1. A method to increase sourcedrain contact area of an integrated circuit transistor which is applicable to a silicon substrate having isolation structures, said method comprising:
forming a gate structure on said silicon substrate having a gate conductor, shallow trench isolation structures, and ion implantations;
forming polysilicon spacers adjacent each side of said gate conductor such that at least one of said polysilicon spacers is at a height less than a height of said adjacent gate conductor; and
forming a conductive silicide on said polysilicon spacers that extends said sourcedrain contact area.
2. The method of claim 1 wherein said step of forming said gate structure includes:
forming a pad oxide layer on said silicon substrate;
forming a pad nitride layer on said pad oxide layer; and
patterning said nitride layer to form a shallow trench isolation structure.
3. The method of claim 2 including:
stripping said nitride layer; and
performing an ion implantation process for a well and a voltage threshold region of said gate structure.
4. The method of claim 3 wherein said pad nitride is stripped using a hot phosphoric acid process.
5. The method of claim 3 wherein said gate structure is subjected to rapid thermal annealing after said ion implantation.
6. The method of claim 2 including:
stripping said pad oxide;
forming a gate dielectric;
depositing a gate polysilicon layer;
planarizing and patterning said polysilicon layer; and
etching said polysilicon layer to form said gate conductor.
7. The method of claim 6, further including:
forming extension ion implants extending from said gate conductors;
depositing an etch-stop oxide layer;
forming nitride spacers adjacent said gate conductor sides;
forming polysilicon spacers adjacent said gate conductor sides; and
performing a sourcedrain ion implantation process.
8. The method of claim 1 wherein said polysilicon spacer height is approximately seventy percent of said gate conductor height.
9. The method of claim 8 comprising:
performing an oxide etch to remove said oxide layer and expose said gate conductor and said sourcedrain ion implantation regions;
performing a selective epitaxial silicon deposition; and
forming a silicide on said exposed gate conductor and exposed sourcedrain ion implantation regions.
10. The method of claim 1 wherein said polysilicon spacer height is approximately fifty percent of said gate conductor height.
11. The method of claim 1 wherein said polysilicon spacer height is approximately thirty percent of said gate conductor height.
12. A method to increase the sourcedrain contact area of an integrated circuit transistor which is applicable to a silicon substrate having a gate structure and isolation structures, said
method comprising:
forming a pad oxide layer on said silicon substrate;
forming a pad nitride layer on said pad oxide layer;
patterning said nitride layer to form a shallow trench isolation structure;
stripping said nitride layer;
performing an ion implantation process for a well and a voltage threshold region of said gate structure;
stripping said pad oxide;
depositing a gate polysilicon layer;
planarizing and patterning said polysilicon layer;
etching said polysilicon layer to form said gate conductor;
forming extension ion implants extending from said gate conductors;
depositing an etch-stop oxide layer;
forming nitride spacers adjacent said gate conductor sides;
forming polysilicon spacers adjacent said gate conductor sides;
performing a sourcedrain ion implantation process;
performing an oxide etch to remove said oxide layer and expose said gate conductors and said sourcedrain ion implantation regions;
performing a selective epitaxial silicon deposition; and
forming a silicide on said exposed gate conductors and exposed sourcedrain ion implantation regions.
13. The method of claim 12 including performing an etching process to reduce said polysilicon spacers to a height approximately one-half of that of said adjacent gate conductor.
14. The method of claim 12 including performing an etching process to reduce said polysilicon spacers to a height less than seventy percent of said adjacent gate conductor.
15. The method of claim 12 including performing an etching process to reduce said polysilicon spacers to a height approximately thirty percent of that of said adjacent gate conductor.
16. An integrated circuit device having increased sourcedrain contact area comprising:
a transistor device having a gate conductor including conductive polysilicon sidewall spacers, said spacers having a height less than seventy percent of said gate conductor height, and having a continuous surface silicide layer over deep source and drain regions.
17. The integrated circuit device of claim 16 wherein said spacers have a height less than fifty percent of said gate conductor height.
