What is claimed is:
1. A piezoelectric element, comprising: a first electrode layer; a piezoelectric layer provided on the first electrode layer; and a second electrode layer provided on the piezoelectric layer, wherein:
the first electrode layer is made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal; and
the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
2. The piezoelectric element of claim 1, wherein an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer.
3. The piezoelectric element of claim 2, wherein the orientation control layer is made of lead lanthanum titanate or a material obtained by adding at least one of magnesium and manganese to lead lanthanum titanate.
4. The piezoelectric element of claim 2, wherein the orientation control layer is made of a strontium-containing perovskite oxide.
5. The piezoelectric element of claim 4, wherein the orientation control layer contains strontium titanate.
6. The piezoelectric element of claim 1, wherein the noble metal of the first electrode layer is at least one noble metal selected from the group consisting of platinum, iridium, palladium and ruthenium.
7. The piezoelectric element of claim 1, wherein a content of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper in the first electrode layer is greater than zero and less than or equal to 26 mol %.
8. The piezoelectric element of claim 1, wherein:
the first electrode layer is provided on a substrate; and
an adhesive layer for improving adhesion between the substrate and the first electrode layer is provided between the substrate and the first electrode layer.
9. The piezoelectric element of claim 8, wherein the adhesive layer is made of at least one material selected from the group consisting of titanium, tantalum and molybdenum.
10. An ink jet head, comprising: a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order; a vibration layer provided on one surface of the piezoelectric element that is closer to the second electrode layer; and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, in which the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge the ink out of the pressure chamber, wherein:
the first electrode layer of the piezoelectric element is made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal; and
the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
11. The ink jet head of claim 10, wherein an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element.
12. An ink jet head, comprising: a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order; a vibration layer provided on one surface of the piezoelectric element that is closer to the first electrode layer; and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, in which the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge the ink out of the pressure chamber, wherein:
the first electrode layer of the piezoelectric element is made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal; and
the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
13. The ink jet head of claim 12, wherein an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element.
14. An angular velocity sensor, comprising a substrate including a fixed portion and at least a pair of vibrating portions extending from the fixed portion in a predetermined direction, in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order at least on each of the vibrating portions of the substrate, and the second electrode layer on each of the vibrating portions is patterned into at least one driving electrode for vibrating the vibrating portion in a width direction thereof and at least one detection electrode for detecting a displacement of the vibrating portion in a thickness direction thereof, wherein:
the first electrode layer is made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal; and
the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
15. The angular velocity sensor of claim 14, wherein an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer.
16. A method for manufacturing a piezoelectric element, comprising the steps of:
forming a first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on a substrate by a sputtering method;
forming a piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the first electrode layer by a sputtering method; and
forming a second electrode layer on the piezoelectric layer.
17. A method for manufacturing a piezoelectric element, comprising the steps of:
forming a first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on a substrate by a sputtering method;
forming an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane on the first electrode layer by a sputtering method;
forming a piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the orientation control layer by a sputtering method; and
forming a second electrode layer on the piezoelectric layer.
18. A method for manufacturing an ink jet head, the ink jet head including a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order, in which a vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge ink out of a pressure chamber, the method comprising the steps of:
forming the first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on a substrate by a sputtering method;
forming the piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the first electrode layer by a sputtering method;
forming the second electrode layer on the piezoelectric layer;
forming the vibration layer on the second electrode layer;
bonding a pressure chamber member for forming the pressure chamber on one surface of the vibration layer that is away from the second electrode layer; and
removing the substrate after the bonding step.
19. A method for manufacturing an ink jet head, the ink jet head including a piezoelectric element in which a first electrode layer, an orientation control layer, a piezoelectric layer and a second electrode layer are layered in this order, in which a vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge ink out of a pressure chamber, the method comprising the steps of:
forming the first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on a substrate by a sputtering method;
forming the orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane on the first electrode layer by a sputtering method;
forming the piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the orientation control layer by a sputtering method;
forming the second electrode layer on the piezoelectric layer;
forming the vibration layer on the second electrode layer;
bonding a pressure chamber member for forming the pressure chamber on one surface of the vibration layer that is away from the second electrode layer; and
removing the substrate after the bonding step.
