1. A rasterization method, comprising:
(a) calculating a first set of graytones for a set of pixels, the first set of graytones corresponding to a center of a pattern being located at a first grid position;
(b) calculating a second set of graytones for the set of pixels, the second set of graytones corresponding to the center of the pattern being located at a second grid position; and
(c) linearly interpolating with constraints, from the first and second set of graytones, a plurality of sets of graytones for the set of pixels, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position.
2. The method of claim 1, wherein the constraints of step (c) comprise:
setting a slope of each respective pixel in the set of pixels equal to one of zero and alpha, wherein alpha is equal to (1\u2212Att)Wp, with Att being a maximum negative graytone amplitude and Wp being a width of each pixel in the set of pixels as projected on a target.
3. The method of claim 2, further comprising:
determining a first range of the shift-amounts and a second range of the shift-amounts for each respective pixel based on the first graytone of the respective pixel, alpha, and the second graytone in the second set of graytones corresponding to the respective pixel.
4. The method of claim 2, wherein the constraints of step (c) further comprise:
setting the slope of each respective pixel in the set of pixels equal to zero over a first range of the shift-amounts and alpha over a second range of the shift-amounts, if at least one of the following is true,
(i) a first graytone in the first set of graytones corresponding to the respective pixel is equal to one and a second graytone in the second set of graytones corresponding to the respective pixel is greater than (1\u2212Att)2, and
(ii) the first graytone in the first set of graytones corresponding to the respective pixel is equal to Att and the second graytone in the second set of graytones corresponding to the respective pixel is less than (1\u2212Att)2.
5. The method of claim 2, wherein the constraints of step (c) further comprise:
setting the slope of each respective pixel in the set of pixels equal to alpha over the first range of the shift-amounts and zero over the second range of the shift-amounts, if at least one of the following is true,
(i) the first graytone in the first set of graytones corresponding to the respective pixel is equal to one and the second graytone in the second set of graytones corresponding to the respective pixel is less than (1\u2212Att)2,
(ii) the first graytone in the first set of graytones corresponding to the respective pixel is equal to Att and the second graytone in the second set of graytones corresponding to the respective pixel is greater than (1\u2212Att)2, and
(iii) the first graytone in the first set of graytones corresponding to the respective pixel is different than one of one and Att.
6. The method of claim 1, further comprising:
(d) generating control signals based on at least one of the first set of graytones, the second set of graytones, and the plurality of sets of graytones, the control signals being used to control an actuation device.
7. The method of claim 6, wherein step (d) comprises:
using the control signals to control at least one of a tilt angle, a phase angle, and a voltage.
8. The method of claim 6, wherein step (d) further comprises:
actuating one of tilting mirrors, phase-tilting mirrors, pistoning mirrors, and grating light valves using the actuation device.
9. A system, comprising:
a computing module that computes a first and second set of graytones for a set of pixels, the first and second set of graytones corresponding to a center of a pattern being located at a first and second grid position, respectively; and
an interpolator that linearly interpolates with constraints, from the first and second set of graytones, a plurality of sets of graytones for the set of pixels, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position.
10. The system of claim 9, wherein the interpolator linearly interpolates with constraints a plurality of sets of graytones for the set of pixels, the constraints comprising:
a slope of each respective pixel in the set of pixels is set equal to one of zero and alpha, wherein alpha is equal to (1\u2212Att)Wp, with Att being a maximum negative amplitude and Wp being a width of each pixel in the set of pixels as projected on a target.
11. The system of claim 10, wherein the interpolator determines a first range of the shift-amounts and a second range of the shift-amounts for each respective pixel based on the first graytone of the respective pixel, alpha, and the second graytone in the second set of graytones corresponding to the respective pixel.
12. The system of claim 10, wherein the interpolator linearly interpolates with constraints a plurality of sets of graytones for the set of pixels, the constraints further comprising:
the slope of each respective pixel in the set of pixels is set equal to zero over a first range of the shift-amounts and alpha over a second range of the shift-amounts, if at least one of the following is true,
(i) a first graytone in the first set of graytones corresponding to the respective pixel is equal to one and a second graytone in the second set of graytones corresponding to the respective pixel is greater than (1\u2212Att)2, and
(ii) the first graytone in the first set of graytones corresponding to the respective pixel is equal to Att and the second graytone in the second set of graytones corresponding to the respective pixel is less than (1\u2212Att)2.
13. The system of claim 10, wherein the interpolator linearly interpolates with constraints a plurality of sets of graytones for the set of pixels, the constraints further comprising:
the slope of each respective pixel in the set of pixels is set equal to alpha over the first range of the shift-amounts and zero over the second range of the shift-amounts, if at least one of the following is true,
(i) the first graytone in the first set of graytones corresponding to the respective pixel is equal to one and the second graytone in the second set of graytones corresponding to the respective pixel is less than (1\u2212Att)2,
(ii) the first graytone in the first set of graytones corresponding to the respective pixel is equal to Att and the second graytone in the second set of graytones corresponding to the respective pixel is greater than (1\u2212Att)2, and
(iii) the first graytone in the first set of graytones corresponding to the respective pixel is different than one of one and Att.
14. The system of claim 9, further comprising:
a converter that converts at least one of the first set of graytones, the second set of graytones, and the plurality of sets of graytones into control signals that are used to actuate an actuation device.
15. The system of claim 14, wherein the control signals control at least one of a tilt angle, a phase angle, and a voltage.
