1. A method for monitoring a line with a first end extending from a floating marine structure and the second end in a body of water, the method comprising:
positioning a monitoring device at a first point on the line;
determining X, Y, and Z position coordinates of the first point on the line;
moving a monitoring device along the line from the first point to a second point on the line; and
determining X, Y, and Z position coordinates of the second point on the line.
2. The method of claim 1, wherein the determining of the position coordinates of the second point on the line comprises double integrating with respect to time of inertial accelerations measured by the device as it is moved from the first point to the second point.
3. The method of claim 1, wherein the determining of the position coordinates of the second point on the line further comprises:
determining at the second point, at least one of (1) the depth of the device at the second point, (2) the position of the device at the second point relative to magnetic north, and (3) the deviation of the device from vertical, to create an error correction for the position coordinates at the second point.
4. The method of claim 1, wherein the determining of the position coordinates of the second point on the line further comprises:
determining at the second point, (1) the depth of the device at the second point, (2) the position of the device at the second point relative to magnetic north, and (3) the deviation of the device from vertical, to create an error correction for the position coordinates at the second point.
5. A method for relocating a mooring line with a first end extending from a floating marine structure and the second end in a body of water, the method comprising:
(A) positioning a monitoring device at a first point on the line;
(B) determining X, Y, and Z position coordinates of the first point on the line;
(C) moving a monitoring device along the line from the first point to a second point on the line;
(D) determining X, Y, and Z position coordinates of the second point on the line; and
(E) relocating the mooring line.
6. The method of claim 5, further comprising:
(F) repeating steps (A) through (E).
7. The method of claim 5, wherein in step (D) the determining of the position coordinates of the second point on the line comprises double integrating with respect to time of inertial accelerations measured by the device as it is moved from the first point to the second point.
8. The method of claim 5, wherein in step (D), the determining of the position coordinates of the second point on the line further comprises:
determining at the second point, at least one of (1) the depth of the device at the second point, (2) the position of the device at the second point relative to magnetic north, and (3) the deviation of the device from vertical, to create an error correction for the position coordinates at the second point.
9. The method of claim 5, wherein in step (D), the determining of the position coordinates of the second point on the line comprises:
determining at the second point, (1) the depth of the device at the second point, (2) the position of the device at the second point relative to magnetic north, and (3) the deviation of the device from vertical, to create an error correction for the position coordinates at the second point.
10. An apparatus for monitoring a line, the line comprising a first end extending from a floating marine structure and the second end in a body of water, the apparatus comprising:
a frame;
a communication system supported by the frame, and in communication with a global positioning system, providing position coordinates of the apparatus at a first point on the line;
an inertial navigation system supported by the frame, providing position coordinates of the apparatus at a second point on the line, by double integration with respect to time of inertial accelerations measured by the device as it is moved from the first point to the second point.
11. The apparatus of claim 10, further comprising:
a measurement correction device, comprising at least one device selected from the group of devices consisting of a pressure gauge providing apparatus depth, a compass providing apparatus position relative to magnetic north, and an inclinometer for providing apparatus deviation from vertical, wherein the measurement correction device is supported by the frame.
12. The apparatus of claim 11, further comprising:
an error correction module in communication with the measurement correction device, which generates an error correction for the position coordinates of the apparatus at a second point on the line.
13. The apparatus of claim 10 further comprising:
a pressure gauge providing apparatus depth, a compass providing apparatus position relative to magnetic north, and an inclinometer for providing apparatus deviation from vertical, wherein the gauge, compass and inclinometer are all supported by the frame.
14. The apparatus of claim 13, further comprising:
an error correction module in communication with the gauge, compass and inclinometer, which generates an error correction for the position coordinates of the apparatus at a second point on the line.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A bulk acoustic wave resonator comprising:
a substrate;
a resonator section in which a piezoelectric film is sandwiched between a pair of electrodes and a vibration region is defined, the vibration region being an area where the electrodes overlap with the piezoelectric film disposed therebetween when viewed from a film thickness direction;
a support section that is elastically deformable, connects the substrate and the resonator section in a state in which one of the electrodes of the resonator section faces a principle surface of the substrate, and allows the one of the electrodes of the resonator section to move toward and away from the principle surface of the substrate;
a membrane arranged between the one of the electrodes of the resonator section and the principle surface of the substrate, the membrane facing the vibration region of the resonator section and being fixed on the substrate so as to be spaced away from the principle surface of the substrate; and
driver sections arranged on the resonator section and the substrate adjacent to the vibration region and the membrane, respectively, the driver sections allowing the resonator section to move relative to the substrate such that the one of the electrodes of the resonator section moves toward and away from the principle surface of the substrate; wherein
the vibration region of the resonator section contacts the membrane when the driver sections move the one of the electrodes of the resonator section close to the principle surface of the substrate, and the vibration region of the resonator section separates from the membrane when the driver sections move the one of the electrodes of the resonator section away from the principle surface of the substrate.
