1. A method of manufacturing a semiconductor structure, comprising:
forming a dielectric layer with a via opening;
forming a wire comprising:
forming a barrier layer on and over the dielectric layer;
depositing an electroplated material on and over the barrier layer;
forming a cap layer on and over the electroplated material; and
forming spacers on sidewalls of the electroplated material; and
forming a dielectric film over and around the wire and directly contacting a top surface of the cap layer, the spacers, and a top surface of the dielectric layer with the via opening,
wherein:
the barrier layer comprises a first conductive material;
the cap layer comprises a second conductive material different than the first conductive material; and
the spacers comprise an insulator material.
2. The method of claim 1, further comprising:
forming a second wire; and
forming an air gap in the dielectric film between the wire and the second wire.
3. The method of claim 2, wherein the second wire is on and contacting the barrier layer.
4. The method of claim 3, wherein:
the second wire comprises a cap composed of a same material as the electroplated material; and
the second wire comprises sidewall spacers composed of a same material as the insulator material.
5. The method of claim 1, wherein:
the first conductive material comprises Ti or TiN;
the second conductive material comprises Ni or CoWP; and
the electroplated material comprises copper.
6. The method of claim 1, wherein the wire has sub-micron height and width.
7. The method of claim 1, wherein the electroplated material directly contacts a via in the via opening.
8. The method of claim 7, wherein the via electrically contacts another wire.
9. The method of claim 1, further comprising:
forming a second wire on the barrier layer, wherein:
the wire and the second wire have a same height; and
a spacing between the wire and the second wire is less than the height.
10. The method of claim 9, further comprising:
forming an air gap in a dielectric material between the wire and the second wire.
11. The method of claim 1, wherein a top surface of the spacers is at a same vertical level as a top surface of the cap layer.
12. A method of manufacturing a semiconductor structure, comprising:
forming a wire comprising:
forming a barrier layer;
depositing an electroplated material on and over the barrier layer;
forming a cap layer on and over the electroplated material; and
forming spacers on sidewalls of the electroplated material,
wherein:
the barrier layer comprises a first conductive material;
the cap layer comprises a second conductive material different than the first conductive material;
the spacers comprise an insulator material; and
an uppermost top surface of the spacers is at a same horizontal plane as an uppermost top surface of the cap layer.
13. The method of claim 12, wherein the cap layer comprises Ni (nickel) or CoWP (cobalt-tungsten-phosphide), and the method further comprises:
forming a dielectric film on and contacting the spacers and the cap layer.
14. The method of claim 13, further comprising:
forming a dielectric layer with a via opening, and wherein:
the barrier layer is on and contacting the dielectric layer;
the barrier layer is in the via opening;
the dielectric film is on and contacting a top surface of the dielectric layer.
15. The method of claim 14, further comprising:
forming a second wire on the barrier layer wherein: the wire and the second wire have a same height, and a spacing between the wire and the second wire is less than the height; and
forming an air gap in the dielectric film between the wire and the second wire.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for interference coordination in an inter-radio access technology (RAT) system, the method comprising:
acquiring information about a time-frequency resource of a first cell and information about an interference relationship between the first cell and a second cell, wherein the information about the interference relationship between the first cell and the second cell is used to determine interference imposed on the second cell by the first cell, and the first cell and the second cell are cells of different RATS; and
determining information about a time-frequency resource of the second cell according to the information about the time-frequency resource of the first cell and the information about the interference relationship, wherein the information about the time-frequency resource of the second cell is used by the second cell to schedule a time-frequency resource.
2. The method according to claim 1, wherein acquiring information about a time-frequency resource of a first cell comprises:
receiving the information about the time-frequency resource of the first cell, wherein the information about the time-frequency resource of the first cell is sent by a base station of the first cell.
3. The method according to claim 1, wherein acquiring information about an interference relationship between the first cell and the second cell comprises:
receiving the information about the interference relationship, wherein the information about the interference relationship is sent by a base station of the second cell.
