1. A method of chemical mechanical polishing of a surface of a metal in a semiconductor device to flatten the surface, comprising steps of:
(i) providing a polishing liquid comprising (i-1) at least one compound selected from the group consisting of tetrazoles or triazoles represented by any one of the following general formulas (I) to (III) and (i-2) an organic acid that is at least one compound selected from the group consisting of amino acids and the compounds represented by the following general formulas (1) and (2) and ammonium salts or alkali metal salts thereof:
wherein, Ra represents at least one substituent selected from the group consisting of a sulfo group, an amino group, a phosphono group (\u2014PO3H2), a carbamoyl group (\u2014CONRR\u2032), a carbamide group (\u2014NHCOR\u2033), a sulfamoyl group (\u2014SO2NH2), and a sulfonamide group (\u2014NHSO2R\u2033); R and R\u2032 each independently represents a group selected from the group consisting of a hydrogen atom, alkyl groups and aryl groups; and R\u2033 independently represents a group selected from the group consisting of alkyl groups and aryl groups.
wherein, Rb represents at least one substituent selected from the group consisting of a hydroxyl group, a carboxyl group, a sulfo group, an amino group, a phosphono group (\u2014PO3H2), a carbamoyl group (\u2014CONRR\u2032), a carbamide group (\u2014NHCOR\u2033), a sulfamoyl group (\u2014SO2NH2), and a sulfonamide group (\u2014NHSO2R\u2033); R and R\u2032 each independently represents a group selected from the group consisting of a hydrogen atom, alkyl groups and aryl groups; R\u2033 independently represents a group selected from the group consisting of alkyl groups and aryl groups; and Lb represents a divalent connecting group.
wherein, Rc and Rd each independently represents a hydrogen atom or a substituent, and at least one of Rc and Rd represent a hydroxyl group, a carboxyl group, a sulfo group, an amino group, a phosphono group (\u2014PO3H2), a carbamoyl group (\u2014CONRR\u2032), a carbamide group (\u2014NHCOR\u2033), a sulfamoyl group (\u2014SO2NH2), a sulfonamide group (\u2014NHSO2R\u2033) or a group: -La-Re; La represents a divalent connecting group; Re represents a hydroxyl group, a carboxyl group, a sulfo group, an amino group, a phosphono group (\u2014PO3H2), a carbamoyl group (\u2014CONRR\u2032), a carbamide group (\u2014NHCOR\u2033), a sulfamoyl group (\u2014SO2NH2) or a sulfonamide group (\u2014NHSO2R\u2033); R and R\u2032 each independently represents a group selected from the group consisting of a hydrogen atom, alkyl groups and aryl groups; and R\u2033 independently represents a group selected from the group consisting of alkyl groups and aryl groups;
wherein, R1 represents a single bond, an alkylene group or a phenylene group, R2 and R3 each independently represents a hydrogen atom, a halogen atom, a carboxyl group, an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group or an aryl group, R4 and R5 each independently represents a hydrogen atom, a halogen atom, a carboxyl group, an alkyl group or an acyl group, provided that if R1 represents a single bond, at least one of these groups R4 and R5 is not a hydrogen atom;
wherein, R6 represents a single bond, an alkylene group or a phenylene group, R7 and R8 each independently represents a hydrogen atom, a halogen atom, a carboxyl group, an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group or an aryl group, R9 represents a hydrogen atom, a halogen atom, a carboxyl group, or an alkyl group, R10 represents an alkylene group, provided that if R10 represents a group: \u2014CH2\u2014, at least one of the following requirements should be satisfied: R6 is not a single bond; and R9 is not a hydrogen atom,
(ii) bringing the polishing liquid into contact with a surface of the metal, and
(iii) making the surface of the metal and a polishing pad to undergo relative motions to thus polish the surface of the metal.
2. The method as set forth in claim 1, wherein the metal is wiring of metal copper andor copper alloy.
3. The method as set forth in claim 1, comprising the compound selected from the group consisting of tetrazoles or triazoles represented by any one of the general formulas (I) to (III) in an amount ranging from 0.00001 to 1 moleL.
4. The method as set forth in claim 1, the amount of the organic acid ranges from 0.0005 to 0.5 moleL.
5. The method as set forth in claim 1, wherein the organic acid is at least one compound selected from the group consisting of amino acids and the compounds represented by general formula (1), wherein R1 is a single bond, R2 and R3 each represents a hydrogen atom, R4 and R5 each independently represents an alkyl group, which alkyl group independently represented by R4 and R5 may have a hydroxyl group as a substituent.
