1. A chemically amplified resist composition comprising a base resin reacting in the presence of an acid, a photo acid generator generating an acid upon exposure, and a compound having the combination of an acetal moiety and a site which is eliminated by an acid in its molecule, wherein said compound is represented by the formula:
2. The chemically amplified resist composition of claim 1, wherein said compound has the acetal moiety and the site eliminated by an acid at locations such that a final product containing a ring structure can be produced through reactions in the presence of the acid.
3. The chemically amplified resist composition of claim 2, wherein said base resin is a copolymer of 2-methyladamantyl methacrylate and gamma-butyrolactone methacrylate.
4. The chemically amplified resist composition of claim 1, wherein said base polymer is a homopolymer of an acrylate or methacrylate monomer or a copolymer of two or more of such monomers, a polymer of cycloolefin monomer, or a hybrid polymer of an acrylate or methacrylate monomer and a cycloolefin monomer.
5. The chemically amplified resist composition of claim 2, wherein said base polymer is a homopolymer of an acrylate or methacrylate monomer or a copolymer of two or more of such monomers, a polymer of cycloolefin monomer, or a hybrid polymer of an acrylate or methacrylate monomer and a cycloolefin monomer.
6. The chemically amplified resist composition of claim 1, wherein said base resin is a copolymer of 2-methyladamantyl methacrylate and gamma-butyrolactone methacrylate.
7. A method for forming a patterned film by applying a resist material to a film provided on the surface of a substrate, to form a resist layer, pre-baking the resist layer, selectively exposing the pre-baked resist layer to a radiation, post-baking the exposed resist layer, developing the post-baked resist layer to form a resist pattern, and patterning the film underlying the resist pattern by the use of the resist pattern as a mask, wherein the chemically amplified resist composition of claim 1 is used as the resist material.
8. The method of claim 7, wherein said radiation is an excimer laser beam, X-rays, or an electron beam.
9. The method of claim 7, wherein said radiation is an ArF excimer laser beam or vacuum ultraviolet light having a shorter wavelength.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A shower assembly comprising:
a stopper movable between a first position and a second position;
a plurality of first openings in a first region; and
a plurality of second openings in a second region;
wherein, when the stopper is in the first position, water provided to the shower assembly is permitted to pass through the plurality of first openings but is prevented from passing through the plurality of second openings; and
wherein, when the stopper is in the second position, water provided to the shower assembly is permitted to pass through both the plurality of first openings and the plurality of second openings.
2. The shower assembly of claim 1 further comprising a panel, wherein the first region and the second region are regions of the panel, and the panel includes the plurality of first openings and the plurality of second openings.
3. The shower assembly of claim 2, wherein the stopper comprises a first portion and a seal coupled to the first portion, and wherein when the stopper is in the first position, the seal separates the first region of the panel from the second region of the panel.
4. The shower assembly of claim 2, wherein the stopper comprises a lower wall; and
when the stopper is in the first position, the lower wall of the stopper is located adjacent the second region of the panel such that the plurality of second openings are covered by the stopper; and
when the stopper is in the second position, the lower wall of the stopper is spaced apart from the second region of the panel such that the plurality of second openings are not covered by the stopper.
5. The shower assembly of claim 2, wherein the panel defines a tank in the second region, the tank being in communication with the plurality of second openings, wherein after the stopper is moved to the second position, the stopper is not moved back to the first position until the tank is substantially emptied of water.
6. The shower assembly of claim 1, wherein the plurality of first openings are configured to cause drops of water to fall from the plurality of first openings and the plurality of second openings are configured to cause streams of water to fall from the plurality of second openings.
7. A shower assembly comprising:
a first outlet;
a second outlet;
a first inlet configured to provide water to the shower assembly from a water supply;
a stopper movable between a first stopper position and a second stopper position, wherein when the stopper is in the first stopper position, water exits the shower assembly through the first outlet and is prevented from exiting the shower assembly through the second outlet, and wherein when the stopper is in the second stopper position, water is permitted to exit the shower assembly through the second outlet; and
an actuator assembly configured to move the stopper between the first stopper position and the second stopper position, the actuator assembly comprising:
a housing;
a diaphragm operably coupled to the stopper and movable between a first diaphragm position corresponding to the first stopper position and a second diaphragm position corresponding to the second stopper position, the diaphragm and the housing at least partially defining a chamber, the chamber fluidly coupled to the water supply; and
a return mechanism configured to bias the diaphragm toward the second diaphragm position;
wherein when water is provided to the chamber, the diaphragm moves to the first diaphragm position causing the stopper to move to the first stopper position, and when water is inhibited from the chamber, the return mechanism moves the diaphragm to the second diaphragm position causing the stopper to move to the second stopper position.
