1. A lithographic exposure device for fabricating a microporous filter membrane, said microporous filter membrane not supported by a solid substrate, comprising:
means for exposing a membrane substrate to a beam comprising at least one energetic particle;
means for conveying said membrane substrate; and,
a mask positioned between said membrane substrate and at least one source of said at least one energetic particle, said beam comprising at least one particle transmitted through said mask.
2. The lithographic exposure device of claim 1, wherein said device fabricates a filter membrane comprising at least one pore.
3. The lithographic exposure device of claim 1, wherein said mask is substantially stationary.
4. The lithographic exposure device of claim 1, wherein said means for conveying said membrane substrate further comprises a clamp for securing said membrane substrate.
5. The lithographic exposure device of claim 1, wherein said means for conveying said membrane substrate advances said membrane substrate in a stepwise fashion wherein said membrane substrate is advanced about a length of said mask for every step.
6. The lithographic exposure device of claim 1, further comprising an etchant exposure system.
7. The lithographic exposure device of claim 1, further comprising a means of applying a high emissivity coating to said filter membrane substrate prior to exposure.
8. The lithographic exposure device of claim 7, further comprising a means of removing said high emissivity coating from said filter membrane substrate after exposure.
9. A filter membrane produced with a device according to claim 1.
10. A lithographic exposure device according to claim 1, wherein said energetic particle is selected from at least one of an ion, a photon, an electron, a neutral energetic atom and an energetic molecule.
11. A lithographic exposure device for fabricating a microporous filter membrane, said microporous filter membrane not supported by a solid substrate, comprising:
a radiation source directed at least partially on a membrane substrate, wherein said radiation source’s radiation emitted comprises a beam of at least one energetic particle;
a device for conveying said membrane substrate comprising at least one supply reel and at least one take-up reel; and,
a mask positioned between said membrane substrate and at least one source of said at least one energetic particle, said beam comprising at least one particle transmitted through said mask.
12. The lithographic exposure device of claim 11, wherein said mask is substantially stationary.
13. The lithographic exposure device of claim 11, wherein said device for conveying said membrane substrate further a clamp for securing said membrane substrate.
14. The lithographic exposure device of claim 11, further comprising an etchant exposure system.
15. The lithographic exposure device of claim 11, further comprising a device for applying a high emissivity coating to said filter membrane substrate prior to exposure.
16. The lithographic exposure device of claim 15, further comprising a device for removing a high emissivity coating from said filter membrane substrate after exposure.
17. A filter membrane produced with the device according to claim 11.
18. The lithographic exposure device of claim 11, wherein said beam comprises energetic particles selected from the groups consisting of H, He, Ne, Xe, C, and B ions and neutral atoms.
19. The lithographic exposure device of claim 11, wherein said beam comprises energetic particles with optimized energy, wherein the optimized energy is at least sufficient to completely penetrate the membrane substrate with a rate of energy loss greater than 400 eVnm; and wherein the optimized energy is at most 1 MeVnucleon.
20. The lithographic exposure device of claim 11, wherein said clamp is electrostatic.
21. A process for fabricating a microporous filter membrane filter, said microporous filter membrane not supported by a solid substrate, said process comprising the steps of:
conveying a membrane substrate in a stepwise fashion adjacent a mask;
damaging said membrane substrate with at least one beam comprising at least one energetic particle emitted from at least one radiation source directed at least partially through said mask; and,
removing said damaged membrane substrate with an etchant.
22. The process of claim 21, wherein said step of conveying said membrane substrate in a stepwise fashion advances said membrane substrate about a length of said mask for every step.
23. The process of claim 21, wherein said membrane substrate is substantially stationary for at least a portion of each step.
24. The process of claim 21, wherein said beam comprises an optimized dose of energetic particles.
25. A filter membrane produced according to the process of claim 21.
26. A process for fabricating a microporous membrane filter, said process comprising the steps of:
applying an intermediate mask layer and a resist coating to a membrane substrate;
conveying said membrane substrate in a stepwise fashion adjacent a mask;
exposing said resist coating with at least one beam comprising at least one energetic particle emitted from at least one radiation source directed at least partially through said mask;
developing said resist coating;
etching said resists’ pattern through said intermediate mask layer; and,
etching said intermediate mask layer’s pattern into said membrane substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A fluidic device, comprising:
a first constituent member internally having a first channel; and
a mounting substrate internally having a second channel, the first constituent member being mounted on the mounting substrate,
the mounting substrate having a first storage portion for storing a fluid which is supplied to the first channel and a second storage portion for storing a fluid which is discharged from the first channel,
the second channel having a first part channel connected to the first storage portion and a second part channel connected to the second storage portion,
wherein the first part channel and the second part channel are connected to each other via the first channel.
2. The fluidic device of claim 1, wherein the first storage portion and the second storage portion are integrated.
3. The fluidic device of claim 1, further comprising a pump to flow a fluid.
4. The fluidic device of claim 3, further comprising a sensor to detect a quantity of state relating to a fluid in the first channel, and a controller to control a drive of the pump based on the quantity of state detected by the sensor.
5. The fluidic device of claim 3, wherein further comprising a detector to detect a state of the fluid or a predetermined component in the fluid.
6. The fluidic device of claim 1,
wherein the first constituent member has a first substrate and a second substrate;
wherein the first channel has a first inside channel portion formed inside the first substrate and a second inside channel portion formed inside the second substrate,
the second inside channel portion having an introduction channel for introducing a fluid into the first inside channel portion, and a discharge channel for discharging a fluid from the first inside channel portion; and
wherein the first part channel and the introduction channel are connected to each other, and the discharge channel and the second part channel are connected to each other.
