What is claimed is:
1. A fuel injection nozzle for injecting high pressure fuel comprising:
a nozzle body member provided inside with a guide hole having a conical inner circumferential wall in a vicinity of an end thereof and a cylindrical inner circumferential wall axially above the conical inner circumferential wall, with at least a first injection bore whose one end is opened to the conical inner circumferential wall and whose another end is opened to outside, and on an axially above side of the first injection bore with at least a second injection bore whose one end is opened to one of the conical and cylindrical circumferential walls and whose another end being opened to outside; and
a needle member inserted into the guide hole, the needle member being provided in a vicinity of an end thereof with a circular seat contact coming in contact with the conical inner circumferential wall, on an axially above side of the seat contact with a guide shaft whose outer diameter is larger than that of the circular seat contact and which is slidably fitted to the cylindrical circumferential wall, and with a fuel passage extending inside the guide shaft for introducing fuel to the first and second injection bores,
wherein, when the needle member does not lift, the circular seat contact is in contact with the conical inner circumferential wall and the fuel passage does not communicate with both the first and second injection bores, when the needle member shows a first lift, the circular seat contact moves in a direction of leaving the conical inner circumferential wall and the fuel passage communicates with the first injection bore through a clearance between the circular seat contact and the conical inner circumferential wall but the guide shaft interrupts communication between the fuel passage and the second injection bore, and, when the needle member shows a second lift, the circular seat contact further moves in a direction of leaving the conical inner circumferential wall and, in addition to the communication between the fuel passage and the first injection bore, the guide shaft allows the communication between the fuel passage and second injection bore.
2. A fuel injection nozzle according to claim 1, wherein the needle member is provided axially above the guide shaft with an upper small diameter portion and axially below the guide shaft with a lower small diameter portion and the fuel passage is at least a through-hole axially penetrating from an upper end of the guide shaft radially outside the upper small diameter portion to a lower end thereof radially outside the lower small diameter portion and axially above the circular seat contact and, further, wherein the one end of the first injection bore is arranged axially below a position where the circular seat contact comes in contact with the conical inner circumferential wall, and outer circumference of the guide shaft serves, when the needle member does not lift or shows the first lift, to close the one end of the second injection bore and, when the needle member shows the second lift, to open the one end of the second injection bore.
3. A fuel injection nozzle according to claim 2, wherein the guide shaft is provided at the lower end thereof radially outside the lower small diameter portion with a guide shaft ring groove to which the through-hole is opened so that the lower end circumference of the guide shaft radially outside the guide shaft ring groove constitutes a thin thickness wall expanding radially outward when the needle member does not lift or shows the first lift so that the guide shaft fluid-tightly closes the one end of the second injection bore and suppresses fuel leakage from the second injection bore.
4. A fuel injection nozzle according to claim 1, wherein the fuel passage comprises a lateral hole radially extending in the guide shaft at a position axially above an upper end of the cylindrical inner circumferential wall and a vertical hole whose one end is opened to the lateral hole, which axially extends through a center of the guide shaft and whose another end is opened to a lower end of the needle member axially below the circular seat contact and, further, wherein the end of the first injection bore is arranged axially above a position where the circular seat contact comes in contact with the conical inner circumferential wall, and outer circumference of the guide shaft serves, when the needle member does not lift or shows the first lift, to close the one end of the second injection bore and, when the needle member shows the second lift, to open the one end of the second injection bore.
5. A fuel injection nozzle according to claim 4, wherein the nozzle body member comprises a nozzle body and a ring shaped guide member whose outer circumference is press fitted into an inner circumference of the nozzle body, the ring shaped guide member having the cylindrical inner circumferential wall from which the second injection bore extends via both insides of the ring shaped guide member and the nozzle body to outside of the nozzle body.
6. A fuel injection nozzle according to claim 1, wherein the needle member comprises an outer needle provided inside with a cylindrical through-hole and in a vicinity of an end thereof with another circular seat contact coming in contact with the conical inner circumferential wall, and an inner needle slidably fitted to the cylindrical through-hole, the outer needle constituting the guide shaft and the inner needle having the circular seat contact and the fuel passage, and, further, wherein, when the needle member does not lift, both the circular and another circular seat contacts are in contact with the conical inner circumferential wall, when the needle member shows the first lift, only the inner needle moves and the outer needle does not move, and, when the needle member shows the second lift, the outer needle moves together with the inner needle.
