1. A method of data transfer, the method comprising using an examination device for producing electrical data from an organ, the method comprising:
transmitting an identifier of the examination device wirelessly from the examination device to a base station of the data transmission network of the patient data system;
transmitting the identifier of the examination device from the base station to the auxiliary server;
receiving the identifier determining the examination device by an auxiliary server, which has installation data associated with at least one accepted device identifier available;
transmitting the installation data associated with the examination device identifier from the auxiliary server to a server of a patient data system;
automatically installing the identifier determining the examination device on the basis of the installation data on the server of the patient data system for data transfer; and
transferring data between the examination device and the server of the patient data system after installing the identifier.
2. The method of claim 1, further comprising controlling the operation of the detection unit by means of the docking station.
3. The method of claim 1, further comprising controlling the data transfer between the detection unit and the server of the patient data system by means of the docking station.
4. The method of claim 1, further comprising connecting the examination device comprising the detection unit and the docking station to the data transmission network of the patient data system; and transmitting the docking station identifier, which also determines the detection unit, from the docking station to the auxiliary server.
5. The method of claim 1, further comprising performing the data transfer between the examination device and the server of the patient data system according to a DICOM protocol.
6. The method of claim 1, further comprising performing the data transfer between the examination device and the server of the patient data system according to an HL7 protocol.
7. The method of claim 1, further comprising searching among a plurality of connections for a working connection to the base station by means of the examination device, and using at least one operating working when communicating with the base station.
8. The method of claim 1, further comprising establishing a MESH connection between the examination device and the base station.
9. The method of claim 1, further comprising establishing a GRID connection between the examination device and the base station.
10. The method of claim 1, further comprising establishing a peer-to-peer connection between the examination device and the base station.
11. The method of claim 1, further comprising transferring the identifier and the installation data in secured form.
12. A method of data transfer, the method comprising using an examination device for producing electrical data from an organ, the method comprising:
searching for examination devices to be connected to the data transmission network of a patient data system by means of a base station, reading an identifier of a detected examination device at the base station;
transmitting the identifier of the examination device from the base station to the auxiliary server via the data transmission network of the patient data system;
receiving the identifier determining the examination device by an auxiliary server, which has installation data associated with at least one accepted device identifier available;
transmitting the installation data associated with the examination device identifier from the auxiliary server to a server of a patient data system;
automatically installing the identifier determining the examination device on the basis of the installation data on the server of the patient data system for data transfer; and
transferring data between the examination device and the server of the patient data system after installing the identifier.
13. A method of data transfer, the method comprising using an examination device for producing electrical data from an organ, the method comprising:
transmitting an identifier of a camera unit representing the examination device to a docking station;
transmitting from the docking station of the camera unit to an auxiliary server at least one of the following: a camera unit identifier, a docking station identifier;
receiving the identifier determining the examination device by an auxiliary server, which has installation data associated with at least one accepted device identifier available;
transmitting the installation data associated with the examination device identifier from the auxiliary server to a server of a patient data system;
automatically installing the identifier determining the examination device on the basis of the installation data on the server of the patient data system for data transfer; and
transferring data between the examination device and the server of the patient data system after installing the identifier.
14. The method of claim 13, further comprising transmitting the detection unit identifier andor the docking station identifier from the docking station to the auxiliary server via the data transmission network of the patient data system.
15. A system for data transfer, the system comprising an examination device for producing electrical data from an organ, a base station of a data transmission network of a patient data system and an auxiliary server, which has installation data associated with at least one accepted device identifier available;
the examination device is configured to transmit the identifier of the examination device wirelessly to the base station of the data transmission network of the patient data system;
the base station is configured to transmit the identifier of the examination device to the auxiliary server;
the auxiliary server being configured to receive an identifier determining the examination device and transmit the installation data associated with the examination device identifier from the auxiliary server to a server of a patient data system for an automatic installation; and
the examination device being configured to transfer data with the server of the patient data system after the identifier has been installed.
