1. A method for producing a semiconductor device, the method comprising:
a first step of forming a fin-shaped silicon layer on a silicon substrate, forming a first insulating film around the fin-shaped silicon layer, and forming a pillar-shaped silicon layer in an upper portion of the fin-shaped silicon layer, the pillar-shaped silicon layer having a width equal to a width of the fin-shaped silicon layer;
subsequent to the first step, a second step of forming a gate insulating film around the pillar-shaped silicon layer, forming a metal film and a polysilicon film around the gate insulating film, forming a third resist for forming a gate line, and performing anisotropic etching to form the gate line, the polysilicon film having a thickness smaller than the width of the pillar-shaped silicon layer; and
subsequent to the second step, a third step of depositing a fourth resist, exposing the polysilicon film on a sidewall of an upper portion of the pillar-shaped silicon layer, removing the exposed polysilicon film by etching, removing the fourth resist, removing the metal film by etching, and forming a gate electrode connecting to the gate line.
2. The method for producing a semiconductor device according to claim 1, wherein the first step comprises:
forming a first resist for forming the fin-shaped silicon layer on the silicon substrate, etching the silicon substrate, forming the fin-shaped silicon layer, removing the first resist, depositing the first insulating film around the fin-shaped silicon layer, etching back the first insulating film, exposing an upper portion of the fin-shaped silicon layer, forming a second resist that orthogonally intersects the fin-shaped silicon layer, etching the fin-shaped silicon layer, and removing the second resist so that a portion where the fin-shaped silicon layer orthogonally intersects the second resist forms the pillar-shaped silicon layer.
3. The method for producing a semiconductor device according to claim 1, further comprising a fourth step of forming a first diffusion layer in an upper portion of the pillar-shaped silicon layer and forming a second diffusion layer in a lower portion of the pillar-shaped silicon layer and an upper portion of the fin-shaped silicon layer.
4. The method for producing a semiconductor device according to claim 3, further comprising a fifth step of forming silicides on the first diffusion layer, on the second diffusion layer, and in the gate line.
5. A semiconductor device, comprising:
a fin-shaped silicon layer formed on a silicon substrate;
a first insulating film formed around the fin-shaped silicon layer;
a pillar-shaped silicon layer formed on the fin-shaped silicon layer, the pillar-shaped silicon layer having a width equal to a width of the fin-shaped silicon layer;
a gate insulating film formed around the pillar-shaped silicon layer;
a gate electrode having a laminated structure that includes a metal film and a polysilicon film formed around the gate insulating film, the polysilicon film having a thickness smaller than the width of the pillar-shaped silicon layer;
a gate line that is connected to the gate electrode and extends in a direction orthogonally intersecting the fin-shaped silicon layer;
a second diffusion layer formed in an upper portion of the fin-shaped silicon layer and in a lower portion of the pillar-shaped silicon layer;
a first diffusion layer formed in an upper portion of the pillar-shaped silicon layer;
a silicide formed in an upper portion of the second diffusion layer; and
a silicide formed in an upper portion of the first diffusion layer.
6. The semiconductor device according to claim 5, wherein the gate line has a laminated structure that includes the metal film and a silicide.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of providing power integrity at a watt-hour meter, the method comprising the steps of:
suppressing transient voltages at the input to the watt-hour meter;
monitoring the resistance of an earth ground conductor in circuit communication with the watt-hour meter;
monitoring the current of the earth ground conductor of the watt-hour meter;
monitoring the voltage of the earth ground conductor of the watt-hour meter; and
displaying the results of the suppressing and monitoring steps on a status display.
2. The method of claim 1, wherein the monitoring steps are performed substantially continuously.
3. The method of claim 1, wherein the step of suppressing transient voltages further comprises:
receiving an AC transient voltage at an input to the watt-hour meter that exceeds a predetermined voltage limit; and
redirecting the received voltage to a neutral line of the watt-hour meter.
