1. A process for sealing an interlayer dielectric comprising a porous low k dielectric material disposed on a substrate, the process comprising:
forming and patterning the interlayer dielectric comprising the porous low k dielectric material;
exposing a surface of the interlayer dielectric to an ultraviolet radiation pattern for a period of time, intensity, and wavelength effective to generate surface bonds and form reactive sites on the surface prior to depositing additional layers andor prior to further processing; and
reacting the reactive sites with a material to seal the surface, wherein the surface after reacting the surface with the material is substantially free of open pores and a portion of the interlayer dielectric underlying the surface remains porous.
2. The process of claim 1, wherein exposing the surface of the porous low k dielectric material to the ultraviolet radiation pattern for a period of time, intensity, and wavelength further comprises introducing a reactive gas during the exposure.
3. The process of claim 2, wherein the reactive gas is composed Of N2, H2, H2O vapor, NH3, CO, CO2, O2, O3, CxHy, CxHzFy, and mixtures thereof, wherein x is an integer between 1 and 6, y is an integer between 4 and 14, and z is an integer between 1 and 14.
4. A process for sealing a porous low k dielectric material disposed on a substrate, comprising:
forming and patterning an interlayer dielectric comprising the porous low k dielectric material;
exposing a surface of the interlayer dielectric to a sealant material and an ultraviolet radiation pattern or a period of time, intensity, and wavelength effective to generate a surface bonds and form reactive sites on the surface prior to depositing additional layers andor prior to further processing; and
reacting the sealing material to seal the surface, wherein the surface is substantially free of open pores and a portion of the interlayer dielectric underlying the surface remains porous.
5. The process of claim 4, wherein exposing the surface of the porous low k dielectric material to the ultraviolet radiation pattern for a period of time, intensity, and wavelength further comprises introducing a reactive gas during the exposure.
6. The process of claim 5, wherein the reactive gas is composed of N2, H2, H2O vapor, NH3, CO, CO2, O2, O3, CxHy, CxFy, CxHzFy, and mixtures thereof, wherein x is an integer between 1 and 6, y is an integer between 4 and 14, and z is an integer between 1 and 14.
7. A process for sealing a porous low k dielectric material disposed on a substrate, comprising:
forming and patterning an interlayer dielectric comprising the porous low k dielectric material;
exposing a surface of the interlayer dielectric to a sealant precursor and ultraviolet radiation for a period of time, intensity, and wavelength effective to generate a surface bonds and form reactive sites on the surface prior to depositing additional layers andor prior to further processing; and
reacting the sealant precursor with the reactive sites and surface bonds to seal the surface, wherein the surface is substantially free of open pores and a portion of the interlayer dielectric underlying the surface remains porous.
8. The process of claim 7, wherein a reactive gas is used during UV exposure to assist in the reaction with sealant material or sealant precursor.
9. The process of claim 8, wherein the reactive gas is composed of N2, H2, H2O vapor, NH3, CO, CO2, O2, O3, CxHy, CxFy, CxHzFy, and mixtures thereof, wherein x is an integer between 1 and 6, y is an integer between 4 and 14, and z is an integer between 1 and 14.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A multi-speed transmission comprising:
an input member;
an output member;
first, second, third and fourth planetary gear sets each having first, second and third members;
a first interconnecting member continuously connecting said second member of said first planetary gear set with said third member of said second planetary gear set;
a second interconnecting member continuously connecting said second member of said second planetary gear set with said first member of said third planetary gear set;
a third interconnecting member continuously connecting said third member of said third planetary gear set with said third member of said fourth planetary gear set;
a fourth interconnecting member continuously connecting said first member of said first planetary gear set with said first member of said fourth planetary gear set;
a fifth interconnecting member continuously connecting said third member of said first planetary gear set with said second member of said third planetary gear set; and five torque transmitting devices, wherein each of the devices selectively interconnects a member of said planetary gear sets with another member of said planetary gear sets or with a stationary member, said five torque-transmitting devices being engaged in combinations of two to establish at least eight forward speed ratios and at least one reverse speed ratio between said input member and said output member.
2. The transmission defined in claim 1, wherein three of said five torque-transmitting devices comprise brakes; and the other two of said five torque-transmitting devices comprise clutches.
