1. A controller for controlling an electrophoretic display device,
the electrophoretic display device including:
a display unit having a plurality of pixels,
each of the plurality of pixels having:
an electrophoretic element containing a plurality of electrophoretic particles being sandwiched between a pixel electrode and a common electrode that face each other,
the controller controlling the electrophoretic display so that the electrophoretic display is driven by a driving method comprising:
during a first partial rewriting period, when an image that is displayed on the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying a common voltage to the common electrode,
supplying a second voltage to the pixel electrode of each of first pixels among the above-mentioned plurality of pixels, the above-mentioned each of the first pixels displaying a first gradation before the rewriting of the image and then displaying a second gradation that is different from the first gradation after the rewriting of the image, the second voltage being set so as to correspond to the second gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the first pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the first pixels among the above-mentioned plurality of pixels into a high impedance state; and
during a second partial rewriting period, when the image that is displayed on the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying the common voltage to the common electrode,
supplying a first voltage to the pixel electrode of each of second pixels among the above-mentioned plurality of pixels, the above-mentioned each of the second pixels displaying the second gradation before the rewriting of the image and then displaying the first gradation after the rewriting of the image, the first voltage being set so as to correspond to the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the second pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the second pixels among the above-mentioned plurality of pixels into a high impedance state.
2. A controller for controlling an electrophoretic display device,
the electrophoretic display device including:
a display unit having a plurality of pixels,
each of the plurality of pixels having:
an electrophoretic element containing a plurality of electrophoretic particles being sandwiched between a pixel electrode and a common electrode that face each other,
the controller controlling the electrophoretic display so that the electrophoretic display is driven by a driving method comprising:
during a first partial rewriting period, when an image that is displayed in an area section that makes up a part of the display unit is rewritten, partially rewriting the image that is displayed in the area section by:
supplying a common voltage to the common electrode,
supplying a second voltage to the pixel electrode of each of first pixels among pixels located in the area section, the above-mentioned each of the first pixels displaying a first gradation before the rewriting of the image and then displaying a second gradation that is different from the first gradation after the rewriting of the image and to the pixel electrode of each of second pixels among the pixels located in the area section, the above-mentioned each of the second pixels displaying the second gradation before the rewriting of the image and then displaying the second gradation after the rewriting of the image, the second voltage being set so as to correspond to the second gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the first pixels and the second pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the first pixels and the second pixels among the above-mentioned plurality of pixels into a high impedance state; and
during a second partial rewriting period, when the image that is displayed in the area section that makes up a part of the display unit is rewritten, partially rewriting the image that is displayed in the area section by:
supplying the common voltage to the common electrode,
supplying a first voltage to the pixel electrode of each of third pixels among the pixels located in the area section, the above-mentioned each of the third pixels displaying the second gradation before the rewriting of the image and then displaying the first gradation after the rewriting of the image and to the pixel electrode of each of fourth pixels among the pixels located in the area section, the above-mentioned each of the fourth pixels displaying the first gradation before the rewriting of the image and then displaying the first gradation after the rewriting of the image, the first voltage being set so as to correspond to the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the third pixels and the fourth pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the third pixels and the fourth pixels among the above-mentioned plurality of pixels into a high impedance state.
3. A controller for controlling an electrophoretic display device,
the electrophoretic display device including:
a display unit having a plurality of pixels,
each of the plurality of pixels having:
an electrophoretic element containing a plurality of electrophoretic particles being sandwiched between a pixel electrode and a common electrode that face each other,
the controller controlling the electrophoretic display so that the electrophoretic display is driven by a driving method comprising:
during a first partial rewriting period, when an image that is displayed in a rewrite area that makes up at least a part of the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying a common voltage to the common electrode,
supplying a second voltage to the pixel electrode of each of first pixels among pixels located in the rewrite area, the above-mentioned each of the first pixels displaying a first gradation before the rewriting of the image, the second voltage being set so as to correspond to a second gradation that is different from the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the first pixels among the pixels located in the rewrite area or putting the pixel electrode of each of pixels other than the first pixels among the pixels located in the rewrite area into a high impedance state; and
during a second partial rewriting period, when the image that is displayed in the rewrite area that makes up at least a part of the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying the common voltage to the common electrode,
supplying a first voltage to the pixel electrode of each of second pixels among the pixels located in the rewrite area, the above-mentioned each of the second pixels displaying the first gradation after the rewriting of the image, the first voltage being set so as to correspond to the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the second pixels among the pixels located in the rewrite area or putting the pixel electrode of each of pixels other than the second pixels among the pixels located in the rewrite area into a high impedance state.
4. The controller according to claim 3, wherein, throughout the first partial rewriting period and the second partial rewriting period, a voltage that is the same as the common voltage is supplied to the pixel electrode of each of pixels that are located in a non-rewrite area of the display unit, which does not include the rewrite area of the display unit, or the pixel electrode of each of pixels that are located in the non-rewrite area of the display unit is put into a high impedance state.
