1460758702-a238c087-7ad1-40ef-b2d6-a5d21dc82d4d

1. Apparatus comprising a plurality of resonator structures including a pair of split masses suspended by suspension flexures, wherein each split mass includes two lobes interconnected with a flexure that allows the lobes to rotate slightly as they resonate so as to reduce longitudinal stresses in the suspension flexures.
2. Apparatus according to claim 1, wherein the pair of split masses are interconnected through a plurality of levers so as to resonate in anti-phase with one another, wherein the rotation of the lobes reduces longitudinal stresses in the levers.
3. Apparatus according to claim 2, wherein the plurality of levers transform the coupled motion of the lobes from co-linear motion to parallel motion.
4. Apparatus according to claim 1, wherein each lobe includes a plurality of drive fingers interdigitated with a corresponding array of fixed drive fingers affixed to a substrate.
5. Apparatus according to claim 1, wherein each lobe comprises at least one notch for electronic quadrature suppression.
6. Apparatus according to claim 2, wherein the plurality of resonator structures are suspended within an inner perimeter of a frame and wherein the resonator structures are mechanically coupled to produce substantially a single resonance frequency so as to restrict transfer of inertial forces to the frame.
7. Apparatus according to claim 6, wherein each of the plurality of levers is coupled at one end to the frame and at another end to a different one of the lobes, and wherein each lever has pivots, defined at the points of attachment to the frame and the lobe by the intersection of the axes of at least two orthogonal flexures, to ensure that the attachment point cannot translate with respect to the lever.
8. Apparatus according to claim 2, wherein each of the levers includes a plurality of lever fingers interdigitated with corresponding fingers affixed to an underlying substrate for at least one of driving the lever and sensing position of the lever.
9. Apparatus according to claim 8, wherein each of the levers moves with an arcuate motion, and wherein the lever fingers are disposed at varying angles so as to maintain substantially equal distances from said corresponding fixed fingers during movement of the levers.
10. Apparatus according to claim 1, wherein the plurality of resonator structures are micromachined from a single wafer.
11. Apparatus comprising a plurality of resonator structures including a first pair of masses coupled through a first flexure and a second pair of masses coupled through a second flexure, each mass suspended by a suspension flexure, wherein the first and second flexures allow the masses to rotate slightly as they resonate so as to reduce longitudinal stresses in the suspension flexures.
12. Apparatus according to claim 11, wherein the first and second pairs of masses are interconnected through a plurality of levers so as to resonate in anti-phase with one another, wherein the rotation of the masses reduces longitudinal stresses in the levers.
13. Apparatus according to claim 12, wherein the plurality of levers transform the coupled motion of the masses from co-linear motion to parallel motion.
14. Apparatus according to claim 11, wherein each mass includes a plurality of drive fingers interdigitated with a corresponding array of fixed drive fingers affixed to a substrate.
15. Apparatus according to claim 11, wherein each mass comprises at least one notch for electronic quadrature suppression.
16. Apparatus according to claim 12, wherein the plurality of resonator structures are suspended within an inner perimeter of a frame and wherein the resonator structures are mechanically coupled to produce substantially a single resonance frequency so as to restrict transfer of inertial forces to the frame.
17. Apparatus according to claim 16, wherein each of the plurality of levers is coupled at one end to the frame and at another end to a different one of the masses, and wherein each lever has pivots, defined at the points of attachment to the frame and the mass by the intersection of the axes of at least two orthogonal flexures, to ensure that the attachment point cannot translate with respect to the lever.
18. Apparatus according to claim 12, wherein each of the levers includes a plurality of lever fingers interdigitated with corresponding fingers affixed to an underlying substrate for at least one of driving the lever and sensing position of the lever.
19. Apparatus according to claim 18, wherein each of the levers moves with an arcuate motion, and wherein the lever fingers are disposed at varying angles so as to maintain substantially equal distances from said corresponding fixed fingers during movement of the levers.
20. Apparatus according to claim 11, wherein the plurality of resonator structures are micromachined from a single wafer.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

Having thus described the invention, what is claimed and desired to be secured by letters patent is:

1. An interferometric arrangement for determining the transit time distribution of light in a sample having a light source whose light is supplied to a sample to be examined, in which the light returning from the sample is supplied by means of a light waveguide to a detector with downstream evaluating device, and characterized in that the light returning from the sample and guided in the light waveguide is split into two parts which are superimposed and supplied to the optical detector.