16. The system of claim 15, wherein the examination device is configured to transmit the identifier of the examination device to the auxiliary server when the examination device is connected to a data transmission network of the patient data system.
17. The system of claim 15, wherein the examination device comprises a detection unit and a docking station;
the examination device is configured to transmit the identifier of the detection unit representing the examination device to the docking station; and the docking station is configured to transmit from the docking station to the auxiliary server at least one of the following: a detection unit identifier, a docking station identifier.
18. The system of claim 17, wherein the docking station is configured to transmit the detection unit identifier andor the docking station identifier from the docking station to the auxiliary server via the data transmission network of the patient data system.
19. The system of claim 17, wherein the docking station is configured to control the operation of the detection unit.
20. The system of claim 17, wherein the docking station is configured to control the data transfer between the detection unit and the server of the patient data system.
21. The system of claim 15, wherein the docking station is configured to transmit the docking station identifier, which also determines the detection unit, to the auxiliary server.
22. The system of claim 15, wherein the system is configured to perform the data transfer between the examination device and the server of the patient data system according to a DICOM protocol.
23. The system of claim 15, wherein the system is configured to perform the data transfer between the examination device and the server of the patient data system according to an HL7 protocol.
24. The system of claim 15, wherein the system is configured to transfer the identifier and the installation data in secured form.
25. A system for data transfer, the system comprising an examination device for producing electrical data from an organ, a base station of a data transmission network of a patient data system and an auxiliary server, which has installation data associated with at least one accepted device identifier available;
the base station is configured to search for examination devices connected to the data transmission network of the patient data system, read the identifier of the detected examination device and transmit the identifier of the examination device to the auxiliary server via the data transmission network of the patient data system;
the auxiliary server being configured to receive an identifier determining the examination device and transmit the installation data associated with the examination device identifier from the auxiliary server to a server of a patient data system for an automatic installation; and
the examination device being configured to transfer data with the server of the patient data system after the identifier has been installed.
26. The system of claim 25, wherein the examination device is configured to search among a plurality of connections for a working connection to the base station and use at least one working connection when communicating with the base station.
27. The system of claim 25, wherein the system is configured to establish a MESH connection between the examination device and the base station.
28. The system of claim 25, wherein the system is configured to establish a GRID connection between the examination device and the base station.
29. The system of claim 25, wherein the system is configured to establish a peer-to-peer connection between the examination device and the base station.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An exposure apparatus for transferring a pattern formed on a mask onto a photosensitive substrate through a projection optical system while synchronously moving the mask and the photosensitive substrate, the exposure apparatus comprising:
a substrate stage supported in a floating manner over a base member;
a mask stage supported in a floating manner over the base member and having a mass corresponding to an amount obtained by multiplying a mass of the substrate stage by a reduction magnification of the projection optical system; and
a first linear motor provided between the substrate stage and the mask stage, for driving the substrate stage and the mask stage so that the mask and the substrate are moved in mutually opposite directions.
2. The exposure apparatus according to claim 1, wherein the projection optical system is an optical system which projects an inverted image of the pattern formed on the mask onto the photosensitive substrate.
3. The exposure apparatus according to claim 1, wherein the photosensitive substrate is held horizontally on the substrate stage, the mask is held vertically on the mask stage, and the projection optical system comprises a plurality of transmitting optical elements, a beam splitter, and a reflecting optical element, and wherein the optical system projects the pattern of the mask arranged on an object plane onto the photosensitive substrate arranged on an image formation plane at a predetermined reduction magnification.
4. The exposure apparatus according to claim 3, further comprising a half TTL alignment detection system which is capable of detecting, via the beam splitter, both of an alignment mark formed on the mask and an alignment mask formed on the photosensitive substrate.
5. The exposure apparatus according to claim 1, wherein a second linear motor for driving the mask stage is provided between the base member and the mask stage.
6. The exposure apparatus according to claim 5, wherein a third linear motor for driving the substrate stage is provided between the base member and the substrate stage.
