1. Method for the realization of a microelectronic device which includes at least one semi-conductor zone which rests on a support and which exhibits, in a direction parallel to the principal plane of the support, a Germanium concentration gradient, the Ge content increasing from centre to the periphery of said semi-conductor zone, the method comprising:
a) The formation on a support of at least one oxidation masking layer which includes one or more holes, where the holes reveal at least one first Si based semi-conductor zone including inclined flanks and having a central portion and a periphery portion, said periphery portion having a thickness smaller than the central portion thickness,
b) The formation of at least one second semi-conductor zone based on Si1-xGex (where 0<x) on said first semi-conductor zone,
c) Thermal oxidation of said first semi-conductor zone and the second semi-conductor zone through said masking layer.
2. Method according to claim 1, wherein said first semi-conductor zone and said second semi-conductor zone form a block with a ration Si1-xGex thickness compared to Si thickness (ESi1-xGexESi) increasing from centre to periphery of said block.
3. Method according to claim 1, wherein said first semi-conductor zone has inclined flanks oriented according to {11n} (with n\u22671).
4. Method according to claim 1, in which the support is an SOI substrate which includes a support layer, an insulating layer resting on said support layer and a thin semi-conductor layer resting on said insulating layer.
5. Method according to claim 4, in which at step a) the first semi-conductor zone based on Si is formed by growth on the semi-conductor thin layer.
6. Method according to claim 4, in which step a) includes:
The formation of one or more openings in the thin semi-conductor layer,
The formation of a masking layer which fills in said openings,
Growth on the thin semi-conductor layer of the first semi-conductor zone.
7. Method according to claim 1, in which the second semi-conductor zone is formed at step b) so that it extends beyond the hole openings, where the method further includes:
Planarisation of the second semi-conductor zone to the level of the masking layer.
8. Method according to claim 1, where the method includes in addition, between step b) and step c): the removal of a thickness of the second semi-conductor zone and of the masking layer, so as to reveal the first semi-conductor zone.
9. Method according to claim 1, including after step c), the removal of said masking layer and of at least one layer of SiO2 formed during oxidation.
10. Method according to claim 1, in which the second semi-conductor zone based on Si1-xGex has a Ge concentration of between 5% and 40%.
11. Method for the realization of at least one vicinal surface on one or more of said semi-conductor zones which exhibits a Germanium concentration gradient in a direction parallel to the principal plane of the support, formed using a method according to claim 1.
12. Method for the realization of at least one heterojunction formed from at least one given semi-conductor zone exhibiting a first Germanium concentration gradient in a direction parallel to the principal plane of the support, and at least one other semi-conductor next to said given zone and which exhibits a second Germanium concentration in a direction parallel to the principal plane of the support, with said given zone and said other zone having been formed using a method according to claim 1.
13. Method for the realization of at least one MOS transistor from one or more of said semi-conductor zones which exhibits a first Germanium concentration gradient in a direction parallel to the principal plane of the support, formed using a method according to claim 1.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An automatic injection device containing a pre-loaded charge of medicament for automatically sell dminisiering the medicameni upon actuation thereof, the automatic injection device comprising:
a housing assembly having an interior chamber, wherein the interior chamber includes, a dry compartment for storing a predetermined dry charge of dry medication therein, and a wet compartment for storing a predetermined amount of liquid injection solution therein;
at least one medicament support assembly located within the dry compartment, wherein each medicament support assembly includes a plurality of apertures formed therein;
a movable separation assembly located within the interior chamber for separating the dry compartment front the wet compartment, wherein the separation assembly is movable with respect to at least the dry compartment, wherein the separation assembly prevents transfer of the liquid injection solution from the wet compartment to the dry compartment prior to activation of the automatic injection device;
an activation assembly for causing the liquid injection solution in the wet compartment to be transterred to the dry compartment, wherein the dry medicament dissolves in the liquid injection solution as the liquid injection solution passes through the dry compartment, wherein the activation assembly includes a drive assembly having a stored source of energy located therein, whereby upon actuation of the activation assembly, the drive assembly releases the stored source or energy for causing liquid injection solution in the Wet compartment to be transferred to the dry compartment; and
a needle assembly for dispensing the liquid injection solution containing the dry medicament dissolved therein.