8. The shower assembly according to claim 7, wherein when the stopper is in the second stopper position, water is permitted to exit the shower assembly through the first outlet.
9. The shower assembly according to claim 7, further comprising a tank configured to receive water from the inlet, the second outlet configured to pass water from the tank;
wherein after water is inhibited from the chamber for the stopper to move to the second stopper position, the diaphragm does not move back to the first diaphragm positon until the tank is substantially emptied of water.
10. The shower assembly according to claim 9 wherein after water is inhibited from the chamber for the stopper to move to the second stopper position, the diaphragm moves back to the first diaphragm position substantially coincident with the tank being emptied of water.
11. A shower assembly comprising:
an inlet configured to couple to a water source;
a plurality of water outlets;
a valve configured to move between an open position and a closed position to selectively permit water to flow to the plurality of water outlets; and
an actuator for selectively moving the valve between the open positon and the closed position, the actuator being configured to receive water from the inlet to move the valve between the open position and the closed position;
wherein the actuator is configured to maintain the valve in the closed position when the actuator is receiving water from the inlet; and
wherein the actuator is configured to move the valve from the closed position to the open position when the actuator stops receiving water from the inlet.
12. The shower assembly according to claim 11, wherein the shower assembly is configured for a user to selectively control whether the actuator receives water from the inlet for moving the valve between the open position and the closed position.
13. The shower assembly according to claim 12, further comprising a reservoir configured to receive water from the inlet in parallel with the actuator receiving water from the inlet, wherein the plurality of water outlets extend through a bottom wall of the reservoir.
14. The shower assembly according to claim 13, wherein the valve comprises a stopper that covers the water outlets, and the actuator moves the stopper up and down to move the valve between the open position and the closed position, respectively.
15. The shower assembly according to claim 14, wherein the actuator comprises a return mechanism to bias the stopper up into the open position.
16. The shower assembly according to claim 15, wherein the actuator comprises a diaphragm to move the stopper down when water is provided to the diaphragm.
17. The shower assembly according to claim 16, wherein the actuator is configured to move the valve to the closed position from the open position slower than it moves the valve to the open position from the closed position.
18. The shower assembly according to claim 17, wherein the actuator comprises:
a housing that defines a chamber coupled to the diaphragm for receiving water; and
a flow regulator having an orifice for receiving water into the chamber at a first actuator flow rate for closing the valve, and a check valve for releasing water from the chamber at a second flow rate for opening the valve, wherein the first flow rate is less than the second flow rate.
19. The shower assembly according to claim 16, wherein the return mechanism comprises a spring.
20. The shower assembly according to claim 12, wherein stopper includes a gasket configured to seal against a portion of the tank to prevent water in the tank from flowing to the water outlets.
21. The shower assembly according to claim 11, further comprising a tank configured to receive water from the inlet and pass water through the plurality of water outlets when the valve is selectively moved to the open position, wherein the actuator is configured such that after the valve is selectively moved to the open position the actuator maintains the valve in the open position a predetermined amount of time that is not sufficient for the tank to empty through the plurality of water outlets.
22. The shower assembly according to claim 21, further configured for a user to selectively actuate the actuator to maintain the stopper in the open position for an extended amount of time longer than the predetermined amount of time to release more water than during the predetermined amount of time.
23. The shower assembly according to claim 21, wherein the valve comprises a stopper that covers the water outlets, and the actuator moves the stopper up and down to move the valve between the open position and the closed position, respectively.
24. The shower assembly according to claim 21, wherein the actuator comprises a diaphragm configured to receive water from the inlet to bias move the valve into the closed position, and comprises a spring to move the valve into the open position when the diaphragm does not receive water.