4. The method of claim 3, wherein the step of redirecting the received voltage to the neutral line of the watt-hour meter further comprises:
providing a voltage limiting device connected in parallel across a hot line and a neutral line of the watt-hour meter;
providing a thermal limiting device connected in series with the voltage limiting device;
providing a fuse connected in series with the voltage limiting device; and
providing a radio frequency filter connected in parallel across the thermal limiting device and the voltage limiting device.
5. The method of claim 4, wherein the voltage limiting device is a metal oxide varistor.
6. The method of claim 4, wherein the thermal limiting device is a thermistor.
7. The method of claim 4, wherein the radio frequency filter is a capacitor.
8. The method of claim 3, wherein the predetermined voltage limit is 271 volts peak.
9. The method of claim 1, wherein the step of monitoring the earth ground resistance of the earth ground cable of the watt-hour meter further comprises:
providing a fixed voltage pulse;
coupling the fixed voltage pulse to a drive transformer;
establishing a current flow through the earth ground cable responsive to the output of the drive transformer;
providing a sense transformer;
transforming the current flowing through the earth ground cable into a corresponding voltage;
filtering the resistance signal of unwanted frequencies;
comparing the corresponding voltage to at least one predetermined voltage limit; and
communicating the comparing step results to the status display.
10. The method of claim 9, wherein the step of providing a fixed voltage pulse further comprises:
providing a 12 volt DC supply; and
providing a timer circuit in circuit communication with the supply to establish the fixed voltage pulse.
11. The method of claim 9, wherein the step of comparing the corresponding voltage to a predetermined voltage limit further comprises:
filtering the corresponding voltage to eliminate noise.
12. The method of claim 9, wherein the step of comparing the corresponding voltage to a predetermined voltage limit further comprises:
providing a first voltage comparator, the first voltage comparator changing state when the corresponding voltage exceeds a 25 ohm ground resistance condition;
providing a second voltage comparator, the second voltage comparator changing state when the corresponding voltage is less than a 300 ohm ground resistance condition;
communicating the first voltage comparator state and the second voltage comparator state to the display.
13. The method of claim 1, wherein the step of monitoring the earth ground current of the earth ground conductor of the watt-hour meter further comprises:
providing a sense transformer;
transforming the current flowing through the earth ground cable into a corresponding voltage;
filtering the signal of unwanted frequencies;
comparing the corresponding voltage to a predetermined voltage limit; and
communicating the results of the comparing step to the display when the corresponding voltage exceeds the predetermined voltage limit.
14. The method of claim 1, wherein the step of monitoring the earth ground voltage of the earth ground cable of the watt-hour meter further comprises:
providing a metal ground probe, the probe positioned in the ground in close proximity to the watt-hour meter;
measuring the voltage between the metal ground probe and a neutral line of the watt-hour meter; and
communicating the results of the measuring step to the display when the voltage between the metal ground probe and the neutral line exceeds a predetermined voltage limit.
15. The method of claim 14, wherein the predetermined voltage limit is 5 volts AC.
16. The method of claim 14, wherein the step of measuring the voltage between the metal ground probe and the neutral line of the watt-hour meter further comprises:
providing an optically isolated circuit in circuit communication with the metal ground probe and a neutral line of the watt-hour meter.
17. The method of claim 16, wherein the optically isolated circuit comprises a light emitting diode in circuit communication with a light sensitive transistor.
18. The method of claim 1, wherein the step of displaying the results of the suppressing and monitoring steps on a status display, further comprises:
providing a visual indicator on the status display.
19. The method of claim 1, further comprising:
providing an audible indicator responsive to the results of the suppressing and monitoring steps.
20. A watt-hour meter protection device comprising:
a transient voltage suppression circuit to provide protection from transient conditions at the input to the watt-hour meter;
an earth ground resistance monitor to monitor the resistance of an earth ground conductor of the watt-hour meter;
an earth ground current monitor to monitor the presence of current on the earth ground conductor of the watt-hour meter;
an earth ground voltage monitor to monitor the presence of voltage on the earth ground conductor of the watt-hour meter;
a status display, the status display in circuit communication with the transient voltage suppression circuit, the resistance monitor, the voltage monitor and the current monitor.
