1. A method for fabricating an electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to displacement of the movable electrode, the method comprising steps of:
forming a groove on at least one of one surface of an insulative substrate on which the fixed electrode is formed as a film and one surface of a semiconductor substrate to which the insulative substrate is joined, the one surface of the insulative substrate being on an opposite side of the other surface thereof on which the fixed electrode is formed as the film, and the insulative substrate being joined to the one surface of the semiconductor substrate;
forming a hole in the semiconductor substrate so as to penetrate from the one surface to the other surface of the semiconductor substrate, at a position communicating with a passage formed by the groove; and
forming an electrode extraction hole, for electrically connecting the fixed electrode to the semiconductor substrate, in the insulative substrate so as to penetrate from the one surface to the other surface of the insulative substrate, at a position communicating with the passage formed by the groove.
2. The method for fabricating an electrostatic capacitance-type acceleration sensor according to claim 1, wherein
the electrostatic capacitance-type acceleration sensor includes a first capacitor which electrostatic capacitance between the movable electrode and a first fixed electrode changes according to the displacement of the movable electrode, and a second capacitor which electrostatic capacitance between the movable electrode and a second fixed electrode changes according to the displacement of the movable electrode in a contrary manner to the first capacitor, and wherein
the step of forming the groove forms the groove on at least one of the one surface of the insulative substrate on which one of the first fixed electrode and the second fixed electrode is formed as the film and the one surface of the semiconductor substrate to which the insulative substrate is joined, the one surface of the insulative substrate being on the opposite side of the other surface thereof on which the fixed electrode is formed as the film, and the insulative substrate being joined to the one surface of the semiconductor substrate.
3. The method for fabricating an electrostatic capacitance-type acceleration sensor according to claim 1, wherein the step of forming the hole in the insulative substrate forms the hole in the insulative substrate, to which the semiconductor substrate is joined, from the surface side of the insulative substrate on which the fixed electrode is formed as the film.
4. An apparatus for fabricating an electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to displacement of the movable electrode, the apparatus comprising:
means for forming a groove on at least one of one surface of an insulative substrate on which the fixed electrode is formed as a film and one surface of a semiconductor substrate to which the insulative substrate is joined, the one surface of the insulative substrate being on an opposite side of the other surface thereof on which the fixed electrode is formed as the film, and the insulative substrate being joined to the one surface of the semiconductor substrate;
means for forming a hole in the semiconductor substrate so as to penetrate from the one surface to the other surface of the semiconductor substrate, at a position communicating with a passage formed by the groove; and
means for forming an electrode extraction hole, for electrically connecting the fixed electrode to the semiconductor substrate, in the insulative substrate so as to penetrate from the one surface to the other surface of the insulative substrate, at a position communicating with the passage formed by the groove.
5. An electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to displacement acceleration of the movable electrode, comprising:
an insulative substrate on which the fixed electrode of the capacitor is formed as a film; and
a semiconductor substrate which is joined to one surface of the insulative substrate on an opposite side of the other surface thereof on which the fixed electrode is formed as the film, wherein
a groove is formed on at least one of the one surface of the insulative substrate and the one surface of the semiconductor substrate to which the insulative substrate is joined, the one surface of the insulative substrate being on the opposite side of the other surface thereof on which the fixed electrode is formed as the film, wherein
a first hole is formed in the semiconductor substrate so as to penetrate from the one surface to the other surface of the semiconductor substrate, at a position communicating with a passage formed by the groove, and wherein
a second hole for electrode extraction, for electrically connecting the fixed electrode to the semiconductor substrate, is formed in the insulative substrate so as to penetrate from the one surface to the other surface of the insulative substrate, at a position communicating with the passage formed by the groove.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An image processing apparatus comprising:
conversion means for converting a standard definition interlace image including a first number of pixels into a first standard definition progressive image;
interpolation means for interpolating the first standard definition progressive image to generate a first high definition progressive image including a second number of pixels, higher than the first number of pixels, which are equal to a number of pixels of a target high definition image;
classification means for classifying, in accordance with a feature of the first high definition progressive image, into classes, subject pixels forming a second high definition progressive image, which serves as the target high definition image, including the second number of pixels and having a quality higher than the first high definition progressive image, the second high definition progressive image being determined from the first high definition progressive image;
storage means for storing a prediction coefficient for each of the classes, the prediction coefficient being obtained by conducting learning using a plurality of high definition progressive images, each including the second number of pixels; and
computation means for performing computation using the first high definition progressive image and the prediction coefficient for each of the classes into which the subject pixels are classified to determine the second high definition progressive image, which serves as the target high definition image, from the first high definition progressive image, wherein the conversion means includes,
interlace-progressive conversion means for converting the standard definition interlace image into a progressive intermediate image,
motion-vector detection means for detecting motion vectors and macro-block differences of the standard definition interlace image by using, as a minimum unit, a distance shorter than an interval between pixels forming the progressive intermediate image,
cyclic-coefficient setting means for setting, based on a vertical motion, which is a vertical component of each of the motion vectors, a first cyclic coefficient for a first type of pixel that is located at a position where a pixel forming the standard definition interlace image exists, the first cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference, and a second cyclic coefficient for a second type of pixel, which is located at a position where a pixel forming the standard definition interlace image does not exist, the second cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference,
motion compensation means for motion-compensating, on a basis of the motion vectors, a past first progressive image to generate a motion-compensated image, and
output image generating means for generating the first standard definition progressive image by adding pixel values of the first type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the first cyclic coefficients as weights and by adding pixel values of the second type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the second cyclic coefficients as weights.