20. A method for manufacturing an ink jet head, the ink jet head including a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order, in which a vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge ink out of a pressure chamber, the method comprising the steps of:
forming the vibration layer on a pressure chamber substrate for forming the pressure chamber;
forming the first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on the vibration layer by a sputtering method;
forming the piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the first electrode layer by a sputtering method;
forming the second electrode layer on the piezoelectric layer; and
forming the pressure chamber in the pressure chamber substrate.
21. A method for manufacturing an ink jet head, the ink jet head including a piezoelectric element in which a first electrode layer, an orientation control layer, a piezoelectric layer and a second electrode layer are layered in this order, in which a vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge ink out of a pressure chamber, the method comprising the steps of:
forming the vibration layer on a pressure chamber substrate for forming the pressure chamber;
forming the first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on the vibration layer by a sputtering method;
forming the orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane on the first electrode layer by a sputtering method;
forming the piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the orientation control layer by a sputtering method;
forming the second electrode layer on the piezoelectric layer; and
forming the pressure chamber in the pressure chamber substrate.
22. A method for manufacturing an angular velocity sensor, the angular velocity sensor including a substrate including a fixed portion and at least a pair of vibrating portions extending from the fixed portion in a predetermined direction, in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order at least on each of the vibrating portions of the substrate, and the second electrode layer on each of the vibrating portions is patterned into at least one driving electrode for vibrating the vibrating portion in a width direction thereof and at least one detection electrode for detecting a displacement of the vibrating portion in a thickness direction thereof, the method comprising the steps of:
forming the first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on the substrate by a sputtering method;
forming the piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the first electrode layer by a sputtering method;
forming the second electrode layer on the piezoelectric layer;
patterning the second electrode layer so as to form the driving electrode and the detection electrode;
patterning the piezoelectric layer and the first electrode layer; and
patterning the substrate so as to form the fixed portion and the vibrating portions.
23. A method for manufacturing an angular velocity sensor, the angular velocity sensor including a substrate including a fixed portion and at least a pair of vibrating portions extending from the fixed portion in a predetermined direction, in which a first electrode layer, an orientation control layer, a piezoelectric layer and a second electrode layer are layered in this order at least on each of the vibrating portions of the substrate, and the second electrode layer on each of the vibrating portions is patterned into at least one driving electrode for vibrating the vibrating portion in a width direction thereof and at least one detection electrode for detecting a displacement of the vibrating portion in a thickness direction thereof, the method comprising the steps of:
forming the first electrode layer made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal on the substrate by a sputtering method;
forming the orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane on the first electrode layer by a sputtering method;
forming the piezoelectric layer made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane on the orientation control layer by a sputtering method;
forming the second electrode layer on the piezoelectric layer;
patterning the second electrode layer so as to form the driving electrode and the detection electrode;
patterning the piezoelectric layer, the orientation control layer and the first electrode layer; and
patterning the substrate so as to form the fixed portion and the vibrating portions.
24. An ink jet recording apparatus, comprising an ink jet head, the ink jet head including: a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order; a vibration layer provided on one surface of the piezoelectric element that is closer to the second electrode layer; and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, the ink jet head being capable of being relatively moved with respect to a recording medium, in which while the ink jet head is moved with respect to the recording medium, the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element in the ink jet head so as to discharge the ink out of the pressure chamber through a nozzle hole communicated to the pressure chamber onto the recording medium, thereby recording information, wherein:
the first electrode layer of the piezoelectric element in the ink jet head is made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal; and
the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
25. The ink jet recording apparatus of claim 24, wherein an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element of the ink jet head.