6. The method as set forth in claim 5, wherein the organic acid comprises bicine.
7. The method as set forth in claim 2, wherein the semiconductor device has a barrier layer comprising Ta or TaN.
8. The method as set forth in claim 7, which provides an improved selectivity to coppertantalum in polishing operations.
9. The method as set forth in claim 1, wherein the polishing is conducted in the presence of abrasive grains.
10. The method as set forth in claim 1, wherein the pressure for pushing the surface of metal against the polishing pad is from 5 to 500 gcm2.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. (canceled)
2. (canceled)
3. (canceled)
4. (canceled)
5. (canceled)
6. (canceled)
7. (canceled)
8. (canceled)
9. (canceled)
10. (canceled)
11. (canceled)
12. (canceled)
13. (canceled)
14. (canceled)
15. (canceled)
16. (canceled)
17. A method for edge direction detection in an image, comprising the steps of:
selecting a pixel in an area of the image;
calculating a vector value from a plurality of pixels being related to the selected pixel, the vector value being associated with a selected direction;
using the vector value to determine whether the selected pixel is in a non-selected direction edge area;
if the selected pixel is in the non-selected direction edge area, then determining a correlation between the non-selected direction edge area and the selected direction, such that if the correlation is low, then the area of the pixel is considered to not include an edge in the selected direction.
18. The method of claim 17, wherein:
the step of selecting further includes the steps of selecting a pixel in an area of the image that is on the center line and defining the pixel as a selected pixel;
the step of determining a correlation further includes the steps of:
calculating at least two candidate edge directions based on a plurality of small-angle vector values each associated with a direction having a small-angle certain angle from the selected direction;
if a candidate edge direction is associated with a preferred direction, verifying that the candidate edge direction is consistent with an additional candidate edge direction;
when neither of the candidate edge directions is associated with a preferred direction, then performing a direction detection process based solely on big-angle vector values associated with directions having bigger angles from the selected direction than the small-angle.
19. The method of claim 18, further comprising the steps of:
calculating a plurality of vector values from the plurality of the adjoining pixels being on the two lines and being related to the selected pixel, the plurality of the vector values including the vertical vector value, the big-angle vector value, and the plurality of the small-angle vector values; and
wherein the step of determining a correlation further includes the steps of:
if every candidate edge direction that is associated with a preferred direction is consistent with the additional candidate edge direction, taking the additional candidate edge direction as a starting point for a direction fine tuning process including steps of:
determining whether at least one big-angle vector value is associated with a more accurate direction than the additional candidate edge direction, the big-angle vector value being associated with a direction having an orientation similar to the additional candidate edge direction, but having a bigger angle from the vertical direction than the additional candidate edge direction;
if the big-angle vector value is associated with a more accurate direction than the additional candidate edge direction, then selecting the more accurate direction as an edge direction for a position of the selected pixel; and
if the big-angle vector value is not associated with a more accurate direction than the additional candidate edge direction, then selecting the additional candidate edge direction as the edge direction for the position of the selected pixel.
20. The method of claim 19, wherein the selected direction comprises the vertical direction, and the selected vector value is a vertical vector norm value.
21. The method of claim 20, wherein:
the step of using the selected vector value to determine whether the selected pixel is in the non-selected edge area includes using a checking function that is equal to a vertical vector norm value minus a predetermined reference correlation value.
22. An edge direction detection system, comprising:
a vector value calculator for calculating a vector value from a plurality of pixels being related to a selected a pixel in an area of the image, the vector value being associated with a selected direction;
a direction checker that uses the vector value to determine whether the selected pixel is in a non-selected direction edge area;
an edge direction detector, wherein if the selected pixel is in the non-selected direction edge area, the edge detector determines a correlation between the non-selected direction edge area and the selected direction, such that if the correlation is low, then the area of the pixel is considered to not include an edge in the selected direction.
23. The system of claim 22, wherein:
the selected pixel is in an area of the image that is on the center line;
the edge direction detector further:
calculates at least two candidate edge directions based on a plurality of small-angle vector values each associated with a direction having a small-angle certain angle from the selected direction;
if a candidate edge direction is associated with a preferred direction, the edge direction detector verifies that the candidate edge direction is consistent with an additional candidate edge direction;
when neither of the candidate edge directions is associated with a preferred direction, then the edge direction detector performs a direction detection process based solely on big-angle vector values associated with directions having bigger angles from the selected direction than the small-angle.
