1. A fin-FET structure comprising a plurality of fins formed for a plurality of fin-FETs, wherein first portions of the plurality of fins that are over voids between the plurality of fins and a substrate are supported by a support structure adjacent the first portions.
2. The structure of claim 1, wherein the substrate comprises a bulk semiconductor.
3. The structure of claim 1, wherein the plurality of fins comprise epitaxially grown semiconductor.
4. The structure of claim 1, wherein the support structure comprises pseudo-gate structures.
5. The structure of claim 4, wherein the pseudo-gate structures are supported by a filling material that is deposited over second portions of the plurality of fins.
6. The structure of claim 1, wherein the support structure comprises amorphous silicon.
7. The structure of claim 1, further comprising a hard mask material disposed between the plurality of fins and the support structure.
8. The structure of claim 1, wherein the first layer comprises a second semiconductor material and the depositing of the first layer comprises epitaxially growing the second semiconductor material.
9. The structure of claim 1, wherein the plurality of fins comprise Si.
10. The structure of claim 1, wherein the plurality of fins have a height between approximately 10 nm and approximately 70 nm.
11. The structure of claim 10, wherein the height of the plurality of fins is uniform to within \xb115%.
12. The structure of claim 1, wherein a width of a fin of the plurality of fins is between approximately 10 nm and approximately 150 nm.
13. The structure of claim 1, wherein a spacing between fins of the plurality of fins is greater than approximately 20 nm.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An angle detecting apparatus comprising:
a rotor fixed to a rotating shaft and for which when an XY orthogonal coordinate system is defined on a plane of rotation for the rotor with a center of rotation of the rotor defined as a coordinate origin, a sum of distances between the center of rotation and respective two points where two straight lines crossing at the center of rotation at a crossing angle of (\u03c0n; (n) is any integer of at least two) cross an outer periphery of the rotor is constant and for which a planar shape of the rotor projected on the plane of rotation is symmetric with respect to Y=tan(\u03c02n)X; and
a first magnetic sensor and a second magnetic sensor arranged close to the outer periphery of the rotor so as to have a difference in angle (\u03c0n) with respect to the center of rotation, the first magnetic sensor detecting a change in magnetic field corresponding to a change in a first distance between the outer periphery of the rotor and the first magnetic sensor which distance varies periodically as the rotor rotates, to output a first detection signal, the second magnetic sensor detecting a change in magnetic field corresponding to a change in a second distance between the outer periphery of the rotor and the second magnetic sensor which distance varies complementarily in conjunction with variation in first distance, to output a second detection signal;
differential operational means for performing differential operation on the first detection signal and the second detection signal to output a differential signal; and
angle calculating means for calculating the angle of rotation of the rotating shaft based on the differential signal.
2. The angle detecting apparatus according to claim 1, wherein the rotor projected on the plane of rotation is shaped like a combination of 2n partial ellipses with a center angle (\u03c0n).
3. The angle detecting apparatus according to claim 1, wherein the shape of the rotor projected on the plane of rotation contains no depressed portion.
4. The angle detecting apparatus according to any one of claim 1, wherein the rotor comprises a ferromagnetic material,
the first magnetic sensor comprises a first magnet generating a magnetic field between the outer periphery of the rotor and the first magnetic sensor, and a first magnetoresistance effect element outputting the first detection signal in response to the magnetic field varying in response to variation in first distance, and
the second magnetic sensor comprises a second magnet generating a magnetic field between the outer periphery of the rotor and the second magnetic sensor, and a second magnetoresistance effect element outputting the second detection signal in response to the magnetic field varying in response to variation in second distance.
5. The angle detecting apparatus according to claim 4, wherein the first magnetoresistance effect element comprises a first free magnetic layer for which a longitudinal direction is set to align with a direction of the center of rotation of the rotor, and
the second magnetoresistance effect comprises a second free magnetic layer for which the longitudinal direction is set to align with the direction of the center of rotation of the rotor.
6. An angle detecting method of detecting an angle of rotation of a rotor fixed to a rotating shaft, using a first magnetic sensor and a second magnetic sensor arranged close to an outer periphery of the rotor so as to have a difference in angle (\u03c0n; (n) is any integer of at least two) with respect to a center of rotation of the rotor, the method comprising the steps of:
rotating the rotor for which when an XY orthogonal coordinate system is defined on a plane of rotation for the rotor with the center of rotation defined as a coordinate origin, a sum of distances between the center of rotation and respective two points where two straight lines crossing at the center of rotation at a crossing angle of (\u03c0n) cross the outer periphery of the rotor is constant and for which a planar shape of the rotor projected on the plane of rotation is symmetric with respect to Y=tan(\u03c02n)X;
allowing a first detection signal to be output by the first magnetic sensor detecting a change in magnetic field corresponding to a change in a first distance between the outer periphery of the rotor and the first magnetic sensor which distance varies periodically as the rotor rotates;
allowing a second detection signal to be output by the second magnetic sensor detecting a change in magnetic field corresponding to a change in a second distance between the outer periphery of the rotor and the second magnetic sensor which distance varies complementarily in conjunction with variation in first distance;
performing differential operation on the first detection signal and the second detection signal to output a differential signal; and
calculating the angle of rotation of the rotating shaft based on the differential signal.