2. The bulk acoustic wave resonator according to claim 1, wherein the driver sections are respectively arranged on the resonator section and the substrate, include driver electrodes that face each other, and move the resonator section relative to the substrate with an electrostatic force generated when a voltage is applied across the driver electrodes.
3. The bulk acoustic wave resonator according to claim 1, wherein the membrane is made of a material of which a primary component is a metal having an acoustic impedance of about 30\xd7105 g(cm2\xb7s) or higher.
4. The bulk acoustic wave resonator according to claim 1, wherein
the membrane includes a metal film; and
a direct current voltage is applied to the metal film of the membrane when the driver sections move the one of the electrodes of the resonator section close to the principle surface of the substrate, the direct current voltage having a potential different from that of the one of the electrodes of the resonator section.
5. A filter comprising the bulk acoustic wave resonator according to claim 1.
6. The bulk acoustic wave resonator according to claim 1, further comprising stoppers arranged adjacent to sides of the membrane.
7. The bulk acoustic wave resonator according to claim 6, wherein the stoppers are defined by protrusion portions arranged to protrude from the principle surface of the substrate and which have a height lower than a height of the membrane.
8. The bulk acoustic wave resonator according to claim 1, wherein the support section has an arched shape at a cross section, one end of which is connected to the substrate and another end of which is connected to the resonator section.
9. The bulk acoustic wave resonator according to claim 8, wherein the support section includes a wiring arranged to connect the one of the electrodes of the resonator section to an input electrode or an output electrode arranged on the principle surface of the substrate.
10. The bulk acoustic wave resonator according to claim 1, wherein the vibration region of the resonator section separates from the membrane when the driver sections move the one of the electrodes of the resonator section away from the principle surface of the substrate when no drive voltage is applied across the one of the electrodes of the resonator section.
11. The bulk acoustic wave resonator according to claim 2, further comprising stoppers arranged adjacent to sides of the membrane, the stoppers are defined by protrusion portions arranged to protrude from the principle surface of the substrate and which have a height lower than a height of the membrane; wherein
the resonator section contacts the stoppers when the driver sections move the one of the electrodes of the resonator section close to the principle surface of the substrate.
12. The bulk acoustic wave resonator according to claim 3, wherein the primary component of the material used to make the membrane is at least one of molybdenum, ruthenium, rhodium, tantalum, tungsten, rhenium, iridium, or platinum.
13. The bulk acoustic wave resonator according to claim 8, wherein the support section includes a dummy wiring arranged to be connected to a dummy electrode located on the principle surface of the substrate.
14. The bulk acoustic wave resonator according to claim 1, wherein a plurality of the support sections are provided, each of the plurality of the support sections has an arched shape at a cross section, one end of which is connected to the substrate and another end of which is connected to the resonator section.
15. A bulk acoustic wave resonator comprising:
a substrate;
a resonator section in which a piezoelectric film is sandwiched between a pair of electrodes and a vibration region is defined, the vibration region being an area where the electrodes overlap with the piezoelectric film disposed therebetween when viewed from a film thickness direction;
a plurality of support sections that are elastically deformable, connect the substrate and the resonator section in a state in which one of the electrodes of the resonator section faces a principle surface of the substrate, and allow the one of the electrodes of the resonator section to move toward and away from the principle surface of the substrate;
a membrane arranged between the one of the electrodes of the resonator section and the principle surface of the substrate, the membrane facing the vibration region of the resonator section and being fixed on the substrate so as to be spaced away from the principle surface of the substrate; and
driver sections arranged on the resonator section and the substrate adjacent to the vibration region and the membrane, respectively, the driver sections allowing the resonator section to move relative to the substrate such that the one of the electrodes of the resonator section moves toward and away from the principle surface of the substrate; wherein
the vibration region of the resonator section contacts the membrane when the driver sections move the one of the electrodes of the resonator section close to the principle surface of the substrate in response to a drive voltage, and the vibration region of the resonator section separates from the membrane when the driver sections move the one of the electrodes of the resonator section away from the principle surface of the substrate when no drive voltage is provided; and
each of the plurality of the support sections has an arched shape at a cross section, one end of which is connected to the substrate and another end of which is connected to the resonator section.
16. The bulk acoustic wave resonator according to claim 15, wherein the membrane is made of a material of which a primary component is a metal having an acoustic impedance of about 30\xd7105 g(cm2\xb7s) or higher.
17. The bulk acoustic wave resonator according to claim 15, wherein the primary component of the material used to make the membrane is at least one of molybdenum, ruthenium, rhodium, tantalum, tungsten, rhenium, iridium, or platinum.
18. The bulk acoustic wave resonator according to claim 15, wherein
the membrane includes a metal film; and
a direct current voltage is applied to the metal film of the membrane when the driver sections move the one of the electrodes of the resonator section close to the principle surface of the substrate, the direct current voltage having a potential different from that of the one of the electrodes of the resonator section.
19. A filter comprising the bulk acoustic wave resonator according to claim 15.
20. The filter of claim 19, further comprising a plurality of the bulk acoustic wave resonators arranged to define series arm resonators and parallel arm resonators.