1. A fluid working machine comprising:
a controller and a working chamber of cyclically varying volume,
the working chamber having an electronically controllable primary low pressure valve associated therewith to control the connection of the working chamber to a first low pressure manifold by a first path,
the controller being operable to actively control at least the primary low pressure valve, in phased relationship to cycles of working chamber volume, to determine the net displacement of fluid by the working chamber on a cycle by cycle basis,
wherein the working chamber further comprises a secondary low pressure port which is openable and closable in phased relationship to cycles of working chamber volume to connect the working chamber by a second path to either the first low pressure manifold or a second low pressure manifold different from the first low pressure manifold, to enable fluid to flow into or out of the working chamber concurrently and in parallel through both the primary low pressure valve and the secondary low pressure port during a portion of at least some cycles of working chamber volume, wherein the primary low pressure valve and the secondary low pressure port are openable concurrently and in parallel at the point in an expansion or contraction stroke where the rate of change of volume of the working chamber is greatest.
2. A fluid working machine according to claim 1, wherein
the controller is operable, in respect of at least some cycles of working chamber volume in which both the primary low pressure valve and the secondary low pressure port are open concurrently, to close the primary low pressure valve a period of time after the secondary low pressure port closes.
3. A fluid working machine according to claim 1, comprising a plurality of said working chambers, wherein the controller is operable to control a plurality of electronically controllable valves, including at least the electronically controllable primary low pressure valve associated with each of the plurality of said working chambers, on a cycle by cycle basis, to determine the net displacement of fluid by each of the plurality of said working chambers.
4. A fluid working machine according to claim 1, wherein the fluid working machine is a pump, or a motor, or is operable to function as either a pump or a motor in different operating modes.
5. A fluid working machine according to claim 1, wherein the secondary low pressure port is openable and closable by a secondary electronically controllable valve.
6. A fluid working machine according to claim 1, wherein the secondary low pressure port is openable and closable by a normally-closed pressure-openable check valve.
7. A fluid working machine according to claim 1, wherein the secondary low pressure port is openable and closable by a mechanical arrangement operatively linked to the expansion and contraction cycle of the working chamber.
8. A fluid working machine according to claim 7, wherein the secondary low pressure port comprises one or more apertures in the working chamber and the fluid working machine comprises one or more fluid conducting conduits, the fluid working machine being operable to periodically bring the one or more fluid conducting conduits into alignment with the one or more apertures to thereby bring the working chamber into fluid communication with the low pressure manifold to which the secondary low pressure port is openable and closable to connect the working chamber for a period of time, in phased relation to cycles of working chamber volume.
9. A fluid working machine according to claim 7, wherein the fluid working machine is a radial piston pump, in which the working chamber has a volume defined by a cylinder and a reciprocating piston, the piston having a base in sliding contact with an eccentric attached to a rotatable crankshaft, the secondary low pressure port comprising an aperture in the base of the piston,
wherein the eccentric comprises one or more fluid conducting conduits adapted to periodically bring the aperture into fluid communication with the low pressure manifold to which the secondary low pressure port is openable and closable to connect the working chamber in phased relation to cycles of working chamber volume.
10. A fluid working machine according to claim 1, wherein the secondary low pressure port is openable and closable in phased relationship to cycles of working chamber volume and is connected to the working chamber by the second path to the second low pressure manifold different from the first low pressure manifold, and wherein the primary low pressure valve and the secondary low pressure port are each openable to bring the working chamber into and out of fluid communication with different low pressure manifolds.
11. A fluid working machine according to claim 1, wherein the primary low pressure valve and the secondary low pressure port are provided spaced apart along a length of the working chamber.
12. A fluid working machine according to claim 1, wherein the working chamber is a piston cylinder having a generally fixed end and a moving end, and wherein the primary low pressure valve is provided at the fixed end of the cylinder and the secondary low pressure port is provided at the moving end of the cylinder.
13. A fluid working machine according to claim 1, further comprising
a rotatable shaft, the angular displacement of which is mechanically linked to the instantaneous volume of the working chamber; and
a shaft position sensor operable to determine the angular displacement of said rotatable shaft.
14. A fluid working machine according to claim 1, functioning as a pump wherein, in use, at the beginning of the expansion stroke of a pumping cycle, the primary low pressure valve and the secondary low pressure port are closed concurrently and the secondary low pressure port remains closed for a period of time which is sufficient to cause the pressure within the working chamber to drop below the pressure of the first low pressure manifold, such that there is a net pressure differential across the first low pressure manifold, urging the primary low pressure valve to open.
15. A fluid working machine according to claim 1, wherein the machine is functioning as a pump and the secondary low pressure port is openable during the expansion stroke but not openable during the contraction stroke, or wherein when the machine is functioning as a motor and the secondary low pressure port is openable during the contraction stroke but not openable during the expansion stroke.
