. The method of claim 3, wherein said reactive plasma includes sulfur hexafluoride.
18. The method of claim 3, wherein said reactive plasma includes bromide.
19. The method of claim 4, wherein a pressure is selectively employed for said plasma sputtering such that the magnetic thin film material is substantially free of erosion.
20. The method of claim 3, further comprising:
forming an insulating layer over the converted portion of said magnetic thin film and said mask; and
etching said insulating layer and said mask to planarize an upper level of the mask and the insulating layer.
21. The method of claim 20, further comprising:
selectively etching said mask; and
forming a conductive material over the insulating layer and an area where the mask was selectively etched.
22. The method of claim 3, wherein said mask comprises an insulating hard mask, said method further comprising:
after said converting, selectively etching said insulating hard mask to pattern said insulating hard mask.
23. The method of claim 22, further comprising:
forming a conductive material over an area where the insulating hard mask was etched.
24. The method of claim 3, wherein said reactive plasma includes O2 and a fluorine-containing gas
25. The method of claim 3, wherein said magnetic thin film includes a magnetic tunnel junction (MTJ), and
wherein after said converting said portion, edges of the magnetic tunnel junction have no exposure to oxygen.
26. The method of claim 25, wherein an edge smoothness of the MTJ is determined by a line edge roughness of the mask.
27. A magnetic thin film, comprising:
a magnetic tunnel junction (MTJ) defined by a surrounding region comprising a fluorinated, non-magnetic, electrically insulating material.
28. The magnetic thin film of claim 27, wherein said fluorinated, non-magnetic, electrically insulating material comprises one of a fluorinated Permalloy\u2122 material and a fluorinated alloy material of any of nickel, iron, and cobalt.
29. A magnetic device, comprising:
the magnetic thin film of claim 27; and
a conductive member coupled to said MTJ.
30. The magnetic device of claim 29, wherein said fluorinated, non-magnetic, electrically insulating material comprises one of a fluorinated Permalloy\u2122 material and a fluorinated alloy material of any of nickel, iron, and cobalt.
31. The magnetic device of claim 29, further comprising:
an insulating layer formed over the fluorinated, non-magnetic, electrically insulating material.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A compound according to Formula (I):
including stereoisomers, prodrugs and pharmaceutically acceptable salts thereof, wherein:
ring moiety A is selected from:
and wherein:
L1 is \u2014NH\u2014, \u2014C(\u2550S)NH\u2014, \u2014C(\u2550S)NHS(\u2550O)2\u2014, or \u2014C(\u2550O)NH\u2014;
R1 is optional and if present is piperazinyl;
L2=-S(\u2550O)2NH\u2014, \u2014S(\u2550O)2\u2014 or \u2014NH\u2014;
R2 is heterocycle, substituted heterocycle, or \u2014C(\u2550O)R where R is alkyl;
X is O, S or NH;
Y at each occurrence is independently halo, haloakyl or alkoxy;
m is 0, 1, 2 or 3;
R3 is \u2014H, halo, haloalkyl, haloalkoxy, aryl or substituted aryl; and
R4 is \u2014H, alkyl, substituted alkyl, aryl or substituted aryl, heteroaryl or substituted heteroaryl.
2. The compound according to claim 1, wherein L1 is \u2014NH\u2014.
3. The compound according to claim 2, wherein ring moiety A is
4. The compound according to claim 2, wherein ring moiety A is
5. The compound according to claim 1, wherein L1 is \u2014C(\u2550S)NH\u2014.
6. The compound according to claim 5, wherein ring moiety A is
7. The compound according to claim 6, wherein R4 is heteroaryl or substituted heteroaryl.
8. The compound according to claim 6, wherein R4 is \u2014H or alkyl.
9. The compound according to claim 1, wherein L1 is \u2014C(\u2550S)NHS(\u2550O)2\u2014.
10. The compound according to claim 9, wherein ring moiety A is
11. The compound according to claim 1, wherein L1 is \u2014C(\u2550O)NH\u2014.
12. The compound according to claim 11, wherein ring moiety A is
13. The compound according to claim 1, consisting of:
or a stereoisomer, prodrug, or pharmaceutically acceptable salt thereof.
