1. A composite sensor, comprising:
a package including a first space having a first pressure and a first thickness, and the package including a second space having a second pressure lower than the first pressure and a second thickness;
an acceleration sensor element disposed in the first space; and
a vibration type angular velocity sensor element disposed in the second space, wherein the first space has a volume smaller than a volume of the second space, and the first thickness is smaller than the second thickness.
2. The composite sensor according to claim 1, the package including a container, a lid and a partitioned member, the first space and the second space is partitioned by the partitioned member.
3. The composite sensor according to claim 1, wherein at least one of a wall forming the first space and a wall forming the second space has a through hole, the through hole is sealed by a sealing member.
4. The composite sensor according to claim 1, wherein a height of a bottom surface forming the first space and a height of a bottom surface forming the second space are different from each other.
5. The composite sensor according to claim 2, wherein at least one of the container and the lid has a layered structure.
6. An electronic device comprising the composite sensor according to claim 1.
7. An electronic device comprising the composite sensor according to claim 2.
8. An electronic device comprising the composite sensor according to claim 3.
9. An electronic device comprising the composite sensor according to claim 4.
10. An electronic device comprising the composite sensor according to claim 5.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. An apparatus for lapping a magnetic head slider, comprising:
a lapping plate to which a bar of the magnetic head slider makes a contact by a predetermined lapping pressure;
a primary oscillating mechanism that makes a primary oscillating of the bar in a radial direction of the lapping plate; and
a secondary oscillating mechanism that makes a secondary oscillating of the bar in a direction perpendicular to a direction of the primary oscillating, wherein
a coarse lapping of the bar is performed by a combined oscillating of the primary oscillating and the secondary oscillating, and,
upon completion of the coarse lapping, the apparatus switches to the primary oscillating to finish lapping of the bar.
2. The apparatus according to claim 1, further comprising:
a pressure control unit that sets, at a time of the primary oscillating, the lapping pressure to substantially zero at dead center of speed of the primary oscillating.
3. The apparatus according to claim 1, further comprising a mechanism to rotate the lapping plate, wherein
the mechanism substantially stops rotation of the lapping plate at dead center of speed of the primary oscillating.
4. The apparatus according to claim 1, wherein oscillating cycles of the primary oscillating and the secondary oscillating are synchronized with each other at a time of the combined oscillating when a new bar is loaded.
5. The apparatus according to claim 1, wherein at a time of the finishing lapping by the primary oscillating, the direction of the primary oscillating makes an angle to a rotational direction of the lapping plate.
6. A method of lapping a magnetic head slider, comprising:
oscillating a bar of the magnetic head slider while the bar is making a contact with a lapping plate by a predetermined lapping pressure, the oscillating including
primary oscillating the bar in a radial direction of the lapping plate; and
secondary oscillating the bar in a direction perpendicular to a direction of the primary oscillating; and
upon completion of a coarse lapping by the oscillating, performing the primary oscillating to finish lapping of the bar.
7. The method according to 6, further comprising:
setting, at a time of the primary oscillating, a lapping pressure to substantially zero at dead center of speed of the primary oscillating.
8. The method according to 6, further comprising:
setting a speed of rotation of the lapping plate to substantially zero at dead center of speed of the primary oscillating.
9. The method according to 6, wherein oscillating cycles of the primary oscillating and the secondary oscillating are synchronized with each other at a time of the combined oscillating after a new bar is loaded.
10. The method according to 6, wherein at a time of the finishing lapping by the primary oscillating, the direction of the primary oscillating makes an angle to a rotational direction of the lapping plate.