1. A method of etching, by a plasma of an etching gas in a processing vessel, a lower layer film of an organic material formed on a substrate, using an upper layer film of an Si-containing organic material as a mask, wherein
a mixed gas containing an NH3 gas and an O2 gas is supplied into the processing vessel as the etching gas,
a CD shift value of etching is controlled by adjusting a flow ratio of the O2 gas to the NH3 gas,
the plasma is formed between a pair of opposed electrodes disposed in the processing vessel, and
a residence time represented by VS takes a value from 20 to 60 msec, where V (m3) represents an effective processing space volume as a product of an area of the substrate and a distance between the electrodes, and S (m3sec) represents a gas exhaust velocity from the processing vessel.
2. The etching method according to claim 1, wherein
a pressure in the processing vessel is not less than 2.7 Pa and less than 13.3 Pa.
3. The etching method according to claim 1, wherein
a pressure in the processing vessel is not less than 6.7 Pa and less than 13.3 Pa.
4. The etching method according to claim 1, wherein
a temperature of a support member supporting the substrate in the processing vessel is from 0 to 20\xb0 C.
5. The etching method according to claim 1, wherein
the substrate has a surface layer to be etched with the lower layer film used as a mask, the surface layer being formed under the lower layer film.
6. The etching method according to claim 1, wherein
the etching method is carried out by a capacitively coupled plasma etching system, which forms a high-frequency electric field between a pair of opposed electrodes disposed in the processing vessel to generate the plasma.
7. A method of etching, by a plasma of an etching gas in a processing vessel, a lower layer film of an organic material formed on a substrate, using an upper layer film of an Si-containing organic material as a mask, wherein
a mixed gas containing an NH3 gas and an O2 gas is supplied into the processing vessel as the etching gas,
a flow ratio of the O2 gas to the NH3 gas is from 0.5 to 20%,
the plasma is formed between a pair of opposed electrodes disposed in the processing vessel, and
a residence time represented by VS takes a value from 20 to 60 msec, where V (m3) represents an effective processing space volume as a product of an area of the substrate and a distance between the electrode, and S (m3sec) represents a gas exhaust velocity from the processing vessel.
8. The etching method according to claim 7, wherein
the flow ratio of the O2 gas to the NH3 gas is from 5 to 10%.
9. The etching method according to claim 7, wherein
a pressure in the processing vessel is not less than 2.7 Pa and less than 13.3 Pa.
10. The etching method according to claim 7, wherein
a pressure in the processing vessel is not less than 6.7 Pa and less than 13.3 Pa.
11. The etching method according to claim 7, wherein
a temperature of a support member supporting the substrate in the processing vessel is from 0 to 20\xb0 C.
12. The etching method according to claim 7, wherein
the substrate has a surface layer to be etched with the lower layer film used as a mask, the surface layer being formed under the under the lower layer film.
13. The etching method according to claim 7, wherein
the etching method is carried out by a capacitively coupled plasma etching system, which forms a high-frequency electric field between a pair of opposed electrodes disposed in the processing vessel to generate the plasma.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A reservoir structure of a fuel delivery structure for a diesel vehicle, the reservoir structure including:
a fuel reservoir having a bottom surface,
a primary fill opening in the bottom surface for permitting fuel to pass from a fuel tank of the vehicle into the reservoir,
a secondary fill opening in the reservoir that is elevated from the bottom surface,
a first valve member associated with the primary fill opening constructed and arranged to close the primary fill opening under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, to permit fuel to enter the reservoir through the primary fill opening, and
a second valve member associated with the secondary fill opening constructed and arranged to close the secondary fill opening under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, to permit fuel to enter the reservoir through the secondary fill opening in the event the primary opening is substantially blocked.
2. The reservoir structure of claim 1, wherein each of the first and second valve members is of generally umbrella shape and comprised of elastomer material.
3. The reservoir structure of claim 1, wherein the secondary opening is associated with a pocket in the bottom of the reservoir.
4. The reservoir structure of claim 3, wherein the pocket is defined by a step in the bottom of the reservoir.
5. The reservoir structure of claim 1, in combination with a suction tube in the reservoir, the suction tube being constructed and arranged to be coupled with a suction unit to draw fuel under certain conditions into the reservoir via at least the secondary fill opening.
6. The combination of claim 5, in further combination with a fuel tank, the reservoir resting on a bottom surface of the fuel tank.
7. The combination of claim 6, wherein the secondary fill opening and a bottom opening of the suction tube are generally at the same height with respect to the bottom surface of the fuel tank.
8. The reservoir structure of claim 1, in combination with a pump module including a fuel pump disposed in the reservoir, the fuel pump being constructed and arranged to draw fuel under certain conditions into the reservoir via at least the secondary fill opening.
9. A reservoir structure of a fuel delivery structure for a diesel vehicle, the reservoir structure including:
a fuel reservoir having a bottom surface,
first means for permitting fuel to pass from a fuel tank of the vehicle into the reservoir,
second means in the reservoir for permitting fuel to pass from the fuel tank into the reservoir that is elevated from the bottom surface,
means for closing the first means under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, for permitting fuel to enter the reservoir through the first means, and
means for closing the second means under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, for permitting fuel to enter the reservoir through the second means in the event the first means is substantially blocked.
10. The reservoir structure of claim 9, wherein each of the means for closing is a valve member of generally umbrella shape comprised of elastomer material.
11. The reservoir structure of claim 9, wherein the second means is an opening in the reservoir that is associated with a pocket in the bottom of the reservoir.
12. The reservoir structure of claim 11, wherein the pocket is defined by a step in the bottom of the reservoir.
13. The reservoir structure of claim 9, in combination with a suction tube in the reservoir, the suction tube being constructed and arranged to be coupled with a suction unit to draw fuel under certain conditions into the reservoir via at least the second means.
14. The combination of claim 13, in further combination with a fuel tank, the reservoir resting on a bottom surface of the fuel tank.
15. The combination of claim 14, wherein the second means is an opening in the reservoir and wherein the opening and a bottom opening of the suction tube are generally at the same height with respect to the bottom surface of the fuel tank.
16. The reservoir structure of claim 9, in combination with a pump module including a fuel pump disposed in the reservoir, the fuel pump being constructed and arranged to draw fuel under certain conditions into the reservoir via at least the second means.