1-51. (Cancelled)
52. A supporting structure for supporting an optical element, said supporting structure comprising:
a first supporting member for supporting the optical element; and
a second supporting member for supporting said first supporting member,
wherein the value of a thermal expansion coefficient of said first supporting member is between the values of the thermal expansion coefficients of the optical element and said second supporting member.
53. A structure according to claim 52, wherein the thermal expansion difference between the optical element and said first supporting member is smaller than the thermal expansion difference between the optical element and said second supporting member.
54. A structure according to claim 52, wherein said first supporting member is supported by said second supporting member via a plurality of elastic members.
55. A structure according to claim 54, wherein each of said elastic members has a plate-shaped spring member.
56. An exposure apparatus comprising:
an illuminating optical system for illuminating a reticle with a light beam from a light source; and
a projection optical system for projecting a light beam from the reticle on a wafer,
wherein at least one of said illuminating optical system and said projection optical system have a supporting structure for supporting an optical element according to claim 52.
57. A method for manufacturing semiconductor devices, said method comprising:
performing an exposing step by an exposure apparatus according to claim 56.
58. A supporting structure for supporting an optical element, said supporting structure comprising:
a supported member including the optical element; and
a supporting member for supporting said supported member via a plurality of elastic members having elasticity in a radial direction of the optical element.
59. A structure according to claim 58, wherein each of said elastic members has a spring member.
60. A structure according to claim 58, wherein each of said elastic members has a plate-shaped spring member.
61. A structure according to claim 58, wherein each of said elastic members is contacted with an outer surface of said supported member and an inner surface of said supporting member.
62. An exposure apparatus comprising:
an illuminating optical system for illuminating a reticle with a light beam from a light source; and
a projection optical system for projecting a light beam from the reticle on a wafer,
wherein at least one of said illuminating optical system and said projection optical system have a supporting structure for supporting an optical element according to claim 58.
63. A method for manufacturing semiconductor devices, said method comprising:
performing an exposing step by an exposure apparatus according to claim 62.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1.-23. (canceled)
24. A cell phone battery pack comprising two batteries joined together, wherein the two batteries are of the same size and each has a different capacity.
25. A cell phone battery pack comprising two batteries joined together, wherein the two batteries differ in size and each has the same capacity.
26. A cell phone battery pack comprising two batteries joined together, wherein the two batteries differ in size and in capacity.
27. The cell phone battery pack of claim 26, wherein each battery is defined by a top surface, an opposite bottom surface, and four edge surfaces positioned between the top surface and the bottom surface, and a first edge surface of a first battery is in contact with a first edge surface of a second battery.
28. The cell phone battery pack of claim 26, wherein the two batteries are joined together by one or more of a tape, a band, by interlocking, an adhesive, and an adhesive strip.
29. The cell phone battery pack of claim 26, wherein the each battery contains an electrical terminal configured to be in electrical connection with electrical contacts in a cell phone in which the battery pack is placed.
30. The cell phone battery pack of claim 29, wherein two of the four edge surfaces of each battery are positioned as ends of the battery, the other two of the four edge surfaces are positioned as side surfaces connecting the two end surfaces, and the electrical terminal of each of the batteries is placed on the end surface.
31. The cell phone battery pack of claim 30, wherein the electrical terminal of each of the batteries is on opposite end surfaces.
32. The cell phone battery pack of claim 30, wherein the electrical terminal of each of the batteries is on adjacent end surfaces.
33. The cell phone battery pack of claim 29, wherein the electrical terminal of each of the batteries is placed on the either the top surface or the bottom surface adjacent an end of the battery.
34. The cell phone battery pack of claim 33, wherein the electrical terminal on the top or bottom surface of each of the batteries is on opposite end surfaces.
35. The cell phone battery pack of claim 33, wherein the electrical terminal on the top or bottom surface of each of the batteries is on adjacent end surfaces.
36. The cell phone battery pack of claim 27, wherein the edge surface of the first battery in contact with the second battery is a side surface and the edge surface of the second battery in contact with the first battery is a side surface.
37. The cell phone battery pack of claim 27, wherein the edge surface of the first battery in contact with the second battery is an end surface and the edge surface of the second battery in contact with the first battery is an end surface.
38. The cell phone battery pack of claim 26, wherein each battery is defined by a top surface, an opposite bottom surface, and four edge surfaces positioned between the top surface and the bottom surface, and the bottom surface of a first battery is in contact with a top surface of a second battery.
39. The cell phone battery pack of claim 38, wherein the each battery contains an electrical terminal configured to be in electrical connection with electrical contacts in a cell phone in which the battery pack is placed and wherein two of the four edge surfaces of each battery are positioned as ends of the battery, the other two of the four edge surfaces are positioned as side surfaces connecting the two end surfaces, and the electrical terminal of each of the batteries is placed on the end surface.
40. The cell phone battery pack of claim 39, wherein the electrical terminal of each of the batteries is on opposite end surfaces or on adjacent end surfaces.
41. The cell phone battery pack of claim 39, wherein the electrical terminal of each of the batteries is placed on the either the top surface or the bottom surface adjacent an end of the battery.
42. The cell phone battery pack of claim 41, wherein the electrical terminal on the top or bottom surface of each of the batteries is on opposite end surfaces or on adjacent end surfaces.