14. The compound according to claim 1, consisting of:
4-Chloro-5-iodo-7-benzenesulfonyl-7H-pyrrolo2,3-dpyrimidine
7-Benzenesulfonyl-4-chloro-5-(4-methoxyphenyl)-7H-pyrrolo2,3-dpyrimidine
4-Piperazine-5-(4-methoxylbenzene)-7H-pyrrolo2,3-dpyrimidine
N-(4-(4-(5-(4-methoxyphenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamido)phenylsulfonyl)acetamide
N-(4-(N-(5-ethyl-1,3,4-thiadiazol-2-yl)sulfamoyl)phenyl)-4-(5-(4-methoxyphenyl)-(7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
4-Chloro-5-(4-methoxylbenzene)-7H-pyrrolo2,3-dpyrimidine
4-Chloro-5-(4-trifluoromethylphenyl)-7H-pyrrolo2,3-dpyrimidine
4-Piperazine-5-(4-trifluoromethylbenzene)-N-benzenesulfonyl-7H-pyrrolo2,3-dpyrimidine
N-(4-(N-(5-ethyl-1,3,4-thiadiazo-2-yl)sulfamoyl)phenyl)-5-(4-trifluoromethylphenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
N-(4-(N-thiazol-2-ylsulfamoyl)phenyl)-4-(5-(4-(trifluoromethyl)phenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
N-(4-(4-methylpiperazin-1-ylsulfonyl)phenyl)-4-(5-(4-(trifluoromethyl)phenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
N-(4-(N-(5-ethyl-1,3,4-thiadiazo-2-yl)sulfamoyl)phenyl)-5-(4-trifluoromethylphenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carboamide
4-Piperazine-5-(4-trifluoromethyl-3-chlorobenzene)-N-benzenesulfonyl-7H-pyrrolo2,3-dpyrimidine
N-(4-(N-(5-ethyl-1,3,4-thiadiazo-2-yl)sulfamoyl)phenyl)-5-(4-trifluoromethyl-3-chlorophenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
N-(4-(7H-pyrrolo2,3-dpyrimidine-4-ylamino)phenylsulfonyl)acetamide
N-(4-(4-(7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamido)phenylsulfonyl)acetamide
4-(7H-pyrrolo2,3-dpyrimidin-4-ylamino)-N-(5-ethyl-1,3,4-thiadiazol-2-yl)benzenesulfonamide
N-(4-(4-(5-(4-methoxyphenyl)thieno2,3-dpyrimidin-4-yl)piperazine-1-carbothioamido)phenylsulfonyl)acetamide
N-(4-(N-(5-ethyl-1,3,4-thiadiazo-2-yl)sulfamoyl)phenyl)-5-(4-trifluoromethyl-3-chlorophenyl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
(S)\u2014N-(4-(N-(5-ethyl-1,3,4-thiadiazol-2-yl)sulfamoyl)phenyl)-4-(5-(3fluoropyrrolidin-1-yl)-7H-pyrrolo2,3-dpyrimidin-4-yl)piperazine-1-carbothioamide
or a stereoisomer, prodrug, or pharmaceutically acceptable salt thereof.
15. A method of treating cancer or hyperproliferative disorders by administering an effective amount of the compound according to claim 1.
16. The method of claim 15, wherein the cancer is of colon, breast, stomach, prostate, pancreas, or ovarian tissue.
17. A method of treating lung cancer, NSCLC (non small cell lung cancer), oat-cell cancer, bone cancer, pancreatic cancer, skin cancer, dermatofibrosarcoma protuberans, cancer of the head and neck, cutaneous or intraocular melanoma, uterine cancer, ovarian cancer, colo-rectal cancer, cancer of the anal region, stomach cancer, colon cancer, breast cancer, gynecologic tumors (e.g., uterine sarcomas, carcinoma of the fallopian tubes, carcinoma of the endometrium, carcinoma of the cervix, carcinoma of the vagina or carcinoma of the vulva), Hodgkin’s Disease, hepatocellular cancer, cancer of the esophagus, cancer of the small intestine, cancer of the endocrine system (e.g., cancer of the thyroid, pancreas, parathyroid or adrenal glands), sarcomas of soft tissues, cancer of the urethra, cancer of the penis, prostate cancer (particularly hormone-refractory), chronic or acute leukemia, solid tumors of childhood, hypereosinophilia, lymphocytic lymphomas, cancer of the bladder, cancer of the kidney or ureter, renal cell carcinoma, carcinoma of the renal pelvis, pediatric malignancy, neoplasms of the central nervous system, primary CNS lymphoma, spinal axis tumors, medulloblastoma, brain stem gliomas, pituitary adenomas, Barrett’s esophagus, pre-malignant syndrome, neoplastic cutaneous disease, psoriasis, mycoses fungoides, benign prostatic hypertrophy, diabetic retinopathy, retinal ischemia, and retinal neovascularization, hepatic cirrhosis, angiogenesis, cardiovascular disease, atherosclerosis, immunological disease, autoimmune disease, or renal disease by administering to one in need of such treatment an effective amount of the compound according to claim 1.
18. A composition comprising a compound according to claim 1 and a pharmaceutically acceptable excipient.