7. A fuel injection nozzle according to claim 6, wherein the fuel passage comprises a lateral hole radially extending in the inner needle at a position axially above an upper end of the outer needle and a vertical hole whose one end is opened to the lateral hole, which axially extends through a center of the inner needle and whose another end is opened to a lower end of the inner needle axially below the circular seat contact, and, further, wherein the one end of the first injection bore is arranged axially above a position where the circular seat contact comes in contact with the conical inner circumferential wall and axially below a position where the another circular seat contact comes in contact with the conical inner circumferential wall, the one end of the second injection bore is arranged at the conical inner circumferential wall axially above the position where the another circular seat contact comes in contact with the conical inner circumferential wall, and, when the needle member shows the first lift, the fuel passage communicates only with the first injection bore through the clearance between the circular seat contact and the conical inner circumferential wall and, when the needle member shows the second lift, the fuel passage communicates with the second injection bore through a clearance between the another circular seat contact and the conical inner circumferential wall.
8. A fuel injection nozzle according to claim 5, wherein both of the nozzle body and the ring shaped guide member have positioning portions with reference to which relative circumferential position between the nozzle body and the ring shaped guide member is defined.
9. A fuel injection nozzle according to claim 6, wherein the inner and outer needles are provided with lift force transmitting means through which a lift force is transmitted from the inner needle to the outer needle at least when the needle member shows the second lift.
10. A fuel injection nozzle according to claim 1, wherein at least one of the outer circumference of the guide shaft and the cylindrical inner circumferential wall is provided axially above the second injection bore with a ring shaped collection groove and the nozzle body member is provided with a collection passage whose one end communicates with the collection groove and whose another end communicates with a low pressure source, whereby the high pressure fuel entering a clearance between the outer circumference of the guide shaft and the cylindrical inner circumferential wall is returned through the collection groove and the collection passage to the low pressure source.
11. A fuel injection nozzle according to claim 5, wherein at least one of the outer circumference of the guide shaft and the cylindrical inner circumferential wall of the ring shaped guide member is provided axially above the second injection bore with a ring shaped collection groove and each of the ring shaped guide member and the nozzle body is provided with a collection passage, one end of the collection passage of the ring shaped guide member communicating with the collection passage and another end thereof communicating with an end of the collection passage of the nozzle body and another end of the collection groove of the nozzle body communicating with a low pressure source, whereby the high pressure fuel entering a clearance between the outer circumference of the guide shaft and the cylindrical inner circumferential wall of the ring shaped guide member is returned through the collection groove and the collection passages of the ring shaped guide member and the nozzle body to the low pressure source.
12. A fuel injection nozzle according to claim 6, wherein at least one of the outer circumference of the outer needle and the cylindrical inner circumferential wall is provided axially above the second injection bore with a ring shaped collection groove, the nozzle body member is provided with a collection passage whose one end communicates with the collection groove and whose another end communicates with a low pressure source, the outer needle is provided with a radial through-hole whose one end communicates with the ring shaped collection groove when the needle member does not lift and the inner needle is provided on outer circumference thereof with a ring groove coming in communication with another end of the radial through hole when the needle member shows the first lift, whereby the high pressure fuel entering a clearance between the outer circumference of the outer needle and the cylindrical inner circumferential wall is returned through the collection groove and the collection passage to the low pressure source and the high pressure fuel entering a clearance between an outer circumference of the inner needle and an inner circumference of the outer needle is returned through the ring groove, the radial through-hole, the collection groove and the collection passage to the low pressure source.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A chip separation method comprising:
providing a wafer comprising a chip, the chip comprising a close-loop boundary line consisting of N straight-line chip boundary lines shared with N other chips on the wafer, N being a positive integer greater than 2; and
cutting around the chip along M straight-line cut segments on the chip, M being a positive integer, wherein M>N.
2. The method of claim 1, wherein the angles of all corners of the chip after cutting are equal, wherein each corner of the corners of the chip after cutting is defined by two consecutive straight-line cut segments of the M straight-line cut segments.
