1. A method of forming a reinforced tip for selectively passing current through a media device, the method comprising:
providing a substrate;
forming a tip structure within a first portion of the substrate;
depositing a first metal material on the substrate;
depositing a second metal material such that the second metal material is disposed over the tip structure;
depositing a stabilization film over the first metal material;
exposing the first metal material, the substrate, and the stabilization film to an elevated temperature to form a desired stress gradient in the first metal material;
etching a second portion of the substrate such that the second portion is removed from beneath the second metal material and from beneath a portion of the first metal material, thereby releasing a mechanical structure connected with the tip;
wherein a third portion of the substrate providing a reinforcing structure is retained beneath the second metal to form a reinforced tip; and
etching the stabilization film so that the first metal material is deployed, thereby extending the tip away from the substrate due to the desired stress gradient in the first metal material.
2. The method of claim 1, wherein forming a tip structure includes:
depositing a hard mask film on said substrate;
patterning the hard mask film to define at least one tip area surrounded by an exposed portion of the substrate;
etching the hard mask film to expose portions of the substrate;
etching an exposed portion of the substrate;
growing a first thermal oxide film so that the hard mask is undercut in the at least one tip area;
etching the first thermal oxide film; and
growing a second thermal oxide film so that the tip structure is formed within the substrate.
3. The method of claim 2, wherein the stabilization film includes one or more of PECVD silicon dioxide, PECVD silicon nitride, PECVD silicon oxy-nitride, sputtered silicon dioxide, sputtered silicon nitride, and evaporated silicon dioxide.
4. The method of claim 1, wherein:
at least one of the first metal material and the second metal material is formed by deposition of an adhesion layer and deposition of a functional layer;
said adhesion layer is formed using one or more types of materials from one or both of a layer of pure metal and a layer of metal alloy; and
said functional layer is formed using one or more types of materials from one or both of a layer of pure metal and a layer of metal alloy.
5. The method of claim 1, wherein:
the first metal material comprises one or more of nickel, cobalt, iron chromium, zirconium, niobium, vanadium, hafnium, tantalum, tungsten, and molybdenum; and
the second metal material comprises one or more of chromium, platinum, osmium, ruthenium rhodium, palladium, hafnium, tantalum, tungsten, and iridium.
6. The method of claim 1, wherein when the first metal material is deployed, it forms a substantially arcuate shape away from the substrate.
7. The method of claim 1, wherein depositing a stabilization film over the first metal material and exposing at least the first metal material, the substrate, and the stabilization film to an elevated temperature is fulfilled in one process step by depositing the stabilization film at an elevated temperature.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of providing location information in a wireless communication system, the method comprising:
receiving a location information request message, including Location Based Service (LBS) control information, from a Base Station (BS), the LBS control information being information about a condition in which location information is reported;
performing LBS measurement; and
transmitting a location information response message which includes location information collected through the LBS measurement, to the BS, if the condition is satisfied.
2. The method of claim 1, wherein:
the LBS control information includes a threshold, and
the condition corresponds to a case in which a difference between location information at a past time and location information at a current time, of a User Equipment (UE), is greater than or equal to the threshold.
3. The method of claim 1, wherein:
the LBS control information includes a timer, and
the condition corresponds to a case in which the timer expires.
4. The method of claim 1, wherein the format of the location information request message is determined depending on a state of a UE.
5. The method of claim 4, wherein in case where the state of the UE is in a connected state, the location information request message is an LBS-REQ message.
6. The method of claim 4, wherein in case where the state of the UE is in an idle state, the location information request message is a ranging response message.
7. The method of claim 4, wherein in case where the state of the UE is in an idle state, the location information request message is a paging advertisement message.
8. The method of claim 1, wherein the collected location information includes any one of Time Difference of Arrival (TDOA), Direction of Arrival (DOA), Angle of Arrival (AOA), and Time of Arrival (TOA).
9. The method of claim 1, wherein the collected location information includes any one of a Carrier to Interference Noise Ratio (CINR), a Received Signal Strength Indication (RSSI), Relative Delay (RD), and Round Trip Delay (RTD).
10. A method of determining a location of a UE in a wireless communication system, the method comprising:
transmitting a location information request message, including LBS control information, to the UE, the LBS control information being information about a condition in which location information is reported;
receiving a location information response message, including location information collected through LBS measurement, from the UE, if the condition is satisfied; and
determining the location of the UE on the basis of the collected location information.
11. The method of claim 10, wherein:
the LBS control information includes a type of a wireless location method of determining the location of the UE, and
the collected location information is different according to the type.
12. The method of claim 10, wherein:
in case where the UE is in an idle state, the determining the location of the UE is performed using a paging or ranging procedure, and
the location information request message and the location information response message are paging-related messages used in a paging procedure.
13. The method of claim 12, wherein the location information request message is a ranging response message or a paging advertisement message.