1. A microsensor array, comprising:
a. a substrate;
b. a plurality of microsensors disposed on the substrate, at least one of which is a fixed, parallel plate capacitive microsensor comprising:
i. a bottom plate electrode disposed on the substrate;
ii. a porous top plate electrode disposed in fixed, spaced relation to the bottom plate electrode; and
iii. a dielectric disposed between said bottom plate electrode and said top plate electrode; and, optionally,
c. a containment barrier disposed between at least two of the microsensors disposed on the substrate.
2. A microsensor array according to claim 1, wherein each of the microsensors is a fixed, parallel plate capacitive microsensor.
3. A microsensor array according to claim 2, wherein each fixed, parallel plate capacitive microsensor comprises:
a. a bottom plate electrode disposed on the substrate;
b. a porous top plate electrode disposed in fixed, spaced relation to the bottom plate electrode; and
c. a dielectric disposed between said bottom plate electrode and said top plate electrode.
4. A microsensor array according to claim 1 further comprising a containment barrier disposed between each of the microsensors disposed on the substrate.
5. A microsensor array according to claim 4, wherein each of the containment barriers is adapted to prevent leakage of the dielectric of one microsensor to another microsensor during manufacture of the microsensors.
6. A microsensor array according to claim 4, wherein each containment barrier is independently selected from the group consisting of a polymer and a metal.
7. A microsensor array according to claim 4, wherein each containment barrier is comprised of a polymer.
8. A microsensor array according to claim 4, wherein each containment barrier is comprised of a metal.
9. A microsensor array according to claim 4, wherein each containment barrier is independently shaped as a rim or a trough.
10. A microsensor array according to claim 4, wherein diaelectric material is applied by a deposition process.
11. A microsensor array according to claim 1, wherein at least two of the microsensors are fixed, parallel plate capacitive microsensors each comprise a dielectric disposed between a bottom plate electrode and a top plate electrode.
12. A microsensor array according to claim 11, wherein each of the fixed, parallel plate capacitive microsensors comprises a different dielectric material.
13. A microsensor array according to claim 12, wherein the different dielectric materials each have a different dielectric constant.
14. A microsensor array according to claim 11, wherein each dielectric material is independently selected from the group consisting of a polymer, a ceramic, and a solgel.
15. A microsensor array according to claim 1, wherein the porous top plate electrode of any fixed, parallel plate capacitive microsensor is fabricated using standard photolithography.
16. A microsensor array according to claim 1 further comprising one or more support layers deposited onto the porous top plate electrode(s).
17. A microsensor array according to claim 1, wherein any bottom plate electrode is a drive electrode.
18. A microsensor array according to claim 1, wherein any bottom plate electrode is a dual-layer electrode.
19. A microsensor array according to claim 1, wherein any porous top plate electrode and bottom plate electrode of a fixed, parallel plate capacitive microsensor is made from a polycrystalline semiconductor material or a metal.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An electronic ballast for a discharge lamp comprising:
a DC voltage regulator providing a DC voltage that varies with a voltage command being fed to said DC voltage regulator,
an inverter converting said DC voltage into a high frequency AC power which is applied through a resonance circuit to said discharge lamp, said high frequency AC power being regulated to vary with a frequency command which designates a frequency at which said inverter is driven to oscillate;
a dimming processor including a dimming unit that provides a dimming signal designating a varying dimming level for varying a light output of said discharge lamp in accordance with an external dimmer demand,
wherein said dimming processor includes a command processing unit which, in response to the dimming signal, generates said voltage command and said frequency command, said frequency command designating a first frequency and a second frequency which is a function of said first frequency and gives a resulting lamp voltage higher than that obtained at said first frequency, said command processing unit driving said inverter at said first and second frequencies alternately with respect to time to thereby regulate said high frequency AC power of said inverter,
said command processing unit including a memory for storing a first table that determines a predetermined relation between the dimming signal and voltage command as well as said frequency command, said command processing unit deriving from said memory said voltage command as well as said frequency command that matches with the dimming signal, and operating said DC voltage regulator and said inverter in accordance with said voltage command and said frequency command, respectively.
2. The electronic ballast as set forth in claim 1, wherein
said command processing unit provides a first time frame in which said inverter operates at said first frequency and a second time frame in which said inverter operates at said second frequency,
said command processing unit generating said second frequency which becomes lower towards a middle of said second time frame than at the beginning and end of said second time frame.
