1. A method of preparing an active pixel cell on a substrate, comprising:
exerting a first stress on the substrate by forming a shallow trench isolation (STI) structure in the substrate;
testing the stressed substrate using Raman spectroscopy at a plurality of locations on the stress substrate; and
depositing a stress layer having a second stress on the substrate, wherein the stress layer covers devices of the active pixel cell that are on the substrate and the devices include a photodiode next to the STI and a transistor, and the deposition of the stress layer results in the second stress being exerted on the substrate, the second stress countering the first stress.
2. The method of claim 1, further comprising forming a silicon oxynitride anti-reflection coating on the substrate prior to forming the STI structure.
3. The method of claim 2, further comprising removing the silicon oxynitride anti-reflective coating following etching a trench in the substrate and prior to forming the STI structure.
4. The method of claim 1, wherein forming the STI structure comprises growing a liner layer along sidewalls and a bottom surface of a trench in the substrate.
5. The method of claim 4, wherein growing the liner layer comprises growing the liner layer at a temperature ranging from 900\xb0 C. to 1100\xb0 C. using an oxygen-containing gas.
6. The method of claim 4, wherein growing the linear layer comprises growing the liner layer to a thickness ranging from 25 Angstroms to 250 Angstroms.
7. The method of claim 4, further comprising performing an anneal process following growing the liner layer, wherein the anneal process is performed at a temperature ranging from 900\xb0 C. to 1100\xb0 C. in an inert environment.
8. The method of claim 4, further comprising filling the trench with an oxide material using a high density plasma process.
9. The method of claim 1, wherein testing the stressed substrate comprises using a Raman spectroscopy having a scanning width of each location of the plurality of locations is about 1 micron.
10. The method of claim 1, wherein testing the stressed substrate comprises using a Raman spectroscopy at a central point of the substrate and a plurality of points on a periphery of the substrate, and each point of the plurality of points is spaced an equal distance from an adjacent point of the plurality of points.
11. The method of claim 1, further comprising forming an interconnect structure over the substrate, wherein the interconnect structure is connected to the active pixel cell.
12. A method of preparing an active pixel cell on a substrate, comprising:
forming a shallow trench isolation (STI) structure in the substrate, the STI structure exerting a first stress on the substrate, wherein forming the STI structure comprises:
forming a protective layer over the substrate,
forming a trench in the substrate through an opening in the protective layer,
removing the protective layer, and
growing a liner layer in the trench;
testing the stressed substrate using Raman spectroscopy at a plurality of locations on the stress substrate; and
depositing a stress layer having a second stress on the substrate, wherein the stress layer covers devices of the active pixel cell that are on the substrate and the devices include a photodiode next to the STI and a transistor, and the deposition of the stress layer results in the second stress being exerted on the substrate, the second stress countering the first stress.
13. The method of claim 12, wherein growing the liner layer comprises growing the liner layer at a temperature ranging from 900\xb0 C. to 1100\xb0 C. using an oxygen-containing gas.
14. The method of claim 12, wherein growing the linear layer comprises growing the liner layer to a thickness ranging from 25 Angstroms to 250 Angstroms.
15. The method of claim 12, wherein forming the STI structure further comprising performing an anneal process following growing the liner layer, wherein the anneal process is performed at a temperature ranging from 900\xb0 C. to 1100\xb0 C. in an inert environment.
16. The method of claim 15, wherein filling the STI structure further comprising filling the trench with an oxide material using a high density plasma process following the anneal process.
17. The method of claim 12, wherein testing the stressed substrate comprises using a Raman spectroscopy having a scanning width of each location of the plurality of locations is about 1 micron.
18. A method of preparing an active pixel cell on a substrate, comprising:
exerting a first stress on the substrate by forming a shallow trench isolation (STI) structure in the substrate;
determining a magnitude or direction of the first stress by collecting Raman peak shift data at a plurality of locations on the substrate;
selecting a stress layer based on the determined magnitude and direction of the first stress; and
depositing the selected stress layer, wherein the selected stress layer exerts a second stress on the substrate counter the first stress, and the deposited stress layer covers a photodiode next to the STI and a transistor.