21. The device of claim 20, wherein the transient voltage suppression circuit further comprises:
a voltage limiting device;
a thermal limiting device connected in series with the voltage limiting device;
a fuse connected in series with the voltage limiting device; and
a radio frequency filter connected in parallel across the thermal limiting device and the voltage limiting device.
22. The device of claim 21, wherein the voltage limiting device is a metal oxide varistor.
23. The device of claim 21, wherein the thermal limiting device is a positive temperature coefficient thermistor.
24. The device of claim 21, wherein the radio frequency filter is a capacitor.
25. The device of claim 20, wherein the earth ground resistance monitor further comprises:
a sensor circuit further comprising a drive transformer and a sense transformer;
a fixed voltage pulse circuit to induce a fixed voltage pulse onto the driver transformer;
the earth ground cable in circuit communication with the drive transformer and the sense transformer, the earth ground cable responsive to a voltage output from the drive transformer to produce a related current in the earth ground cable and a corresponding voltage output signal in the sense transformer; a filter network for removing unwanted frequencies,
a first voltage comparator in circuit communication with the output of the filter network, the first voltage comparator changing state when the output voltage exceeds a first predetermined value corresponding to a first predetermined ground resistance condition, the output of the first voltage comparator supplied to the status display; and
a second voltage comparator in circuit communication with the output of the sense transformer, the second voltage comparator changing state when the output voltage exceeds a second predetermined value corresponding to a second predetermined ground resistance condition, the output of the second voltage comparator supplied to the status display.
26. The device of claim 25, wherein the fixed voltage pulse circuit further comprises:
a direct current voltage supply;
a timer circuit in circuit communication with the voltage supply, the timer circuit to establish the fixed voltage pulse.
27. The device of claim 26, wherein the fixed voltage pulse circuit further comprises:
a filter circuit to eliminate noise in the voltage output of the drive transformer.
28. The device of claim 26, wherein the first predetermined ground resistance condition is 25 ohms.
29. The device of claim 26, wherein the second predetermined ground resistance conditions is 300 ohms.
30. The device of claim 20, wherein the earth ground current monitor further comprises:
a current sense transformer;
a frequency filter network; and
a third voltage comparator in circuit communication with the output of the filter network, the output of the third voltage comparator changing state when the output voltage exceeds a the third predetermined value corresponding to a predetermined current condition, the output state of the third voltage comparator supplied to the status display.
31. The device of claim 30, wherein the predetermined current condition is 1 amp of 60 Hz AC current.
32. The device of claim 20, wherein the earth ground voltage monitor further comprises:
a metal earth ground probe, the probe positioned in the ground in close proximity to the watt-hour meter, the metal earth ground probe in circuit communication with a neutral line of the watt-hour meter; and
a measurement circuit to measure the voltage between the metal earth ground probe and the neutral line of the watt-hour meter, the measurement results communicated to the status display when the voltage between the metal ground probe and the neutral line exceeds a predetermined voltage limit.
33. The device of claim 32, wherein the measurement circuit further comprises an optically isolated circuit.
34. The device of claim 33, wherein the optically isolated circuit further comprises a light emitting diode in circuit communication with a light sensitive transistor.
35. The device of claim 32, wherein the predetermined voltage limit is 5 volts AC.
36. The device of claim 20, wherein the status display further comprises visual indicators.
37. The device of claim 20, wherein the status display further comprises audible indicators.
38. A watt-hour meter protection device comprising:
a transient voltage suppression circuit to provide protection from transient conditions at the input to the watt-hour meter;
an earth ground resistance monitor to monitor the resistance of an earth ground conductor of the watt-hour meter;
an earth ground current monitor to monitor the presence of current on the earth ground conductor of the watt-hour meter;
an earth ground voltage monitor to monitor the presence of voltage on the earth ground conductor of the watt-hour meter;
a metal ground probe, the probe positioned in the ground in close proximity to the watt-hour meter, the metal ground probe in circuit communication with a neutral line of the watt-hour meter;
a status monitor display, the status monitor display in circuit communication with the transient voltage suppression circuit, the resistance monitor, the voltage monitor and the current monitor.