1. One or more computer-readable storage media having computer-executable instructions embodied thereon that, when executed, perform a method for rendering a plurality of graphical images to a user viewing a two-dimensional display, wherein the plurality of graphical images appear to be positioned in a three-dimensional space when displayed on the two-dimensional display, the method comprising:
receiving a selection of a directory in a computer memory containing a plurality of files, each file having an associated graphical image, and the selection indicating a request to view the associated graphical images of the plurality of files:
retrieving a first graphical image and a second graphical image from the plurality of graphical images stored in the memory;
determining a first position on a visual display for the first graphical image and a second position on the visual display for the second graphical image;
transforming the first graphical image based on information about the first position and the second graphical image based on information about the second position on the visual display;
rendering the first graphical image and second graphical image for display in a graphically depicted three-dimensional space;
receiving a user navigation input instructing movement of the first graphical image to a third position and movement of the second graphical image to a fourth position, wherein the third and fourth positions are the same or different than the first and second positions;
transforming the first and second graphical images with information about the third and fourth positions respectively to change the orientation of the first and second graphical images in the graphically depicted three-dimensional space; and
rendering the first and second graphical images for display in the graphically depicted three-dimensional space in the third and fourth positions respectively.
2. The storage media of claim 1, wherein the two-dimensional display comprises a left portion, a right portion, and a center, and wherein the information about the first, second, third, and fourth positions includes an indication describing the positing as being in the left portion, the right portion, or the center.
3. The storage media of claim 2, wherein transforming the first and second graphical images based on information about the first, second, third, and fourth positions includes changing the orientation of the first and second graphical images such that the first and second graphical images appear to be rotated into the graphically depicted three-dimensional space when the first, second, third, or fourth positions are in the left portion or right portion.
4. The storage media of claim 3, wherein transforming the first and second graphical images based on information about the first, second, third, and fourth positions includes changing the orientation of the first and second graphical images such that the first and second graphical images appear generally flat in the graphically depicted three-dimensional space when the first, second, third, or fourth positions are in the center.
5. The storage media of claim 3, wherein a right side of the first and second graphical images is rotated into the graphically depicted three-dimensional space when the first, second, third, or fourth positions are in the left portion, and wherein a left side of the first and second graphical images is rotated into the graphically depicted three-dimensional space when the first, second, third, or fourth positions are in the right portion.
6. The storage media of claim 3, wherein the first and second graphical images overlap when both the first and second graphical images are in the left portion or when both the first and second graphical images are in the right portion.
7. The storage media of claim 1, wherein rendering the first and second graphical images in the third and fourth positions is delayed a predetermined amount of time.
8. The storage media of claim 7, wherein the predetermined amount of time is sufficient to display a transition animation of a movement of the first and second graphical images from the first and second positions to the third and fourth positions, respectively.
9. The storage media of claim 1, wherein the navigation input is a touch input.
10. The storage media of claim 1, further comprising:
rendering three-dimensional graphical effects for display on the two-dimensional display to enhance the presentation of the first and second graphical images.
11. The storage media of claim 10, wherein the three-dimensional graphical effects include a reflection of the first and second graphical images.
12. The storage media of claim 11, wherein the reflection is depicted on a virtual flooring depicted beneath the first and second graphical images within the graphically depicted three-dimensional space.
13. A computer system for representing a directory’s contents by rendering a plurality of graphical images representing the contents on a two-dimensional display with the appearance of being positioned in a three-dimensional space, the system comprising:
a processing unit capable of executing machine-readable instructions;
a two-dimensional visual display for displaying the plurality of graphical images and including a left portion, a right portion, and a center between the left and right portions;
one or more memories containing the plurality of graphical images and machine-readable instructions that, when executed by the processor, perform steps comprising:
receiving an indication of a plurality of graphical images stored in one or more of the memories,
identifying and receiving a first graphical image and a second graphical image from the plurality of images stored in the one or more of the memories,
determining a first position on the visual display for the first graphical image and a second position on the visual display for the second graphical image, wherein the first and second positions are each located in one of the left portion, right portion, or center of the two-dimensional visual display,
transforming the first graphical image with information about the first position and the second graphical image with information about the second position on the visual display, the information about the first position indicating a location at the center and information about the second position indicates a location within the left portion or right portion,
rendering the first graphical image and second graphical image for display in a graphically depicted three-dimensional space, and
in response to user input, moving the position of the first and second graphical images on the display such that a visible portion of the first graphical image is reduced and the second graphical image is moved to the first position; and
an input device for the user to provide an indication to move the first and second graphical images in the graphically depicted three-dimensional space.