7. The fluidic device of claim 1,
wherein the first constituent member has a first substrate and a second substrate;
wherein a recess portion is formed on at least one of two mutually opposing surfaces of the first substrate and the second substrate;
wherein the first channel has a channel-portion-between-substrates constituted by the recess portion between the first substrate and the second substrate, and a second inside channel portion formed inside the second substrate;
the second inside channel portion having an introduction channel for introducing a fluid into the channel-portion-between-substrates, and a discharge channel for discharging a fluid from the channel-portion-between-substrates; and
wherein the first part channel and the introduction channel are connected to each other, and the discharge channel and the second part channel are connected to each other.
8. The fluidic device of claim 1, further comprising a first bonding portion for bonding the first constituent member and the mounting substrate to each other,
wherein the first bonding portion has a first bonding member and a second bonding member,
the first bonding member internally having a channel for connecting the first channel and the first part channel to each other, and
the second bonding member internally having a channel for connecting the first channel and the second part channel to each other.
9. The fluidic device of claim 6, further comprising a first bonding portion for bonding the second substrate and the mounting substrate to each other, and a second bonding portion for bonding the first substrate and the second substrate to each other,
the first bonding portion having a first bonding member and a second bonding member,
the second bonding portion having a third bonding member and a fourth bonding member,
wherein the first bonding member internally has a channel for connecting the introduction channel and the first part channel to each other;
the second bonding member internally has a channel for connecting the discharge channel and the second part channel to each other;
the third bonding member internally has a channel for connecting the introduction channel and the first inside channel portion to each other; and
the fourth bonding member internally has a channel for connecting the discharge channel and the first inside channel portion to each other.
10. The fluidic device of claim 7, further comprising a first bonding portion for bonding the mounting substrate and the second substrate to each other, and a second bonding portion for bonding the first substrate and the second substrate to each other,
the first bonding portion having a first bonding member and a second bonding member,
the second bonding portion having a ring-shaped third bonding member,
wherein the first bonding member internally has a channel for connecting the introduction channel and the first part channel to each other;
the second bonding member internally has a channel for connecting the discharge channel and the second part channel to each other; and
the third bonding member is formed so as to enclose the channel-portion-between-substrates.
11. The fluidic device of claim 1,
wherein the first constituent member has a first substrate and a second substrate,
the fluidic device further comprising:
a first bonding portion for bonding the mounting substrate and the second substrate to each other; and
a second bonding portion for bonding the second substrate and the first substrate,
the first bonding portion having a first bonding member and a second bonding member,
the second bonding portion having a ring-shaped third bonding member,
wherein the first channel has a channel-portion-between-substrates constituted by a gap between the second substrate and the first substrate inside the third bonding member, and a second inside channel portion formed inside the second substrate,
the second inside channel portion having an introduction channel for introducing a fluid into the first inside channel portion, and a discharge channel for discharging a fluid from the first inside channel portion, and
wherein the first bonding member internally has a channel for connecting the introduction channel and the first part channel to each other, and
the second bonding member internally has a channel for connecting the discharge channel and the second part channel to each other.
12. The fluidic device of claim 1, further comprising a first electrically connecting portion for electrically connecting the first constituent member and the mounting substrate to each other.
13. The fluidic device of claim 6, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and a second substrate to each other, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate to each other.
14. The fluidic device of claim 7, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and a second substrate to each other, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate to each other.
15. The fluidic device of claim 8, further comprising a first electrically connecting portion for electrically connecting the first constituent member and the mounting substrate, wherein the first bonding portion is integrated with the first electrically connecting portion.
16. The fluidic device of claim 9, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and the second substrate, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate,
wherein the first bonding portion is integrated with the first electrically connecting portion, and the second bonding portion is integrated with the second electrically connecting portion.
17. The fluidic device of claim 10, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and the second substrate, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate, wherein the first bonding portion is integrated with the first electrically connecting portion, and the second bonding portion is integrated with the second electrically connecting portion.
18. The fluidic device of claim 11, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and the second substrate, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate, wherein the first bonding portion is integrated with the first electrically connecting portion, and the second bonding portion is integrated with the second electrically connecting portion.
19. The fluidic device of claim 8, further comprising a first electrically connecting portion for electrically connecting the first constituent member and the mounting substrate, wherein the first electrically connecting portion is disposed closer to an outer peripheral portion than the first bonding portion.
20. The fluidic device of claim 9, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and the second substrate, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate,
wherein the first electrically connecting portion is disposed closer to an outer peripheral portion than the first bonding portion, and the second electrically connecting portion is disposed closer to an outer peripheral portion than the second bonding portion.
21. The fluidic device of claim 10, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and the second substrate, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate, wherein the first electrically connecting portion is disposed closer to an outer peripheral portion than the first bonding portion, and the second electrically connecting portion is disposed closer to an outer peripheral portion than the second bonding portion.
22. The fluidic device of claim 11, further comprising a first electrically connecting portion for electrically connecting the mounting substrate and the second substrate, and a second electrically connecting portion for electrically connecting the second substrate and the first substrate, wherein the first electrically connecting portion is disposed closer to an outer peripheral portion than the first bonding portion, and the second electrically connecting portion is disposed closer to an outer peripheral portion than the second bonding portion.
23. The fluidic device of claim 9, wherein the second bonding portion is disposed closer to an outer peripheral portion than the first bonding portion when viewed from a plain surface.
24. The fluidic device of claim 10, wherein the second bonding portion is disposed closer to an outer peripheral portion than the first bonding portion when viewed from a plain surface.
25. A detecting method for detecting a component in the fluid using the fluid device of claim 5 comprising:
a storage step of storing a fluid of interest which is subjected to detection;
a fluid feeding step of feeding the stored fluid of interest;
a detection step of detecting a predetermined component in the fluid of interest; and
a collection step of collecting the fluid of interest having been subjected to detection.