1460758691-a1154cc0-8be9-45d8-93fa-a7382f60d531

1. A process for producing a compound represented by the formula (I) or a salt thereof comprising:
(in the formula (I), R1 represents
(1) \u2014OH,
(2) \u2014O\u2014Ra, or
(3) \u2014NRbRc,
Ra represents a C1-6 alkyl group or a C3-8 cycloalkyl group (wherein the C1-6 alkyl group or C3-8 cycloalkyl group is either unsubstituted or substituted with one or more of a C1-6 alkoxy group, a hydroxyl group, a halogen atom, an aryl group, or a heteroaryl group),
Rb and Rc, which may be the same or different from each other, each represents a hydrogen atom, a halogen atom, a C1-6 alkyl group, or a C3-8 cycloalkyl group (the C1-6 alkyl group or C3-8 cycloalkyl group is either unsubstituted or substituted with one or more of a hydroxyl group, a C1-6 alkoxy group, an aryl group, or a heteroaryl group), or Rb and Rc may bond to each other and form a 4- to 7-membered saturated heterocycle together with an adjacent nitrogen atom (wherein the saturated heterocycle is either unsubstituted or substituted with a hydroxyl group, a C1-6 alkyl group, or a C1-6 alkoxy group))
(A) converting a compound represented by the formula (II) to a compound represented by the formula (III), wherein the compound represented by Formula (III) is produced by reacting the compound represented by Formula (II) with an acyl group donor in the presence of an enzyme derived from a microorganism or Fungus,
(in the formula (II), R1 is as defined in the formula (I) above)
(in the formula (III), R1 is as defined in the formula (I) above,
R2 represents a hydrogen atom, a C1-6 alkyl group, a C3-8 cycloalkyl group, or a \u2014(CH2)n-phenyl group (wherein the C1-6 alkyl group, C3-8 cycloalkyl group, or \u2014(CH2)n-phenyl group is either unsubstituted or substituted with one or more of a halogen atom, a hydroxyl group, a C1-6 alkyl group, or a C1-6 alkoxy group), and n represents 0, 1, or 2)
(B) converting the compound represented by the formula (III) to a compound represented by the formula (IV),
(in the formula (IV), R1 and R2 are as defined in the formula (I) and the formula (III) above),
(C) converting the compound represented by the formula (IV) to a compound represented by the formula (V),
(in the formula (V), R1 is as defined in the formula (I) above), and
(D) converting the compound represented by the formula (V) to the compound represented by the formula (I).
2. A process for producing a compound represented by the formula (III) or a salt thereof, which comprises converting a compound represented by the formula (II) to a compound represented by the formula (III), wherein the compound represented by Formula (III) is produced by reacting the compound represented by Formula (II) with an acyl group donor in the presence of an enzyme derived from a microorganism or fungus,
(in the formula (III), R1 represents
(1) \u2014OH,
(2) \u2014O\u2014Ra, or
(3) \u2014NRbRc,
Ra represents a C1-6 alkyl group or a C3-8 cycloalkyl group (wherein the C1-6 alkyl group or C3-8 cycloalkyl group is either unsubstituted or substituted with one or more of a C1-6 alkoxy group, a hydroxyl group, a halogen atom, an aryl group, or a heteroaryl group),
Rb and Rc, which may be the same or different from each other, each represents a hydrogen atom, a halogen atom, a C1-6 alkyl group, or a C3-8 cycloalkyl group (wherein the C1-6 alkyl group or C3-8 cycloalkyl group is either unsubstituted or substituted with one or more of a hydroxyl group, a C1-6 alkoxy group, an aryl group, or a heteroaryl group), or Rb and Rc bond to each other and form a 4- to 7-membered saturated heterocycle together with an adjacent nitrogen atom (wherein the saturated heterocycle is either unsubstituted or substituted with a hydroxyl group, a C1-6 alkyl group, or a C1-6 alkoxy group),
R2 represents a hydrogen atom, a C1-6 alkyl group, a C3-8 cycloalkyl group, or a \u2014(CH2)n-phenyl group (wherein the C1-6 alkyl group, C3-8 cycloalkyl group, or \u2014(CH2)n-phenyl group is either unsubstituted or substituted with one or more of a halogen atom, a hydroxyl group, a C1-6 alkyl group, or a C1-6 alkoxy group), and n represents 0, 1, or 2)
(in the formula (II), R1 is as defined in the formula (III) above).
3. The process according to claim 1 or 2, wherein R1 is (2)\u2014O\u2014Ra and Ra is a methyl group or an ethyl group.
4. The process according to claim 1 or 2, wherein R2 is a methyl group.
5. The process according to claim 1 or 2, wherein the microorganism is at least one selected from the group consisting of the genus Candida, the genus Aspergillus, the genus Thermomyces, the genus Penicillium, the genus Alcaligenes, the genus Geotrichum, the genus Galactomyces, and the genus Dipodascus.
6. The process according to claim 1 or 2, wherein the enzyme derived from the microorganism is a lipase, a protease, or a pectinase.
7. The process according to claim 1 or 2, wherein the enzyme derived from the microorganism is a lipase derived from Candida cylindracea, Candida rugosa, or Alcaligenes sp.