18. The integrated circuit device of claim 16 wherein said spacers have a height less than thirty percent of said gate conductor height.
19. The integrated circuit device of claim 16, including a dielectric spacer between said gate conductor and said conductive polysilicon sidewall spacers.
20. The integrated circuit device of claim 19, wherein said dielectric spacer is selected from nitride or a low dielectric constant material such as SiCOH.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A computer implemented method of clarifying electronic communication between an originator and a recipient, comprising:
providing an application software on one or more of an originator communication device and a recipient communication device;
declaring characteristics of an originating message using said application software on said originator communication device, wherein said declaration specifies intent of communication and linguistic type of communication of said originating message, wherein said declaration is used for categorization by said application software on said recipient communication device and formulation of a first response message by said recipient;
transmitting said originating message with said declared characteristics to said recipient communication device via a communication network;
recognizing said declared characteristics of said transmitted originating message by said application software on said recipient communication device, wherein said recognition enables said recipient to formulate said first response message to said transmitted originating message;
categorizing said transmitted originating message by said application software on said recipient communication device based on said recognized declared characteristics of said transmitted originating message;
determining requirement of said first response message as a reply to said transmitted originating message, by said application software on said recipient communication device;
generating a plurality of response message templates on said recipient communication device based on said categorization on determining said requirement of said first response message, wherein said response message templates declare characteristics of said first response message, wherein said declaration specifies intent of communication and linguistic type of communication of said first response message, wherein said recipient selects one of said generated response message templates for creating said first response message to be transmitted to said originator; and
transmitting said created first response message to said originator communication device via said communication network;
whereby said declaration of said characteristics of said originating message and said first response message clarifies said electronic communication between said originator and said recipient.
2. The computer implemented method of claim 1, further comprising recognizing properties of said transmitted originating message by said application software on said recipient communication device, wherein said properties of said transmitted originating message comprise status of communication and mode of addressing said originating message.
3. The computer implemented method of claim 2, further comprising classifying said transmitted originating message by said application software on said recipient communication device based on said recognized properties of said transmitted originating message.
4. The computer implemented method of claim 1, further comprising creating said originating message by said originator on said originator communication device after said declaration of said characteristics of said originating message using said application software on said originator communication device.
5. The computer implemented method of claim 1, wherein said linguistic type of communication is a request linguistic type of communication and an offer linguistic type of communication.
6. The computer implemented method of claim 1, wherein said linguistic type of communication comprises a plurality of subtypes for enabling declaration of additional characteristics of said originating message and said first response message.
7. The computer implemented method of claim 1, wherein said declared characteristics of said originating message are one of embedded in said originating message and referenced by said originating message.
8. The computer implemented method of claim 1, wherein said declared characteristics of said first response message are embedded in said first response message.
9. The computer implemented method of claim 1, further comprising:
recognizing said declared characteristics of said transmitted first response message by said application software on said originator communication device, wherein said recognition enables said originator to formulate a second response message to said transmitted first response message; and
categorizing said transmitted first response message by said application software on said originator communication device based on said recognized declared characteristics of said transmitted first response message.
10. The computer implemented method of claim 9, further comprising classifying said transmitted first response message by said application software on said originator communication device based on properties of said transmitted first response message, wherein said properties of said transmitted first response message comprise status of communication and mode of addressing said first response message.
11. The computer implemented method of claim 1, wherein said electronic communication comprises electronic mail communication, short message service communication, multimedia messaging service communication, and instant messaging communication.
12. The computer implemented method of claim 1, further comprising iteratively determining requirement of response messages by said application software on said originator communication device and said recipient communication device until said electronic communication is declared complete.