26. An ink jet recording apparatus, comprising an ink jet head, the ink jet head including: a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order; a vibration layer provided on one surface of the piezoelectric element that is closer to the first electrode layer; and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, the ink jet head being capable of being relatively moved with respect to a recording medium, in which while the ink jet head is moved with respect to the recording medium, the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element in the ink jet head so as to discharge the ink out of the pressure chamber through a nozzle hole communicated to the pressure chamber onto the recording medium, thereby recording information, wherein:
the first electrode layer of the piezoelectric element in the ink jet head is made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal; and
the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.
27. The ink jet recording apparatus of claim 26, wherein an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element of the ink jet head.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A portable sunshade apparatus comprising:
a shade;
a ridged support panel;
an articulating support frame affixed to the ridged support panel and the shade, the articulating support frame including joints and configured to articulate about the joints to position the shade with respect to the ridged support panel; and
at least one securing strap affixed to the ridged support panel and configured to wrap around an external object and brace the ridged support panel up against the external object.
2. The portable sunshade apparatus of claim 1, the shade further comprising:
a jointed frame covered; and
a flexible opaque sheath, the jointed frame having a substantially rectangular shape and shade joints enabling the jointed frame to fold substantially in half, the flexible opaque sheath enveloping the jointed frame.
3. The portable sunshade apparatus of claim 1, wherein the shade includes frills extending outward.
4. The portable sunshade apparatus of claim 1, wherein the ridged support panel has a substantially filled-in rectangular shape and provides support for the shade when buried.
5. The portable sunshade apparatus of claim 1, wherein the articulating support frame includes a substantially rectangular section and the joints enable the substantially rectangular section to warp substantially into a parallelogram shape.
6. The portable sunshade apparatus of claim 1, wherein the articulating support frame, the shade, and the ridged support panel fold together into substantially the same plane.
7. The portable sunshade apparatus of claim 1, the at least one securing strap comprising:
two Velcro straps affixed to opposing sides of the ridged support panel and configured to secure to one another.
8. The portable sunshade apparatus of claim 1, further including one or more of:
a sleeve adapted to accommodate a folded sunshade apparatus; or
carry-straps attached to a surface of the portable sunshade apparatus and orto a surface of the sleeve.
9. The portable sunshade apparatus of claim 1, wherein the shade further comprises:
flexible opaque material configured for receiving markings applied through any of ink, sublimation, paint, or adhesive.
10. The portable sunshade apparatus of claim 1, wherein the articulating support frame further comprises:
a rectangular frame wherein the first length of the rectangular frame spins about a first axis and the second length of the rectangular frame spins about a second axis, the first length additionally affixed to the shade and the second length including two perpendicular poles affixing to the ridged support panel.
11. The portable sunshade apparatus of claim 1, wherein the articulating support frame is configured to lock at predetermined articulation configurations.
12. The portable sunshade apparatus of claim 1, wherein the articulating support frame is configured to force fit to predetermined articulation configurations.
13. The portable sunshade apparatus of claim 1, wherein the articulating support frame further comprises:
speakers; and
auditory apparatus.
14. The portable sunshade apparatus of claim 2, wherein the ridged support panel further comprises:
A media player pocket.
15. A portable sunshade apparatus comprising:
a shade including a jointed frame covered with a flexible opaque sheath, the jointed frame having a substantially rectangular shape and shade joints enabling the jointed frame to fold substantially in half, the flexible opaque sheath enveloping the jointed frame and including frills extending outward from the jointed frame;
a ridged support panel having a substantially filled-in rectangular shape and configured to brace against the frame of a chair and provide supportive resistance against the ground when buried;
an articulating support frame affixed to the ridged support panel and the shade, the articulating support frame including articulation joints and configured to articulate about the articulation joints to position the shade with respect to the ridged support panel, wherein the articulation joints enable the shade to rotate about a first axis and the ridged support panel to rotate about a second axis, and enable the articulating support frame to warp into alternate polygonal shapes; and
at least one Velcro strap affixed to the ridged support panel and configured to wrap around the frame of the chair and brace the ridged support panel up against the frame of the chair.