1. A lithographic cell, comprising:
a lithographic apparatus;
a process apparatus comprising a fill apparatus, or a strip apparatus, or both a fill apparatus and a strip apparatus; and
a control unit configured to control both the lithographic apparatus and the process apparatus; the control unit comprising a storage medium having stored therein instructions to cause the lithographic cell to carry out a process comprising the steps of:
filling first apertures in a first pattern in a first layer of radiation-sensitive material of a substrate with a first filler;
removing the first layer of radiation-sensitive material without removing any of the first filler;
applying a second layer of radiation-sensitive material around the first filler;
exposing and developing the second layer of radiation-sensitive material to form second apertures in a second pattern therein; and
removing the first filler without removing the second layer of radiation-sensitive material to re-expose the first apertures.
2. The lithographic cell of claim 1, wherein the fill apparatus is a spin coater.
3. The lithographic cell of claim 1, wherein the strip apparatus is a developer connected to a supply of solvent or reagent able to selectively remove a filler material.
4. The lithographic cell of claim 1, wherein the storage medium has stored therein further instructions to cause the lithographic cell to perform the steps of:
transferring a third pattern, defined by the first and second apertures, into the substrate; and
removing the second layer of radiation-sensitive material.
5. The lithographic cell of claim 4, wherein the first pattern and the second pattern are interleaved so that the pitch of features in the third pattern is smaller than the pitch of features in the first and second patterns.
6. The lithographic cell of claim 5, wherein transferring the third pattern into the substrate comprises etching the areas of the substrate not covered by the second layer of radiation-sensitive material.
7. The lithographic cell of claim 1, wherein the storage medium has stored therein further instructions to cause the lithographic cell to perform the steps of:
applying a first layer of radiation-sensitive material to a substrate;
and exposing and developing the first layer of radiation-sensitive material to form the first apertures in the first pattern therein.
8. The lithographic cell of claim 1, wherein filling the first aperture comprises spin coating a filler material onto the substrate over the exposed and developed layer of radiation-sensitive material.
9. The lithographic cell of claim 1, wherein the first filler is of a material that is substantially insoluble in a solvent that dissolves developed first and second radiation-sensitive material.
10. A device manufacturing method using a lithographic apparatus, the method comprising:
filling first apertures in a first pattern in a first layer of radiation-sensitive material of a substrate with a first filler;
removing the first layer of radiation-sensitive material without removing any of the first filler;
applying a second layer of radiation-sensitive material around the first filler;
exposing and developing the second layer of radiation-sensitive material to form second apertures in a second pattern therein; and
removing the first filler without removing the second layer of radiation-sensitive material to re-expose the first apertures.
11. The method of claim 10, further comprising:
transferring a third pattern, defined by the first and second apertures, into the substrate; and
removing the second layer of radiation-sensitive material.
12. The method of claim 11, wherein the first pattern and the second pattern are interleaved so that the pitch of features in the third pattern is smaller than the pitch of features in the first and second patterns.
13. The method of claim 12, wherein transferring the third pattern into the substrate comprises etching the areas of the substrate not covered by the second layer of radiation-sensitive material.
14. The method of claim 10, further comprising:
applying a first layer of radiation-sensitive material to a substrate; and
exposing and developing the first layer of radiation-sensitive material to form the first apertures in the first pattern therein.
15. The method of claim 10, wherein filling the first aperture comprises spin coating a filler material onto the substrate over the exposed and developed layer of radiation-sensitive material.
16. The method of claim 10, wherein the first filler is of a material that is substantially insoluble in a solvent that dissolves developed first and second radiation-sensitive material.
17. A device manufacturing method, the method comprising, in a lithographic cell comprising a lithographic apparatus and a plurality of process apparatus:
filling first apertures in a first pattern in a first layer of radiation-sensitive material of a substrate with a first filler;
removing the first layer of radiation-sensitive material without removing any of the first filler;
applying a second layer of radiation-sensitive material around the first filler;
exposing and developing the second layer of radiation-sensitive material to form second apertures in a second pattern therein; and
removing the first filler without removing the second layer of radiation-sensitive material to re-expose the first apertures.
18. The method of claim 17, further comprising:
transferring a third pattern, defined by the first and second apertures, into the substrate; and
removing the second layer of radiation-sensitive material.
19. The method of claim 18, wherein the first pattern and the second pattern are interleaved so that the pitch of features in the third pattern is smaller than the pitch of features in the first and second patterns.
20. The method of claim 19, wherein transferring the third pattern into the substrate comprises etching areas of the substrate not covered by the second layer of radiation-sensitive material.
