1. A three-dimensional measuring apparatus for measuring a measurement object, the three-dimensional measuring apparatus comprising:
pattern forming means for forming a pattern for light to be projected onto the measurement object, said pattern comprising a combination of N individual patterns having an intensity Ii (i=1, 2, 3, . . . , N), respectively, said combination including a pattern employing either an optimal combination which provides a maximum difference in an intensity of the relative maximums between a target individual pattern and an individual pattern adjacent thereto, or a second optimal combination which provides a sufficiently large difference in an intensity of the relative maximums between a target individual pattern and an individual pattern adjacent thereto;
projecting means for projecting a pattern of light in the pattern formed by the pattern forming means onto the measurement object;
imaging means for capturing an image of the measurement object illuminated with the pattern of light;
projected pattern light detection means for detecting the projected pattern of light on the image;
direction angle computing means for comparing the projected pattern of light and an original pattern of light to compute a direction angle of the projected pattern of light;
dividing means for dividing the projected pattern of light at every cycle;
phase value computing means for computing a phase value at a measuring point from the divided projected pattern of light;
distance computing means for computing a depth distance of the measuring point from the computed phase value; and
three-dimensional information computing means for computing three-dimensional information on the measurement object using the computed depth distance of the measuring point.
2. The three-dimensional measuring apparatus according to claim 1, further comprising intensity value correcting means for correcting an intensity value of a projected pattern of light detected by the projected pattern light detection means.
3. The three-dimensional measuring apparatus according to claim 1, further comprising position correcting means for correcting the position of a measurement object in an image acquired by the imaging means.
4. The three-dimensional measuring apparatus according to claim 2, further comprising position correcting means for correcting the position of a measurement object in an image acquired by the imaging means.
5. The three-dimensional measuring apparatus according to claim 1, wherein the three-dimensional information computing means computes spatial coordinates, distance, angle, area or volume of the measurement object.
6. The three-dimensional measuring apparatus according to claim 2, wherein the three-dimensional information computing means computes spatial coordinates, distance, angle, area or volume of the measurement object.
7. The three-dimensional measuring apparatus according to claim 3, wherein the three-dimensional information computing means computes spatial coordinates, distance, angle, area or volume of the measurement object.
8. The three-dimensional measuring apparatus according to claim 4, wherein the three-dimensional information computing means computes spatial coordinates, distance, angle, area or volume of the measurement object.
9. The three-dimensional measuring apparatus according to claim 1, wherein the pattern is formed in the shape of stripes.
10. The three-dimensional measuring apparatus according to claim 2, wherein the pattern is formed in the shape of stripes.
11. The three-dimensional measuring apparatus according to claim 3, wherein the pattern is formed in the shape of stripes.
12. The three-dimensional measuring apparatus according to claim 4, wherein the pattern is formed in the shape of stripes.
13. A three-dimensional measuring method for measuring a measurement object, the three-dimensional measuring method comprising:
a pattern forming step of forming a pattern for light to be projected onto the measurement object, said pattern comprising a combination of N individual patterns having an intensity Ii (i=1, 2, 3, . . . , N), respectively said combination including a pattern employing either an optimal combination which provides a maximum difference in an intensity of the relative maximums between a target individual pattern and an individual pattern adjacent thereto, or a second optimal combination which provides a sufficiently large difference in an intensity of the relative maximums between a target individual pattern and an individual pattern adjacent thereto;
a pattern light projecting step of projecting a pattern of light in the pattern formed in the pattern forming step onto the measurement object;
an imaging step of capturing an image of the measurement object illuminated with the pattern of light;
a projected pattern light detection step of detecting the projected pattern of light on the image;
a direction angle computing step of comparing the projected pattern of light and an original pattern of light to compute a direction angle of the projected pattern of light;
a dividing step of dividing the projected pattern of light at every cycle;
a phase value computing step of computing a phase value at a measuring point from the divided projected pattern of light;
a distance computing step of computing a depth distance of the measuring point from the computed phase value; and
a three-dimensional information computing step of computing three-dimensional information on the measurement object using the computed depth distance of the measuring point.
14. The three-dimensional measuring method according to claim 13, further comprising an intensity value correcting step of correcting an intensity value of a projected pattern of light detected in the projected pattern light detection step.
15. A computer-readable storage medium containing instructions for a three-dimensional measuring apparatus, the instructions for causing the three-dimensional measuring apparatus to execute:
a pattern forming step of forming a pattern for light to be projected onto a measurement object, said pattern comprising a combination of N individual patterns having an intensity Ii (i=1, 2, 3, . . . , N), respectively, said combination including a pattern employing either an optimal combination which provides a maximum difference in an intensity of the relative maximums between a target individual pattern and an individual pattern adjacent thereto, or a second optimal combination which provides a sufficiently large difference in an intensity of the relative maximums between a target individual pattern and an individual pattern adjacent thereto;
a projected pattern light detection step of detecting a projected pattern of light formed by a pattern forming means on an image of the measurement object illuminated with a projected pattern of light in the pattern formed in the pattern forming step;
a direction angle computing step of comparing the projected pattern of light and an original pattern of light to compute a direction angle of the projected pattern of light;
a dividing step of dividing the projected pattern of light at every cycle;
a phase value computing step of computing a phase value at a measuring point from the divided projected pattern of light;
a distance computing step of computing a depth distance of the measuring point from the computed phase value; and
a three-dimensional information computing step of computing three-dimensional information on the measurement object using the computed depth distance of the measuring point.
