1. A film forming apparatus which forms a film on a long substrate, the apparatus comprising:
a film forming unit;
a transport unit which transports the long substrate;
a supply portion which supplies an inspection substrate onto the long substrate; and
a substrate recovery portion which recovers the inspection substrate that was placed on the long substrate and that has a film formed thereon by the film forming unit.
2. The apparatus according to claim 1, wherein the long substrate is a conductive substrate.
3. The apparatus according to claim 1, comprising a plurality of film forming units including said film forming unit.
4. The apparatus according to claim 3, wherein the plurality of film forming units are controlled so that a film is formed on the inspection substrate by one film forming unit selected from the plurality of film forming units.
5. The apparatus according to claim 1, wherein the transport unit is configured to transport the long substrate by a roll-to-roll scheme, and the recovery portion recovers the inspection substrate fallen by a self weight thereof.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A device for a vehicle for estimating a friction coefficient of a road surface, comprising:
first parameter-acquiring means for finding a first parameter indicating a driving behavior of the vehicle;
second parameter-acquiring means for finding a second parameter corresponding to the first parameter, with a different method from that of the first parameter-acquiring means;
correlation coefficient computing means for statistically computing a coefficient of correlation between the first and second parameters;
population correlation coefficient computing means for computing a correlation coefficient of a current population of the correlation coefficients computed by the correlation coefficient computing means based on a previously computed correlation coefficient of the population; and
friction coefficient of a road surface estimating means for estimating a friction coefficient of the road surface on the basis of the correlation coefficients of the population.
2. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the first and second parameters comprise wheel accelerations of left and right wheels disposed on one of a front side and a rear side of the vehicle.
3. The device for estimating a friction coefficient of a road surface according to claim 2, wherein the first and second parameters comprise values from which variation components of corresponding wheel speeds due to a driving operation of the vehicle are excluded.
4. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the first parameter comprises a longitudinal acceleration computed from a driving force and a braking force of the vehicle, and the second parameter comprises a longitudinal acceleration which is one of computed from a vehicle speed and detected by a longitudinal acceleration sensor.
5. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the first parameter comprises a yaw rate determined by substituting necessary parameters into an equation of state of a kinetic model of a vehicle motion, and the second parameter comprises a yaw rate detected by a yaw rate sensor.
6. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the first parameter comprises a lateral acceleration determined by substituting necessary parameters into an equation of state of a kinetic model of a vehicle motion, and the second parameter comprises a lateral acceleration detected by a lateral acceleration sensor.
7. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the first parameter comprises a yaw rate determined from a vehicle speed and a lateral acceleration detected by a lateral acceleration sensor, and the second parameter comprises a yaw rate detected by a yaw rate sensor.
8. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the first parameter comprises a lateral acceleration determined from a vehicle speed and a yaw rate detected by a yaw rate sensor, and the second parameter comprises a lateral acceleration detected by a lateral acceleration sensor.
9. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the correlation coefficient computing means computes a correlation coefficient by dividing a sum of products of deviations of the first and second parameters by a square root of a product of sums of squared deviations of the first and second parameters.
10. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the friction coefficient on road surface estimating means estimates the friction coefficient on road surface in a variable manner in accordance with a running state of the vehicle.
11. The device for estimating a friction coefficient of a road surface according to claim 1, wherein the friction coefficient of the road surface estimating means sets a determining threshold value for previously determining the friction coefficient on road surface and estimates the friction coefficient on road surface by comparing the determining threshold value with the coefficient of correlation of the population.
12. The device for estimating a friction coefficient of a road surface according to claim 11, wherein the determining threshold value sets a value varying in accordance with a running state of the vehicle.
13. The device for estimating a friction coefficient of a road surface according to claim 1, wherein
the population correlation coefficient computing means estimates upper and lower limits of the correlation coefficient of the population on the basis of the correlation coefficients computed by the correlation coefficient computing means, and
a correlation coefficient of a current population of correlation coefficients is computed based on the previously computed correlation coefficient of the population, the upper and lower limits, and the correlation coefficients computed by the correlation coefficient computing means.
14. A device for a vehicle for estimating a friction coefficient of a road surface, comprising:
first pararmeter-acquiring means for finding a first parameter indicating a driving behavior of the vehicle;
second parameter-acquiring means for finding a second parameter corresponding to the first parameter, with a different method from that of the first parameter-acquiring means;
correlation coefficient computing means for statistically computing a coefficient of correlation between the first and second parameters;
population correlation computing means for computing a correlation coefficient of a population of the correlation coefficients computed by the correlation coefficient computing means; and
friction coefficient of a road surface estimating means for estimating a friction coefficient of the road surface on the basis of the correlation coefficients of the population,
wherein the population correlation coefficient computing means estimates upper and lower limits of the correlation coefficient of the population in a predetermined manner on the basis of the correlation coefficients computed by the correlation coefficient computing means, wherein the correlation coefficient of the population of a previous time is compared and limited with the upper and lower limits, and a current correlation coefficient of the population is computed based on at least a correlation coefficient computed by the correlation coefficient computing means.
15. The device for estimating a friction coefficient of a road surface according to claim 14, wherein the population correlation computing takes into account a running state of the vehicle and an acquiring state of the parameters, upon computing the correlation coefficient of the population of this time.