1. A direct torque flow assembly comprising:
an inner joint part comprising inner ball tracks, and a spline hole defining a spline length (LS) and adapted to engage a journal shaft of a drive unit;
an outer joint part having outer ball tracks and directly connected to a shaft;
a cage between the inner joint part and outer joint part; and
a plurality of balls (N) held by said cage and engaging pairs of the inner and outer ball tracks, said balls defining a joint pitch circle diameter (PCD), wherein 2.5\u2266(PCDLS)\u22663.2 is satisfied, wherein said inner joint part, said outer joint part, and said cage and said plurality of balls form one of a threaded fastener constant velocity universal joint wherein the inner joint has a threaded portion, a collet spring constant velocity universal joint, or a clip constant velocity universal joint.
2. A direct torque flow assembly according to claim 1 wherein each of said balls has a diameter (d), wherein all units are in millimeters and 1\u2266((PDC2)*d2*N))(1000*LS)\u22668 is satisfied.
3. A direct torque flow assembly according to claim 2 wherein said shaft has a diameter (TD), and 0.5\u2266(TDLS)\u22662.0 is satisfied.
4. A direct torque flow assembly according to claim 3 wherein said inner ball tracks define an inner race width (WIR) and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
5. A direct torque flow assembly according to claim 2 wherein said inner ball tracks define an inner race width (WIR) and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
6. A direct torque flow assembly according to claim 1 wherein said shaft has a diameter (TD), and 0.5\u2266(TDLS)\u22662.0 is satisfied.
7. A direct torque flow assembly according to claim 6 wherein said inner ball tracks define an inner race width (WIR) and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
8. A direct torque flow assembly according to claim 1 wherein said inner ball tracks define an inner race width (WIR) and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
9. A direct torque flow assembly comprising:
an inner joint part comprising inner ball tracks, and a spline hole defining a spline length (LS) and adapted to engage a journal shaft of a drive unit;
an outer joint part having outer ball tracks and directly connected to a shaft; a cage between the inner joint part and outer joint part; and
a plurality of balls (N) each having a diameter (d), the balls held by said cage and engaging pairs of the inner and outer ball tracks, said balls defining a joint pitch circle diameter (PCD), wherein all units are in millimeters and 3\u2266((PCD2)*d2*N))(1000*LS)\u22668 is satisfied,
wherein said inner joint part, said outer joint part, and said cage and said plurality of balls form one of a threaded fastener constant velocity universal joint wherein the inner joint has a threaded portion, a collet spring constant velocity universal joint, or a clip constant velocity universal joint.
10. A direct torque flow assembly according to claim 9 wherein said shaft has a diameter (TD), and 0.5\u2266(TDLS)\u22662.0 is satisfied.
11. A direct torque flow assembly according to claim 10 wherein said inner ball tracks define an inner race width (WIR) and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
12. A direct torque flow assembly according to claim 9 wherein said inner ball tracks define an inner race width (WIR), and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
13. A direct torque flow assembly comprising:
an inner joint part comprising inner ball tracks, and a spline hole defining a spline length (LS) and adapted to engage a journal shaft of a drive unit;
an outer joint part having outer ball tracks and directly connected to a shaft having a diameter (TD);
a cage between the inner joint part and outer joint part; and
a plurality of balls held by said cage and engaging pairs of the inner and outer ball tracks, wherein 1.5\u2266(TDLS)\u22662.0 is satisfied,
wherein said inner joint part, said outer joint part, and said cage and said plurality of balls form one of a threaded fastener constant velocity universal joint wherein the inner joint has a threaded portion, a collet spring constant velocity universal joint, or a clip constant velocity universal joint.
14. A direct torque flow assembly according to claim 13 wherein said inner ball tracks define an inner race width (WIR) and 0.3\u2266(WIRLS)\u22661.0 is satisfied.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A substrate treating method for performing predetermined treatment for a substrate coated with a coating solution, comprising the steps of:
(a) heating the substrate coated with the coating solution at a first predetermined temperature;
(b) lowering the temperature of the substrate by at least one of positively cooling the substrate and naturally releasing the heat thereof after said step (a); and
(c) heating the substrate at a second predetermined temperature after said step (b).
2. The method as set forth in claim 1,
wherein a heat treatment temperature of the substrate in each of said steps (a) and (c) is set at a temperature which fulfills a condition of tha temperature in said step (a)the temperature in said step (c).
