1. A mass flow controller comprising:
a flow rate sensor part measuring a flow rate of a fluid flowing in a channel, and outputting a flow rate measurement signal indicating a measurement value of the flow rate;
a flow rate control valve provided upstream or downstream of the flow rate sensor part;
a calculation part performing PID operation on a deviation between a flow rate measurement value indicated by the flow rate measurement signal and a flow rate set value serving as a target value, and calculating a feedback control value to be fed back to the flow rate control valve; and
an opening control signal output part generating an opening control signal based on the feedback control value, and outputting the opening control signal to the flow rate control valve, wherein
the calculation part changes a proportional coefficient, an integral coefficient, and a derivative coefficient used for the PID operation in a stable state based on at least two out of a primary pressure, a time change amount of the primary pressure, and the flow rate set value.
2. The mass flow controller according to claim 1, wherein
the calculation part changes the proportional coefficient, the integral coefficient, and the derivative coefficient depending on whether the time change amount of the primary pressure is positive or negative.
3. The mass flow controller according to claim 1, wherein
the calculation part changes the proportional coefficient, the integral coefficient, and the derivative coefficient depending on whether the time change amount of the primary pressure is positive or negative, changes the proportional coefficient, integral coefficient, and derivative coefficient based on whether the time change amount of the primary pressure is positive or negative by performing predetermined operation on the proportional coefficient, integral coefficient, and derivative coefficient using values obtained by assigning the flow rate set value to a predetermined function, respectively, and changes the proportional coefficient, integral coefficient, and derivative coefficient based on the flow rate set value by performing predetermined operation on the proportional coefficient, integral coefficient, and derivative coefficient using values obtained by assigning the primary pressure to a predetermined function, respectively.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system including an information processing apparatus and a wireless device, comprising:
a wired connection unit adapted to wire-connect the wireless device to the information processing apparatus;
a wireless communication unit adapted to wirelessly communicate between the wireless device and the information processing apparatus;
a storing unit adapted to store authentication information obtained based on wired communication by the wired connection unit, the authentication information being used for authentication when wireless communication is performed by the wireless communication unit;
a separation detecting unit adapted to detect separation of the wired connection between the wireless device and the information processing apparatus; and
an authentication unit adapted to start the authentication using the authentication information stored by the storing unit for wireless communication between the wireless device and the information processing apparatus in accordance with detection by the separation detecting unit.
2. The system according to claim 1, further comprising a generating unit adapted to generate the authentication information in accordance with detection of wired connection by the wired connection unit, and
wherein the storing unit is adapted to send the authentication information generated by the generating unit to a communication destination by the wired communication and to cause the authentication information to be stored in a memory of the communication destination.
3. The system according to claim 2, wherein the storing unit is adapted to cause the authentication information generated by the generating unit to be stored in a memory of the wireless device and a memory of the information processing apparatus.
4. The system according to claim 1, wherein the authentication information stored by the storing unit and individual identification information of the wireless device or the information processing apparatus are associated with each other.
5. The system according to claim 1, further comprising:
a detecting unit adapted to detect wired connection between the wireless device and the information processing apparatus by the wired connection unit,
wherein the storing unit is adapted to store the authentication information in accordance with detection by the detecting unit.
6. An information processing apparatus comprising:
a wired connection unit adapted to be wire-connected to a wireless device;
a wireless communication unit adapted to wirelessly communicate with the wireless device;
a storing unit adapted to cause authentication information used for authentication when wireless communication is performed by the wireless communication unit to be stored in the wireless device by wired communication by the wired connection unit;
a separation detecting unit adapted to detect separation of wired connection between the wireless device and the information processing apparatus; and
an authentication unit adapted to start the authentication using the authentication information stored by the storing unit for the wireless communication between the wireless device and the information processing apparatus in accordance with detection by the separation detecting unit.
7. The information processing apparatus according to claim 6, further comprising a generating unit adapted to generate authentication information in accordance with detection of wired connection by the wired connection unit,
wherein the storing unit is adapted to cause the authentication information generated by the generating unit to be stored in the wireless device.
8. The information processing apparatus according to claim 6, wherein the authentication information stored in the wireless device by the storing unit and individual identification information of the wireless device are associated with each other.
9. The system according to claim 6, further comprising:
a detecting unit adapted to detect wired connection with the wireless device by the wired connection unit,
wherein the storing unit is adapted to cause the authentication information to be stored in accordance with detection by the detecting unit.
10. The system according to claim 6, wherein the storing unit is adapted to cause the authentication information to be stored in the information processing apparatus.
11. An authentication method for an information processing apparatus including wired connection means for being wire-connected to an external device and wireless communication means wirelessly communicating with the external device, comprising:
a setting step of setting authentication information used for authentication when wireless communication is performed between the information processing apparatus and the external device by wired communication with the external device;
a separation detecting step of detecting separation of the wired connection between the external device and information processing apparatus; and
an authentication step of starting authentication using the authentication information set in the setting step for the wireless communication between the external device and the information processing apparatus in accordance with detection in the separation detecting step.