5. An electronic apparatus comprising:
an electrophoretic display device including a display unit having a plurality of pixels, each of the plurality of pixels having an electrophoretic element containing a plurality of electrophoretic particles being sandwiched between a pixel electrode and a common electrode that face each other; and
a controller controlling the electrophoretic display so that the electrophoretic display is driven by a driving method comprising:
during a first partial rewriting period, when an image that is displayed on the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying a common voltage to the common electrode,
supplying a second voltage to the pixel electrode of each of first pixels among the above-mentioned plurality of pixels, the above-mentioned each of the first pixels displaying a first gradation before the rewriting of the image and then displaying a second gradation that is different from the first gradation after the rewriting of the image, the second voltage being set so as to correspond to the second gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the first pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the first pixels among the above-mentioned plurality of pixels into a high impedance state; and
during a second partial rewriting period, when the image that is displayed on the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying the common voltage to the common electrode,
supplying a first voltage to the pixel electrode of each of second pixels among the above-mentioned plurality of pixels, the above-mentioned each of the second pixels displaying the second gradation before the rewriting of the image and then displaying the first gradation after the rewriting of the image, the first voltage being set so as to correspond to the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the second pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the second pixels among the above-mentioned plurality of pixels into a high impedance state.
6. An electronic apparatus comprising:
an electrophoretic display device including a display unit having a plurality of pixels, each of the plurality of pixels having an electrophoretic element containing a plurality of electrophoretic particles being sandwiched between a pixel electrode and a common electrode that face each other; and
a controller controlling the electrophoretic display so that the electrophoretic display is driven by a driving method comprising:
during a first partial rewriting period, when an image that is displayed in an area section that makes up a part of the display unit is rewritten, partially rewriting the image that is displayed in the area section by:
supplying a common voltage to the common electrode,
supplying a second voltage to the pixel electrode of each of first pixels among pixels located in the area section, the above-mentioned each of the first pixels displaying a first gradation before the rewriting of the image and then displaying a second gradation that is different from the first gradation after the rewriting of the image and to the pixel electrode of each of second pixels among the pixels located in the area section, the above-mentioned each of the second pixels displaying the second gradation before the rewriting of the image and then displaying the second gradation after the rewriting of the image, the second voltage being set so as to correspond to the second gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the first pixels and the second pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the first pixels and the second pixels among the above-mentioned plurality of pixels into a high impedance state; and
during a second partial rewriting period, when the image that is displayed in the area section that makes up a part of the display unit is rewritten, partially rewriting the image that is displayed in the area section by:
supplying the common voltage to the common electrode,
supplying a first voltage to the pixel electrode of each of third pixels among the pixels located in the area section, the above-mentioned each of the third pixels displaying the second gradation before the rewriting of the image and then displaying the first gradation after the rewriting of the image and to the pixel electrode of each of fourth pixels among the pixels located in the area section, the above-mentioned each of the fourth pixels displaying the first gradation before the rewriting of the image and then displaying the first gradation after the rewriting of the image, the first voltage being set so as to correspond to the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the third pixels and the fourth pixels among the above-mentioned plurality of pixels or putting the pixel electrode of each of pixels other than the third pixels and the fourth pixels among the above-mentioned plurality of pixels into a high impedance state.
7. An electronic apparatus comprising:
an electrophoretic display device including a display unit having a plurality of pixels, each of the plurality of pixels having an electrophoretic element containing a plurality of electrophoretic particles being sandwiched between a pixel electrode and a common electrode that face each other; and
a controller controlling the electrophoretic display so that the electrophoretic display is driven by a driving method comprising:
during a first partial rewriting period, when an image that is displayed in a rewrite area that makes up at least a part of the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying a common voltage to the common electrode,
supplying a second voltage to the pixel electrode of each of first pixels among pixels located in the rewrite area, the above-mentioned each of the first pixels displaying a first gradation before the rewriting of the image, the second voltage being set so as to correspond to a second gradation that is different from the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the first pixels among the pixels located in the rewrite area or putting the pixel electrode of each of pixels other than the first pixels among the pixels located in the rewrite area into a high impedance state; and
during a second partial rewriting period, when the image that is displayed in the rewrite area that makes up at least a part of the display unit is rewritten, partially rewriting the image that is displayed on the display unit by:
supplying the common voltage to the common electrode,
supplying a first voltage to the pixel electrode of each of second pixels among the pixels located in the rewrite area, the above-mentioned each of the second pixels displaying the first gradation after the rewriting of the image, the first voltage being set so as to correspond to the first gradation, and
supplying a voltage that is the same as the common voltage to the pixel electrode of each of pixels other than the second pixels among the pixels located in the rewrite area or putting the pixel electrode of each of pixels other than the second pixels among the pixels located in the rewrite area into a high impedance state.
