1. A system for patient-staff acknowledgment, said system comprising:
a wireless staff member device comprising:
a first receiver configured for receiving a first signal from a wireless patient member device;
a first transmitter configured for transmitting a second signal to said wireless patient member device; and
at least one first switch;
a wireless patient member device comprising:
at least one second switch;
a second transmitter configured for transmitting said first signal to said wireless staff member device; and
a second receiver configured for receiving said second signal from said wireless staff member device;
wherein
said wireless patient member device is configured to activate an alarm, upon affecting one of said at least one second switch a first time, and to transmit said first signal from said second transmitter, upon affecting one of said at least one second switch a second time;
said wireless staff member device is configured to, upon affecting one of said at least one first switch, activate said first receiver to receive said first signal within a range less than a threshold distance during a predetermined activation time; and
said wireless staff member device is configured to transmit said second signal by said first transmitter, after receiving said first signal by said first receiver within said predetermined activation time; and said wireless patient member device is configured to cancel said alarm after receiving said second signal by said second receiver.
2. The system of claim 1, wherein said threshold distance is a distance between said wireless staff member device and said wireless patient member device
3. The system of claim 2, wherein said threshold distance is calculated based on a measured position of said wireless patient member device andor a measured position of said wireless staff member device.
4. The system of claim 3, wherein said measured position of said wireless patient member device andor said measured position of said wireless staff member device are based on a Received Signal Strength Indicator (RSSI) signal obtained from a wireless network transceiver of a group of wireless network transceivers, said wireless network transceiver being the wireless network transceiver closest to the wireless patient device andor the wireless staff member device.
5. The system of claim 1, wherein said system comprises a wireless network transceiver of a group of wireless network transceivers being part of a network.
6. The system of any of claim 5, wherein said wireless network transceiver comprises two antennas and wherein an antenna with a largest RSSI is selected for position calculations.
7. The system of claim 5, wherein said wireless patient member device is configured to indicate said alarm in said network by transmitting an alarm signal by said second transmitter to a wireless network transceiver of said group of wireless network transceivers, said wireless network transceiver being the wireless network transceiver closest to said wireless patient member device.
8. The system of claim 5, wherein said wireless network transceiver closest to said wireless patient member device is configured to transmit an alarm acknowledgment signal to said wireless patient member device after receiving an alarm signal from said wireless patient member device.
9. The system of claim 5, wherein said wireless patient member device is configured to repeatedly transmitting said alarm signal to indicate activation of said alarm to said network by transmitting said alarm signal to one or more wireless network transceivers of said group of wireless network transceivers closest to said wireless patient member device.
10. The system of claim 5, wherein said wireless staff member device is configured to acknowledge reception of an alarm from said network by transmitting a first acknowledgment signal by said first transmitter to a wireless network transceiver of said group of wireless network transceivers, said wireless network transceiver being a wireless network transceiver closest to said wireless patient device andor the wireless staff member device or a group of transceivers.
11. The system of claim 10, wherein said first acknowledgment signal is acknowledged by a second acknowledgment signal transmitted from said wireless patient device to one or more wireless network transceivers closest to said wireless patient device.
12. The system of any of claim 5, wherein said wireless staff member device is configured to cancel an indication of said alarm by transmitting a cancellation signal by said first transmitter to one or more wireless network transceivers of said wireless network closest to said wireless patient device andor the wireless staff member device.
13. The system of claim 5, wherein said wireless patient member device andor said wireless staff member device are configured to update its position in said network by transmitting a position signal by said first andor second transmitter to said network.
14. A wireless staff member device for use in the system for patient-staff acknowledgment of claim 1, said staff member device comprising:
a first receiver for receiving a first signal from the wireless patient member device of claim 19;
a first transmitter for transmitting a second signal to said wireless patient member device;
at least one first switch; and
a control unit configured to, upon affecting one of said at least one switch, activate said first receiver to receive a first signal within a range less than a threshold distance during a predetermined activation time, and to transmit said second signal by said transmitter after receiving said first signal by said receiver within said predetermined activation time.
15. The wireless staff member device of claim 14, wherein said threshold distance is less than 5 meter; andor said predetermined activation time is in the range 2 to 10 seconds.
16. The wireless staff member device of claim 14, wherein said threshold distance is determined by adjusting a receiver sensitivity of said receivers; andor a second transmitter of said patient member device is configured to transmit said first signal within a range less than a threshold distance by reducing a transmittance level of said second transmitter.
17. The wireless staff member device of claim 14, further comprising a counter configured to count said activation time.
18. The wireless staff member device of claim 14, wherein one of said at least one switch is configured to activate a staff alarm, upon activation of said staff alarm, said control unit is configured to indicate said staff alarm in a network by transmitting a staff alarm signal by said first transmitter to a wireless network transceiver of a group of wireless network transceivers being part of said network, said wireless network transceiver being the wireless network transceiver andor a plurality of transceivers of said group of wireless network transceivers closest to said wireless staff member device.
19. A wireless patient member device for use in the system for patient-staff acknowledgment of claim 1, said wireless patient member device comprising:
at least one second switch;
a second transmitter for transmitting a first signal to the wireless staff member device of claim 14;
a second receiver for receiving a second signal from said wireless staff member device;
a control unit configured to, upon affecting one of said at least one second switch said first time, activate an alarm, said control unit being further configured to, upon affecting one of said at least one second switch a second time, transmit said first signal by said second transmitter and cancelling said alarm after receiving said second signal by said second receiver as a response to said transmitted first signal.
