1. An antenna coil comprising:
a bar-shaped core;
a bobbin formed of insulating material and having opposing first and second ends, opposing longitudinal sides extending between said first and second ends and defining a side opening of a recess therebetween, said opposing longitudinal sides defining a winding accepting groove, and said bar-shaped core being disposed in said recess;
a coil wound around said bobbin and said bar-shaped core within said winding accepting groove;
a case formed of insulating material defining a cavity having a cavity interior wall, said bobbin with said coil wound therearound being disposed in said cavity;
a tuning condenser connected to said coil and situated proximate said first end;
said case having a protrusion extending into said cavity;
a wiring harness connected to said tuning condenser and extending exterior of said case, said wiring harness being disposed around a portion of a perimeter of said protrusion in a substantially omega shape, said wiring harness being disposed at least in part between said protrusion and said cavity interior wall; and
a flexible resin filing spaces in said cavity between said bobbin and said cavity interior wall.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
Having thus described our invention, what we claim as new and desire to secure by letters patent is as follows:
1. A method of quantitative determination of optical performance of an optical system including steps of
measuring said aberrations of said optical system outside an image area, and
determining optical performance within said image area based on results of said measuring step.
2. A method as recited in claim 1, further including a step of
correlating optical performance within an image area with aberrations of the optical system outside the image area.
3. A method as recited in claim 2, wherein said correlating step is performed by modelling.
4. A method as recited in claim 2, wherein said correlating step is performed by collecting empirical data.
5. A method as recited in claim 2, further including a step of
adjusting said optical system in accordance with said correlating step.
6. A method as recited in claim 1, wherein said measuring step is performed with light of a non-actinic wavelength.
7. A method as recited in claim 1, wherein said measurement step is performed during projection of an image through said optical system.
8. A method as recited in claim 7, including the further step of measuring on-axis performance of the optical system between projection of images through said optical system.
9. A method as recited in claim 7, including the further step of taking samples within said image area between projections of images.
10. A method of correcting aberrations in a optical system comprising steps of
measuring said aberrations of said optical system outside the image area,
determining a correction for an adaptive optical element to improve optical performance of said optical system within said image area based on results of said measuring step.
11. A method as recited in claim 10, further including a step of
correlating optical performance within an image area with aberrations of the optical system outside the image area.
12. A method as recited in claim 11, further including a step of
adjusting said optical system in accordance with said correlating step.
13. A method as recited in claim 11, wherein said correlating step is performed by modelling.
14. A method as recited in claim 11, wherein said correlating step is performed by collecting empirical data.
15. A method as recited in claim 10, wherein said measuring step is performed with light of a non-actinic wavelength.
16. A method as recited in claim 10, wherein said measurement step is performed during projection of an image through said optical system.
17. A method as recited in claim 16, including the further step of measuring on-axis performance of the optical system between projection of images through said optical system.
18. A method as recited in claim 16, including the further step of taking samples within said image area between projections of images.
19. A method as recited in claim 11, wherein results of said correlating step are stored in the form of a look-up table and accessed during said determining step.
20. An optical system including
an adaptive optical element,
a light source and sensor located off-axis outside an image area of said optical system,
means for determining optical performance within an image area of said optical system based on an output of said sensor, and
means for controlling said adaptive optical element in accordance with an output of said means for determining optical performance.
21. An optical system as recited in claim 20, wherein said means for determining optical performance includes a look-up table.
22. An optical system as recited in claim 20, wherein said light source and sensor are movably positioned by a retractable structure.
23. An optical system as recited in claim 20, wherein said light source provides non-actinic wavelength light.
24. A method of correcting aberrations of an optical system for projecting a pattern defined on a reticle onto a wafer using EUV radiation, said reticle including off-axis image areas, said method comprising steps of
measuring said aberrations of said optical system outside said off-axis image areas, and
determining a correction for an adaptive optical element to reduce said aberrations of said optical system within said off-axis image area based on results of said measuring step.
25. A method as recited in claim 24, wherein said measuring step is performed during projection.
26. A method for correcting aberrations on an optical system for projecting a pattern defined on a reticle onto a wafer using EUV radiation, said image area of said reticle including off-axis image areas, said method comprising steps of
measuring said aberrations of said optical system inside said off-axis image areas, and
determining a correction for an adaptive optical element to reduce said aberrations of said optical system within said image area based on results of said measuring step.