14. The system of claim 13, wherein the input device is a touch input device.
15. The system of claim 13, wherein the one or more memories containing the plurality of graphical images and machine-readable instructions that, when executed by the processor, perform steps that further comprise:
rendering three-dimensional graphical effects for display on the two-dimensional display to enhance the presentation of the first graphical image and second graphical image.
16. A computer-implemented method for displaying the contents of a computer directory by rendering a plurality of graphical images on a two-dimensional display with the appearance of being positioned in a three-dimensional space, the method comprising:
identifying via a computing device having a processor, a directory that includes a plurality of files and a representative image of each of the plurality of files stored in a memory, the contents of the directory to be presented on a visual display associated with the computing device;
determining a first position on the visual display for a first representative image for a first file from the plurality of files and a second position on the visual display for a second representative image for a second file from the plurality of files;
transforming the first representative image based on information about the first position and the second representative image based on information about the second position, the information including an indication of a location in a left portion, a right portion, or a center between the left and right portions on the visual display, and wherein transforming the first and second representative images includes rotating the first and second representative images with respect to the location of the first and second positions, respectively;
presenting the first and second representative images in a graphically depicted three-dimensional space on the visual display;
receiving a navigation input instructing movement of the first representative image to a third position and movement of the second representative image to the first position;
transforming the first and second representative images based on information about the third and first positions, respectively, to change the orientation of the first and second representative images in the graphically depicted three-dimensional space with respect to a location of the third and first positions on the visual display, respectively;
providing a delay comprising an amount of time sufficient to present a transition animation depicting movement of the first and second representative images from the first and second positions to the third and first positions, respectively; and
presenting the first and second representative images in the third and first positions, respectively.
17. The method of claim 16, wherein when the first and second positions are both in the left portion or both in the right portion of the visual display the first and second representative images are equally rotated and overlap.
18. The method of claim 16, wherein when the first position is in the central portion of the visual display the first representative image is substantially un-rotated and is more prominently displayed than the second representative image.
19. The method of claim 16, wherein the first position is in the left portion of the visual display and a right side of the first representative image is rotated into the graphically depicted three dimensional space about an axis generally along a left side of the first representative image or the first position is in the right portion of the visual display and the and a left side of the first representative image is rotated into the graphically depicted three dimensional space about an axis generally along a right side of the first representative image.
20. The method of claim 16, further comprising:
rendering three-dimensional graphical effects for display on the two dimensional display to enhance the presentation of the first representative image and second representative image, the three-dimensional graphical effects including a reflection of the first and second representative images on a virtual flooring in the three-dimensional space.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of etching, comprising:
transferring a substrate into a vacuum environment;
etching a material layer on the substrate in the vacuum environment; and
depositing a polymeric film encapsulating etch residue without removing the substrate from the vacuum environment.
2. The method of claim 1 further comprising:
transferring the substrate to an ex-situ processing reactor; and
removing the polymeric film and the residue from the substrate using the ex-situ processing reactor.
3. The method of claim 1, wherein the residue is a halogenic residue formed after etching the material layer using at least one of NF3, CF4, Cl2, and HBr.
4. The method of claim 1, wherein the material layer comprises at least one of a dielectric material, a metal, and a metal alloy.
5. The method of claim 1, wherein the material layer comprises at least one of Si, polysilicon, SiO2, HfSiO4 and HfO2.
6. The method of claim 1, wherein the material layer has a patterned etch mask disposed thereon.
7. The method of claim 6, wherein the patterned etch mask further comprises an anti-reflective coating (ARC).
8. The method of claim 7, wherein the ARC comprises at least one of Si3N4 and SiON.
9. The method of claim 6, wherein the material layer comprises trenches having an aspect ratio of about 20 to 100.
10. The method of claim 6, wherein the patterned etch mask is formed from borosilicate glass (BSG).
11. The method of claim 6, wherein the patterned etch mask is formed from photoresist.
12. The method of claim 1, wherein the encapsulating step further comprises flowing a carbon containing gas into the etch chamber that comprises at least one of a fluorocarbon gas and a hydrocarbon gas.
13. The method of claim 12, wherein the fluorocarbon gas comprises at least one of CF4, CH2F2, CH3F, CHF3, C2F6, C2F4, C3F8, C4F6, and C4F8.
14. The method of claim 12, wherein the hydrocarbon gas comprises at least one gas having a chemical formula CxHy, where x and y are integers.
15. The method of claim 12, wherein the carbon containing gas further comprises at least one of O2, CO2, H2O, H2, N2, NH3, Br2, Cl2, F2, HBr, HCl, HF, NF3, and a forming gas.
16. The method of claim 15, wherein the forming gas comprises about 3-5% of H2 and about 97-95% of N2.
17. The method of claim 15, wherein the encapsulating step further comprises:
providing CF4 and H2 at a flow ratio H2:CF4 in a range from about 0:1 to 5:1.
