1461115301-683f983e-7188-46f0-809b-27036376da27

1. A method for forming a P-type polysilicon layer in a semiconductor device, comprising:
alternately depositing a plurality of silicon atom layers and a plurality of group IIIA element atom layers on a semiconductor substrate by atomic layer deposition; and
forming a P-type polysilicon layer by thermally diffusing the plurality of group IIIA element atom layers into the plurality of silicon atom layers.
2. A method as defined in claim 1, wherein the plurality of silicon atom layers are respectively deposited to a thickness of about 5-100 \u212b.
3. A method as defined in claim 1, wherein the plurality of group IIIA element atom layers are respectively deposited to a thickness of about 5-50 \u212b.
4. A method as defined in claim 1, wherein the plurality of group IIIA element atom layers comprise at least one of Al, Ga, In, or Tl.
5. A method as defined in claim 1, wherein the plurality of silicon atom layers are respectively deposited to a thickness of about 5-100 \u212b and the plurality of group IIIA element atom layers are respectively deposited to a thickness of about 5-50 \u212b, and the plurality of group IIIA element atom layers comprise at least one of Al, Ga, In, or Tl.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A removable protective vehicle door cover comprising:
a protective barrier;
one or more upper fasteners for securing an upper portion of the protective barrier to an upper portion of an interior vehicle door;
one or more lower fasteners for securing a lower portion of the protective barrier to a lower portion of an interior vehicle door, such that the fastener’s hold the lower portion at least temporarily in place until the vehicle door is closed, at which point the pressure of the vehicle door against a car frame grips the fasteners and securely holds the protective-barrier in place.
2. The door cover of claim 1, wherein the fasteners include one or more straps of high-tensile material and a securing device attached to a first end thereof, and wherein the other end thereof is attached to the barrier.
3. The door cover of claim 2, wherein the securing device comprises a magnet.
4. The door cover of claim 2, wherein the securing device comprises a hook and loop fastener.
5. The door cover of claim 2, wherein the securing device comprises a suction cup.
6. The door cover of claim 1, wherein the protective barrier includes a hole cut therein to allow access to a handle secured behind the barrier.
7. The door cover of claim 6, wherein the protective barrier includes a cover covering the hole.
8. The door cover of claim 7, wherein the cover is securable over the hole.
9. The door cover of claim 1, wherein the upper portion of the door is the window well.
10. A method for protecting a vehicle door interior, using a protective barrier including one or more upper fasteners and one or more lower fasteners comprising:
securing the one or more upper fasteners to an upper portion of the interior of the door;
securing the one or more lower fasteners to a lower portion of the door frame; and
closing the door to create a pressurized force on the one or more lower fasteners, the force coming from the pressure of the door against the vehicle frame and the force being sufficient to substantially hold the lower fasteners in place against pressure.