1. A method for forming a field effect transistor (FET) device, the method comprising:
forming a gate conductor and gate dielectric on an active device area of a semiconductor wafer, said semiconductor wafer including a buried insulating layer formed over a bulk substrate and a semiconductor-on-insulator layer initially formed over said buried insulator layer;
forming source and drain extensions in said semiconductor-on-insulator layer, adjacent opposing sides of said gate conductor;
forming source and drain sidewall spacers adjacent said gate conductor;
removing remaining portions of said semiconductor-on-insulator layer adjacent said sidewall spacers;
forming additional sidewall spacers adjacent said source and drain sidewall spacers;
removing exposed portions of said buried insulator layer by a vertical etch thereof, followed by a horizontal, recess etch thereof, so as to expose portions of said bulk substrate, wherein a remaining portion of said buried insulator layer below said gate conductor has a length so as to expose only a bottom surface of said source and drain extensions;
epitaxially growing a semiconductor layer on said exposed portions of said bulk substrate and said bottom surface of source and drain extensions;
forming source and drain implants in said epitaxially grown semiconductor layer.
2. The method of claim 1, wherein:
said bulk substrate comprises silicon;
said buried insulator further comprises a buried oxide (BOX) layer; and
said semiconductor-on-insulator layer further comprises a thin silicon-on-insulator (501) layer.
3. The method of claim 2, wherein said epitaxially grown semiconductor layer further comprises one or more of: silicon (Si), silicon germanium (SiGe), silicon carbon (SiC), silicon germanium carbon (SiGeC), germanium (Ge), and combinations thereof.
4. The method of claim 2, further comprising:
removing a protective nitride cap, previously formed on said gate conductor, following said forming said source and drain implants; and
forming silicide contacts in said source region, said drain region, and said gate conductor.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An adjustable camshaft (1), for internal combustion engines in motor vehicles, in which
two shafts (2, 4), namely one inside shaft (4) and one outside shaft (2), each fixedly connected to cams, are rotatable in relation to one another,
to create a relative movement a hydraulic regulating device (3) having a rotor (6) and a stator (5) is provided on one of the ends thereof and a chainbelt wheel (7) that is connected to a drive, in particular to a crankshaft, via a chain or a belt is also provided,
the stator (5) is lockable with respect to the rotor (6) and in the mounted state of the camshaft (1) there is a connection of the stator (5) and of the rotor (6) each to the inside shaft (4) or the outside shaft (2),
wherein
the chainbelt wheel (7) is designed so that it is rotatable in relation to the regulating device (3) and thus in relation to the inside shaft (4) and the outside shaft (2) for aligning the camshaft (1) with respect to the drive, and after successful alignment it can be connected either to the inside shaft (4) or to the outside shaft (2) in a rotationally fixed manner.
2. The camshaft according to claim 1,
wherein a fixation device (12) that runs coaxially with the camshaft (1) is provided, bracing the stator (5) of the regulating device (3) against the inside shaft (4) in a rotationally fixed manner.
3. The camshaft according to claim 2,
wherein the fixation device (12) running coaxially with the camshaft (1) is a screw having an outside thread which can be screwed into an inside thread that is designed to be complementary to the former and is provided on an axial end of the inside shaft (4).
4. The camshaft according to claim 1,
wherein a fixation device (12) that runs coaxially with the camshaft (1) is provided, bracing the chainbelt wheel (7) against the inside shaft (4) in a rotationally fixed manner via the rotor (6) of the regulating device (3).
5. The camshaft according to claim 1,
wherein the rotor (6) of the regulating device (3) andor the chainbelt wheel (7) hashave elongated holes which are curved in the circumferential direction, with fixation means (13) that connect the rotor (6) and the chainbelt wheel (7) together passing through said elongated holes, and which allow a rotational movement of the chainbelt wheel (7) with respect to the inside shaft (4) and the outside shaft (2) during the alignment of the camshaft (1) with respect to the drive.
6. The camshaft according to claim 1,
wherein the fixation device (12) passes through the chainbelt wheel (7) reaches through without coming in contact with it.
7. The camshaft according to claim 1,
wherein a moving radial seal (14) is provided between the stator (5) of the regulating device (3) and the outside shaft (2), separating two hydraulic channels (10, 10\u2032) that supply the regulating device (3) from one another.
8. The camshaft according to claim 1,
wherein a stationary axial seal (16) is provided between the stator (5) of the regulating device (3) and an end face (15) of the outside shaft (2), said axial seal separating two hydraulic channels (10, 10\u2032) that supply the regulating device (3) from one another.
9. The method for assembling a camshaft according to claim 1, comprising at least the following method steps:
(a) rotationally fixed mounting of the regulating device (3) on the camshaft (1) with a rotor (6) and a stator (5) secured on one another,
(b) aligning the camshaft (1) with respect to the drive in a predetermined angular position, provisionally fixing this position and applying the chain or the belt to the rotatable chainbelt wheel (7) or vice versa,
(c) rotationally fixed attachment of the chainbelt wheel (7) to the inside shaft (4) or to the outside shaft (2),
(d) releasing the provision fixation.