1. An information providing method for providing information to an occupant of a vehicle, the method comprising the steps of:
detecting position information on the vehicle with information equipment installed in the vehicle;
accumulating, as a travel information history, routes of the vehicle obtained from the detected position information;
predicting a destination of the vehicle by referring to a route along which the vehicle has traveled to the current time and to the accumulated travel information history, when detecting the occurrence of a given event; and
providing information regarding the predicted destination to the occupant via the information equipment,
wherein the travel information history is accumulated in the manner of transition among nodes,
the method including the step of defining, as a node, an intersection which is located on the routes and through which the vehicle has passed in at least two directions.
2. An information providing method for providing information to an occupant of a vehicle, the method comprising the steps of:
detecting position information on the vehicle with information equipment installed in the vehicle;
accumulating, as a travel information history, routes of the vehicle obtained from the detected position information;
predicting a destination of the vehicle by referring to a route along which the vehicle has traveled to the current time and to the accumulated travel information history, when detecting the occurrence of a given event; and
providing information regarding the predicted destination to the occupant via the information equipment,
wherein in the predicting step, a destination to which estimated required travel time exceeds a predetermined value is eliminated from being a predicted destination.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An apparatus for delivering gas to a substrate, the apparatus comprising:
upper and lower chamber bodies forming a cavity;
a gas source in fluid communication with the cavity;
an exhaust unit adapted to remove gas in the cavity;
a chuck disposed in the cavity; and
an injector containing a plurality of channels extending therethrough, each channel bent enough to substantially block light rays entering the channel from directly exiting the channel.
2. The apparatus of claim 1, wherein at least one of the channels has a first inclination angle in an upper section of the injector substantially perpendicular to a second inclination angle of a lower section of the injector.
3. The apparatus of claim 2, wherein at least one of the first and second inclination angles is oblique from a central axis of the injector.
4. The apparatus of claim 3, wherein the first inclination angle ranges from about 0\xb0 to 60\xb0 from the central axis of the injector while the second inclination angle ranges from about 10\xb0 to 60\xb0 from the central axis of the injector.
5. The apparatus of claim 1, wherein a nozzle at an end of at least one of the channels is substantially funnel shaped.
6. The apparatus of claim 5, wherein an angle at the end of the nozzle adjacent to an internal surface of the upper chamber body matches an angle of the internal surface.
7. The apparatus of claim 6, wherein the internal surface is funnel shaped.
8. The apparatus of claim 1, wherein the injector has a tapered lower portion.
9. The apparatus of claim 8, wherein the tapered lower portion has first and second regions that taper at different rates.
10. The apparatus of claim 9, wherein an internal surface of the upper chamber body matches an angle of taper of at least one of the first and second regions.
11. The apparatus of claim 1, wherein the injector contacts the gas source.
12. The apparatus of claim 11, further comprising O-rings between the injector and the gas source and between the injector and the upper chamber body, wherein the injector contains a slot inside at least one of the O-rings, the slot substantially parallel to a central axis of the injector.
13. The apparatus of claim 11, further comprising O-rings between the injector and the gas source and between the injector and the upper chamber body, wherein the injector contains a gap inside the O-ring between at least one of:
a surface of the injector and a surface of the gas source; and
a surface of the injector and a surface of the upper chamber body.
14. The apparatus of claim 1, wherein the injector further comprises a temperature adjustment system that permits manual or automatic adjustment of a temperature of the injector.
15. The apparatus of claim 14, wherein the temperature adjustment system comprises a cooling channel in the injector, the cooling channel containing a cooling liquid.
16. The apparatus of claim 15, wherein the temperature adjustment system further comprises a temperature sensor that senses the temperature of the injector and an electrical heater that alters the temperature of the injector.
17. An apparatus comprising:
upper and lower chamber bodies forming a cavity;
a gas source in fluid communication with the cavity;
an exhaust unit adapted to remove gas in the cavity;
a chuck disposed in the cavity; and
a single fixture between the gas source and the cavity through which the gas passes to enter the cavity, the fixture having channels with at least two connecting segments that are bent at substantially right angles with respect to each other.
18. The apparatus of claim 17, wherein a funnel-shaped nozzle is disposed at an end of at least one of the channels.
19. The apparatus of claim 17, wherein an angle at an end of the nozzle adjacent to an internal surface of the upper chamber body matches an angle of the internal surface.
20. The apparatus of claim 19, wherein the internal surface is funnel shaped.
21. The apparatus of claim 17, further comprising O-rings between the fixture and the gas source and between the fixture and the upper chamber body, wherein the fixture contains a slot inside at least one of the O-rings, the slot substantially parallel to a central axis of the fixture.
22. The apparatus of claim 17, further comprising O-rings between the fixture and the gas source and between the fixture and the upper chamber body, wherein the fixture contains a gap inside the O-ring between at least one of:
a surface of the fixture and a surface of the gas source; and
a surface of the fixture and a surface of the upper chamber body.
23. The apparatus of claim 17, wherein the fixture further comprises a temperature adjustment system that permits manual or automatic adjustment of a temperature of the fixture.
24. The apparatus of claim 23, wherein the temperature adjustment system comprises a cooling channel in the fixture, the cooling channel containing a cooling liquid.
25. The apparatus of claim 24, wherein the temperature adjustment system further comprises a temperature sensor that senses the temperature of the fixture and an electrical heater that alters the temperature of the fixture.
26. A method of processing a wafer, the method comprising:
injecting a gas into a cavity, towards the wafer, through channels in an injector that bend enough to substantially prevent light from passing through the channels without reflection, the cavity formed by upper and lower chamber bodies;
shaping the flow of the gas using at least angles of the channels through which the gas flows, angles of ends of the channels from which the gas is ejected, and angles of internal surfaces of the upper and lower chamber bodies; and
removing the gas that has impinged on the wafer through an exhaust vent.
27. The method of claim 26, further comprising providing each of the channels with substantially perpendicular bends, each bend being at most about 60\xb0 from a central axis of the injector.
28. The method of claim 26, further comprising providing a funnel-shaped nozzle at the end of each of the channels.
29. The method of claim 28, further comprising providing the upper chamber body with a funnel-shaped internal surface.
30. The method of claim 26, further comprising providing the injector with slots to absorb thermal expansion of the injector.
31. The method of claim 26, further comprising providing gaps between mating surfaces of the injector and at least one of the upper chamber body and a gas source that supplies the gas.
32. The method of claim 26, further comprising controlling a temperature of the injector.