4. The method according to claim 1, wherein the information about the time-frequency resource of the first cell comprises at least any piece of information about a carrier of the first cell, information about a power of the carrier, information about a timeslot, and information about a power in the timeslot.
5. The method according to claim 1, wherein the information about the interference relationship between the first cell and the second cell comprises at least information about the interference imposed on the second cell by the first cell.
6. The method according to claim 1, wherein determining information about a time-frequency resource of the second cell according to the information about the time-frequency resource of the first cell and the information about the interference relationship comprises:
determining an available time-frequency resource or an unavailable time-frequency resource of the second cell or information about strength of interference imposed on the time-frequency resource of the second cell.
7. The method according to claim 1, wherein the information about the time-frequency resource of the second cell is used to instruct the second cell to use a first carrier of the second cell to schedule a second carrier of the second cell in a cross-carrier manner, wherein the second carrier comprises a time-frequency resource shared by the first cell and the second cell.
8. The method according to claim 1, further comprising:
sending the information about the time-frequency resource of the second cell to a base station of the second cell.
9. An apparatus, comprising: a memory and one or more programs, where the one or more programs are stored in the memory, and one or more processors are configured to execute instructions included in the one or more programs, so as to perform the following operations:
acquiring information about a time-frequency resource of a first cell and information about an interference relationship between the first cell and a second cell, wherein the information about the interference relationship between the first cell and the second cell is used to determine interference imposed on the second cell by the first cell, and the first cell and the second cell are cells of different RATs; and
determining information about a time-frequency resource of the second cell according to the information about the time-frequency resource of the first cell and the information about the interference relationship, wherein the information about the time-frequency resource of the second cell is used by the second cell to schedule a time-frequency resource.
10. The apparatus according to claim 9, wherein the memory of the apparatus further comprises instructions for executing the following operation:
receiving the information about the time-frequency resource of the first cell, wherein the information about the time-frequency resource of the first cell is sent by a base station of the first cell.
11. The apparatus according to claim 9, wherein the memory of the apparatus further includes instructions for executing the following operation:
receiving the information about the interference relationship, wherein the information about the interference relationship is sent by a base station of the second cell.
12. The apparatus according to a claim 9, wherein the information about the time-frequency resource of the first cell comprises at least any piece of information about a carrier of the first cell, information about a power of the carrier, information about a timeslot, and information about a power in the timeslot.
13. The apparatus according to claim 9, wherein the information about the interference relationship between the first cell and the second cell comprises at least information about the interference imposed on the second cell by the first cell.
14. The apparatus according to claim 9, wherein the memory of the apparatus further includes instructions for executing the following operation:
determining an available time-frequency resource or an unavailable time-frequency resource of the second cell or information about strength of interference imposed on the time-frequency resource of the second cell.
15. The apparatus according to claim 9, wherein the information about the time-frequency resource of the second cell is used to instruct the second cell to use a first carrier of the second cell to schedule a second carrier of the second cell in a cross-carrier manner, wherein the second carrier comprises a time-frequency resource shared by the first cell and the second cell.
16. The apparatus according to claim 9, the memory of the apparatus further includes instructions for executing the following operation:
sending the information about the time-frequency resource of the second cell to a base station of the second cell.
17. The apparatus according to claim 9, wherein the apparatus is a multi-standard controller.
18. The apparatus according to claim 9, wherein the apparatus is a base station.
19. A non-transitory computer-readable storage medium having a program stored thereon, the program comprising instructions for executing a method for interference coordination in an inter-radio access technology (RAT) system, wherein the method comprises:
acquiring information about a time-frequency resource of a first cell and information about an interference relationship between the first cell and a second cell, wherein the information about the interference relationship between the first cell and the second cell is used to determine interference imposed on the second cell by the first cell, and the first cell and the second cell are cells of different RATs; and
determining information about a time-frequency resource of the second cell according to the information about the time-frequency resource of the first cell and the information about the interference relationship, wherein the information about the time-frequency resource of the second cell is used by the second cell to schedule a time-frequency resource.