16. A method of supplying fluid to or receiving fluid from a fluid working machine working chamber of cyclically varying volume, during an expansion or contraction stroke of the working chamber respectively, comprising:
opening an electronically controllable primary low pressure valve, in phased relation to cycles of working chamber volume, to bring the working chamber into fluid communication with a first low pressure manifold by a first path under the active control of a controller on a cycle by cycle basis,
opening a secondary low pressure port, in phased relation to cycles of working chamber volume, to bring the working chamber into fluid communication with either the first low pressure manifold or a second low pressure manifold different from the first low pressure manifold by a second path, such that, during a portion of at least some cycles of working chamber volume, the primary low pressure valve and secondary low pressure port are open concurrently such that fluid flows into or out of the working chamber, as appropriate, through both the primary low pressure valve and the secondary low pressure port in parallel, wherein the primary low pressure valve and the secondary pressure port are open concurrently and in parallel at the point in the expansion or contraction stroke where the rate of change of volume of the working chamber is greatest.
17. A method according to claim 16, wherein in respect of at least some cycles of working chamber volume in which both said primary low pressure valve and said secondary low pressure port are open concurrently, the controller is operable to close the primary low pressure valve a period of time after the secondary low pressure port closes.
18. A method according to claim 16, wherein the fluid working machine is a pump, or a motor, or is operable to function as either a pump or a motor in different operating modes.
19. A method according to claim 16, wherein, in use, at the beginning of the expansion stroke of a pumping cycle, the primary low pressure valve and the secondary low pressure port are closed concurrently and the secondary low pressure port remains closed for a period of time which is sufficient to cause the pressure within the working chamber to drop below the pressure of the first low pressure manifold, such that there is a net pressure differential across the first low pressure manifold, urging the primary low pressure valve to open.
20. A non-transitory computer readable storage medium comprising program code for a fluid working machine controller of a fluid working machine further comprising a working chamber of cyclically varying volume, the working chamber having an electronically controllable primary low pressure valve associated therewith to control the connection of the working chamber to a first low pressure manifold by a first path and a secondary low pressure port which is openable and closable in phased relationship to cycles of working chamber volume to connect the working chamber by a second path to either the first low pressure manifold or a second low pressure manifold different from the first low pressure manifold, to enable fluid to flow into or out of the working chamber concurrently and in parallel through both the primary low pressure valve and the secondary low pressure port during a portion of at least some cycles of working chamber volume at the point in an expansion or contraction stroke where the rate of change of volume of the working chamber is greatest, wherein the program code executed on the fluid working machine controller is configured to cause at least the primary low pressure valve to be actively controlled, in phased relationship to cycles of working chamber volume, to determine the net displacement of fluid by the working chamber on a cycle by cycle basis.
21. A fluid working machine comprising:
a controller, and a working chamber of cyclically varying volume,
the working chamber having an electronically controllable primary low pressure valve associated therewith to control the connection of the working chamber to a first low pressure manifold,
the controller being operable to actively control at least the primary low pressure valve, in phased relationship to cycles of working chamber volume, to determine the net displacement of fluid by the working chamber on a cycle by cycle basis,
wherein the working chamber further comprises a secondary low pressure port which is openable and closable in phased relationship to cycles of working chamber volume to connect the working chamber to either the first low pressure manifold or a second low pressure manifold different from the first low pressure manifold, to enable fluid to flow into or out of the working chamber concurrently and in parallel through both the primary low pressure valve and the secondary low pressure port during a portion of at least some cycles of working chamber volume,
wherein the machine is functioning as a pump and the secondary low pressure port is openable during an expansion stroke but not during a contraction stroke, or wherein the machine is functioning as a motor and the secondary low pressure port is openable during the contraction stroke but not during the expansion stroke.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A production process of a highly heat-resistant synthetic quartz glass having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more, comprising the steps in the sequence set forth:
preparing a silica porous body,
conducting a reduction treatment to the silica porous body in an atmosphere containing a reducing gas at a reaction temperature of 100\xb0 C. or higher and 1,300\xb0 C. or lower for 30 minutes or more,
conducting a baking treatment to the silica porous body at a reaction temperature of 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby forming a dense glass body having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more,
wherein said reducing gas is a volatile silicon compound containing nitrogen andor carbon, and said volatile silicon compound is at least one kind of compound selected from the group consisting of an organosiloxane, an alkoxysilane, an aroxysilane, an organosilane, and an organopolysilane and
wherein the dense glass body has a natural logarithmic value of viscosity at 1280\xb0 C. in an approximate range of 11.7 and 12.4.
2. The production process of a highly heat-resistant synthetic quartz glass according to claim 1, which is characterized in that the reduction treatment is carried out at a reaction temperature of 100\xb0 C. or higher and 800\xb0 C. or lower, followed by baking at 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby obtaining a transparent glass body.