18. The method of claim 15, wherein the encapsulating step further comprises:
providing CHF3 and H2 at a flow ratio H2:CHF3 in a range from about 0:1 to 5:1.
19. The method of claim 1, wherein the transferring step further comprises a cleaning process that in-situ cleans a processing chamber of the etch reactor after the substrate is removed from the chamber.
20. The method of claim 11, wherein the removing step further strips the photoresist mask.
21. The method of claim 2, wherein the ex-situ processing reactor performs a plasma strip process.
22. The method of claim 21, wherein the plasma strip process uses at least one of O2, water vapor (H2O), and O3.
23. The method of claim 22, wherein the plasma strip process further uses N2.
24. The method of claim 2, wherein the ex-situ processing reactor performs a wet strip process.
25. The method of claim 24, wherein the wet strip process uses a solvent comprising at least one of H2SO4 and H2O2.
26. The method of claim 25, wherein the solvent comprises, by volume, about 70% of H2SO4 and about 30% of H2O2.
27. The method of claim 2, wherein the removing step further comprises a substrate cleaning process performed after the polymeric film is removed from the substrate.
28. The method of claim 27, wherein the substrate cleaning process uses a solution comprising at least one of HF, HNO3, and HCl in deionized water
29. The method of claim 28, wherein the solution comprises, by volume, about 0.5 to 2% of HF and deionized water.
30. The method of claim 1, wherein the steps of etching depositing occur in the same reactor.
31. A method of etching, comprising:
etching a substrate in an etch reactor using a halogen containing etchant;
depositing in-situ a polymeric film encapsulating residue formed on the substrate during etching; and
removing the polymeric film and the residue from the substrate ex-situ in the reactor.
32. The method of claim 31, further comprising:
transferring the encapsulated substrate from a first integrated semiconductor substrate processing system to an ex-situ processing reactor of a second integrated semiconductor substrate processing system.
33. The method of claim 31, wherein the residue is a halogenic residue formed after etching the material layer using at least one of NF3, CF4, Cl2, and HBr.
34. The method of claim 31, wherein the material layer comprises at least one of a dielectric material, a metal, and a metal alloy.
35. The method of claim 31, wherein the material layer comprises at least one of Si, polysilicon, SiO2, and HfO2.
36. The method of claim 31, wherein the material layer comprises structures each having a patterned etch mask.
37. The method of claim 36, wherein the patterned etch mask further comprises an anti-reflective coating (ARC).
38. The method of claim 37, wherein the ARC comprises at least one of Si3N4 and SiON.
39. The method of claim 36, wherein the structures are trenches having an aspect ration of about 20 to 100.
40. The method of claim 36, wherein the patterned etch mask is formed from borosilicate glass (BSG).
41. The method of claim 36, wherein the patterned etch mask is formed from photo resist.
42. The method of claim 31, wherein the depositing step uses a carbon containing gas that comprises at least one of a fluorocarbon gas and a hydrocarbon gas.
43. The method of claim 42, wherein the fluorocarbon gas comprises at least one of CF4, CH2F2, CH3F, CHF3; C2F6, C2F4, C3F8, C4F6, and C4F8.
44. The method of claim 42, wherein the hydrocarbon gas comprises at least one gas having a chemical formula CxHy, where x and y are integers.
45. The method of claim 42, wherein the carbon containing gas further comprises at least one of O2, CO2, H2O, H2, N2, NH3, Br2, Cl2, F2, HBr, HCl, HF, NF3, and a forming gas.
46. The method of claim 45, wherein the forming gas comprises about 3-5% of H2 and about 97-95% of N2.
47. The method of claim 45, wherein the depositing step further comprises:
providing CF4 and H2 at a flow ratio H2:CF4 in a range from about 0:1 go 5:1.
48. The method of claim 45, wherein the depositing step further comprises:
providing CHF3 and H2 at a flow ratio about H2:CHF3 in a range from 0:1 to 5:1.
49. The method of claim 41, wherein the removing step further strips the photoresist mask.
50. The method of claim 31, wherein the ex-situ processing reactor performs a plasma strip process.
51. The method of claim 50, wherein the plasma strip process uses at least one of O2, water vapor (H2O), and O3.
52. The method of claim 51, wherein the plasma strip process further uses N2.
53. The method of claim 31, wherein the ex-situ processing reactor performs a wet strip process.
54. The method of claim 51, wherein the wet strip process uses a solvent comprising at least one of H2SO4 and H2O2.
55. The method of claim 31, wherein the removing step further comprises a substrate cleaning process performed after the polymeric film is removed from the substrate.
56. The method of claim 55, wherein the substrate cleaning process uses a solution comprising at least one of HF, HNO3, and HCl in deionized water