16. The computer-readable storage medium containing instructions for a three-dimensional measuring apparatus according to claim 15, the instructions further for causing the three-dimensional measuring apparatus to execute an intensity value correcting step of correcting an intensity value of a projected pattern of light detected in the projected pattern light detection step.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A physical quantity sensor element comprising:
a supporting portion;
a mass portion; and
a beam portion which connects the supporting portion and the mass portion to each other,
wherein the beam portion includes a branched portion.
2. The physical quantity sensor element according to claim 1,
wherein the beam portion includes two mass portion side beam portions which extend from two positions in the mass portion, which are different from each other, and
wherein both end portions on the supporting portion side of the two mass portion side beam portions are connected to each other.
3. The physical quantity sensor element according to claim 2,
wherein a width of an end portion on the mass portion side of each of the mass portion side beam portions is greater than a width of a middle portion of each of the mass portion side beam portions.
4. The physical quantity sensor element according to claim 1,
wherein the beam portion includes two supporting portion side beam portions which extend from the two positions in the supporting portion, which are different from each other, and
wherein both end portions on the mass portion side of the two supporting portion side beam portions are connected to each other.
5. The physical quantity sensor element according to claim 4,
wherein a width of the end portion on the supporting portion side of each of the supporting portion side beam portions is greater than a width of a middle portion of each of the supporting portion side beam portions.
6. The physical quantity sensor element according to claim 1,
wherein the beam portion includes two branched beam portions which are branched from the middle of the beam portion, and
wherein both end portions on the mass portion side of the two branched beam portions are connected to each other, and both end portions on the supporting portion side of the two branched beam portions are connected to each other.
7. The physical quantity sensor element according to claim 1, further comprising:
a first mass portion and a second mass portion which respectively form the mass portion;
a first supporting portion and a second supporting portion which respectively form the supporting portion;
a first beam portion which forms the beam portion for connecting the first mass portion and the first supporting portion;
a second beam portion which forms the beam portion for connecting the second mass portion and the second supporting portion; and
a coupling portion which connects the first mass portion and the second mass portion to each other.
8. The physical quantity sensor element according to claim 7,
wherein one end portion of the coupling portion is connected to a portion in the first mass portion, and the other end portion of the coupling portion is connected to a portion in the second mass portion,
wherein the first mass portion is connected to the one end portion of the coupling portion, and includes the first easily deformable portion which is deformable so as to reduce a change of a posture of the first mass portion with respect to a reference surface, and
wherein the second mass portion is connected to the other end portion of the coupling portion, and includes the second easily deformable portion which is deformable so as to reduce a change of a posture of the second mass portion with respect to the reference surface.
9. The physical quantity sensor element according to claim 8,
wherein the first mass portion includes a first gap portion in which the first easily deformable portion is disposed, and
wherein the second mass portion includes a second gap portion in which the second easily deformable portion is disposed.
10. The physical quantity sensor element according to claim 7, further comprising: an electrode which detects vibration of the first supporting portion and the second supporting portion along the reference surface.
11. A physical quantity sensor comprising:
the physical quantity sensor element according to claim 1; and
a package which stores the physical quantity sensor element.
12. Electronic equipment comprising the physical quantity sensor element according to claim 1.
13. A movable body comprising the physical quantity sensor element according to claim 1.
14. The physical quantity sensor element according to claim 2,
wherein the beam portion includes two supporting portion side beam portions which extend from the two positions in the supporting portion, which are different from each other, and
wherein both end portions on the mass portion side of the two supporting portion side beam portions are connected to each other.
15. The physical quantity sensor element according to claim 14, further comprising:
a first mass portion and a second mass portion which respectively form the mass portion;
a first supporting portion and a second supporting portion which respectively form the supporting portion;
a first beam portion which forms the beam portion for connecting the first mass portion and the first supporting portion;
a second beam portion which forms the beam portion for connecting the second mass portion and the second supporting portion; and
a coupling portion which connects the first mass portion and the second mass portion to each other.
16. The physical quantity sensor element according to claim 15,
wherein one end portion of the coupling portion is connected to a portion in the first mass portion, and the other end portion of the coupling portion is connected to a portion in the second mass portion,
wherein the first mass portion is connected to the one end portion of the coupling portion, and includes a first easily deformable portion which is deformable so as to reduce a change of a posture of the first mass portion with respect to a reference surface, and
wherein the second mass portion is connected to the other end portion of the coupling portion, and includes a second easily deformable portion which is deformable so as to reduce a change of a posture of the second mass portion with respect to the reference surface.
17. The physical quantity sensor element, according to claim 16,
wherein the first mass portion includes a first gap portion in which the first easily deformable portion is disposed, and
wherein the second mass portion includes a second gap portion in which the second easily deformable portion is disposed.
18. The physical quantity sensor element according to claim 17, further comprising: an electrode which detects the vibration of the first supporting portion and the second supporting portion along the reference surface.