7. The angle detecting method according to claim 6, wherein the rotor projected on the plane of rotation is shaped like a combination of 2n partial ellipses with a center angle (\u03c0n).
8. The angle detecting method according to claim 6, wherein the shape of the rotor projected on the plane of rotation contains no depressed portion.
9. The angle detecting method according to any one of claim 6, wherein the rotor comprises a ferromagnetic material,
the first magnetic sensor comprises a first magnet generating a magnetic field between the outer periphery of the rotor and the first magnetic sensor, and a first magnetoresistance effect element outputting the first detection signal in response to the magnetic field varying in response to variation in first distance, and
the second magnetic sensor comprises a second magnet generating a magnetic field between the outer periphery of the rotor and the second magnetic sensor, and a second magnetoresistance effect element outputting the second detection signal in response to the magnetic field varying in response to variation in second distance.
10. The angle detecting method according to claim 9, wherein the first magnetoresistance effect element comprises a first free magnetic layer for which a longitudinal direction is set to align with a direction of the center of rotation of the rotor, and
the second magnetoresistance effect element comprises a second free magnetic layer for which the longitudinal direction is set to align with the direction of the center of rotation of the rotor.
11. An angle detecting apparatus comprising:
a rotor fixed to a rotating shaft and for which when an XY orthogonal coordinate system is defined on a plane of rotation for the rotor with a center of rotation of the rotor defined as a coordinate origin, a sum of distances between the center of rotation and respective two points where two straight lines crossing at the center of rotation at a crossing angle of (\u03c0n; (n) is any integer of at least two) cross an outer periphery of the rotor is constant and for which a planar shape of the rotor projected on the plane of rotation is symmetric with respect to Y=tan(\u03c02n)X;
a first magnetic sensor and a second magnetic sensor arranged close to the outer periphery of the rotor so as to have a difference in angle (\u03c02n) with respect to the center of rotation, the first magnetic sensor detecting a change in magnetic field corresponding to a change in a first distance between the outer periphery of the rotor and the first magnetic sensor which distance varies periodically as the rotor rotates, to output a first detection signal, the second magnetic sensor detecting a change in magnetic field corresponding to a change in a second distance between the outer periphery of the rotor and the second magnetic sensor which distance varies periodically as the rotor rotates, to output a second detection signal;
a conversion table in which the angle of rotation of the rotating shaft corresponding to each of the first and second detection signals is stored, and
angle calculating means for comparing the first and second detection signals output by the first and second magnetic sensors with the conversion table to output the angle of rotation of the rotor.
12. The angle detecting apparatus according to claim 11, wherein each of the first and second detection signals is a substantial sine wave signal, and
the angle calculating means compares the conversion table with one of the first and second detection signals which falls within an angular range of \xb1\u03c04n from an angle at which the detection signal takes an intermediate value, to output the angle of rotation of the rotor.
13. An angle detecting method of detecting an angle of rotation of a rotor fixed to a rotating shaft, using a first magnetic sensor and a second magnetic sensor arranged close to an outer periphery of the rotor so as to have a difference in angle (\u03c02n; (n) is any integer of at least two) with respect to a center of rotation of the rotor, the method comprising the steps of:
rotating the rotor for which when an XY orthogonal coordinate system is defined on a plane of rotation for the rotor with the center of rotation defined as a coordinate origin, a sum of distances between the center of rotation and respective two points where two straight lines crossing at the center of rotation at a crossing angle of (\u03c0n) cross the outer periphery of the rotor is constant and for which a planar shape of the rotor projected on the plane of rotation is symmetric with respect to Y=tan(\u03c02n)X;
allowing a first detection signal to be output by the first magnetic sensor detecting a change in magnetic field corresponding to a change in a first distance between the outer periphery of the rotor and the first magnetic sensor which distance varies periodically as the rotor rotates;
allowing a second detection signal to be output by the second magnetic sensor detecting a change in magnetic field corresponding to a change in a second distance between the outer periphery of the rotor and the second magnetic sensor which distance varies periodically as the rotor rotates; and
comparing a conversion table in which the angle of rotation of the rotating shaft corresponding to each of the first and second detection signals is stored, with the first and second detection signals output by the first and second magnetic sensors to output the angle of rotation of the rotor.
14. The angle detecting method according to claim 13, wherein each of the first and second detection signals is a substantial sine wave signal, and
outputting the angle of rotation comprises comparing the conversion table with one of the first and second detection signals which falls within an angular range of \xb1\u03c04n from an angle at which the detection signal takes an intermediate value, to output the angle of rotation of the rotor.