3. The transmission of claim 1, wherein said first, second and third members of said first, second, third and fourth planetary gear sets comprise a sun gear member, a planet carrier assembly member and a ring gear member, respectively.
4. The transmission of claim 1, wherein said input member is continuously interconnected with said first member of said first planetary gear set, and said output member is continuously interconnected with said second member of said fourth planetary gear set.
5. The transmission of claim 1, wherein a first of said five torque-transmitting devices is operable for selectively connecting said third member of said first planetary gear set with said stationary member.
6. The transmission of claim 5, wherein a second of said five torque-transmitting devices is operable for selectively connecting said first member of said second planetary gear set with said stationary member.
7. The transmission of claim 6, wherein a third of said five torque-transmitting devices is operable for selectively connecting said second member of said second planetary gear set with said stationary member.
8. The transmission of claim 7, wherein a fourth of said five torque-transmitting devices is operable for selectively connecting said first member of said first planetary gear set with said second member of said first planetary gear set.
9. The transmission of claim 8, wherein a fifth of said five torque-transmitting devices is operable for selectively connecting said second member of said first planetary gear set with said second member of said fourth planetary gear set.
10. A multi-speed transmission comprising:
an input member;
an output member;
first, second, third and fourth planetary gear sets each having first, second and third members;
said input member being continuously interconnected with said first member of said first planetary gear set;
said output member being continuously interconnected with said second member of said fourth planetary gear set;
a first interconnecting member continuously connecting said second member of said first planetary gear set with said third member of said second planetary gear set;
a second interconnecting member continuously connecting said second member of said second planetary gear set with said first member of said third planetary gear set;
a third interconnecting member continuously connecting said third member of said third planetary gear set with said third member of said fourth planetary gear set;
a fourth interconnecting member continuously connecting said first member of said first planetary gear set with said first member of said fourth planetary gear set;
a fifth interconnecting member continuously connecting said third member of said first planetary gear set with said second member of said third planetary gear set;
a first torque-transmitting device selectively connecting said third member of said first planetary gear set with a stationary member;
a second torque-transmitting device selectively connecting said first member of said second planetary gear set with said stationary member;
a third torque-transmitting device selectively connecting said second member of said second planetary gear set with said stationary member;
a fourth torque-transmitting device selectively connecting said first member of said first planetary gear set with said second member of said first planetary gear set;
a fifth torque-transmitting device selectively connecting said second member of said first planetary gear set with said second member of said fourth planetary gear set; and
said torque-transmitting devices being engaged in combinations of two to establish at least eight forward speed ratios and at least one reverse speed ratio between said input member and said output member.
11. A multi-speed transmission comprising:
an input member;
an output member;
first, second, third and fourth planetary gear sets each having a sun gear member, planet carrier assembly member and ring gear member;
said input member being continuously interconnected with said sun gear member of said first planetary gear set;
said output member being continuously interconnected with said planet carrier assembly member of said fourth planetary gear set;
a first interconnecting member continuously connecting said planet carrier assembly member of said first planetary gear set with said ring gear member of said second planetary gear set;
a second interconnecting member continuously connecting said planet carrier assembly member of said second planetary gear set with said sun gear member of said third planetary gear set;
a third interconnecting member continuously connecting said ring gear member of said third planetary gear set with said ring gear member of said fourth planetary gear set;
a fourth interconnecting member continuously connecting said sun gear member of said first planetary gear set with said sun gear member of said fourth planetary gear set;
a fifth interconnecting member continuously connecting said ring gear member of said first planetary gear set with said planet carrier assembly member of said third planetary gear set;
a first torque-transmitting device selectively connecting said ring gear member of said first planetary gear set with a stationary member;
a second torque-transmitting device selectively connecting said sun gear member of said second planetary gear set with said stationary member;
a third torque-transmitting device selectively connecting said planet carrier assembly member of said second planetary gear set with said stationary member;
a fourth torque-transmitting device selectively connecting said sun gear member of said first planetary gear set with said planet carrier assembly member of said first planetary gear set;
a fifth torque-transmitting device selectively connecting said planet carrier assembly member of said first planetary gear set with said planet carrier assembly member of said fourth planetary gear set; and
said torque-transmitting devices being engaged in combinations of two to establish at least eight forward speed ratios and at least one reverse speed ratio between said input member and said output member.