1. A method of manufacturing a mold, comprising:
forming a first layer having a greater affinity to a second polymer than to a first polymer, on a substrate having a greater affinity to the first polymer than to the second polymer;
forming first openings and second openings in the first layer, the second opening being larger in size than the first opening;
filling a resist in the second openings and hardening the resist to obtain a hardened resist;
forming a second layer containing a block copolymer having the first and second polymers, in the first openings and on the first layer;
causing the block copolymer to self-assemble to form a dot row arranged corresponding to the first openings and containing the first polymer;
removing the hardened resist;
processing the substrate using the dot row as a mask to form a mold having a first area with a shape corresponding to the dot row and a flat second area corresponding to the second openings; and
removing the first and second layers.
2. The method according to claim 1,
wherein the size of the first opening is 15 nm or less; and
wherein the resist has a polymer having a molecular weight equal to or greater than 24000 and equal to or less than 60000.
3. The method according to claim 2,
wherein the size of the second opening is equal to or greater than four times the size of the first opening.
4. The method according to claim 1,
wherein the size of the first opening is 15 nm or less; and
wherein the resist has a viscosity equal to or greater than 1500 mPa\xb7s and equal to or less than 10000 mPa\xb7s.
5. The method according to claim 4,
wherein the size of the second opening is equal to or greater than four times the size of the first opening.
6. The method according to claim 1,
the forming first openings and second openings, comprising:
forming a layer of a second resist on the first layer;
processing the layer of the second resist to have a shape corresponding to the first and second openings; and
etching the first layer using the processed layer of the second resist as a mask to form the first and second openings,
the method further comprising removing the processed layer of the second resist after the filling and hardening a resist.
7. The method according to claim 6,
wherein the processing the layer of the second resist, comprising:
pressing a mold having first and second projections corresponding to the first and second openings against the layer of the second resist; and
hardening the layer of the second resist against which the mold is pressed.
8. The method according to claim 6,
wherein a material of the second resist is novolac, PMMA, or PVA.
9. The method according to claim 8, further comprising
removing the layer of the second resist by wet etching.
10. The method according to claim 1,
wherein the block copolymer is at least any one of PS (poly styrene)-PDMS (polydimethylsiloxane), PS-PMMA (polymenthyl methacrylate), PMMA-PMAPOSS (polymethacrylate containing polyhedral oligomeric silsesquioxane), and PS-PEO (polyethylene oxide).
11. The method according to claim 1,
wherein, in the forming a dot row, the block copolymer self-assembles by annealing.
12. A method of manufacturing a magnetic recording medium, comprising:
forming a resist layer on a substrate having a magnetic film thereon;
pressing a mold manufactured by the manufacturing method according to claim 1 or a mold replicated from the mold against the resist layer;
patterning the resist layer against which the mold is pressed by hardening the resist layer; and
forming a magnetic recording medium having a magnetic area corresponding to the first area and having a dot row arranged and a non-magnetic area corresponding to the second area, using the patterned resist layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of forming an earth-boring tool, comprising:
forming a catalyst-containing material on each of a top and sides of a diamond material discrete from the catalyst-containing material, the diamond material comprising diamond nanoparticles;
processing the diamond material under high temperature and high pressure conditions to form a sintered nanoparticle-enhanced polycrystalline compact; and
attaching the sintered nanoparticle-enhanced polycrystalline compact to a bit body.
2. The method of claim 1, further comprising selecting the catalyst-containing material to comprise particles comprising at least one catalyst material.
3. The method of claim 1, further comprising selecting the catalyst-containing material to comprise a solid structure comprising at least one catalyst material.
4. The method of claim 1, further comprising selecting the catalyst-containing material to comprise one or more of cobalt, iron, and nickel.
5. The method of claim 1, further comprising selecting the catalyst-containing material to comprise cemented tungsten carbide.
6. The method of claim 1, further comprising selecting the catalyst-containing material to comprise at least one catalyst material and at least one non-diamond carbon material.
7. The method of claim 1, further comprising depositing the diamond material on a supporting substrate prior to forming the catalyst-containing material on each of the top and the sides of the diamond material.
8. The method of claim 7, further comprising selecting the catalyst-containing material to comprise at least one catalyst material different than at least one other catalyst material of the supporting substrate.
9. The method of claim 8, wherein selecting the catalyst-containing material to comprise at least one catalyst material different than at least one other catalyst material of the supporting substrate comprises:
selecting the at least one catalyst material to comprise one or more of cobalt, iron, and nickel; and
selecting the at least one other catalyst material of the supporting substrate to comprise one or more of cobalt, iron, and nickel.
10. The method of claim 7, wherein attaching the sintered nanoparticle-enhanced polycrystalline compact to a bit body comprises securing the supporting substrate within a pocket in an outer surface of the bit body.
11. A method of forming an earth-boring tool, comprising:
forming a catalyst-containing material on exposed surfaces of a diamond material discrete from the catalyst-containing material, the diamond material comprising diamond nanoparticles;
forming another catalyst-containing material on the catalyst-containing material;
subjecting the diamond material to a high temperature and high pressure process to form a sintered nanoparticle-enhanced polycrystalline compact; and
securing the sintered nanoparticle-enhanced polycrystalline compact to a bit body.
12. The method of claim 11, further comprising:
selecting the catalyst-containing material to comprise a solid structure selected from the group consisting of a film, a sheet, and a mesh; and
selecting the another catalyst-containing material to comprise a plurality of particles.
13. The method of claim 11, further comprising selecting the catalyst-containing material and the another catalyst-containing material to comprise different catalyst materials.
14. The method of claim 11, further comprising forming the diamond material on a supporting substrate prior to forming the catalyst-containing material on the exposed surfaces of the diamond material.
15. The method of claim 14, wherein forming a catalyst-containing material on exposed surfaces of a diamond material comprises forming the catalyst-containing material on the exposed surfaces of the diamond material and on exposed surfaces of the supporting substrate.
16. The method of claim 11, further comprising selecting two or more of the supporting substrate, the catalyst-containing material, and the another catalyst-containing material to comprise the same catalyst material.
17. A method of forming an earth-boring tool, comprising:
depositing a diamond material on a supporting substrate, the diamond material comprising diamond nanoparticles;
depositing a catalyst-containing material on exposed surfaces of the diamond material and on a portion of exposed side surfaces of the supporting substrate;
subjecting the diamond material, the catalyst-containing material, and the supporting substrate to high temperature and high pressure conditions to form a cutting element comprising a sintered nanoparticle-enhanced polycrystalline compact; and
attaching the cutting element to a bit body.
18. The method of claim 17, further comprising providing another catalyst-containing material on the catalyst-containing material and on remaining portions of the exposed side surfaces of the supporting substrate.
19. The method of claim 17, further comprising providing a non-catalyst-containing material on remaining portions of the exposed side surfaces of the supporting substrate.
20. The method of claim 19, further comprising selecting the non-catalyst-containing material to comprise one or more of a ceramic, a carbide, an oxide, an intermetallic, a clay, a mineral, a glass, carbon nanotubes, fullerene, adamantane, graphene, and amorphous carbon.