7. The exposure apparatus according to claim 6, wherein at least one of the second linear motor and the third linear motor is provided with a regenerative braking circuit for finely adjusting a velocity ratio during synchronous movement of the both stages effected by the first linear motor
8. The exposure apparatus according to claim 1, wherein the substrate stage comprises a first stage which is movable in a first direction in which the photosensitive substrate is moved synchronously, with the mask stage and a second stage which is movable in the first direction integrally with the first stage while holding the photosensitive substrate and which is movable in a second direction perpendicular to the first direction by being guided by the first stage.
9. The exposure apparatus according to claim 1, wherein the substrate stage is supported in the floating manner over the base member via an air bearing.
10. The exposure apparatus according to claim 1, wherein the mask stage is supported in the floating manner over the base member via an air bearing.
11. A scanning exposure apparatus having a projection optical system with an optical axis substantially perpendicular to a mask and a substrate respectively, for transferring a pattern formed on the mask onto the substrate through the projection optical system, the scanning exposure apparatus comprising:
a base;
a first stage for moving the mask over the base;
a second stage for moving the substrate over the base; and
a driving system connected to the first stage and the second stage, for synchronously moving the mask and the substrate at a velocity ratio corresponding to a magnification of the projection optical system, wherein:
the driving system drives the first stage and the second stage along predetermined directions oppositely to one another so that a reactive force generated by the synchronous movement is offset.
12. The scanning exposure apparatus according to claim 11, wherein a mass ratio between the first stage and the second stage is substantially coincident with a projection magnification of the projection optical system.
13. The scanning exposure apparatus according to claim 11 wherein the projection optical system comprises a refractive optical element and at least one reflecting optical element, and the projection optical system reduces and projects a partial inverted image of the pattern on the mask onto the substrate.
14. The scanning exposure apparatus according to claim 11 wherein the projection optical system comprises at least two reflecting optical elements, and its image plane is arranged on a side of an object plane with respect to the projection optical system.
15. The scanning exposure apparatus according to claim 13, wherein the projection optical system comprises, as the reflecting optical element, at least one of a mirror, a concave mirror, and a beam splitter.
16. The scanning exposure apparatus according to claim 14, wherein the projection optical system comprises, as the reflecting optical element, at least one of a mirror, a concave mirror, and a beam splitter.
17. The scanning exposure apparatus according to claim 11, wherein an object plane and an image plane of the projection optical system are arranged in an identical plane, and the first and second stages move the mask and the substrate along the plane respectively.
18. The scanning exposure apparatus according to claim 14, wherein an object plane and an image plane of the projection optical system are arranged in an identical plane, and the first and second stages move the mask and the substrate along the plane respectively.
19. The scanning exposure apparatus according to claim 14, further comprising an illumination system arranged on a side opposite to the projection optical system with respect to the base, for irradiating the mask with a light beam.
20. The scanning exposure apparatus according to claim 17, further comprising an illumination system arranged on a side opposite to the projection optical system with respect to the base, for irradiating the mask with a light beam.
21. The scanning exposure apparatus according to claim 18, further comprising an illumination system arranged on a side opposite to the projection optical system with respect to the base, for irradiating the mask with a light beam.
22. A scanning exposure method for transferring a pattern formed on a mask onto a substrate through a projection optical system, the scanning exposure method comprising the steps of:
arranging the mask and the substrate in an identical plane perpendicular to an optical axis of the projection optical system;
projecting a partial inverted image of the pattern formed on the mask onto the substrate; and
synchronously moving the mask and the substrate oppositely to one another along predetermined directions on the plane so that a reactive force generated by the synchronous movement is substantially offset.
23. The scanning exposure method according to claim 22, wherein the mask and the substrate are synchronously moved at a velocity ratio corresponding to a magnification of the projection optical system.
24. The scanning exposure method according to claim 22 wherein in order to perform overlay transfer of the pattern on the mask onto a pattern on the substrate, a velocity ratio between the mask and the substrate is adjusted during the synchronous movement so that at least one of a magnification error and a distortion error between the pattern on the substrate and the image of the pattern on the mask is corrected.