What is claimed is:
1. An exposure apparatus, comprising:
a first dispersing element for dispersing a substantially parallel laser light, from a laser, with respect to wavelength to provide lights of wavelength units;
a first optical system for collecting each light of a wavelength unit from said first dispersing element;
wavelength selecting means for passing a predetermined wavelength region of light, of the lights of wavelength units each being collected by said first optical system;
a second optical system for receiving the light from said wavelength selecting means and providing parallel lights of wavelength units; and
a second dispersing element for combining the parallel lights of wavelength units from said second optical system, said second dispersing element having substantially the same angular dispersion as of said first dispersing element and a direction of dispersion opposite to that of said first dispersing element.
2. An apparatus according to claim 1, wherein said wavelength selecting means has a slit.
3. An apparatus according to claim 2, wherein said wavelength selecting means has a variable region for passing light.
4. An apparatus according to claim 3, wherein each of said first and second dispersing elements has a prism.
5. An apparatus according to claim 3, wherein each of said first and second dispersing element has a diffraction grating.
6. An exposure apparatus, comprising:
a dispersing element for dispersing a laser light with respect to wavelength;
an optical system for collecting each laser light of a wavelength unit, being dispersed by said dispersing element; and
wavelength selecting means having a portion for blocking each collected laser light, and for changing a band width of light to be provided thereby, by changing said blocking portion.
7. An apparatus according to claim 6, wherein said dispersing element, said optical system and said wavelength means are disposed within a resonator.
8. An apparatus according to claim 7, further comprising a Brewster window for transforming the laser light into a linearly polarized light and a reflector for directing the laser light back into a chamber, both being provided in said resonator.
9. An apparatus according to claim 6, wherein said dispersing element has at least one of a prism and a diffraction grating.
10. An exposure apparatus, comprising:
a first unit serviceable to provide laser light of a spectral width smaller than a natural emission spectrum; and
a second unit interchangeable with said first unit and serviceable to set a spectral width of laser light at the natural emission spectrum.
11. A device manufacturing method for manufacturing a device by using an apparatus as recited in any one of claims 1-10.
12. An illumination apparatus, comprising:
a first dispersing element for dispersing a substantially parallel laser light, from a laser, with respect to wavelength to provide lights of wavelength units;
a first optical system for collecting each light of a wavelength unit from said first dispersing element;
wavelength selecting means for passing a predetermined wavelength region of light, of the lights of wavelength units each being collected by said first optical system;
a second optical system for receiving the light from said wavelength selecting means and providing parallel lights of wavelength units; and
a second dispersing element for combining the parallel lights of wavelength units from said second optical system, said second dispersing element having substantially the same angular dispersion as of said first dispersing element and a direction of dispersion opposite to that of said first dispersing element.
13. An apparatus according to claim 12, wherein said wavelength selecting means has a slit.
14. An apparatus according to claim 13, wherein said wavelength selecting means has a variable region for passing light.
15. An apparatus according to claim 12, wherein each of said first and second dispersing elements has a prism.
16. An apparatus according to claim 12, wherein each of said first and second dispersing element has a diffraction grating.
17. A laser apparatus, comprising:
a dispersing element for dispersing a laser light with respect to wavelength;
an optical system for collecting each laser light of a wavelength unit, being dispersed by said dispersing element; and
wavelength selecting means having a portion for blocking each collected laser light, and for changing a band width of light to be provided, by changing said blocking portion.
18. An apparatus according to claim 17, wherein said dispersing element, said optical system and said wavelength means are disposed within a resonator.
19. An apparatus according to claim 18, further comprising a Brewster window for transforming the laser light into a linearly polarized light and a reflector for directing the laser light back into a chamber, both being provided in said resonator.
20. An apparatus according to claim 17, wherein said dispersing element has at least one of a prism and a diffraction grating.
21. A laser apparatus, comprising:
a first unit serviceable to provide laser light of a spectral width smaller than a natural emission spectrum; and
a second unit interchangeable with said first unit and serviceable to set a spectral width of laser light at the natural emission spectrum.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A structural section for a tower mast having a longitudinal axis, said section comprising:
a sheet comprising a first end, a second end and a body disposed between said first end and said second end;
a plurality of profiles formed within said body, each said profile comprising a deformation offset from said body; and,
a fastener configured to facilitate coupling said first end to second end to facilitate forming said body about the longitudinal axis and facilitate radially positioning said plurality of profiles around the longitudinal axis.
2. The structural section of claim 1, wherein said body comprises an inner side, an outer side and a sidewall disposed between said inner side and said outer side.
3. The structural section of claim 2, wherein said sidewall comprises a thickness, as measured between said inner side and said outer side, in a range between about 0.10 mm and about 60 mm.
4. The structural section of claim 2, wherein said deformation is offset from said inner side at a distance in a range between about 0.10 mm and about 10 mm.
5. The structural section of claim 1, wherein said profiles are uniformly positioned within said body.
6. The structural section of claim 1, wherein each said profile comprises a substantially square deformation.
7. The structural section of claim 6, wherein said substantially square deformation comprises substantially rounded corners.
8. The structural section of claim 1, wherein said deformation includes an end and opposing walls, said end and said walls form a void.
9. The structural section of claim 1, wherein said sheet comprises a plurality of sheets coupled in an end-to-end configuration.
10. A method of manufacturing a structural section of a tower mast, said method comprising:
forming a sheet of material having a first end, a second end and a body disposed therebetween;
forming a plurality of profiles within said body; and,
coupling said first end to said second end.
11. The method of claim 10, wherein forming said plurality of profiles comprises applying a pressure to said body.
12. The method of claim 11, wherein applying a pressure comprises applying a hydrostatic pressure.
13. The method of claim 11, wherein applying a pressure comprises applying a die to said body.
14. The method of claim 10, wherein coupling said first end to said second end comprises welding said first end to said second end.
15. The method of claim 10, further comprising forming said profiles in a repetitive pattern within said body.
16. The method of claim 10, further comprising forming said profiles to have a substantially square configuration.
17. The method of claim 10, wherein coupling said first end to said second end comprises orientating said profiles radially about a longitudinal axis of said body.
18. A tower mast having a longitudinal axis, comprising:
a base;
a structural section coupled to said base, said structural section comprising:
a sheet comprising a first end, a second end and a body disposed between said first end and said second end;
a plurality of profiles formed within said body, each profile comprising a deformation offset from said body; and,
a fastener configured to facilitate coupling said first end to said second end to facilitate forming said body about the longitudinal axis and facilitate radially positioning said plurality of profiles around the longitudinal axis; and,
a nacelle coupled to said structural section.
19. The tower mast of claim 18, wherein said body comprises a thickness, in a range between about 0.10 mm and about 60 mm.
20. The structural section of claim 18, wherein said deformation is offset from said body at a distance in a range between about 0.10 mm and about 10 mm.