1. A method of buffering, during at least a predetermined retention time, a digital optical signal having a predetermined digital level, comprising:
inputting the optical signal to an optical input of a semiconductor laser element; and
injecting an injection current to said semiconductor laser element to establish an optical gain process in said semiconductor laser element, the injection current having an amplitude such that said optical gain process and an optical absorption process within said semiconductor laser element outweigh one another longer than said retention time in order to keep said digital optical signal on said predetermined digital level during said retention time.
2. The method according to claim 1, further comprising:
outputting said optical signal to an output line by means of an optical output switch connected between an output of said semiconductor laser element and said output line.
3. The method according to claim 1, further comprising the step of, prior to the inputting step, clearing said semiconductor laser element by turning off said injection current during a predetermined clearing time period.
4. A method of time division multiplexing of a plurality of digital optical signals each having a predetermined digital level, comprising:
inputting each of the optical signals to an optical input of one of a plurality of semiconductor laser elements;
injecting a distinct injection current to each of said semiconductor laser elements to establish an optical gain process in each of said semiconductor laser elements, each injection current having an amplitude such that said optical gain process and an optical absorption process within each of said semiconductor laser elements outweigh one another longer than a predetermined retention time in order to keep each of said digital optical signals on each of said predetermined digital levels during said retention time; and
consecutively outputting each of said optical signals to one output line in consecutive time frames by means of a plurality of optical output switches, each one of said plurality of output switches being connected between an output of one of said semiconductor laser elements and said output line.
5. The method according to claim 4, further comprising the step of, prior to the inputting step, clearing said semiconductor laser element by turning off said injection current during a predetermined clearing time period.
6. An arrangement for buffering, during at least a predetermined retention time, a digital optical signal having a predetermined digital level, comprising:
a semiconductor laser element with an optical input for receiving the optical signal; and
a current source connected to said semiconductor laser element and arranged to inject an injection current to said semiconductor laser element to establish an optical gain process in said semiconductor laser element, the injection current having an amplitude such that said optical gain process and an optical absorption process within said semiconductor laser element outweigh one another longer than said retention time in order to keep said digital optical signal on said predetermined digital level during said retention time.
7. The arrangement according to claim 6, further comprising a controller connected to said current source to provide a current control signal to said current source to control an amplitude of said injection current.
8. The arrangement according to claim 7, further comprising an optical detector arranged to detect optical power content of said semiconductor laser element and to provide a feedback signal to said controller, said controller being arranged to generate said current control signal in dependence on said feedback signal.
9. The arrangement according to claim 8, further comprising an optical output switch connected between an output of said semiconductor laser element and an output line, and connected to said controller to receive an output switch control signal to control outputting said optical signal to said output line.
10. The arrangement according to claim 9, further comprising an optical output directional filter connected between said output of said semiconductor laser element and said optical output switch.
11. The arrangement according to claim 10, further comprising an optical input switch connected to said input of said semiconductor laser element, and connected to said controller to receive an input switch control signal to control inputting said optical signal to said semiconductor laser element.
12. The arrangement according to claim 11, further comprising an optical input directional filter connected between said input of said semiconductor laser element and said optical input switch.
13. The arrangement according to claim 11, wherein said controller is arranged for controlling said current source such that said current source clears said semiconductor laser element by turning off said injection current during a predetermined clearing time period prior to switching said digital optical signal to said semiconductor laser element by said optical input switch.
14. An arrangement for time division multiplexing of a plurality of digital optical signals each having a predetermined digital level, comprising:
a plurality of semiconductor laser elements each having an optical input for receiving one of said optical signals;
a current source connected to said semiconductor laser elements for injecting a distinct injection current to each of said semiconductor laser elements to establish an optical gain process in each of said semiconductor laser elements, each injection current having an amplitude such that said optical gain process and an optical absorption process within each of said semiconductor laser elements outweigh one another longer than a predetermined retention time in order to keep each of said digital optical signals on each of said predetermined digital levels during said retention time;
a plurality of optical output switches, each one of said plurality of output switches being connected between an output of one of said semiconductor laser elements and one output line; and
a controller connected to said plurality of optical output switches to control consecutively outputting each of said optical signals to said output line in consecutive time frames.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
Having thus described my invention, what I claim as new and desire to secure by Letters Patent is as follows:
1. A method for aligning elements of an electron beam projection lithography tool, said method including steps of
centering and rotationally aligning an image of a shaping aperture with an image of a reticle sub-field to form a compound image,
aligning orientation of said compound image with movement of a wafer stage of said electron beam projection lithography tool by lens adjustment, and
correcting orientation and motion of said compound image relative to said movement of said wafer stage by rotational adjustment of a deflector.
2. A method as recited in claim 1, including further steps of
adjusting size of said image of said reticle sub-field,
detecting rotation of said compound image resulting from said step of adjusting size, and
repeating said correcting step when rotation of said compound image resulting from said step of adjusting size is detected.
3. A method as recited in claim 1, including the further steps of
detecting said compound image, and
displaying said compound image.
4. A method as recited in claim 3, including the further step of rastering said compound image over said detector.
5. A method as recited in claim 2, including the further steps of
detecting said compound image, and
displaying said compound image.
6. A method as recited in claim 5, including the further step of rastering said compound image over said detector.
7. A method as recited in claim 1, wherein said step of centering and aligning includes the further steps of
centering a detector on said image of said shaping aperture,
centering said image of a reticle sub-field on said image of said shaping aperture, and
rotationally aligning said image of a reticle sub-field with said image of said shaping aperture.
8. A method as recited in claim 1, wherein said rotational adjustment of said deflector is performed mechanically.
9. A method as recited in claim 1, wherein said rotational adjustment of said deflector is performed electrically.
10. A method as recited in claim 1, including a further steps of
displaying an image of a pattern projected on a target plane of said electron beam projection lithography tool forming a displayed image, and
performing at least one of said centering and rotationally aligning step, said aligning step and said correcting step in real time in accordance with said displayed image.
11. A method as recited in claim 2, including a further steps of
displaying an image of a pattern projected on a target plane of said electron beam projection lithography tool forming a displayed image, and
performing at least one of said centering and rotationally aligning step, said aligning step, said adjusting size step, said detecting rotation step and said correcting step in real time in accordance with said displayed image.