1. A lithographic apparatus comprising:
a support structure configured to hold a patterning device, the patterning device configured to pattern a projection beam with a pattern in its cross-section;
a substrate table configured to hold a substrate; and
a projection system configured to project the patterned beam onto a target portion of the substrate, wherein a joint between an element of the projection system and its support comprises an inorganic layer comprising (i) metal, (ii) ceramic, (iii) glass, or (iv) any combination of (i)-(iii), and comprises glue protection.
2. A lithographic apparatus according to claim 1, further comprises a liquid supply system configured to at least partially fill a space between the projection system and the substrate, with a liquid.
3. A lithographic apparatus according to claim 2, wherein the element is configured to come into contact with the liquid.
4. A lithographic apparatus according to claim 1, wherein said joint comprises a direct bond.
5. A lithographic apparatus according to claim 1, wherein the joint was made without heating.
6. A lithographic apparatus according to claim 1, wherein the joint was heat treated.
7. A lithographic apparatus according to claim 6, wherein the joint has been heat treated to 900\xb0 C.
8. A lithographic apparatus according to claim 6, wherein the joint is made by the interaction of clean surfaces.
9. A lithographic apparatus according to claim 6, wherein the joint is made by the interaction of clean surfaces, sealed with a low temperature glass solder and heat treated to 600\xb0 C.
10. A lithographic apparatus according to claim 6, wherein the element of the projection system and its support are doped with boron.
11. A lithographic apparatus according to claim 10, wherein the joint is made by the interaction of clean surfaces, sealed with a low temperature glass solder and heat treated to 600\xb0 C.
12. A lithographic apparatus according to claim 1, wherein the inorganic layer comprises a metal solder.
13. A lithographic apparatus according to claim 12, wherein the metal solder is indium.
14. A lithographic apparatus according to claim 1, wherein the element and its support are made of glass.
15. A lithographic apparatus according to claim 14, wherein the element and its support are made of fused silica.
16. A lithographic apparatus according to claim 1, wherein the joints between all parts of the projection system configured to be immersed in a liquid comprise an inorganic layer.
17. A lithographic apparatus according to claim 1, wherein the element is a lens.
18. A lithographic apparatus comprising:
a support structure configured to hold a patterning device, the patterning device configured to pattern a projection beam with a pattern in its cross-section;
a substrate table configured to hold a substrate; and
a projection system configured to project the patterned beam onto a target portion of the substrate, wherein a fluid tight joint between an element of the projection system and its support comprises a direct bond by which molecules of the element and its support chemically interact.
19. A lithographic apparatus according to claim 18, further comprises a liquid supply system configured to at least partially fill a space between the projection system and the substrate, with a liquid.
20. A lithographic apparatus according to claim 19, wherein the element is configured to come into contact with the liquid.
21. A lithographic apparatus according to claim 18 wherein the joint comprises (i) a metal layer, (ii) a ceramic layer, (iii) a glass layer, or (iv) any combination of (i)-(iii).
22. A lithographic apparatus according to claim 21, wherein the joint comprises a layer of glue protection.
23. A lithographic apparatus according to claim 18, wherein the joint was made without heating.
24. A lithographic apparatus according to claim 18, wherein the joint was heat treated.
25. A lithographic apparatus according to claim 24, wherein the joint has been heat treated to 900\xb0 C.
26. A lithographic apparatus according to claim 24, wherein the joint is made by the interaction of clean surfaces.
27. A lithographic apparatus according to claim 24, wherein the joint is made by the interaction of clean surfaces, sealed with a low temperature glass solder and heat treated to 600\xb0 C.
28. A lithographic apparatus according to claim 24, wherein the element of the projection system and its support are doped with boron.
29. A lithographic apparatus according to claim 28, wherein the joint is made by the interaction of clean surfaces, sealed with a low temperature glass solder and heat treated to 600\xb0 C.
30. A lithographic apparatus according to claim 18, wherein the joint comprises a layer of metal solder.
31. A lithographic apparatus according to claim 30, wherein the metal solder comprises indium.
32. A lithographic apparatus according to claim 18, wherein the element and its support are made of glass.
33. A lithographic apparatus according to claim 32, wherein the element and its support are made of fused silica.
34. A lithographic apparatus according to claim 18 wherein the joints between all parts of the projection system configured to be immersed in a liquid comprise an inorganic layer.
35. A lithographic apparatus according to claim 18, wherein the element is a lens.
36. A lithographic apparatus according to claim 18, wherein the inorganic layer comprises (i) a metal layer, (ii) a ceramic layer, (iii) a glass layer, or (iv) any combination of (i)-(iii).