13. A computer implemented system for clarifying electronic communication between an originator and a recipient, comprising:
an application software on one or more of an originator communication device and a recipient communication device;
said application software on said originator communication device, comprising:
a characteristic declaration module that declares characteristics of an originating message on said originator communication device, wherein said characteristic declaration module specifies intent of communication and linguistic type of communication of said originating message for enabling categorization by said application software on said recipient communication device and formulation of a first response message by said recipient;
an originating message transmission module that transmits said originating message with said declared characteristics to said recipient communication device via a communication network;
said application software on said recipient communication device comprising:
a recognition module that recognizes said declared characteristics of said transmitted originating message, wherein said recognition module determines requirement of said first response message as a reply to said transmitted originating message and enables said recipient to formulate said first response message to said transmitted originating message;
a categorization engine that categorizes said transmitted originating message on said recipient communication device based on said recognized declared characteristics of said transmitted originating message;
a response message template generation module that generates a plurality of response message templates on said recipient communication device based on said categorization, wherein said response message templates declare characteristics of said first response message, wherein said declaration specifies intent of communication and linguistic type of communication of said first response message, wherein said recipient selects one of said generated response message templates for creating said first response message to be transmitted to said originator; and
a response message transmission module that transmits said created first response message to said originator communication device via said communication network.
14. The computer implemented system of claim 13, wherein said recognition module recognizes properties of said transmitted originating message, wherein said properties of said transmitted originating message comprise status of communication and mode of addressing said originating message.
15. The computer implemented system of claim 14, wherein said application software further comprises a classification engine that classifies said transmitted originating message and said transmitted first response message on said recipient communication device and said originator communication device respectively based on said recognized properties of said transmitted originating message and said transmitted first response message respectively.
16. The computer implemented system of claim 13, wherein said application software on said originator communication device further comprises an originating message template generation module that creates said originating message on said originator communication device after said declaration of said characteristics of said originating message.
17. The computer implemented system of claim 13, wherein said characteristic declaration module performs one of embedding said declared characteristics in said originating message and referencing said declared characteristics in said originating message.
18. A computer program product comprising computer executable instructions embodied in non-transitory a computer readable storage medium, wherein said computer program product comprises:
a first computer parsable program code for providing an application software on one or more of an originator communication device and a recipient communication device;
a second computer parsable program code for declaring characteristics of an originating message using said application software on said originator communication device, wherein said declaration specifies intent of communication and linguistic type of communication of said originating message, wherein said declaration is used for categorization by said application software on said recipient communication device and formulation of a first response message by a recipient;
a third computer parsable program code for creating said originating message on said originator communication device;
a fourth computer parsable program code for transmitting said created originating message with said declared characteristics to said recipient communication device via a communication network;
a fifth computer parsable program code for recognizing said declared characteristics of said transmitted originating message on said recipient communication device, wherein said recognition enables said recipient to formulate said first response message to said transmitted originating message;
a sixth computer parsable program code for categorizing said transmitted originating message on recipient communication device based on said recognized declared characteristics of said transmitted originating message;
a seventh computer parsable program code for determining requirement of said first response message as a reply to said transmitted originating message;
an eighth computer parsable program code for generating a plurality of response message templates on said recipient communication device based on said categorization on determining said requirement of said first response message, wherein said response message templates declare characteristics of said first response message, wherein said declaration specifies intent of communication and linguistic type of communication of said first response message, wherein said recipient selects one of said generated response message templates for creating said first response message to be transmitted to said originator; and
a ninth computer parsable program code for transmitting said created first response message to said originator communication device via said communication network.
19. The computer program product of claim 18, further comprising a tenth computer parsable program code for recognizing properties of said transmitted originating message and said transmitted first response message, wherein said properties of said transmitted originating message and said transmitted first response message comprise status of communication and mode of addressing said originating message and said first response message.
20. The computer program product of claim 18, further comprising an eleventh computer parsable program code for classifying said transmitted originating message and said transmitted first response message on said recipient communication device and said originator communication device respectively based on said recognized properties of said transmitted originating message and said transmitted first response message respectively.
21. The computer program product of claim 18, further comprising a twelfth computer parsable program code for performing one of embedding said declared characteristics in one of said originating message and said first response message and referencing said declared characteristics in said one of said originating message and said first response message.
22. The computer program product of claim 18, further comprising a thirteenth computer parsable program code for iteratively determining requirement of response messages on said originator communication device and said recipient communication device until said electronic communication is declared complete.