24. The system of claim 23, further comprising:
means for calculating a plurality of vector values from the plurality of the adjoining pixels being on the two lines and being related to the selected pixel, the plurality of the vector values including the vertical vector value, the big-angle vector value, and the plurality of the small-angle vector values; and
wherein the edge direction detector further:
determines if every candidate edge direction that is associated with a preferred direction is consistent with the additional candidate edge direction, and if so, takes the additional candidate edge direction as a starting point for a direction fine tuning process that:
determines if at least one big-angle vector value is associated with a more accurate direction than the additional candidate edge direction, the big-angle vector value being associated with a direction having an orientation similar to the additional candidate edge direction, but having a bigger angle from the vertical direction than the additional candidate edge direction;
determines if the big-angle vector value is associated with a more accurate direction than the additional candidate edge direction, then selects the more accurate direction as an edge direction for a position of the selected pixel; and
determines if the big-angle vector value is not associated with a more accurate direction than the additional candidate edge direction, then selects the additional candidate edge direction as the edge direction for the position of the selected pixel.
25. The system of claim 24, wherein the selected direction comprises the vertical direction, and the selected vector value is a vertical vector norm value.
26. The system of claim 25, wherein:
the plurality of the vector values are based on vectors defined as:
U
\u2061
(
l
)
=
\u2062
I
\u2061
(
n
1
–
1
,
n
2
–
L
+
l
)
,
\u2026
\u2062
\u2003
,
I
\u2061
(
n
1
–
1
,
n
2
+
l
)
,
\u2026
\u2062
\u2003
,
\u2062
I
\u2062
(
n
1
–
1
,
n
2
+
L
+
l
)
=
\u2062
U
–
L
\u2061
(
l
)
,
\u2026
\u2062
\u2003
,
U
0
\u2061
(
l
)
,
\u2026
\u2062
\u2003
,
U
L
\u2061
(
l
)
,
and
\u2062
\u2003
V
\u2061
(
m
)
=
\u2062
I
\u2061
(
n
1
+
1
,
n
2
–
L
+
m
)
,
\u2026
\u2062
\u2003
,
I
\u2061
(
n
1
+
1
,
n
2
+
m
)
,
\u2026
\u2062
\u2003
,
\u2062
I
\u2061
(
n
1
+
1
,
n
2
+
L
+
m
)
=
\u2062
V
–
L
\u2061
(
m
)
,
\u2026
\u2062
\u2003
,
V
0
\u2061
(
m
)
,
\u2026
\u2062
\u2003
,
V
L
\u2061
(
m
)
.
Wherein I is an original image;
L is a constant that relates to a length of each of the vectors; and
L the length of each of the vectors is 2L+1.
27. The system of claim 26, wherein:
each of the plurality of the vector values is defined as:
D
\u2061
(
l
,
m
)
=
1
M
\u2062
\u2211
i
=
–
L
L
\u2062
\uf603
U
i
\u2061
(
l
)
–
V
i
\u2061
(
m
)
\uf604
\u2062
C
i
.
Ci is a weight value; and
M
=
\u2211
i
\u2062
C
i
.
28. The system of claim 26, wherein:
the vertical vector norm value is defined as:
D
v
=
D
\u2061
(
0
,
0
)
=
1
M
\u2062
\u2211
i
=
–
L
L
\u2062
\uf603
U
i
\u2061
(
0
)
–
V
i
\u2061
(
0
)
\uf604
\u2062
C
i
;
and
Ci is a weight value.
29. The system of claim 27, wherein:
the plurality of the small-angle vector norm values are defined as:
D
l
,
m
=
D
\u2061
(
l
,
m
)
=
1
M
\u2062
\u2211
i
=
–
L
L
\u2062
\uf603
U
i
\u2061
(
l
)
–
V
i
\u2061
(
m
)
\uf604
\u2062
C
i
;
and
\u2062
(
l
,
m
)
\u2208
{
(
1
,
0
)
,
(
–
1
,
0
)
,
(
0
,
1
)
,
(
0
,
–
1
)
}
.
30. The system of claim 26, wherein:
the big-angle norm value is defined as:
D
\u2061
(
l
,
–
l
)
=
1
M
\u2062
\u2211
i
=
–
L
L
\u2062
\uf603
U
i
\u2061
(
l
)
–
V
i
\u2061
(
–
l
)
\uf604
\u2062
C
i
,
l
\u2208
(
–
W
,
–
1
\u22c3
1
,
W
)
;
wherein: l is an integer; W is a constant that relates to a correlation checking range; and 2W+1 is a maximum correlation checking range.