37. A lithographic apparatus comprising:
a support structure configured to hold a patterning device, the patterning device configured to pattern a projection beam with a pattern in its cross-section;
a substrate table configured to hold a substrate; and
a projection system configured to project the patterned beam onto a target portion of the substrate, the projection system having a lens, a lens support and an inorganic material providing a fluid tight seal between the lens and the lens support wherein the seal was made without heating.
38. A lithographic apparatus according to claim 37, further comprising a direct bond between the lens and the lens support.
39. A lithographic apparatus according to claim 37, wherein the lens and the lens support are made of glass.
40. A lithographic apparatus comprising:
a support structure configured to hold a patterning device, the patterning device configured to pattern a projection beam with a pattern in its cross-section;
a substrate table configured to hold a substrate; and
a projection system configured to project the patterned beam onto a target portion of the substrate, the projection system having a lens, a lens support and a direct bond, by which molecules of the lens and the lens support chemically interact, providing a fluid tight seal between the lens and the lens support.
41. A lithographic apparatus according to claim 40, further comprising (i) a metal layer, (ii) a ceramic layer, (iii) a glass layer, or (iv) any combination of (i)-(iii) at a joint between the lens and the lens support.
42. A lithographic apparatus according to claim 40, wherein a joint between the lens and the lens support was heat treated.
43. A lithographic apparatus according to claim 40, wherein the lens and the lens support are made of glass.
44. An immersion projection system manufacturing method comprising joining an element of a projection system, that in use in a lithographic apparatus comes into contact with a liquid, with its support using an inorganic layer comprising (i) metal, (ii) ceramic, (iii) glass, or (iv) any combination of (i)-(iii), and glue protection, direct bonding by which molecules of the element and its support chemically interact, or both.
45. The method according to claim 44, comprising heat treating the element and its support.
46. The method according to claim 45, wherein the joining comprises creating a joint by the interaction of a clean surface of the element and a clean surface of the support.
47. The method according to claim 44, wherein the inorganic layer comprises metal solder.
48. The method according to claim 44, wherein the element and its support are made of glass.
49. The method according to claim 48, wherein the element and its support are made of fused silica.
50. The method according to claim 44, comprising joining all elements of the projection system configured to be immersed in a liquid with their respective supports using an inorganic layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of enrolling at least one client in an electronic payment system, comprising:
receiving client information relating to the at least one client, the client information comprising funding source information relating to at least one funding source and payment account information relating to at least one payment account;
selecting a regular funding cycle associated with the at least one funding source;
determining a regular funding amount associated with the selected regular funding cycle;
determining a plurality of potential funding profiles that adjust the regular funding amount based upon the client information; and
selecting at least one funding profile from the plurality of potential funding profiles.
2. The method of claim 1, wherein the regular funding cycle is selected from the group consisting of weekly, biweekly, twice-monthly, and monthly.
3. The method of claim 1, wherein selecting a regular funding cycle includes prompting the at least one client to select a regular funding cycle from a plurality of regular funding cycles.
4. The method of claim 1, wherein determining a regular funding amount includes prompting the at least one client to provide a regular funding amount for the selected regular funding cycle.
5. The method of claim 1, wherein determining a plurality of potential funding profiles includes determining a plurality of potential first funding dates and a plurality of potential first funding amounts based upon the regular funding cycle and the regular funding amount.
6. The method of claim 1, wherein determining a plurality of funding profiles comprises allocating the regular funding amount to the at least one payment account.
7. The method of claim 1, further comprising:
prompting the at least one client to enter a power plus funding amount to the regular funding amount; and
adding the power plus funding amount to the regular funding amount.
8. The method of claim 1, further comprising:
determining a plurality of additional potential funding profiles based upon funding amounts allocated to at least one payment account during a grace period associated with the at least one payment account;
displaying the plurality of additional potential funding profiles; and
receiving a client input enabling display of the plurality of additional potential funding profiles.
9. The method of claim 1, wherein the at least one payment account is selected from the group consisting of a loan payment account, a bill payment account, a mortgage payment account, a second mortgage payment account, a home equity loan payment account, an automobile loan payment account, an RV loan payment account, a boat loan payment account, a motorcycle loan payment account, a water sports vehicle loan payment account, a student loan payment account, a credit card payment account, a line of credit payment account, a medical payment account, a utility payment account, an expense payment account, a deferred payment account, and combinations thereof.
10. The method of claim 1, further comprising determining and displaying the savings and benefits of a client-selected funding profile.
11. A computer system for enrolling at least one client in a payment program, comprising:
a network communications interface configured to receive client information relating to at least one client, the client information comprising funding source information relating to at least one funding source, payment account information relating to at least one payment account, a regular funding cycle for the at least one funding source, and a regular funding amount for the at least one funding source;
a client information database in network communications with the network communications interface, the client information database configured to store the client information; and
at least one processor in network communications with the client information database, the at least one processor configured to execute a plurality of program instructions comprising:
determining a plurality of potential funding profiles based upon the client information; and
generating a message requesting the at least one client to select at least one funding profile from the plurality of potential funding profiles.