3. The production process of a highly heat-resistant synthetic quartz glass according to claim 1, which is characterized in that the silica porous body is subjected to the reduction treatment by reacting with a carbon-containing gas at 400\xb0 C. or higher and 1,300\xb0 C. or lower, followed by baking at 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby obtaining a densified black glass body.
4. The production process of a highly heat-resistant synthetic quartz glass according to claim 1, which is characterized in that after the reduction treatment, a heating treatment is carried out in an atmosphere containing hydrogen, followed by subjecting to a baking treatment, thereby obtaining a dense glass body.
5. The production process of a highly heat-resistant synthetic quartz glass according to claim 1, which is characterized in that the dense glass body is further subjected to a heating treatment in a non-oxidative atmosphere under a pressure exceeding the atmospheric pressure in the temperature range of from 1,200\xb0 C. to 1,900\xb0 C.
6. The production process of a highly heat-resistant synthetic quartz glass according to claim 5, which is characterized in that the dense glass body is subjected to the heating treatment in an inert gas atmosphere under a pressure exceeding the atmospheric pressure and up to 10,000 kgcm2 in the temperature range of from 1,200\xb0 C. to 1,900\xb0 C.
7. A production process of a highly heat-resistant synthetic quartz glass having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more, comprising the steps in the sequence set forth:
preparing a silica porous body,
conducting a reduction treatment to the silica porous body in an atmosphere containing a reducing gas at a reaction temperature of 100\xb0 C. or higher and 1,300\xb0 C. or lower for 30 minutes or more,
conducting a baking treatment to the silica porous body at a reaction temperature of 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby forming a dense glass body having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more,
wherein said reducing gas is a volatile silicon compound containing nitrogen andor carbon, and said volatile silicon compound is at least one kind of compound selected from the group consisting of a silazane and an organosilazane, after the reduction treatment, a heating treatment is carried out in an atmosphere containing hydrogen, followed by subjecting to a baking treatment, thereby obtaining a dense glass body and
wherein the dense glass body has a natural logarithmic value of viscosity at 1280\xb0 C. in an approximate range of 11.7 and 12.4.
8. The production process of a highly heat-resistant synthetic quartz glass according to claim 7, which is characterized in that the reduction treatment is carried out at a reaction temperature of 100\xb0 C. or higher and 800\xb0 C. or lower, followed by baking at 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby obtaining a transparent glass body.
9. The production process of a highly heat-resistant synthetic quartz glass according to claim 7, which is characterized in that the silica porous body is subjected to the reduction treatment by reacting with a carbon-containing gas at 400\xb0 C. or higher and 1,300\xb0 C. or lower, followed by baking at 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby obtaining a densified black glass body.
10. The production process of a highly heat-resistant synthetic quartz glass according to claim 7, which is characterized in that the dense glass body is further subjected to a heating treatment in a non-oxidative atmosphere under a pressure exceeding the atmospheric pressure in the temperature range of from 1,200\xb0 C. to 1,900\xb0 C.
11. The production process of a highly heat-resistant synthetic quartz glass according to claim 10, which is characterized in that the dense glass body is subjected to the heating treatment in an inert gas atmosphere under a pressure exceeding the atmospheric pressure and up to 10,000 kgcm2 in the temperature range of from 1,200\xb0 C. to 1,900\xb0 C.
12. A production process of a highly heat-resistant synthetic quartz glass having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more comprising the steps in the sequence set forth:
preparing a silica porous body,
conducting a reduction treatment to the silica porous body in an atmosphere containing a reducing gas at a reaction temperature of 100\xb0 C. or higher and 1,300\xb0 C. or lower for 30 minutes or more,
conducting a baking treatment to the silica porous body at a reaction temperature of 1,300\xb0 C. or higher and 1,900\xb0 C. or lower, thereby forming a dense glass body having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more,
wherein said reducing gas is a volatile silicon compound containing nitrogen andor carbon,
wherein the volatile silicon compound is hexamethyldisilazane and
wherein the dense glass body has a natural logarithmic value of viscosity at 1280\xb0 C. in an approximate range of 11.7 and 12.4.
13. A production process of a highly heat-resistant synthetic quartz glass having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more comprising the steps in the sequence set forth:
preparing a silica porous body,
conducting a reduction treatment to the silica porous body in an atmosphere containing a reducing gas at a reaction temperature of 100\xb0 C. or higher and 1,300\xb0 C. or lower,
conducting a baking treatment to the silica porous body at a reaction temperature of 1,300\xb0 C. or higher and 1,900\xb0 C. or lower for 30 minutes or more, thereby forming a dense glass body having an absorption coefficient at 245 nm of 0.05 cm\u22121 or more,
wherein said reducing gas is a volatile silicon compound containing nitrogen andor carbon,
wherein the volatile silicon compound is hexamethyldisiloxane and
wherein the dense glass body has a natural logarithmic value of viscosity at 1280\xb0 C. in an approximate range of 11.7 and 12.4.