What is claimed is:
1. A diamond film depositing apparatus comprising:
a process chamber having a gas inlet for injecting a reactive gas and an gas exhaust outlet for discharging an exhaust gas;
a cathode disposed at an upper portion inside the process chamber;
an anode for fixing a substrate, the anode being disposed below the cathode;
an SMPS(switched-mode power supply) connected to the cathode and the anode, applying a DC voltage to the cathode and anode to form a plasma between the cathode and the anode;
and a holder for fixing the cathode to the upper inside portion of the process chamber.
2. The apparatus according to claim 1, wherein the cathode and the anode each have a diameter of over 100 mm, respectively.
3. The apparatus according to claim 1, wherein a plurality of vacuum holes and vacuum grooves are formed in an upper surface of the anode.
4. The apparatus according to claim 1, wherein the holder includes a central fixing bar disposed at a center of a upper surface of the cathode, a handle threadedly engaged with the central fixing bar at an upper end thereof, plural edge fixing bars disposed at an edge of the upper surface of the cathode at regular intervals, and a cooling line formed inside the holder.
5. The apparatus according to claim 1, wherein a spacer is inserted between the cathode and the holder.
6. The apparatus according to claim 5, wherein the spacer is formed to be a thin plate.
7. The apparatus according to claim 5, wherein the spacer is formed of one of molybdenum, copper or stainless steel.
8. he apparatus according to claim 5, wherein the surface of the spacer is roughly ground or indented in a uniform pattern.
9. The apparatus according to claim 1, wherein the temperature of the cathode is controlled by varying contact intervals between the cathode, the spacer and the holder fixed to the central fixing bar by rotating the handle.
10. A diamond film depositing method comprising the steps of:
applying a DC or DC pulse voltage with SMPS to a cathode and an anode disposed inside a vacuum chamber;
generating a plasma between the cathode and the anode by supplying a reactive gas therebetween; and
depositing a diamond film on a substrate disposed on a holder while maintaining the temparature of cathode below 2000 C. and maintaining a constant gas pressure.
11. The method according to claim 10, wherein the cathode is maintained at a temperature of 800 C.-1400 C.
12. The method according to claim 10, wherein the reactive gas is a mixture of hydrocarbon and hydrogen.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A magnetic recording medium comprising:
a substrate;
magnetic recording layers formed on the substrate;
the magnetic recording layers both include parts with a relatively higher element ratio of a ferromagnetic material, and parts with a relatively lower element ratio of a ferromagnetic material, which are provided periodically in the in-plane direction,
an average height from a substrate surface of the parts with a relatively higher element ratio of a ferromagnetic material is higher than an average height from the substrate surface of the parts with a relatively lower element ratio of a ferromagnetic material, by between about 0.1-3 nm; and
a nonmagnetic element is ion implanted into the parts with a relatively lower element ratio of the ferromagnetic material, and the nonmagnetic element extends through an uppermost one of the magnetic recording layers, and only partially through a magnetic recording layer beneath said uppermost one of the magnetic recording layers.
2. The magnetic recording medium according to claim 1, wherein the magnetic recording medium is a discrete track type in which the parts with a relatively higher element ratio of the ferromagnetic material and the parts with a relatively lower element ratio of the ferromagnetic material are continuous in the circumferential direction and periodic in the radial direction.
3. The magnetic recording medium according to claim 1, wherein the magnetic recording medium further comprises an adhesion layer, a soft magnetic layer, a seed layer, an intermediate layer, the magnetic recording layer comprises two layers, and a pre-mask layer.
4. The magnetic recording medium according to claim 3, wherein the adhesion layer is AlTi, the seed layer is NiW, the intermediate layer is Ru, the magnetic recording layer comprises two Co-based alloy granular magnetic layers, and the pre-mask layer is Ta.
5. The magnetic recording medium according to claim 3, wherein the soft magnetic layer is a laminated film of a lower soft magnetic layer, an antiferromagnetic coupling layer, and an upper soft magnetic layer.
6. The magnetic recording medium according to claim 5, wherein the lower and upper soft magnetic layers are FeCo-based, and the antiferromagnetic coupling layer is Ru.
7. A magnetic recording medium comprising:
a substrate, an adhesion layer, a soft magnetic layer, a seed layer, an intermediate layer, a magnetic recording layer, and a pre-mask layer;
the magnetic recording layer includes parts with a relatively higher element ratio of a ferromagnetic material, and parts with a relatively lower element ratio of a ferromagnetic material, which are provided periodically in the in-plane direction;
an average height from a substrate surface of the parts with the relatively higher element ratio of the ferromagnetic material is higher than an average height from the substrate surface of the parts with the relatively lower element ratio of the ferromagnetic material,
by between about 0.1-3 nm;
the magnetic recording medium is a discrete track type in which the parts with the relatively higher element ratio of the ferromagnetic material and the parts with the relatively lower element ratio of the ferromagnetic material are continuous in the circumferential direction and periodic in the radial direction; and
a nonmagnetic element is ion implanted into the parts with a relatively lower element ratio of the ferromagnetic material; and
the nonmagnetic element extends through an uppermost one of the magnetic recording layers, and only partially through a magnetic recording layer beneath said uppermost one of the magnetic recording layers.
8. The magnetic recording medium according to claim 7, wherein the adhesion layer is AlTi, the seed layer is NiW, the intermediate layer is Ru, the magnetic recording layer comprises two Co-based alloy granular magnetic layers, and the pre-mask layer is Ta.
9. The magnetic recording medium according to claim 7, wherein the soft magnetic layer is a laminated film of a lower soft magnetic layer, an antiferromagnetic coupling layer, and an upper soft magnetic layer.
10. The magnetic recording medium according to claim 9, wherein the lower and upper soft magnetic layers are FeCo-based, and the antiferromagnetic coupling layer is Ru.
11. A magnetic recording medium comprising:
a substrate;
magnetic recording layers formed on the substrate;
the magnetic recording layers both include parts with a relatively higher element ratio of a ferromagnetic material, and parts with a relatively lower element ratio of a ferromagnetic material, which are provided periodically in the in-plane direction; and
a nonmagnetic element is ion implanted into the parts with the relatively lower element ratio of the ferromagnetic material, and that a height of the ion implanted parts relative to a height of the non-implanted parts is within the range of \u22123 nm or more to 3 nm or less, such that the magnetic recording medium has a glide noise is 30 mV or less.
12. The magnetic recording medium according to claim 11, wherein the magnetic recording medium is a discrete track type in which the parts with the relatively higher element ratio of the ferromagnetic material and the parts with the relatively lower element ratio of the ferromagnetic material are continuous in the circumferential direction and periodic in the radial direction.