1. A method of scanning a sample, the method comprising:
simultaneously forming a plurality of co-linear scans, each scan formed by a sweep of a spot by an acousto-optical device (AOD), the plurality of co-linear scans being separated by a predetermined spacing; and
forming a first plurality of swaths by repeating said simultaneously forming the plurality of co-linear scans in a direction perpendicular to the co-linear scans, the first plurality of swaths having an inter-swath spacing of the predetermined spacing.
2. The method of claim 1, wherein the predetermined spacing is a scan length.
3. The method of claim 1, wherein the predetermined spacing is an integral number of scan lengths.
4. The method of claim 1, further including adjusting an AOD parameter to provide an integral number of scan lengths as the predetermined spacing.
5. The method of claim 1, further including forming a second plurality of swaths adjacent to the first plurality of swaths.
6. The method of claim 1, further including forming a second plurality of swaths adjacent to all of the first plurality of swaths except a bottom half of the first plurality of swaths.
7. The method of claim 6, wherein said forming the second plurality of swaths is performed in an opposite direction to that of the first plurality of swaths.
8. The method of claim 1, wherein said forming the second plurality of swaths is performed in a same direction to that of the first plurality of swaths.
9. A method of performing a scan of a sample, the method comprising:
providing a spot size and a first scan length using an adjustable magnification changer;
providing a spot separation a diffractive optical element (DOE) path;
providing a second scan length by a programmable acousto-optical device (AOD) and based on the first scan length; and
performing the scan using the spot size, the spot separation, and the second scan length.
10. An inspection system comprising:
a first acousto-optical device (AOD) configured to receive a light beam from a laser and to direct the light beam at various angles along an angular scan;
a lens configured to convert the angular scan to a linear scan;
a second AOD configured to receive the light beam in the linear scan and to generate a scan, the scan being a sweep of a spot, thereby generating a plurality of co-linear spots;
a magnification changer configured to adjust magnification of the plurality of co-linear spots, thereby generating an adjusted plurality of co-linear spots;
a first diffractive optical element (DOE) path configured to duplicate the adjusted plurality of co-linear spots, thereby generating a set of co-linear scans having a predetermined spacing there between; and
a moveable platform system configured to secure a sample and forming a first plurality of swaths by moving in a direction perpendicular to the set of co-linear scans as the first DOE path generates a plurality of sets of the co-linear scans, said moving forming adjacent sets of the co-linear scans, the first plurality of swaths having an inter-swath spacing equal to the predetermined spacing.
11. The inspection system of claim 10, wherein the moveable platform system is further configured to step in a direction parallel to the set of co-linear scans and, with the first DOE path, generate a second plurality of swaths, the second plurality of swaths formed adjacent to the first plurality of swaths, wherein the predetermined spacing is a scan length.
12. The inspection system of claim 10, wherein the moveable platform system is further configured to step in a direction parallel to the set of co-linear scans and, with the first DOE path, generate a second plurality of swaths, the second plurality of swaths formed adjacent to the first plurality of swaths, wherein the predetermined spacing is an integral number of scan lengths.
13. The inspection system of claim 10, wherein the moveable platform system is further configured to step in a direction parallel to the set of co-linear scans and, with the first DOE path, generate a second plurality of swaths, the second plurality of swaths formed adjacent to the first plurality of swaths, wherein the second AOD is programmable to provide an adjustable scan length for the second plurality of swaths.
14. The inspection system of claim 10, wherein the moveable platform system is further configured to step in a direction parallel to the set of co-linear scans and, with the first DOE path, generate a second plurality of swaths, the second plurality of swaths formed adjacent to the first plurality of swaths except for a bottom half of the first plurality of swaths.
15. The inspection system of claim 10, wherein the moveable platform system is further configured to step in a direction parallel to the set of co-linear scans and, with the first DOE path, generate a second plurality of swaths, the second plurality of swaths being formed in an opposite direction to that of the first plurality of swaths.
16. The inspection system of claim 10, wherein the moveable platform system is further configured to step in a direction parallel to the set of co-linear scans and, with the first DOE path, generate a second plurality of swaths, the second plurality of swaths being formed in a same direction to that of the first plurality of swaths.
17. The inspection system of claim 10, wherein the first DOE path is for either normal incidence illumination or oblique incidence illumination.
18. The inspection system of claim 10, wherein the first DOE path is for oblique incidence illumination.
19. The inspection system of claim 10, further including:
a second DOE path; and
a switching component configured to direct the adjusted plurality of co-linear spots to one of the first DOE path and the second DOE path.
20. The inspection system of claim 10, further including an anamorphic waist relay positioned to receive the light beam from the laser and configured to allow making adjustments to two independent axes.
21. The inspection system of claim 10, the laser including a barium borate laser doubling crystal, the inspection system further including a beam shaper having a slit.
22. The inspection system of claim 10, further including:
a pupil; and
one or more apodization plates placed in operative relation to the pupil and configured to provide a predetermined transmission profile to the plurality of co-linear spots.
23. The inspection system of claim 22, wherein the one or more apodization plates are configured to provide a same transmission profile in an x axis and a y axis.
24. The inspection system of claim 22, wherein the one or more apodization plates are configured to provide a different transmission profile in an x axis and a y axis.
25. The inspection system of claim 22, wherein the one or more apodization plates are configured to provide a programmable transmission profile.
26. The inspection system of claim 22, wherein the pupil is decentered with respect to objective lenses of the first DOE path.
27. The inspection system of claim 10, further including an angle of incidence mirror positioned between the magnification changer and the first DOE path, the angle of incidence mirror configured to adjust an angle of incidence to the sample.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A braking system comprising:
a rotor member attached to a rotating body;
a sliding member which brakes a rotation of the rotating body via the rotor member as the sliding member is brought into sliding contact with the rotor member; and
a movable member which moves the sliding member in a direction of the rotor member, wherein:
the sliding member includes a sliding member body which comes into contact with the rotor member, and an interposing member which attaches the sliding member body to the movable member;
a thermoelectric conversion element is arranged on an interposing member side in the sliding member body;
a heat transfer member is provided between a surface of the sliding member body on a side of the rotor member, and the thermoelectric conversion element;
the sliding member body is formed with a space for disposing the heat transfer member;
an outer peripheral portion of the heat transfer member is formed with a layer made of metal oxide; and
the heat transfer member formed with the layer made of metal oxide is disposed in the space.
2. The braking system according to claim 1,
wherein the heat transfer member is a carbon nanotube.
3. The braking system according to claim 1, wherein:
the outer peripheral portion of the heat transfer member is formed with a heat insulating material layer; and
the heat transfer member formed with the heat insulating material layer is disposed in the space.