3. The electronic ballast as set forth in claim 1, wherein
said first table has at least one point of inflection for a rate of voltage change of said voltage command and for a rate of frequency change of said frequency command with respect to the varying light output level,
said at least one point of inflection corresponding to a specific point with regard to the light output level, and defining a low light output range and a high light output range respectively below and above said specific point, and
said first table determining said rate of voltage change which is different for said low and high light output ranges, and determining said rate of frequency change which is different for said low and high light output ranges.
4. The electronic ballast as set forth in claim 3, wherein
said first table determines that the rate of voltage change is greater in one of said low and high light output ranges than in the other when the rate of frequency change is smaller in said one of said low and high output ranges than in the other.
5. The electronic ballast as set forth in claim 1, wherein
said first table has at least one point of inflection for at least one of a rate of voltage change of said voltage command and of a rate of frequency change of said frequency command with respect to the varying light output level,
said at least one point of inflection corresponding to a specific point with regard to the light output level, and defining a low light output range and a high light output range respectively below and above said specific point, and
said first table determining at least one of said rate of voltage change and said rate of frequency change is different for said low and high light output ranges such that a rate of change in the resulting light output of said discharge lamp is smaller in said low light output range than in said high light output range.
6. The electronic ballast as set forth in claim 1, wherein
said first table has at least two points of inflection for a rate of voltage change of said voltage command and for a rate of frequency change of said frequency command with respect to the varying light output level,
said two points of inflection corresponding to a first specific point and a second specific point with regard to the light output level, and defining a low light output range below the first specific point, an intermediate light output range between the first and second specific points, and a high light output range above said second specific point, and
said first table determining said rate of voltage change which is minimum in said intermediate light output range, and said rate of frequency change which is maximum in said intermediate light output range.
7. The electronic ballast as set forth in claim 1, wherein
said memory includes a second table in addition to said first table, said second table determining another predetermined relation between the dimming signal and said voltage command as well as said frequency command, which is different from said relation given by said first table,
said command processing unit including a selector for deriving said voltage command and said frequency command from selective one of said first and second tables,
said command processing unit also including a monitor for monitoring a rate of change in the dimming level intended by the dimming signal and provide a first signal when said rate of change in the dimming level is smaller than a predetermined rate and otherwise provides a second signal, said first signal actuating said selector to derive said voltage command and said frequency command from said first table, and said second signal actuating said selector to derive said voltage command and said frequency command from said second table.
8. The electronic ballast as set forth in claim 1, wherein said command processing unit includes:
a voltage signal generator which generates said voltage command,
a first frequency signal generator which generates a first frequency command designating said first frequency,
a second frequency signal generator which generates a second frequency command designating said second frequency command,
a selector for providing selective one of said first and second frequency commands to said inverter
said voltage signal generator being a pulse-width-modulator that gives a PWM signal of which width defines said voltage command,
said voltage signal generator producing a timing pulse in synchronize with said PWM signal and providing said timing pulse to said second frequency signal generator,
said second frequency signal generator generating said second frequency command and a predetermined time frame each time it receives said timing pulse, and
said selector being connected to receive said first frequency command, said second frequency command, and said time frame so that it passes said second frequency command to said inverter only during said time frame and otherwise pass said first frequency command to be issued to said inverter.
9. The electronic ballast as set forth in claim 1, wherein
said command processing unit includes a smoothing circuit for smoothing out said first frequency command.
10. The electronic ballast as set forth in claim 1, wherein
said command processing unit includes a first smoothing circuit smoothing out said dimming signal, a second smoothing circuit for smoothing out said voltage command, and a third smoothing circuit for smoothing out said frequency command.
11. The electronic ballast as set forth in claim 10, wherein
said second and third smoothing circuits have adjustable time constants which determine individual response times by which said voltage command and said frequency command are delayed in driving said DC voltage regulator and said inverter, respectively,
said command processing unit including a dimming direction monitor which monitors said dimming signal to provide an upward signal when said dimming signal indicates an increase in the light output level and provide a downward signal when said dimming signal indicates a decrease in the light output level,
said dimming direction monitor adjusting said time constants of said second and third smoothing circuits in order to make the response time of said voltage command longer than that of said frequency command in response to said upward signal, and to make the response time of said frequency command longer than that of said voltage command in response to said downward signal.
12. The electronic ballast as set forth in claim 1, wherein
said frequency command is a digital signal which is converted by a DA converter into an analog signal which is fed to a voltage controlled oscillator,
said voltage controller receiving said analog signal to drive said inverter at the frequency designated by said frequency command, and
said DA converter being defined by a ladder resistor network or weighted resistor network.