1460737150-73942b76-e9a7-4d88-a6c9-35de7a35b5e8

1. A composition comprising:
a phosphoric acid;
ammonium ions; and
a silicon compound,

wherein the silicon compound comprises a silicon atom, an atomic group comprising an amino group combined with the silicon atom, and at least two oxygen atoms combined with the silicon atom.
2. The composition of claim 1, wherein the atomic group is an amino alkyl group or an amino alkoxy group.
3. The composition of claim 2, wherein the atomic group comprises 1 to 10 carbon atoms.
4. The composition of claim 1, wherein the silicon compound is expressed by the following chemical Formula 1:
wherein, R1 is an amino alkyl group or an amino alkoxy group.
5. The composition of claim 1, wherein the silicon compound is expressed by the following chemical Formula 2:
wherein, R2, R3, R4 and R5 are hydrogen, an alkyl group, an amino alkyl group or an amino alkoxy group,
wherein at least one of R2, R3, R4 and R5 is an amino alkyl group or an amino alkoxy group, and wherein, n is 2 or 3.
6. The composition of claim 1, wherein a content of the silicon compound is within a range of about 0.01 wt % to about 15 wt % of the composition.
7. The composition of claim 1, wherein a content of the ammonium ions is within a range of about 0.01 wt % to about 10 wt % of the composition.
8. The composition of claim 1, wherein an etch selectivity of a silicon nitride layer to a silicon oxide layer is greater than 100.
9. The composition of claim 1, wherein the atomic group comprising the amino group stabilizes a bonding structure of the silicon compound.
10. An etchant comprising:
a phosphoric acid;
ammonium ions or a compound comprising ammonium ions; and
a silicon compound selected from the group consisting of amino propyl silanetriol, tri-(methyl, ethylamino-silane)methyl siloxane and tri-(di-ethylamino-silane)amino propyl siloxane.
11. The etchant of claim 10, wherein the etchant comprises the phosphoric acid in an amount up to about 99.8 wt % of the etchant.
12. The etchant of claim 10, wherein the etchant comprises ammonium ions or a compound comprising ammonium ions in an amount in a range from about 0.01 wt % to about 10 wt % of the etchant.
13. The etchant of claim 10, wherein the etchant comprises the silicon compound in an amount in a range from about 0.01 wt % to about 15 wt % of the etchant.
14-20. (canceled)

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A computer-implemented method of normalizing public HMDA data received from a federal agency, the method comprising:
receiving, by a processor, Home Mortgage Disclosure Act (HMDA) data including at least one of HMDA data reports and loan-level public HMDA data, the HMDA data having loan information that varies as a function of time and that is provided by multiple financial institutions;
correcting, by the processor, errors in the HMDA data;
normalizing, by the processor, the HMDA data across variations in the information, wherein normalizing comprises:
accessing a first database storing data indicative of which HMDA data is provided by each of the multiple financial institutions,
accessing a second database storing the names of the multiple financial institutions and associated identifying tags that identify relationships among the multiple financial institutions,
reducing, based on the data stored in the first database and the names of the multiple financial institutions and the associated identifying tags stored in the second database, a total number of the names of the multiple financial institutions, and
reassigning, based on the reduced total number of the names of the multiple financial institutions, the data stored in the first database;

summarizing, by the processor, the normalized HMDA data; and
outputting, by the processor, the summarized and normalized HMDA data to an application for analysis.
2. The method of normalizing HMDA data according to claim 1, wherein correcting errors comprises correcting at least one of a missing census tract number and an improper data code.
3. The method of claim 1, wherein normalizing the HMDA data further comprises:
retrieving geographic reference data related to the HMDA data;
applying rules to the geographic reference data to normalize current census tract data to previous census tract data, current and previous census tract data to counties, and county information to metropolitan statistical area data; and
outputting normalized census tracts to metropolitan statistical area data.
4. The method of claim 3, wherein normalizing the HMDA data further comprises:
retrieving data related to a goal required of a government-sponsored enterprise and the normalized census tracts to metropolitan statistical area data;
applying rules to the retrieved data to determine loans within census tracts that meet the required goal; and
identifying loans that meet the required goal.
5. The method of claim 1, wherein normalizing the HMDA data further comprises:
applying rules to the accessed data indicative of which HMDA data is provided by each of the financial institutions to determine a market share of a first financial institution in a specified year and to include the market share of other financial institutions acquired by the first financial institution after the specified year.
6. The method of claim 1, wherein normalizing the HMDA data further comprises:
applying rules to the HMDA data to identify loans associated with the HMDA data belonging to the sub-prime market and loans belonging to the prime market.
7. The method of claim 1, wherein normalizing the HMDA data further comprises:
applying rules to the HMDA data to identify conforming loans or non-conforming loans.
8. A computer-readable storage medium including program instructions which, when executed by a processor, performs a method of normalizing public Home Mortgage Disclosure Act (HMDA) data received from a federal agency, the method comprising:
receiving HMDA data including at least one of HMDA data reports and loan-level public HMDA data, the HMDA data having loan information that varies as a function of time and that is provided by multiple financial institutions;
correcting errors in the HMDA data;
normalizing the HMDA data across variations in the information, wherein normalizing comprises:
accessing a first database storing data indicative of which HMDA data is provided by each of the multiple financial institutions,
accessing a second database storing names of the multiple financial institutions and associated identifying tags that identify relationships among the multiple financial institutions,
reducing, based on the data stored in the first database and the names of the multiple financial institutions and the associated identifying tags stored in the second database, a total number of the names of the multiple financial institutions, and
reassigning, based on the reduced total number of the names of the multiple financial institutions, the data stored in the first database;