12. A method of operating an electronic payment system, the method comprising:
storing funding source information relating to at least one funding source in a database;
storing funding schedule information relating to at least one funding schedule corresponding to the at least one funding source in the database, the funding schedule information comprising a funding schedule type;
storing recurring payment account information relating to a plurality of recurring payment accounts in the database; and
allocating an available funding amount from the at least one funding source to the plurality of recurring payment accounts based upon the funding source information, the funding schedule information, and the recurring payment account information.
13. The method of claim 12, wherein allocating the funding amount from the at least one funding source to the plurality of recurring payment accounts comprises:
determining a funding event of a funding schedule of the at least one funding schedule, the funding event comprising the funding amount;
dividing the funding amount into a plurality of funding shares; and
allocating the plurality of funding shares to the plurality of recurring payment accounts.
14. The method of claim 12, further comprising prompting a client to select the funding schedule type, wherein the funding schedule type is selected from the group consisting of weekly, biweekly, twice-monthly, and monthly.
15. The method of claim 12, further comprising:
determining an effective payment send date for each payment account of the plurality of payment accounts based upon payment information comprising a payment due date, payment delivery days, and payment safety days;
allocating the available funding amount to the plurality of payment accounts in the order of the effective payment send dates; and
determining the available funding amount based upon a funding availability period.
16. The method of claim 15, wherein the payment information further comprises a business day adjustment.
17. The method of claim 15, wherein the payment due date for at least one of the plurality of payment accounts is a payment grace due date.
18. The method of claim 15, further comprising determining the funding availability period based upon the type of the funding source.
19. The method of claim 12, wherein a plurality of the funding schedules form a funding profile.
20. The method of claim 19, further comprising:
projecting funding amounts from the at least one funding source over a predetermined time window based upon the funding profile;
projecting payments to at least one payment account of the plurality of payment accounts over the predetermined time window based upon a payment profile;
comparing the projected funding amounts and the projected payments to obtain projected balances;
determining at least one minimum projected balance over the predetermined time window based upon the projected balances; and
determining an excess funding amount or a payment shortage amount based upon the at least one minimum projected balance.
21. The method of claim 20, further comprising determining a minimum projected balance date within the predetermined time window on which the at least one minimum projected balance occurs.
22. The method of claim 21, further comprising allocating the excess funding amount to the at least one payment account on or after the minimum projected balance date if it is determined that there is an excess funding amount.
23. The method of claim 21, further comprising refunding the excess funding amount to the at least one funding source on or after the minimum projected balance date if it is determined that there is an excess funding amount.
24. The method of claim 21, further comprising scheduling at least one makeup funding event if it is determined that there is a payment shortage amount.
25. The method of claim 20, wherein determining an excess funding amount or a payment shortage amount comprises:
determining the sign of the minimum projected balance;
determining an excess funding amount if the sign of the minimum projected balance is positive; and
determining a payment shortage amount if the sign of the minimum projected balance is negative.
26. The method of claim 12, further comprising:
determining whether a first recurring payment account of the plurality of payment accounts is paid off; and
allocating any portion of a regular funding amount that was intended for the first recurring payment account to a second recurring payment account of the plurality of payment accounts if it is determined that the first recurring payment account is paid off, the second recurring payment account having the highest priority level excluding the first recurring payment account,
wherein the priority level is determined based upon interest rate, account balance, periodic payment amount, or term of a recurring payment account.
27. The method of claim 12, further comprising:
prompting a client to input an additional funding amount;
receiving additional funding information comprising the additional funding amount; and
allocating the additional funding amount to a payment account of the plurality of payment accounts having the highest priority information.
28. The method of claim 12, further comprising re-allocating funding amounts in response to a re-allocation event, wherein the re-allocation event is selected from the group consisting of a membership event, a new account change, and an active account event,
wherein the membership event is selected from the group consisting of a funding schedule change, a returned funding amount, and a skipped funding amount,
wherein the new account change is selected from the group consisting of a first payment date, a payment account due date, and a payment account grace period, and
wherein the active account event is selected from the group consisting of a payment change, a direct client payment, and a termination.
29. The method of claim 12, further comprising:
receiving updated client information relating to at least one client, the updated client information selected from the group consisting of funding source information relating to at least one funding source, payment account information relating to at least one payment account, a regular funding cycle for the at least one funding source, and a regular funding amount for the at least one funding source; and
updating at least one funding schedule based upon the updated client information.