1. An apparatus comprising a low EUV reflectivity (LEUVR) mask, wherein the LEUVR mask includes:
a low thermal expansion material (LTEM) layer;
a reflective multilayer (ML) over the LTEM layer, the reflective ML having less than 2% EUV reflectivity; and
a patterned absorption layer over the reflective ML.
2. The apparatus of claim 1, wherein the reflective ML includes forty pairs of films and each pair of films includes a first film having about 1.5 nm molybdenum (Mo) and a second film having about 2 nm silicon (Si).
3. The apparatus of claim 1, wherein the reflective ML includes forty pairs of films and each pair of films includes a first film having about 4.5 nm molybdenum (Mo) and a second film having about 6 nm silicon (Si).
4. The apparatus of claim 1, wherein the reflective ML includes about 280 nm molybdenum silicon (MoSi).
5. The apparatus of claim 1, wherein the LEUVR mask further includes a capping layer between the reflective ML and the patterned absorption layer.
6. The apparatus of claim 5, wherein the capping layer includes about 2.5 nm ruthenium (Ru).
7. The apparatus of claim 1, further comprising:
an extreme ultraviolet (EUV) mask having a EUV reflectivity greater than 60%, wherein the EUV mask and the LEUVR mask have at least one common pattern.
8. An apparatus, comprising:
an extreme ultraviolet (EUV) mask having a first EUV reflectivity; and
a low EUV reflectivity (LEUVR) mask having a second EUV reflectivity,
wherein the first EUV reflectivity is greater than the second EUV reflectivity, and
wherein the EUV mask and the LEUVR mask have at least one common pattern.
9. The apparatus of claim 8, wherein the second EUV reflectivity is less than 2%.
10. The apparatus of claim 9, wherein the first EUV reflectivity is greater than 60%.
11. The apparatus of claim 8, wherein the LEUVR mask comprises:
a low thermal expansion material (LTEM) layer;
a reflective multilayer (ML) over the LTEM layer, the reflective ML having less than 2% EUV reflectivity; and
a patterned absorption layer over the reflective ML.
12. The apparatus of claim 11, wherein the reflective ML includes forty pairs of films and each pair of films includes a first film having about 1.5 nm molybdenum (Mo) and a second film having about 2 nm silicon (Si).
13. The apparatus of claim 11, wherein the reflective ML includes forty pairs of films and each pair of films includes a first film having about 4.5 nm molybdenum (Mo) and a second film having about 6 nm silicon (Si).
14. The apparatus of claim 11, wherein the reflective ML includes about 280 nm molybdenum silicon (MoSi).
15. The apparatus of claim 11, wherein the LEUVR mask further comprises:
a capping layer between the reflective ML and the patterned absorption layer.
16. The apparatus of claim 15, wherein the capping layer includes about 2.5 nm ruthenium (Ru).
17. An apparatus, comprising:
an extreme ultraviolet (EUV) mask; and
a low EUV reflectivity (LEUVR) mask,
wherein the EUV mask includes:
a first low thermal expansion material (LTEM) layer;
a first reflective multilayer (ML) over the first LTEM layer, the first reflective ML having a first EUV reflectivity; and
a first patterned absorption layer over the first reflective ML;
wherein the LEUVR mask includes:
a second low thermal expansion material (LTEM) layer;
a second reflective multilayer (ML) over the second LTEM layer, the second reflective ML having a second EUV reflectivity; and
a second patterned absorption layer over the second reflective ML;
wherein the first EUV reflectivity is greater than the second EUV reflectivity; and
wherein the first and second patterned absorption layers have at least one common pattern.
18. The apparatus of claim 17, wherein the first EUV reflectivity is greater than 60% and the second EUV reflectivity is less than 2%.
19. The apparatus of claim 18, wherein the second reflective ML includes forty pairs of films and each pair of films includes a first film having molybdenum (Mo) and a second film having silicon (Si).
20. The apparatus of claim 18, wherein the second reflective ML includes molybdenum silicon (MoSi).
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system for classifying keywords across multiple campaigns, the system comprising:
a bid management system for managing purchase of at least one keyword in a plurality of campaigns;
a web analytics tool for collecting traffic statistics for the keyword; and
a classification manager adapted for communication with the web analytics tool and the bid management system, the classification manager adapted to receive input from a user including a classification including at least one classified keyword and a classification name, the classification manager retrieving and presenting web site visitation statistics related to the classified keyword.
2. (canceled)
3. The system of claim 1, wherein the classification manager includes a classification user interface module for presenting the classification as a hierarchical display with the classification name at a level, and the classified keyword at a sub-level.
4. The system of claim 3, wherein the classification user interface module is adapted to receive input from a user and manage keywords based on the input from the user.
5. The system of claim 1, wherein:
the bid management system for managing purchase of a plurality of keywords in a plurality of campaigns on a plurality of search engines; and
the classification manager presents the classification including a plurality of classified keywords and a classification name, and the classification manager presents the classification as a hierarchical display with the classification name at a level, and the classified keyword at a sub-level.
6. (canceled)
7. The system of claim 1, wherein the classification manager includes a repository for storing a classification and at least one classified keyword associated with the classification.
8. (canceled)
9. The system of claim 1, wherein the classification manager includes classification creation module for creating the classification including the classification name, the at least one classified keyword, and a metric associated with the classified keyword.
10. The system of claim 9, wherein the metric for the classified keyword includes one from the group of cost-per-click (CPC), impressions, clicks, click-through rate (CTR), page hits, and cost.
11. The system of claim 1, wherein the classification manager includes a keyword measurement module for measuring metrics for classified keywords, the keyword measurement module adapted for communication with the web analytics tool.
12. The system of claim 1, wherein the classification manager presents a plurality of classifications, each classification having a classification name and a plurality of classified keywords.
13. The system of claim 1, wherein at least one of the plurality of classifications includes a sub-classification.
14. A method for classifying keywords across multiple campaigns, the method comprising:
receiving from a user information including a classification name and at least one keyword;
creating a classification including the information;
determining the keyword in the information;
determining a web traffic metric for the keyword; and
presenting the classification to the user including the keyword in a relationship to the classification and the metric for the keyword.
15. The method of claim 14, further comprising storing the information in a repository.
16. The method of claim 15, wherein the information in stored in a data structure including a classification name, a classification keyword, a classification metric, and other classification information.
17. The method of claim 14, wherein the metric is one from the group of cost-per-click (CPC), impressions, clicks, click-through rate (CTR), page hits and cost.
18. The method of claim 14, wherein presenting the classification includes displaying the classification name in a hierarchical relationship to keywords for the classification.
19. (canceled)
20. The method of claim 14, wherein presenting the classification includes generating and displaying a metric for the classification.
21. The method of claim 14, wherein presenting the classification presents the classification and the keywords of the classification in a graphical user interface.
22. The method of claim 14, further comprising managing at least one classified keyword using the graphical user interface.
23. A computer-readable medium having instructions stored therein and that are executable by a processor, the instructions comprising instructions to:
receiving from a user information including a classification name and at least one keyword;
creating a classification including the information;
determining the keyword in the information;
determining a web traffic metric for the keyword; and
presenting the classification to the user including the keyword in a relationship to the classification and the metric for the keyword.
24. (canceled)
25. The computer-readable medium of claim 18 wherein the presenting the classification includes displaying the classification name in a hierarchical relationship to keywords for the classification.
26. (canceled)
27. (canceled)