19. The method of claim 18, wherein selecting the stress layer comprises creating a recipe for the stress layer based on the collected Raman peak shift data.
20. The method of claim 18, wherein selecting the stress layer comprises retrieving a recipe for the stress layer based on the collected Raman peak shift data.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method comprising:
requesting verification for a transaction;
receiving at a portable device requests for data input, including biometric data of a user, a geospatial position of said device, a query posed to said user using said device, and an identification data from a memory associated with said device;
obtaining responses to said requests for data input; and
transmitting responses to said requests for data input.
2. The method as in claim 1, further comprising generating an electronic key using parameters from said responses to said requests for data inputs, wherein said transmitting responses comprises transmitting said key over a wireless transmitter.
3. The method as in claim 1, wherein said biometric data of a user is selected from the group consisting of a fingerprint of said user, a voice print of said user, an eye scan of said user, and a vein scan of said user.
4. The method as in claim 1, wherein said data inputs are transmitted wirelessly.
5. The method as in claim 1, comprising measuring a time between the step of receiving said query and said step of obtaining the response to said query.
6. The method as in claim 5, further comprising receiving notification of rejection of said transaction if said measured time is above a predetermined limit.
7. The method as in claim 1, comprising receiving a notification of an acceptance or rejection of said transaction.
8. A method for verifying a contemplated transaction between a first party and a second party comprising:
receiving at a central device a request for transaction verification;
receiving from a portable device biometric data of a user, a geospatial position of said portable device, and at least one identification data;
processing said biometric data, said geospatial position, said at least identification data to determine whether transaction verification should be provided; and
transmitting a result of said processing to a merchant device.
9. The system of claim 8, further comprising:
transmitting to said portable device at least one query for personalized information pertaining to said user;
receiving at least one response to said at least one query; and
comparing said at least one response to at least one predetermined response to said at least one query, wherein said processing step further includes processing a result of said comparing step.
10. The system of claim 8, wherein said biometric data includes voice data, and further comprising processing said voice data to determine whether said user is under duress.
11. A mobile device comprising:
a location sensor to detect location data of said device;
a biometric sensor to detect a biometric property of a user of said device;
a display to prompt said user for personalized manual input;
a memory to store identification data;
a user input interface to receive said personalized manual input from said user;
a transmitter to wirelessly transmit said location data, said biometric data, said personalized input and said identification data; and
a mobile power source to power said device.
12. The device as in claim 11, further comprising a processor to encrypt at least one data selected from the group consisting of said location data, said identification data, said biometric data and said personalized manual input, wherein said transmitter is to transmit said encrypted data.
13. The device as in claim 11, wherein said a biometric sensor comprises at least one device selected from the group consisting of a fingerprint sensor, a microphone, a voice scanner, an eye scanner, and a blood vessel scanner.
14. The device as in claim 11, comprising a receiver to receive wireless signals from another biometric sensor.
15. The device as in claim 11, wherein said device has height dimension of less than 3.6 inches, width dimension of less than 2.6 inches and thickness of less than 0.50 inches.
16. A system for verifying a contemplated transaction between a first party and a second party comprising:
a first device including a user input interface, a biometric sensor, a location sensor, a memory, a display and a transmitter to transmit data from said interface, said biometric sensor, said location sensor and said memory; and
a second device including a receiver to receive data from said first device, a processor to process said received data and further to determine whether the contemplated transaction should be verified, and a transmitter to transmit said determination; and
a third device including a transmitter to transmit to said second device a request for verification and a receiver to receive from said second device said determination.
17. The system of claim 16,
wherein said transmitter of said second device is further to transmit a query for personalized information to said first device,
wherein said display of said first device is farther to display said query for personalized information, said input interface of said first device is to receive responsive input from said first party responsive to said query and said transmitter is to transmit to said second device said responsive input, and
wherein said processor of said second device is further to process said responsive input in said determination whether the contemplated transaction should be verified.
18. The system as in claim 16, wherein said first device further comprises a portable power source.
19. The system as in claim 16, wherein said first device further comprises a processor to encrypt data from said interface, said biometric sensor, said location sensor and said memory, and wherein said transmitter of said first device is further to transmit said encrypted data.