1. A system for stabilizing an intervertebral segment comprising:
an intervertebral implant including
a first plate,
a second plate, and
an articulating joint coupling said first and second plates, wherein at least one of said plates has an inner surface having at least one hole;
an instrument for holding said implant including
a shaft having a proximal end, a distal end and a longitudinal axis extending between the proximal and distal ends,
a body attached to the distal end of said shaft,
a pin having a hooked end that is extendable from said body for being inserted into the at least one hole of said implant for coupling said implant with the distal end of said holding instrument.
2. The system as claimed in claim 1, wherein said pin is movable along the longitudinal axis between a first position in which said hooked end of said pin is at least partially retracted inside said body and a second position in which said hooked end of said pin is at least partially extended from said body.
3. The system as claimed in claim 1, further comprising a spring coupled with said pin for normally urging said pin into the first retracted position.
4. The system as claimed in claim 1, further comprising a flange coupled with said pin, said flange being movable relative to said shaft and toward the distal end of said shaft for moving said hooked end of said pin into the second extended position.
5. The system as claimed in claim 1, wherein said pin has a first section that extends along said longitudinal axis of said shaft and said hooked end is connected to and angled relative to said first section of said pin.
6. The system as claimed in claim 1, wherein said hooked end of said pin consists of a single hook.
7. The system as claimed in claim 1, wherein said body has at least one concave surface at a distal face thereof that is engageable with said intervertebral implant.
8. The system as claimed in claim 7, wherein said at least one concave surface comprises:
a first set of substantially flat surfaces that are angled relative to one another;
a second set of substantially flat surfaces that are angled relative to one another;
a wedge-shaped projection located between said first set of substantially flat surfaces that are angled relative to one another and said second set of substantially flat surfaces that are angled relative to one another.
9. The system as claimed in claim 8, wherein said first plate has a peripheral edge including substantially flat surfaces that are angled relative to one another and that conform with said first set of substantially flat surfaces on said body and said second plate has a peripheral edge including substantially flat surfaces that are angled relative to one another and that conform with said second set of substantially flat surfaces on said body.
10. The system as claimed in claim 8, wherein said wedge-shaped projection has a top surface, a bottom surface angled relative to the top surface and a curved surface extending between the top and bottom surfaces thereof.
11. The system as claimed in claim 11, wherein said wedge-shaped projection includes a channel formed therein and said hooked end of said pin is extendable from said channel.
12. A system for stabilizing an intervertebral segment comprising:
an articulating implant including a first plate and a second plate, wherein an inner surface of at least one of said plates has at least one hole;
an instrument for holding said implant including
a shaft having a proximal end and a distal end,
a body attached to the distal end of said shaft,
a pin having a hooked end that is extendable from said body and insertable into the at least one hole of said implant for coupling said implant with said holding instrument.
13. The system as claimed in claim 12, wherein said pin is movable along an axis extending from the proximal end to the distal end of said shaft between a first position in which said hooked end of said pin is at least partially retracted inside said body and a second position in which said hooked end of said pin is at least partially extended from said body.
14. The system as claimed in claim 13, further comprising a spring coupled with said pin for normally urging said hooked end of said pin toward the proximal end of said shaft and into the first position.
15. The system as claimed in claim 12, wherein said body has at least one concave surface at a distal end thereof that is engageable with said intervertebral implant.
16. The system as claimed in claim 15, wherein said at least one concave surface comprises:
a first set of substantially flat surfaces that are angled relative to one another;
a second set of substantially flat surfaces that are angled relative to one another;
a wedge-shaped projection located between said first set of substantially flat surfaces and said second set of substantially flat surfaces.
17. The system as claimed in claim 16, wherein said first plate has a peripheral edge including substantially flat surfaces that are angled relative to one another and that conform with said first set of substantially flat surfaces on said body and said second plate has a peripheral edge including substantially flat surfaces that are angled relative to one another and that conform with said second set of substantially flat surfaces on said body.
18. A system for stabilizing an intervertebral segment comprising:
an articulating implant including a first plate and a second plate, wherein an inner surface of at least one of said plates has at least one hole;
an instrument for holding said implant including
a shaft having a proximal end and a distal end,
a body attached to the distal end of said shaft,
a distal face of said body including a first set of substantially flat surfaces that are angled relative to one another, a second set of substantially flat surfaces that are angled relative to one another, and a wedge-shaped projection located between said first set of substantially flat surfaces and said second set of substantially flat surfaces, and
a pin having a hooked end that is extendable from said wedge-shaped projection for being insertable into the at least one hole of said implant for coupling said implant with said holding instrument.
19. The system as claimed in claim 18, wherein said wedge-shaped projection has a top surface engageable with said first plate, a bottom surface engageable with said second plate, the top surface of said wedge-shaped projection being angled relative to the bottom surface of said wedge-shaped projection, and a concave surface extending between the top and bottom surfaces thereof.
20. The system as claimed in claim 19, wherein said wedge-shaped projection includes a channel formed therein and said hooked end of said pin is extendable from said channel.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of forming a metal wire comprising:
introducing an organic aluminum precursor comprising aluminum as a central metal, and borohydride and trimethylamine as ligands, onto a substrate with a carrier gas;
thermally decomposing the organic aluminum precursor at a temperature of about 120\xb0 C. to about 200\xb0 C.; and
depositing aluminum that is decomposed from the organic aluminum precursor on the substrate to form a aluminum layer on the substrate.
wherein a chemical structure of the organic alumumum precursor is in accordance with the formula:
wherein the carrier gas includes at least one of an argon (Ar) gas, a helium (He) gas, a neon (Ne) gas and a nitrogen (N2) gas.
2. The method of claim 1, wherein the organic aluminum precursor is vaporizes at a temperature of about 20\xb0 C. to about 50\xb0 C.
3. The method of claim 1, wherein the organic aluminum precursor has a vapor pressure of about 0.4 Torr to about 0.6 Torr at a temperature of about 30\xb0 C., and a vapor pressure of about 1.2 Torr to about 1.4 Torr at a temperature of about 50\xb0 C.
4. The method of claim 1, wherein the aluminum is deposited by a chemical vapor deposition (CVD) process or a cyclic CVD process.
5. A method of forming a metal wire comprising:
forming an insulation layer pattern including an opening on a substrate, the opening exposing a conductive pattern formed in the substrate;
performing a chemical vapor deposition (CVD) process or a cyclic CVD process using an organic aluminum precursor comprising aluminum as a central metal, and borohydride and trimethylamine as ligands, to form a first aluminum layer on inner walls of the opening and on an upper surface of the insulation layer pattern; and
forming a second aluminum layer on the first aluminum layer by a physical vapor deposition (PVD) process,
wherein a chemical structure of the organic aluminum precursor is in accordance with the formula:
6. The method of claim 5, further comprising, after forming the insulation layer pattern and prior to forming the first aluminum layer, forming a barrier metal layer on the inner walls of the opening and on the upper surface of the insulation layer pattern.
7. The method of claim 6, wherein the barrier metal layer is formed in a single-layered structure or a multi-layered structure using at least one selected from the group consisting of titanium (Ti), titanium nitride (TiN), tantalum (Ta) and tantalum nitride (TaN).
8. The method of claim 5, wherein the CVD process or the cyclic CVD process is performed by thermally decomposing the organic aluminum precursor at a temperature of about 120 to about 200\xb0 C.