20. A method of patient-staff acknowledgment, said method comprising:
activating a first receiver of the wireless staff member device according to claim 14 to receive a first signal within a threshold distance from the wireless patient device according to claim 19, said first receiver being activated for a predetermined activation time, by affecting the at least one first switch of said wireless staff member device;
activating a second transmitter of said wireless patient member device to transmit said first signal by affecting the at least one second switch of said wireless patient device;
transmitting a second signal from said first transmitter of said wireless staff member device when said first receiver of said wireless staff member device is receiving said first signal within said predetermined activation time; and
cancelling an alarm activated by said wireless patient member device when said second receiver of said wireless patient device is receiving said second signal from said wireless staff member device.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A semiconductor device comprising:
a substrate provided with a semiconductor element;
first and second interconnects provided above the substrate, each of the first and second interconnects having a line shape in a plan view, and the first and second interconnects being substantially parallel to each other;
a first via plug provided above the substrate, electrically connected to a lower surface of the first interconnect on a second interconnect side, and including a first recess part at an upper end of the first via plug under a first region between interconnects, the first region between interconnects being a region between the first interconnect and the second interconnect; and
a via layer insulator provided above the substrate and including the first via plug, and a first trench under the first region between interconnects, the first trench including a region adjacent to the first via plug in a width direction of the first and second interconnects,
wherein an air gap is included in the first region between interconnects and in the first trench.
2. The device of claim 1, wherein
the first trench includes a region which is not adjacent to the first via plug in the width direction.
3. The device of claim 1, further comprising:
an insulating film provided in the first region between interconnects, the first recess part, and the first trench, and including the air gap.
4. The device of claim 1, further comprising:
an oxidation resistant film provided on side surfaces of the first and second interconnects.
5. The device of claim 1, further comprising:
a first oxidation resistant film provided on upper surfaces of the first and second interconnects; and
a second oxidation resistant film provided on side surfaces of the first and second interconnects.
6. The device of claim 1, wherein
the first recess part has a round shape in a vertical cross section of the first recess part.
7. The device of claim 1, wherein
a height of a bottom of the air gap on a first interconnect side is higher than a height of a bottom of the air gap on a second interconnect side.
8. The device of claim 1, wherein
a height of a bottom of the air gap on a first interconnect side is lower than a height of a bottom of the air gap on a second interconnect side.
9. The device of claim 1, wherein
side surfaces of the first and second interconnects on a first region side are exposed to the air gap.
10. The device of claim 1, further comprising:
third and fourth interconnects provided above the substrate, each of the third and fourth interconnects having a line shape in a plan view, the third and fourth interconnects being substantially parallel to each other, and a distance between the third and fourth interconnects being longer than a distance between the first and second interconnects; and
a second via plug provided above the substrate, electrically connected to a lower surface of the third interconnect on a fourth interconnect side, and including a second recess part at an upper end of the second via plug under a second region between interconnects, the second region between interconnects being a region between the third interconnect and the fourth interconnect,
wherein
the via layer insulator includes the second via plug, and a second trench under the second region between interconnects, the second trench including a region adjacent to the second via plug in a width direction of the third and fourth interconnects, and
no air gap is included in the second region between interconnects and in the second trench.
11. The device of claim 10, wherein
the distance between the third and fourth interconnects is equal to or longer than 100 nm.
12. The device of claim 10, wherein the second region between interconnects and the second trench are buried by:
a first insulating film formed of the same insulating material as the insulating film including the air gap; and
a second insulating film provided on the first insulating film.
13. A method of manufacturing a semiconductor device, the method comprising:
forming a via layer insulator including a via plug above a substrate which is provided with a semiconductor element;
forming a metal film on the via layer insulator;
patterning the metal film to form a first interconnect electrically connected to the via plug, and to form a second interconnect;
forming a recess part at an upper end of the via plug under a region between interconnects, the region between interconnects being a region between the first interconnect and the second interconnect;
forming a trench in a region of the via layer insulator under the region between interconnects; and
forming an insulating film on the first and second interconnects so that an air gap is included in the region between interconnects and in the trench.
14. The method of claim 13, further comprising:
forming an oxidation resistant film in the region between interconnects and in the trench to cover side surfaces of the first and second interconnects, before the insulating film is formed.
15. The method of claim 13, further comprising:
forming a first oxidation resistant film on an upper surface of the metal surface, before the metal film is patterned; and
forming a second oxidation resistant film on side surfaces of the first and second interconnects, before the recess part is formed.
16. The method of claim 13, wherein
the first recess part is formed to have a round shape in a vertical cross section of the first recess part.
17. The method of claim 13, wherein
the metal film is patterned by using a hard mask formed on the metal film, and
the hard mask is removed simultaneously with or after the formation of the trench.
18. The method of claim 13, wherein
the trench is formed so that a height of a bottom of the trench on a first interconnect side becomes higher than a height of a bottom of the trench on a second interconnect side.
19. The method of claim 13, wherein
the trench is formed so that a height of a bottom of the trench on a first interconnect side becomes lower than a height of a bottom of the trench on a second interconnect side.
20. The method of claim 13, wherein
the insulating film is formed so that side surfaces of the first and second interconnect are exposed to the air gap.