16. The system of claim 14, further comprising:
an illumination system that supplies a beam of radiation;
a pattern generator that includes an array of individually controllable elements that are controlled using the actuation device, the pattern generator patterning the beam of radiation; and
a projector that projects the patterned beam onto a target portion of an object.
17. The system of claim 16, wherein the object is one of a semiconductor wafer, a flat panel display glass substrate, or a display of a projection device.
18. The system of claim 16, wherein the pattern generator comprises one of tilting mirrors, phase-tilting mirrors, pistoning mirrors, and grating light valves.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An internal combustion engine controller comprising:
a voltage booster circuit for boosting a battery voltage and outputting a boosted voltage;
a first switching element disposed on an upstream side along a current direction of an injector, said first switching element flowing a current through said injector by using said boosted voltage;
a second switching element disposed on the upstream side along a current direction of said injector, said second switching element flowing a current through said injector by using said battery voltage;
a third switching element disposed on a downstream side along a current direction of said injector, said third switching element controlling a current flowing through said injector;
a first resistor disposed between said third switching element and a power source ground terminal, said first resistor detecting a current flowing through said injector;
a first diode for flowing a current from the downstream side to the upstream side of said injector;
a second resistor for detecting a current flowing via said first diode; and
a driver control unit for controlling and driving said first, second and third switching elements based on a current detected by said first resistor andor said second resistor.
2. The internal combustion engine controller according to claim 1, wherein:
a current flowing through said first resistor is detected during a first period while a current flows through said injector; and
a current flowing through said second resistor is detected during a second period different from said first period.
3. The internal combustion engine controller according to claim 2, wherein said second resistor is provided between said voltage booster circuit and said first switching element.
4. The internal combustion engine controller according to claim 3, wherein:
an anode of said first diode is connected between said injector and said third switching element; and
a cathode of said first diode is connected between said second resistor and said first switching element.
5. The internal combustion engine controller according to claim 2, wherein said first diode regenerates electric energy of said injector to said voltage booster circuit, when all of said first, second and third switching elements are turned off.
6. The internal combustion engine controller according to claim 2, wherein said driver control unit detects a current flowing through said injector during a whole period while a current flows through said injector, by using said first or second resistor.
7. The internal combustion engine controller according to claim 6, wherein said second resistor is used for detecting ground short and disconnection on the upstream side of said injector.
8. The internal combustion engine controller according to claim 2, wherein said driver control circuit controls the current flowing through said injector by using a current detected with said second resistor, when all of said first, second and third switching elements are turned off.
9. The internal combustion engine controller according to claim 8, wherein:
the internal combustion engine controller controls a plurality of injectors; and
said first-resistor detects currents flowing through said plurality of injectors.
10. The internal combustion engine controller according to claim 2, wherein said driver control circuit controls the current flowing through said injector by using a current detected with said second resistor, during a peak current steep reduction period.
11. The internal combustion engine controller according to claim 2, wherein said driver control circuit controls the current flowing through said injector by using a current detected with said second resistor, during a hold current steep reduction period.
12. The internal combustion engine controller according to claim 1, wherein said driver control circuit comprises:
a first current detector circuit for detecting the current flowing through said first resistor;
a second current detector circuit for detecting the current flowing through said second resistor; and
a current select circuit for selecting either a current detected with said first current detector circuit or a current detected with said second current detector circuit.
13. The internal combustion engine controller according to claim 1, further comprising a second diode connected between the upstream side of said injector and said power source ground terminal.
14. The internal combustion engine controller according to claim 13, wherein said second diode circulates regeneration current of said injector to be generated when said first and second switching elements are turned off and said third switching element is made conductive after a current is excited through said injector.
15. An internal combustion engine controller comprising:
a voltage booster circuit for boosting a battery voltage and outputting a boosted voltage;
a first switching element disposed on an upstream side along a current direction of an injector, said first switching element flowing a current through said injector by using said boosted voltage;
a second switching element disposed in parallel with said first switching element on the upstream side along a current direction of said injector, said second switching element flowing a current through said injector by using said battery voltage;
a third switching element disposed on a downstream side along a current direction of said injector, said third switching element controlling a current flowing through said injector;
a resistor serially connected to said injector, said resistor detecting a current flowing through said injector; and
a driver control unit for controlling and driving said first, second and third switching elements, wherein said driver control unit has a current detector circuit for detecting a current flowing through said resistor during a whole period while a current flows through said injector.
16. The internal combustion engine controller according to claim 15, wherein a protective circuit is disposed between said resistor and said current detector circuit.
17. The internal combustion engine controller according to claim 15, wherein said resistor is disposed between said injector and said third switching element.
18. The internal combustion engine controller according to claim 15, wherein said resistor is disposed between said injector and an interconnection between said first and second switching elements.
19. A method of controlling a current flowing through an injector of an internal combustion engine, comprising:
in a first period, a step of flowing a peak current through said injector by turning on a first switching element and by using a boosted voltage obtained by making a voltage booster circuit boost a power supply voltage;
in a second period, a step of flowing a hold current through said injector by using a power source voltage, by performing onoff control of a second switching element; and
in a third period, a step of flowing a regeneration current through said voltage booster circuit via said injector, by turning off said first and second switching elements, wherein:
a current flowing through a first resistor serially connected between said injector and a ground is detected during said first and second periods;
a current flowing through a second resistor serially connected between said injector and said voltage booster during said third period; and
a period transits to said second period when a current detected with said second resistor reaches a predetermined value during said third period.