8. The electronic apparatus according to claim 7, wherein, throughout the first partial rewriting period and the second partial rewriting period, a voltage that is the same as the common voltage is supplied to the pixel electrode of each of pixels that are located in a non-rewrite area of the display unit, which does not include the rewrite area of the display unit, or the pixel electrode of each of pixels that are located in the non-rewrite area of the display unit is put into a high impedance state.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A semiconductor processing chamber, comprising:
a first substrate support configured to support a substrate;
a second substrate support configured to support a substrate;
a shuttle coupled to the first substrate support and configured to move the first substrate support between a processing zone and a first loading zone, wherein the processing zone having a processing volume configured to alternately accommodating the first substrate support and the second substrate support.
2. The apparatus of claim 1, wherein the shuttle is coupled to the second substrate support and is configured to move the second substrate support between the processing zone and a second loading zone.
3. The apparatus of claim 2, wherein the shuttle has a first position and a second position, the first substrate support is in the first loading zone and the second substrate support is in the processing zone when the shuttle is in the first position, and the first substrate support is in the processing zone and the second substrate support is in the second loading zone when the shuttle is in the second position.
4. The apparatus of claim 2, wherein the shuttle move the first and second substrate supports simultaneously.
5. The apparatus of claim 1, further comprising:
an energy source disposed in the processing zone, wherein the energy source is configured to project energy to an anneal region, the first and second substrate supports are configured to align a desired portion of a substrate with the anneal region.
6. The apparatus of claim 5, wherein each of the first and second substrate supports comprises:
a substrate chuck configured to secure a substrate thereon;
a first stage configured to translate the substrate chuck along a first direction; and
a second stage configured to translate the substrate chuck along a second direction.
7. The apparatus of claim 6, wherein each of the first and second substrate supports further comprises a rotating mechanism configured to rotate the substrate chuck about a central axis of the substrate chuck.
8. The apparatus of claim 6, wherein each of the first and second substrate supports further comprises a temperature control assembly configured to heat or cool a substrate positioned on the substrate chuck.
9. The apparatus of claim 5, wherein the energy source is configured to project pulsed laser energy.
10. An annealing system, comprising:
a processing chamber having a processing zone, a first loading zone and a second loading zone;
a first substrate support assembly configured to support and transfer a substrate between the first loading zone and the processing zone;
a second substrate assembly configured to support and transfer a substrate between the second loading zone and the processing zone;
a shuttle configured to alternately position the first and second substrate assemblies in the processing zone; and
an energy source configured to project an energy to an anneal region in the processing zone.
11. The apparatus of claim 10, wherein the first loading zone and the second loading zone are positioned on opposite sides of the processing zone, the shuttle has a first position and a second position, the first substrate support assembly is in the first loading zone and the second substrate support assembly is in the processing zone when the shuttle is in the first position, and the first substrate support assembly is in the processing zone and the second substrate support assembly is in the second loading zone when the shuttle is in the second position.
12. The apparatus of claim 10, further comprising doors to selectively insulate the processing zone from the first and second loading zones.
13. The apparatus of claim 10, wherein each of the first and second substrate support assemblies comprises:
a substrate chuck configured to secure a substrate thereon;
a first stage configured to translate the substrate chuck along a first direction; and
a second stage configured to translate the substrate chuck along a second direction.
14. The apparatus of claim 13, wherein each of the first and second substrate support assemblies further comprises a rotating mechanism configured to rotate the substrate chuck about a central axis of the substrate chuck.
15. The apparatus of claim 13, wherein each of the first and second substrate support assemblies further comprises a temperature control assembly configured to heat or cool a substrate positioned on the substrate chuck.
16. A method for processing semiconductor substrates, comprising:
loading a first substrate on a first substrate support assembly positioned in a first loading zone;
preheating the first substrate in the first loading zone;
moving the first substrate support assembly to a processing zone to position the first substrate in the processing zone;
aligning a first region of the first substrate with an annealing region of an energy source disposed in the processing zone; and
projecting a pulsed energy to the first region of the first substrate using the energy source.
17. The method of claim 16, further comprising:
aligning a second region of the first substrate with the annealing region of the energy source; and
projecting a pulsed energy to the second region of the first substrate using the energy source.
18. The method of claim 16, further comprising:
loading a second substrate on a second substrate support assembly and preheating the second substrate while aligning the first substrate with the energy source and projection a pulsed energy to the first substrate.
19. The method of claim 18, further comprising:
moving the first substrate from the processing zone to the first loading zone by moving the first substrate support assembly from the processing zone to the first loading zone, simultaneously positioning the second substrate in the processing zone by moving the second substrate support assembly to the processing zone.
20. The method of claim 19, wherein moving the first and second substrate assemblies is performed by a shuttle.
21. The method of claim 16, wherein aligning the first region of the first substrate with the anneal region comprising:
translating the first substrate along a first direction using a first stage positioned on the first substrate support assembly; and
translating the first substrate along a second direction using a second stage positioned in the first substrate support assembly.
22. The method of claim 16, further comprising chucking the first substrate on the first substrate assembly after preheating the first substrate in the first loading zone.
23. The method of claim 16, further comprising unloading the first substrate from the first substrate support assembly in the first loading zone.