2. The automatic injection device according to claim 1, wherein each of the at least one medicament support assembly prevents the passage of undissolved medicament from the dry compartment.
3. The automatic injection device according to claim 2, wherein each of the apertures is sized to prevent passage of the undissolved medicament.
4. The automatic injection device according to claim 1, wherein each of the at least one medicament support assembly includes at least one support plate having the plurality of apertures formed therein.
5. An injection device containing a pre-loaded charge of medicament for self-administering the medicament upon actuation thereof, the injection device comprising:
a housing assembly having an interior chamber, wherein the interior chamber includes a dry compartment for storing a predetermined dry charge of dry medicament therein, and a wet compartment for storing a predetermined amount of liquid injection solution therein;
at least one medicament support assembly located within the dry compartment, wherein the at least one medicament support assembly preventing the passage of undissolved dry medicament therethrough;
a movable separation assembly located within the interior chamber for separating the dry compartment from the wet compartment, wherein the separation assembly is movable with respect to at least the dry compartment, wherein the separation assembly prevents transfer of the liquid injection solution from the wet compartment to the dry compartment prior to activation of the automatic injection device;
an activation assembly for causing the liquid injection solution in the wet compartment to be transferred to the dry compartment, wherein the dry medicament dissolves in the liquid injection solution as the liquid injection solution passes through the dry compartment; and
a needle assembly for dispencing the liquid injection solution containing the dry medicament dissolved therein,
wherein the at least one medicament support assembly includes a first medicament support located adjacent the separation assembly, and a second medicament support located adjacent the needle assembly, wherein at least one medicament support assembly includes a plurity of apertures formed therein.
6. The injection device according to claim 5, wherein the first medicament support includes at least one projection adapted to engage to the separation assembly to open a passage therein to permit the passage of the liquid injection solution from the wet compartment to the dry compartment.
7. The injection device according to claim 6, wherein the separation assembly includes a membrane assembly positioned adjacent the first medicament support, wherein at least one projection adapted to rupture the membrane assembly.
8. The injection device according to claim 5, further comprising:
a membrane assembly positioned adjacent the second medicament support.
9. The injection device according to claim 5, wherein each of the apertures is sized to prevent passage of the undissolved medicament.
10. The injection device according to claim 3, wherein each of the at least one medicament support assembly include at least one Support plate having a plurality of apertures formed therein.
11. An injection device containing a pre-loaded charge of medicament for self-administering the medicament upon actuation thereof the injection device comprising:
a housing assembly having an interior chamber, wherein the interior chamber includes a dry compartment for storing a predetermined dry charge of dry medicament therein, and a wet compartment for storing a predetermined amount of liquid injection solution therein;
at least one medicament support assembly located within the dry compartment, wherein the at least one medicament support assembly preventing the passage of undissolved medicament therethrough, wherein each medicament support assembly includes a plurality of apertures formed therein;
a movable separation assembly located within the interior chamber for separating the dry compartment from the wet compartment, wherein the separation assembly is movable with respect to the dry compartment and the wet compartment, wherein the separation assembly prevents transfer of the liquid injection solution from the wet compartment to the dry compartment prior to activation of the automatic injection device;
an activation assembly for causing the liquid injection solution in the wet compartment to be transferred to the dry compartment, wherein the dry medicament dissolves in the liquid injection solution as the liquid injection solution passes through the dry compartment;
needle assembly for dispensing the liquid injection solution containing the dry medicament dissolved therein; and
a diaphragm assembly positioned near one of the at least one medicament support assembly and the needle assembly.
12. The injection device according to claim 11, wherein each off the apertures is sized to prevent passage of the undissolved medicament.
13. The injection device according to claim 11, wherein each of the at least one medicament support assembly includes at least one support plate having the plurality of apertures formed therein.