2. The image processing apparatus according to claim 1, wherein the computation means includes a means for predicting a natural image of the first high definition progressive image, a means for predicting an artificial image of the first high definition progressive image, a means for determining a ratio between the natural image and the artificial image of the first high definition progressive image, and a means for synthesizing an output from the means for predicting the natural image and the means for predicting the artificial image based on the determined ratio to form the second high definition image.
3. An image processing method comprising the steps of:
converting a standard definition interlace image including a first number of pixels into a first standard definition progressive image;
generating a first high definition progressive image including a second number of pixels, higher than the first number of pixels, which are equal to a number of pixels of a target image by interpolating the first standard definition progressive image;
classifying, in accordance with a feature of the first high definition progressive image, into classes, subject pixels forming a second high definition progressive image, which serves as the target high definition image, including the second number of pixels and having a quality higher than the first high definition progressive image, the second high definition progressive image being determined from the first high definition progressive image; and
determining the second high definition progressive image, which serves as the target high definition image, from the first high definition progressive image by performing computation using the first high definition progressive image and a prediction coefficient for each of the classes into which the subject pixels are classified among prediction coefficients obtained by conducting learning using a plurality of high definition progressive images, each including the second number of pixels, wherein said step of converting includes,
converting the standard definition interlace image into a progressive intermediate image,
detecting motion vectors and macro-block differences of the standard definition interlace image by using, as a minimum unit, a distance shorter than an interval between pixels forming the progressive intermediate image,
setting, based on a vertical motion, which is a vertical component of each of the motion vectors, a first cyclic coefficient for a first type of pixel that is located at a position where a pixel forming the standard definition interlace image exists, the first cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference, and a second cyclic coefficient for a second type of pixel, which is located at a position where a pixel forming the standard definition interlace image does not exist, the second cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference,
motion-compensating, on a basis of the motion vectors, a past first progressive image to generate a motion-compensated image, and
generating the first standard definition progressive image by adding pixel values of the first type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the first cyclic coefficients as weights and by adding pixel values of the second type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the second cyclic coefficients as weights.
4. A non-transitory computer readable medium having computer instructions recorded thereon, the computer instructions configured to perform a method when executed on a computer, the method comprising the steps of:
converting a standard definition interlace image including a first number of pixels into a first standard definition progressive image;
generating a first high definition progressive image including a second number of pixels, higher than the first number of pixels, which are equal to a number of pixels of a target high definition image by interpolating the first standard definition progressive image;
classifying, in accordance with a feature of the first high definition progressive image, into classes, subject pixels forming a second high definition progressive image, which serves as the target high definition image, including the second number of pixels and having a quality higher than the first high definition progressive image, the second high definition progressive image being determined from the first high definition progressive image; and
determining the second high definition progressive image, which serves as the target high definition image, from the first high definition progressive image by performing computation using the first high definition progressive image and a prediction coefficient for each of the classes into which the subject pixels are classified among prediction coefficients obtained by conducting learning using a plurality of high definition progressive images, each including the second number of pixels, wherein said step of converting includes,
converting the standard definition interlace image into a progressive intermediate image,
detecting motion vectors and macro-block differences of the standard definition interlace image by using, as a minimum unit, a distance shorter than an interval between pixels forming the progressive intermediate image,
setting, based on a vertical motion, which is a vertical component of each of the motion vectors, a first cyclic coefficient for a first type of pixel that is located at a position where a pixel forming the standard definition interlace image exists, the first cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference, and a second cyclic coefficient for a second type of pixel, which is located at a position where a pixel forming the standard definition interlace image does not exist, the second cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference,
motion-compensating, on a basis of the motion vectors, a past first progressive image to generate a motion-compensated image, and
generating the first standard definition progressive image by adding pixel values of the first type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the first cyclic coefficients as weights and by adding pixel values of the second type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the second cyclic coefficients as weights.
5. An image processing apparatus comprising:
a converter configured to convert a standard definition interlace image including a first number of pixels into a first standard definition progressive image;
an interpolator configured to interpolate the first standard definition progressive image to generate a first high definition progressive image including a second number of pixels, higher than the first number of pixels, which are equal to a number of pixels of a target high definition image;
a classification unit configured to classify, in accordance with a feature of the first high definition progressive image, into classes, subject pixels forming a second high definition progressive image, which serves as the target high definition image, including the second number of pixels and having a quality higher than the first high definition progressive image, the second high definition progressive image being determined from the first high definition progressive image;
a storage unit configured to store a prediction coefficient for each of the classes, the prediction coefficient being obtained by conducting learning using a plurality of high definition progressive images, each including the second number of pixels; and
a computation unit configured to perform computation using the first high definition progressive image and the prediction coefficient for each of the classes into which the subject pixels are classified to determine the second high definition progressive image, which serves as the target high definition image, from the first high definition progressive image, wherein the converter includes,
an interlace-progressive converter configured to convert the standard definition interlace image into a progressive intermediate image,
a motion-vector detector configured to detect motion vectors and macro-block differences of the standard definition interlace image by using, as a minimum unit, a distance shorter than an interval between pixels forming the progressive intermediate image,
a cyclic-coefficient setting unit configured to set, based on a vertical motion, which is a vertical component of each of the motion vectors, a first cyclic coefficient for a first type of pixel that is located at a position where a pixel forming standard definition the interlace image exists, the first cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference, and a second cyclic coefficient for a second type of pixel, which is located at a position where a pixel forming the standard definition interlace image does not exist, the second cyclic coefficient calculated by using the corresponding motion vector and the macro-block difference,
a motion compensator configured to motion-compensate, on a basis of the motion vectors, a past first progressive image to generate a motion-compensated image, and
an output image generator configured to generate the first standard definition progressive image by adding pixel values of the first type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the first cyclic coefficients as weights and by adding pixel values of the second type of pixels located at corresponding positions of the intermediate image and the motion-compensated image by using the second cyclic coefficients as weights.