summarizing the normalized HMDA data; and
outputting the summarized and normalized HMDA data to an application for analysis.
9. The storage medium of claim 8, wherein correcting errors comprises correcting at least one of a missing census tract number and an improper data code.
10. The storage medium of claim 8, wherein normalizing the HMDA data further comprises:
retrieving geographic reference data related to the HMDA data;
applying rules to the geographic reference data to normalize current census tract data to previous census tract data, current and previous census tract data to counties, and county information to metropolitan statistical area data; and outputting normalized census tracts to metropolitan statistical area data.
11. The storage medium of claim 10, wherein normalizing the HMDA data further comprises:
retrieving data related to a goal required of a government-sponsored enterprise and the normalized census tracts to metropolitan statistical area data;
applying rules to the retrieved data to determine loans within census tracts that meet the required goal; and
identifying loans that meet the required goal.
12. The storage medium of claim 8, wherein normalizing the HMDA data further comprises:
applying rules to the accessed data indicative of which HMDA data is provided by each of the financial institutions to determine the market share of a first financial institution in a specified year and to include the market share of other financial institutions acquired by the first financial institution after the specified year.
13. The storage medium of claim 8, wherein normalizing the HMDA data further comprises:
applying rules to the HMDA data to identify loans associated with the HMDA data belonging to the sub-prime market and loans belonging to the prime market.
14. The storage medium of claim 8, wherein normalizing the HMDA data further comprises:
applying rules to the HMDA data to identify conforming loans or non-conforming loans.
15. A Home Mortgage Disclosure Act (HMDA) data analysis tool to perform a normalizing process and analysis of public HMDA data, received from a federal agency comprising:
a geographic translator to perform a cross-year process to normalize geographic information on locations of properties reported in the HMDA data provided by multiple financial institutions;
an income translator to perform a cross-year process to normalize HUD goals required of government-sponsored enterprises relative to the HMDA data;
a lender translator for to access a first database storing data indicative of which HDMA data is provided by each of the multiple financial institutions and a second database storing names of the multiple financial institutions and associated identifying tags that identify relationships among the multiple financial institutions, and to perform a cross-year process to normalize lender information reported in the HMDA data by: reducing, based on the data stored in the first database and the names of the multiple financial institutions and the associated identifying tags stored in the second database, a total number of the names of the multiple financial institutions, and reassigning, based on the reduced total number of the names of the multiple financial institutions, the data stored in the first database;
a rules repository for storing rules for performing the normalization process; and
a rules processor for executing the rules.
16. The HMDA data analysis tool of claim 15, wherein the cross-year process performed by the geographic translator further comprises:
determining changes in HMDA reporting standards and formatting of the HMDA data, data definitions, and a time period when a change occurred; and
normalizing the HMDA data based on the determined change and the time period of the change.
17. The HMDA data analysis tool of claim 15, wherein the determined change is a change in census tract data.
18. The HMDA data analysis tool of claim 15, wherein the determined change is a change in a metropolitan statistical area definition.
19. The HMDA data analysis tool of claim 15, wherein the cross-year process performed by the income translator further comprises:
analyzing the HMDA data in relation to the HUD goals;
and flagging loans meeting the goals required of government-sponsored enterprises by the U.S. Department of Housing and Urban Development.
20. The HMDA data analysis tool of claim 15, wherein the cross-year process performed by the lender translator further comprises:
determining a market share of a financial institution for a particular year; and
analyzing the HMDA data in relation to the determined market share.