3. The method of claim 1, wherein at least two consecutive straight-line cut segments of the M straight-line cut segments which are not on the N straight-line chip boundary lines are of a same length.
4. The method of claim 1, wherein all the straight-line cut segments of the M straight-line cut segments which are not on the N straight-line chip boundary lines are of a same length.
5. The method of claim 1, wherein said cutting around the chip along the M straight-line cut segments comprises:
cutting, with a laser beam, along the straight-line cut segments of the M straight-line cut segments which are not on the N straight-line chip boundary lines, and
cutting, with a saw blade, along the straight-line cut segments of the M straight-line cut segments which are on the N straight-line chip boundary lines of the chip.
6. The method of claim 1, wherein the cutting goes as deep as the entire thickness of the chip along the plurality of straight-line cut segments.
7. The method of claim 1, wherein the cutting goes as deep as the entire thickness of the chip along the straight-line cut segments of the M straight-line cut segments which are on the N straight-line chip boundary lines of the chip, and wherein the cutting goes only as deep as a Back End Of Line (BEOL) layer along the straight-line cut segments of the M straight-line cut segments which are not on any chip boundary line.
8. The method of claim 1, wherein cutting along the straight-line cut segments of the M straight-line cut segments which are not on the N straight-line chip boundary lines of the chip are performed with a laser beam and as deep as a Back End Of Line (BEOL) layer of the chip, and wherein cutting along the straight-line cut segments of the M straight-line cut segments which are on the N straight-line chip boundary lines of the chip are performed with a saw blade and as deep as entire the thickness of the chip.
9. A semiconductor wafer comprising a chip, the chip comprising a close-loop boundary line consisting of N straight-line chip boundary lines shared with N other chips of the wafer, N being a positive integer greater than 2, the chip further comprising cuts along M straight-line cut segments, M being a positive integer, wherein M>N.
10. The wafer of claim 9, wherein the angles of all corners of the chip are equal, wherein each corner of the corners of the chip is defined by two consecutive straight-line cut segments of the M straight-line cut segments.
11. The wafer of claim 9, wherein at least two consecutive straight-line cut segments of the M straight-line cut segments which are not on the N straight-line chip boundary lines of the chip are of a same length.
12. The wafer of claim 9, further comprising a Back End of Line (BEOL) layer which comprises a low-K material, wherein the BEOL layer resides at a top surface of the wafer.
13. A chip separation method comprising:
providing a wafer comprising a plurality of chips sharing straight-line chip boundary lines; and
for each chip of the plurality of chips having a close-loop boundary line consisting of N straight-line chip boundary lines, N being an integer greater than 2, cutting around the chip along M straight-line cut segments on the chip, wherein M is an integer and M>N.
14. The method of claim 13, wherein the cutting of one chip of the plurality of chips is finished before the cutting of another chip of the plurality of chips is started.
15. The method of claim 13, wherein the cutting of one chip of the plurality of chips is started before the cutting of another chip of the plurality of chips is finished.
16. The method of claim 13, wherein the cutting is performed with a laser beam for straight-line cut segments of the plurality of straight-line cut segments which are not on any straight-line chip boundary line, and wherein the cutting is performed with a saw blade for all straight-line chip boundary lines comprising straight-line cut segments of the plurality of straight-line cut segments.
17. The method of claim 13, wherein for straight-line cut segments of the plurality of straight-line cut segments which are not on the straight-line chip boundary lines, the cutting is only as deep as a Back End of Line (BEOL) layer, and wherein for straight-line cut segments of the plurality of straight-line cut segments which are on the straight-line chip boundary lines, the cutting is as deep as the entire thickness of the wafer.
18. The method of claim 17, further comprising the step of cutting as deep as the entire thickness of the wafer along all the straight-line chip boundary lines.
19. The method of claim 13, wherein the plurality of chips are arranged in rows and columns, and wherein at least one straight-line chip boundary line goes through at least two straight-line cut segments of at least two chips of the plurality of chips.
20. The method of claim 13, wherein the straight-line cut segments of the plurality of straight-line cut segments which are not on any straight-line chip boundary line of the chip are of a same length.