8. The process according to claim 1 or 2, wherein the enzyme is immobilized on a support.
9. The process according to claim 1 or 2, wherein the acyl group donor is vinyl acetate or isopropenyl acetate.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. A system for radiographic inspection of airfoil structure on aircraft, said system comprising:
a radiation source located on one side of said airfoil structure;
an X-Y scanning device located on an opposing side of said airfoil structure, said X-Y scanning device being positioned to receive radiation from said radiation source; and
a radiation detector mounted on said X-Y scanning device so as to be moveable relative to said airfoil structure along two mutually orthogonal axes.
2. The system of claim 1 wherein said radiation detector converts impinging radiation into electrical signals.
3. The system of claim 2 further comprising means for processing said signals and generating images from said signals.
4. The system of claim 1 further comprising means for holding said X-Y scanning device in position relative to said airfoil structure.
5. The system of claim 4 wherein said means for holding comprise a plurality of legs attached to said X-Y scanning device.
6. The system of claim 5 further comprising a suction cup mounted on each one of said legs.
7. The system of claim 4 wherein said means for holding comprise a crane or robotic device.
8. The system of claim 1 wherein said X-Y scanning device comprises a rectangular frame, a first carriage slidingly mounted on said frame for movement along a first axis, and a second carriage slidingly mounted on said first carriage for movement along a second axis, and said radiation detector being mounted to said second carriage.
9. The system of claim 8 wherein said radiation detector is mounted to said second carriage via a swivel mount.
10. The system of claim 8 wherein said frame is made of a semi-rigid material so as to conform to the contour of said airfoil structure.
11. The system of claim 1 wherein said X-Y scanning device is positioned so as to partially extend beyond an edge of said airfoil structure.
12. A system for radiographic inspection of airfoil structure on aircraft, said system comprising:
a radiation source located on one side of said airfoil structure;
an X-Y scanning device located on an opposing side of said airfoil structure, said X-Y scanning device being positioned to receive radiation from said radiation source and having a carriage that is moveable along two mutually orthogonal axes;
a digital radiation detector that converts impinging radiation into electrical signals, said radiation detector being mounted on said carriage so as to be moveable relative to said airfoil structure along said two mutually orthogonal axes; and
means for processing said signals and generating images from said signals.
13. The system of claim 12 further comprising means for holding said X-Y scanning device in position relative to said airfoil structure.
14. The system of claim 13 wherein said means for holding comprise a plurality of legs attached to said X-Y scanning device.
15. The system of claim 14 further comprising a suction cup mounted on each one of said legs.
16. The system of claim 13 wherein said means for holding comprise a crane or robotic device.
17. The system of claim 12 wherein said X-Y scanning device comprises a rectangular frame that supports said carriage.
18. The system of claim 17 wherein said radiation detector is mounted said carriage via a swivel mount.
19. The system of claim 17 wherein said frame is made of a semi-rigid material so as to conform to the contour of said airfoil structure.
20. The system of claim 12 wherein said X-Y scanning device is positioned so as to partially extend beyond an edge of said airfoil structure.
21. A method for radiographic inspection of airfoil structure on aircraft, said method comprising:
locating a radiation source on one side of said airfoil structure;
locating an X-Y scanning device on an opposing side of said airfoil structure, said X-Y scanning device being positioned to receive radiation from said radiation source;
mounting a radiation detector on said X-Y scanning device so as to be moveable relative to said airfoil structure along two mutually orthogonal axes;
causing said radiation source to emit radiation so as to irradiate said airfoil structure and said X-Y scanning device; and
operating said X-Y scanning device to move said radiation detector in a predetermined raster pattern while said radiation source is emitting radiation.
22. The method of claim 21 wherein said radiation detector is sequentially moved through said raster pattern.
23. The method of claim 21 wherein said radiation detector is continuously moved through said raster pattern.
24. The method of claim 21 wherein said X-Y scanning device is mounted to said airfoil structure.
25. The method of claim 21 wherein said X-Y scanning device is positioned so as to partially extend beyond an edge of said airfoil structure.