1. A semiconductor device comprising:
a semiconductor substrate having an active region having a gate forming zone and an isolation region;
an isolation layer formed in the isolation region of the semiconductor substrate and having a first portion having a first height and a second portion adjacent to the active region and having a second height less than the first height so as to form an aperture interposed between the first portion and the active region, the aperture exposing side surface of a portion of the gate forming zone of the active region such that the portion of the gate forming zone of the active region constitutes a fin pattern;
a silicon epitaxial layer formed on an upper surface of the fin pattern and formed on a side surface of the fin pattern within the aperture so as to be between the gate forming zone of the active region and the isolation layer; and
a gate formed to cover the fin pattern on the silicon epitaxial layer and formed within the aperture on side surfaces of the isolation layer and the silicon epitaxial layer so as to be interposed between the silicon epitaxial layer and the isolation layer.
2. The semiconductor device according to claim 1, wherein the fin pattern has a height of 100\u02dc1,500 \u212b.
3. The semiconductor device according to claim 1, wherein the silicon epitaxial layer is formed to a thickness of 50\u02dc500 \u212b.
4. The semiconductor device according to claim 1, wherein the silicon epitaxial layer comprises a pure Si epitaxial layer or an SixGe(1-x) epitaxial layer containing Ge.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A power supply circuit comprising:
a DC-to-DC converter outputting a first voltage dropped from an input supply voltage; and
a series regulator outputting a second voltage dropped from an output of the DC-to-DC converter,
the series regulator including:
an output transistor supplied with the output of the DC-to-DC converter and outputting the second voltage, and
a first control circuit operated by the input supply voltage and controlling the output transistor.
2. The circuit according to claim 1, wherein
the DC-to-DC converter includes a soft start circuit, and
when the input supply voltage is applied, the first voltage increases from zero to a steady-state value during a first time period and the second voltage increases from zero to a steady-state value during a second time period.
3. The circuit according to claim 1, wherein
the DC-to-DC converter includes:
a first switching element having one end supplied with the input supply voltage and another end outputting the first voltage; and
a second control circuit comparing a third voltage to a divided voltage of the first voltage and controlling at least the first switching element,
the first control circuit or the second control circuit includes a reference voltage generating circuit outputting a fourth voltage, and
the second control circuit sets the fourth voltage or a divided voltage of the fourth voltage to the third voltage.
4. The circuit according, to claim 1, wherein
the DC-to-DC converter varies the first voltage in response to the second voltage.
5. The circuit according to claim 4, wherein
the DC-to-DC converter includes a soft start circuit, and
when the input supply voltage is applied, the first voltage increases from zero to a steady-state value during a first time period and the second voltage increases from zero to a steady-state value during a second time period.
6. The circuit according to claim 4, wherein
the DC-to-DC converter includes:
a first switching element having one end supplied with the input supply voltage and another end outputting the first voltage; and
a second control circuit controlling at least the first switching element in response to the second voltage and varying the first voltage.
7. The circuit according to claim 6, wherein
the second control circuit varies a third voltage used as reference or a dividing ratio of the first voltage in response to the second voltage.
8. The circuit according to claim 7, wherein
the first control circuit or the second control circuit further includes a reference voltage generating circuit outputting a fourth voltage, and
the second control circuit sets the fourth voltage or a divided voltage of the fourth voltage to the third voltage.
9. The circuit according to claim 6, wherein
the DC-to-DC converter includes a soft start circuit, and
when the input supply voltage is applied, the first voltage increases from zero to a steady-state value during a first time period and the second voltage increases from zero to a steady-state value during a second time period.
10. The circuit according to claim 1, further comprising a voltage-detecting circuit detecting the second voltage,
the DC-to-DC converter including:
a first switching element having one end supplied with the input supply voltage and another end outputting the first voltage;
a diode connected between the another end of the first switching element and a ground; and
a second control circuit comparing a third voltage to a divided voltage of the first voltage and controlling at least the first switching element,
the first voltage being varied by varying the third voltage or a dividing ratio to divide the first voltage in response to an output of the voltage-detecting circuit.
11. The circuit according to claim 10, wherein
the DC-to-DC converter includes a soft start circuit, and
when the input supply voltage is applied, the first voltage increases from zero to a steady-state value during a first time period and the second voltage increases from zero to a steady-state value during a second time period.
12. The circuit according to claim 10, wherein
the first control circuit or the second control circuit includes a reference voltage generating circuit outputting a fourth voltage, and
the second control circuit sets the fourth voltage or a divided voltage of the fourth voltage to the third voltage.
13. A receiving apparatus comprising:
an antenna terminal;
a power supply circuit outputting a second voltage to the antenna terminal; and
a receiving circuit receiving a radio signal from the antenna terminal,
the power supply circuit includes:
a DC-to-DC converter outputting a first voltage dropped from an input supply voltage; and
a series regulator outputting the second voltage dropped from an output of the DC-to-DC converter,
the series regulator including:
an output transistor supplied with the output of the DC-to-DC converter and outputting the second voltage, and
a first control circuit operating with the input supply voltage and controlling the output transistor.
14. The apparatus according to claim 13, wherein
the DC-to-DC converter includes a soft start circuit, and
when the input supply voltage is applied, the first voltage increases from zero to a steady-state value during a first time period and the second voltage increases from zero to a steady-state value during a second time period.
15. The apparatus according to claim 13, wherein
the DC-to-DC converter includes:
a first switching circuit element having one end supplied with the input supply voltage and another end outputting the first voltage; and
a second control circuit comparing a third voltage to a divided voltage of the first voltage and controlling at least the first switching element,
the first control circuit or the second control circuit further includes a reference voltage generating circuit outputting a the fourth voltage, and
the second control circuit sets the fourth voltage or a divided voltage of the fourth voltage to the third voltage.
16. The apparatus according to claim 13, wherein
the DC-to-DC converter varies the first voltage in response to the second voltage.
17. The apparatus according to claim 16, wherein
the DC-to-DC converter includes:
a first switching element having one end supplied with the input supply voltage and another end outputting the first voltage; and
a second control circuit varying the first voltage by controlling at least the first switching element in response to the second voltage.
18. The apparatus according to claim 17, wherein
the second control circuit varies a third voltage used as reference or a dividing ratio of the first voltage in response to the second voltage.
19. The apparatus according to claim 13, further comprising a voltage-detecting circuit detecting the second voltage,
the DC-to-DC converter including:
a first switching element having one end supplied with the input supply voltage and another end outputting the first voltage;
a diode connected between the another end of the first switching element and a ground; and
a second control circuit comparing a third voltage to a divided voltage of the first voltage and controlling at least the first switching element,
the first voltage being varied by varying the third voltage or a dividing ratio to divide the first voltage in response to an output of the voltage-detecting circuit.
20. The apparatus according to claim 19, wherein
the first control circuit or the second control circuit further includes a reference voltage generating circuit outputting a the fourth voltage, and
the second control circuit sets the fourth voltage or a divided voltage of the fourth voltage to the third voltage.