1. A method, comprising:
responsive to a search criterion received in a telephonic apparatus, submitting a query from the telephonic apparatus over a data communication network;
receiving at the telephonic apparatus at least one advertisement, the advertisement including a telephonic reference containing information about the query; and
responsive to a user selection of the advertisement at the telephonic apparatus, establishing a connection with a connection server for a telephonic call using the telephonic reference, the connection server to extract from the telephonic reference the information about the query and to connect the telephonic call to an advertiser of the advertisement.
2. The method of claim 1, wherein the telephonic reference comprises a session initiation protocol (SIP) uniform resource identifier (URI), a telephone number without an extension, a telephone number with an extension, or a user identifier.
3. The method of claim 2, wherein the telephonic reference is encrypted with a telephonic reference of the advertiser.
4. The method of claim 3, wherein the information about the query includes the search criterion, an identification of the advertisement, a timestamp of the query, an entity of the telephonic apparatus, an identification of a user of the telephonic apparatus, a position of the advertisement in a result of a search performed in response to the query, or a price of an advertisement fee offered by the advertiser.
5. The method of claim 2, wherein the telephonic reference is provided in a form according to a calling capability of the telephonic apparatus indicated in the query.
6. The method of claim 2, wherein the information about the query includes at least an identification of a distributor of the telephonic apparatus, an identification of a distribution channel of the advertisement, or an identifier of a party who has a contribution in a process of delivering the advertisement to the telephonic apparatus.
7. The method of claim 1, wherein the telephonic reference is transmitted to the connection server via a data communication network in a process of the telephonic apparatus establishing the connection with the connection server for the telephonic call.
8. The method of claim 7, wherein the telephonic apparatus initiates the telephonic call via a gateway between the telephonic apparatus and the connection server; the telephonic apparatus communicates with the gateway in a first protocol; and the gateway communicates with the connection server in a second protocol.
9. The method of claim 1, further comprising:
in response to the query, generating an encrypted string as part of the telephonic reference, the encrypted string to include the information about the query and a telephonic reference of the advertiser.
10. The method of claim 1, further comprising:
in response to the query, a listing server retrieving the advertisement via a web service and providing the advertisement to the telephonic apparatus.
11. The method of claim 10, further comprising:
in response to the query, the listing server further retrieving a listing from a listing database maintained by the listing server and providing the retrieved listing with the advertisement to the telephonic apparatus.
12. The method of claim 1, further comprising:
determining a geographic location of the telephonic apparatus;
wherein the query includes the geographic location of the telephonic apparatus; and
wherein the advertisement is selected based at least in part on the geographic location.
13. The method of claim 12, wherein the geographic location is determined based on a user preference, a user input specified with the search criterion, or an Internet address associated with the telephonic apparatus.
14. The method of claim 13, wherein the user reference is stored in the telephonic apparatus, a server, or a peer to peer network.
15. A machine readable media embodying instructions, the instructions causing a machine to perform a method, the method comprising:
responsive to a search criterion received in a telephonic apparatus, submitting a query from the telephonic apparatus over a data communication network;
receiving at the telephonic apparatus at least one advertisement, the advertisement including a telephonic reference containing information about the query; and
responsive to a user selection of the advertisement at the telephonic apparatus, establishing a connection with a connection server for a telephonic call using the telephonic reference, the connection server to extract from the telephonic reference the information about the query and to connect the telephonic call to an advertiser of the advertisement.
16. A method of providing instructions, the instructions causing a machine to perform operations, the operations comprising:
responsive to a search criterion received in a telephonic apparatus, submitting a query from the telephonic apparatus over a data communication network;
receiving at the telephonic apparatus at least one advertisement, the advertisement including a telephonic reference containing information about the query; and
responsive to a user selection of the advertisement at the telephonic apparatus, establishing a connection with a connection server for a telephonic call using the telephonic reference, the connection server to extract from the telephonic reference the information about the query and to connect the telephonic call to an advertiser of the advertisement.
17. A telephonic apparatus, comprising:
a user interface to receive a search criterion;
a network interface coupled to the user interface to submit a query from the telephonic apparatus over a data communication network and to receive at least one advertisement, the advertisement including a telephonic reference containing information about the query; and
a call module coupled to the user interface and the network interface, in response to a user selection of the advertisement, the call module to establish a connection with a connection server for a telephonic call using the telephonic reference, the connection server to extract from the telephonic reference the information about the query and to connect the telephonic call to an advertiser of the advertisement.
18. A method, comprising:
receiving a query over a data communication network;
identifying at least one advertisement according to the query;
generating a telephonic reference of a connection server, the telephonic reference containing information including a search criterion of the query and a telephonic reference of an advertiser of the advertisement; and
providing the advertisement with the telephonic reference for presentation on a telephonic apparatus;
wherein when the telephonic apparatus calls the connection server using the generated telephonic reference of the connection server, the connection server extracts from the telephonic reference called by the telephonic apparatus the telephonic reference of the advertiser, to provide a connection between the telephonic apparatus and the advertiser using the telephonic reference of the advertiser, and to associate the connection with the search criterion.
19. The method of claim 18, wherein the information contained in the telephonic reference of the connection server includes an identification of the telephonic apparatus from which the query is received; and the method further includes:
determining whether an identification of the telephonic apparatus which initiates the telephonic call to the connection server matches with the identification of the telephonic apparatus from which the query is received.
20. The method of claim 9, wherein the information contained in the telephonic reference of the connection server includes an identification of a user of the telephonic apparatus from which the query is received; and the method further includes:
determining whether an identification of a user of the telephonic apparatus which initiates the telephonic call to the connection server matches with the identification of the user of the telephonic apparatus from which the query is received.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of processing semiconductor substrates, the method comprising:
placing a substrate on a substrate support in a chamber defining a processing region therein;
introducing one or more process gases through at least one nozzle which extends into the chamber and which has a nozzle opening for the one or more process gases to flow therethrough;
applying energy from a coil disposed outside the chamber to the processing region to perform a process on the substrate; and
providing a heat shield for the nozzle, the heat shield being disposed within the chamber around at least a portion of the nozzle between the coil and the nozzle to reduce a temperature rise of the nozzle from the process performed on the substrate, the heat shield having an extension which projects distally of the nozzle opening of the nozzle and which includes a heat shield opening for the process gas to flow therethrough from the nozzle opening.
2. The method of claim 1 wherein applying energy in the processing region comprises generating a plasma in the processing region.
3. The method of claim 2 wherein generating the plasma in the processing region comprises applying a source RF power of at least about 10 kW.
4. The method of claim 1 wherein the process performed on the substrate comprises forming a layer from the one or more process gases.
5. The method of claim 4 wherein the layer fills a gap in the substrate and the gap has a width of at most about 90 nm.
6. The method of claim 4 wherein the layer fills a gap in the substrate and the gap has an aspect ratio of at least about 4.
7. The method of claim 1 wherein the extension of the heat shield projects distally of the nozzle opening by a distance of between about a radius of the nozzle and about a diameter of the nozzle.
8. The method of claim 1 wherein a plurality of nozzles having heat shields are disposed around the substrate, and wherein the heat shields are disposed around the substrate and configured such that the heat shield openings of the heat shields are disposed radially outwardly of a periphery of the substrate.
9. The method of claim 1 wherein the heat shield reduces the temperature rise of the nozzle from the process performed on the substrate.