21. The method of claim 17, further comprising:
applying a first layer of radiation-sensitive material to a substrate; and
exposing and developing the first layer of radiation-sensitive material to form the first apertures in the first pattern therein.
22. The method of claim 17, wherein filling the first aperture comprises spin coating a filler material onto the substrate over the exposed and developed layer of radiation-sensitive material.
23. The method of claim 17, wherein the first filler is of a material that is substantially insoluble in a solvent that dissolves developed first and second radiation-sensitive material.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method, comprising:
displaying, via a display device, a graphics item within a border of a background;
receiving an input indicating a change in a position of at least one of the graphics item or the background; and
displaying, via the display device, at least one portion of the graphics item outside the border based on and in response to receiving the input.
2. The method of claim 1, wherein displaying, via the display device, the at least one portion of the graphics item outside the border further comprises:
defining, according to at least one portion of the background, an anchor including a point location of the graphics item; and
displaying the at least one portion of the graphics item based on the point location.
3. The method of claim 2, wherein defining, according to the at least one portion of the background, further comprises: defining the anchor within the border.
4. The method of claim 1, wherein displaying, via the display device, the at least one portion of the graphics item outside the border further comprises:
defining, according to a center of the background, an anchor including a point location of the graphics item; and
displaying the at least one portion of the graphics item based on the point location.
5. The method of claim 4, wherein defining, via the display device, the at least one portion of the graphics item outside the border further comprises defining the anchor according to a geometric center of the background.
6. The method of claim 1, wherein displaying, via the display device, the at least one portion of the graphics item outside the border further comprises defining an anchor based on a point location shared by the graphics item and the background.
7. The method of claim 1, further comprising displaying an interface of a graphics tool, wherein receiving the input further includes receiving the input according to the displaying of the interface of the graphics tool.
8. The method of claim 1, further comprising:
resizing, based on the input, the graphics item within a maximum image size associated with the display device.
9. The method of claim 1, further comprising:
repositioning, based on the input, the graphics item within a maximum image size associated with the display device.
10. The method of claim 1, further comprising:
resizing, based on the input, the background within a maximum image size associated with the display device.
11. The method of claim 1, wherein the resizing further comprises:
resizing the background irrespective of keystone correction.
12. The method of claim 1, further comprising:
repositioning, based on the input, the background within a maximum image size associated with the display device.
13. The method of claim 1, further comprising:
determining display properties of the display device; and
modifying bitmap information based on the display properties, wherein the second displaying further includes displaying the portion based on a result of the modifying.
14. The method of claim 13, wherein the determining the display properties further comprises:
determining at least one of a resolution of the display device or a native aspect ratio of the display device.
15. The method of claim 13, wherein the modifying the bitmap information further comprises:
at least one of down converting or up converting video information.
16. A system, comprising:
means for first displaying a graphics item within a first border of a background;
means for receiving an input; and
means for second displaying, based on the input, at least a part of a second border of the graphics item outside of the border of the background.
17. The system of claim 16, further comprising:
means for defining an anchor including a point location of the graphics item based on a part of the background, wherein the means for the second displaying further comprises means for displaying the part of the second border based on the anchor.
18. The system of claim 16, further comprising:
means for resizing at least one of the graphics item or the background based on the input.
19. The system of claim 16, further comprising:
means for repositioning at least one of the graphics item or the background based on the input.
20. The system of claim 16, wherein the means for second displaying further comprises:
means for determining display settings of a display device; and
means for modifying bitmap information based on the display settings, wherein the means for second displaying further includes means for displaying the part of the second border based on the means for the modifying the bitmap information.
21. A computer-readable media having stored thereon computer executable instructions that, in response to execution by at least one computing device, cause the at least one computing device to perform a method comprising:
first displaying, via a projection-type display device, a graphics item within a border of a background;
receiving, via an interface of a graphics tool, an input; and
second displaying, via the projection-type display device, one or more portions of a border of the graphics item outside of the border of the background according to the input.
22. The computer-readable media of claim 21, the method further comprising:
defining an anchor including a point location of the graphics item according a property of the background, wherein the second displaying further comprises displaying the one or more portions of the border of the graphics item outside of the border of the background based on the point location.
23. The computer-readable media of claim 21, the method further comprising:
resizing or repositioning the background based on the input.
24. An apparatus, comprising:
at least one computing device configured to:
first display a border of a graphics item within a border of a background;
receive an input; and
second display, in response to the input, one or more portions of the border of the graphics item outside of the border of the background.
25. The apparatus of claim 24, wherein the at least one computing device is further configured to:
determine an anchor including a point location within the border of the graphics item referenced to a location within the border of the background.