3. The method as set forth in claim 1,
wherein said step (a) is performed before exposing the substrate and said step (c) is performed after exposing the substrate.
4. The method as set forth in claim 1,
wherein treatment for drying the substrate while supplying gas thereto is performed for the substrate before said step (a) or between said step (a) and said step (c).
5. The method as set forth in claim 1,
wherein drying treatment under reduced pressure is performed for the substrate before said step (a) or between said step (a) and said step (c).
6. The method as set forth in claim 1,
wherein a coating film on the substrate is gelatinized before said step (a) or between said step (a) and said step (c).
7. The method as set forth in claim 1,
wherein a solvent is coated on the substrate to exchange a solvent of the coating film before said step (a) or between said step (a) and said step (c).
8. The method as set forth in claim 1,
wherein treatment for removing at least a part of a coating film formed on the substrate is performed before said step (a) or between said step (a) and said step (c).
9. The method as set forth in claim 1,
wherein said step (a) and said step (c) are performed in the same treatment unit and are different from each other in space between a heating body and the substrate.
10. A substrate treating method for performing predetermined treatment for substrates coated with a coating solution, comprising the steps of:
(a) heating the substrates coated with the coating solution one by one at a first predetermined temperature;
(b) lowering the temperature of the substrates by at least one of positively cooling the substrates and naturally releasing the heat thereof one by one after said step (a);
(c) heating the substrates one by one at a second predetermined temperature after said step (b);
(d) lowering the temperature of the substrates by at least one of positively cooling the substrates and naturally releasing the heat thereof one by one after said step (c); and
(e) heating the substrates one by one or plural substrates at a time at a third predetermined temperature after said step (d).
11. The method as set forth in claim 10,
wherein a heat treatment temperature of the substrate in each of said heating steps (a), (c), and (e) is set at a temperature which fulfills each condition of a temperature in said step (a)a temperature in said step (c), and a temperature in said step (a)a temperature in said step (c)a temperature in said step (e).
12. The method as set forth in claim 10,
wherein said step (a) is performed before exposing the substrate and said step (c) is performed after exposing the substrate.
13. The method as set forth in claim 10,
wherein treatment for drying the substrate while supplying gas thereto is performed for the substrate before said step (a) or between said step (a) and said step (c).
14. The method as set forth in claim 10,
wherein drying treatment under reduced pressure is performed for the substrate before said step (a) or between said step (a) and said step (c).
15. The method as set forth in claim 10,
wherein a coating film on the substrate is gelatinized before said step (a) or between said step (a) and said step (c).
16. The method as set forth in claim 10,
wherein a solvent is coated on the substrate to exchange a solvent of the coating film before said step (a) or between said step (a) and said step (c).
17. The method as set forth in claim 10,
wherein treatment for removing at least a part of a coating film formed on the substrate is performed before said step (a) or between said step (a) and said step (c).
18. The method as set forth in claim 10,
wherein said step (a) and said step (c) are performed in the same treatment unit and are different from each other in space between a heating body and the substrate.
19. A substrate treating method for performing predetermined treatment for a substrate coated with a coating solution, comprising the steps of:
(a) heating the substrate coated with the coating solution; and
(b) putting the substrate in a non-heated state after said step (a),
said steps (a) and (b) being repeated a plurality of times.
20. The method as set forth in claim 19,
wherein when said steps are repeated a plurality of times, a treatment temperature in said heating step (a) is set in a higher range.
21. The method as set forth in claim 19,
wherein treatment for drying the substrate while supplying gas thereto is performed for the substrate before said step (a) or between said step (a) and said step (b).
22. The method as set forth in claim 19,
wherein drying treatment under reduced pressure is performed for the substrate before said step (a) or between said step (a) and said step (b).
23. The method as set forth in claim 19,
wherein a coating film on the substrate is gelatinized before said step (a) or between said step (a) and said step (b).
24. The method as set forth in claim 19,
wherein a solvent is coated on the substrate to exchange a solvent of the coating film before said step (a) or between said step (a) and said step (b).
25. The method as set forth in claim 19,
wherein treatment for removing at least a part of a coating film formed on the substrate is performed before said step (a) or between said step (a) and said step (b).
26. The method as set forth in claim 19,
wherein said repeated steps (a) are performed in the same treatment unit and are different from each other in space between a heating body and the substrate.
27. The method as set forth in claim 19, further comprising the step of:
supplying a cleaning fluid to the substrate to be cleaned before andor after said steps.