1. A defect inspection data analysis apparatus, comprising:
a first storage means to store inspection data obtained by inspecting a wafer for a defect by means of a defect inspection apparatus after processing is performed in each of predetermined process steps among a plurality of process steps in a front-end process;
a second storage means to store non-conforming article judgment criteria, which are set for each predetermined type of defect on the basis of design data of the wafer, and according to which whether a chip formed on the wafer is a non-conforming article or not is judged;
a defective chip identifying means to identify, after the front-end process is completed, a chip having a defect among all chips formed on the wafer and to determine a type of defect for each defect that the identified chip has, on the basis of the inspection data stored in said first storage means;
a non-conforming chip judging means to read out, from said second storage means and for each chip identified by said defective chip identifying means, the non-conforming article judgment criteria corresponding to the type of defect for each defect that the chip has, then to judge whether the chip is a non-conforming article or not according to the read out non-conforming article judgment criteria, and to obtain position information within a surface of the wafer of a chip judged as being a non-conforming article; and
a third storage means to store the position information within the surface of the wafer of each chip judged as being a non-conforming article by said non-conforming chip judging means.
2. The defect inspection data analysis apparatus according to claim 1, further comprising:
a transmission means to transmit the position information stored in said third storage means to a test apparatus that tests an electric property of each chip formed on the wafer.
3. The defect inspection data analysis apparatus according to claim 1 or 2, wherein the non-conforming article judgment criteria for particular types of defects include criteria according to which a defect that causes a malfunction is judged, and criteria according to which a potential defect is judged.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A boiler for making super heated steam by indirect heat exchange of water against a hot gas, said boiler comprising a vertically oriented vessel comprising a spirally formed conduit around a vertical axis of the vessel, which vessel is provided with an inlet for hot gas fluidly connected to a lower end of the conduit for upwardly passage of hot gas through the spirally formed conduit, an outlet for cooled gas fluidly connected to the upper end of the conduit, an inlet for fresh water and a vessel outlet for super heated steam,
said vessel further provided with a water bath space in the lower end of the vessel and a saturated steam collection space above said water bath space,
said spirally formed conduit comprising a spirally formed evaporating section located in the water bath space and a spirally formed super heater section at the upper end of the vessel, wherein the conduit of the super heater section is surrounded by a second conduit forming an annular space between said super heater conduit and said second conduit, said annular space being provided with an inlet for saturated steam fluidly connected to the saturated steam collection space and an outlet for super heated steam located at the opposite end of said annular space and fluidly connected to the vessel outlet for super heated steam, wherein outlet or inlet are positioned in water bath space.
2. A boiler according to claim 1, further comprising a demister between the inlet for saturated steam and the saturated steam collection space.
3. A boiler according to claim 1, wherein the spirally formed super heater section is located in the saturated steam collection space.
4. A boiler according to claim 1, wherein the inlet for saturated steam is provided at the upstream end of the super heater conduit section as seen from the direction of the hot gas, such that in use the saturated steam flows co-current in the annular space relative to the hot gas in the spirally formed conduit.
5. A boiler according to claim 1, wherein the inlet for saturated steam is provided at the downstream end of the super heater conduit section as seen from the direction of the hot gas, such that in use the saturated steam flows counter-current in the annular space relative to the hot gas in the spirally formed conduit.
6. A boiler according to claim 5, wherein the spirally formed super heater section comprises at least 2 spirally formed conduits running parallel relative to each other and wherein the outlet of the annular space of each conduit is fluidly connected to a common header, said common header being in the form of a horizontal ring through which the conduits transfer in a vertical direction, thereby forming annular outlet openings for passage of the super heated steam to enter the common header and wherein the common header is fluidly connected to the vessel outlet for super heated steam.
7. A boiler according to claim 1, wherein the spirally formed super heater section is located in the saturated steam collection space, the upper end of the saturated steam section is provided with a demister which separates the upper end of the vessel in a saturated steam collection space and a demisted saturated steam collection space and wherein the inlet for saturated steam is provided in the demisted saturated steam collection space.
8. A boiler according to claim 1, further comprising a partial oxidation reactor wherein the reactor is provided with a burner, supply conduits to said burner to supply a hydrocarbon feed and an oxidation gas, said reactor also provided with a outlet for the partial oxidized gas which outlet is fluidly connected to inlet for hot gas of the boiler.
9. A process to prepare super heated steam in a boiler according to claim 1, wherein the hot gas has at inlet 4 a temperature of between 700 and 1600\xb0 C. and a pressure of between 2 and 11 MPa, the cooled gas at outlet 5 has a temperature of between 200 and 450\xb0 C. and the pressure of the super heated steam at outlet 7 has a pressure of between 2 and 15 MPa.
10. A process according to claim 9, wherein the hot gas comprises carbon monoxide and hydrogen and between 0 and 3 vol % sulphur.