Author: claimsbot

1. A fabrication method of a semiconductor device, said semiconductor device having a first interconnection, a via-plug that is connected to said first interconnection, and a second interconnection that is connected to said via-plug; said fabrication method comprising the steps of:
successively forming on said first interconnection: a first metal diffusion prevention film, an interlayer dielectric film, an etching stopper film, and an intralayer dielectric film;
using a lithographic process and an etching process to form a first opening in a prescribed opening pattern in said interlayer dielectric film, said etching stopper film, and said intralayer dielectric film;
applying an antireflective coating for preventing a reflection of light by said first interconnection, and forming a second opening in said first opening in which said antireflective coating is buried such that a position of an upper surface of said antireflective coating is lower than a lower surface of said etching stopper film;
forming a resist film having a prescribed pattern of trench openings in said intralayer dielectric film;
performing etching with said resist film as a mask to form a trench opening in said intralayer dielectric film while said antireflective coating remains at a bottom of said first opening after said etching such that said antireflective coating covers sidewalls of said first opening only to a level of the upper surface of said antireflective coating, and forming sidewalls of said interlayer dielectric film of said second opening such that a diameter of said second opening is progressively larger from a bottom toward a top of said second opening by etching said interlayer dielectric film with said antireflective coating remaining at the bottom of said first opening as a mask;
removing said resist film and said antireflective coating;
etching from the trench opening that has been formed in said intralayer dielectric film to remove said etching stopper film and said first metal diffusion prevention film that have been exposed on upper surfaces and forming a via-hole that includes said second opening and the trench opening of said second interconnection; and
embedding a metal in said via-hole and the trench opening of said second interconnection to form said via-plug and said second interconnection, and then forming a second metal diffusion prevention film.
2. The fabrication method of a semiconductor device according to claim 1, wherein:
regarding a plug sidewall angle in a cross-sectional shape of said via-hole following formation of said via-hole, said plug sidewall angle being an angle formed between: a line that joins an arbitrary point of a sidewall of said via-hole and a point of intersection of a line that passes through said arbitrary point and that is parallel to a surface of said first interconnection and a central axis of said via-hole, and a line that joins said arbitrary point and a point of intersection between a tangent line at said arbitrary point and said central axis, an angle of depression from a line that is parallel to the surface of said first interconnection is a positive angle, and an angle of elevation from a line that is parallel to the surface of said first interconnection is a negative angle; and
in the cross-sectional shape of said via-hole, said plug sidewall angle is a positive angle; and at least two points exist between a base and a top of said via-hole on at least one of two sidewalls of said via-hole cross-sectional shape at which said plug sidewall angle attains a maximum value.
3. A method of fabricating a semiconductor device having a first interconnection, a via-plug connected to said first interconnection, and a second interconnection connected to said via-plug, said fabrication method comprising:
successively forming a first metal diffusion prevention film, an interlayer dielectric film, an etching stopper film, and an intralayer dielectric film above a first interconnection;
forming an opening having a prescribed opening pattern in said interlayer dielectric film, said etching stopper film, and said intralayer dielectric film using a lithographic process and an etching process;
filling said opening with an antireflective coating from a bottom portion of said opening to a level such that a position of an upper surface of said antireflective coating is lower than a lower surface of said etching stopper film;
forming a resist film having a prescribed pattern of trench openings in said intralayer dielectric film;
performing etching with said resist film as a mask to form a trench opening in said intralayer dielectric film while said antireflective coating remains at a bottom of said opening after said etching such that said antireflective coating covers sidewalls of said opening only to a level of the upper surface of said antireflective coating, and forming sidewalls of said interlayer dielectric film of said opening such that a diameter of said opening is progressively larger from the bottom toward a top of said opening by etching said interlayer dielectric film with said antireflective coating remaining at the bottom of said first opening as a mask;
removing said resist film and said antireflective coating;
etching from the trench opening that has been formed in said intralayer dielectric film to remove said etching stopper film and said first metal diffusion prevention film that have been exposed on upper surfaces and forming a via-hole that includes said opening and the trench opening of said second interconnection; and
embedding a metal in said via-hole and the trench opening of said second interconnection to form said via-plug and said second interconnection, and then forming a second metal diffusion prevention film.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An apparatus for a function setting event in a mobile terminal according to user position information, the apparatus comprising:
a memory for storing character user interface images according to a user position information confirming event and a function setting event, and storing the user position information;
a global positioning system (GPS) receiving unit for receiving the user position information;
an event collection unit for sensing an event occurrence and generating an event message for identifying the corresponding event;
an agent control unit, comprising a plurality of specialists to perform an agent control according to a type of the events, for determining a specialist to perform an agent control corresponding to the event message, among the plurality of specialists, selecting a character user interface according to the events from among agent expressions of the determined specialist and outputting the character user interface on the mobile terminal; and
an agent expression unit for accessing and outputting a character image and text corresponding to the character user interface according to the events.
2. The apparatus as claimed in claim 1, wherein the agent control unit further comprises a specialist that generates a timer event when a user position information confirming time point arrives, the user position information is received from the GPS receiving unit if the timer event occurs, and a message is displayed for notifying the user’s present position and a corresponding character user interface.
3. The apparatus as claimed in claim 1, wherein the agent control unit causes display of the user position information and the present setting state of the mobile terminal received from the GPS receiving unit, the agent control unit further comprising a specialist for storing information being displayed in the memory.
4. The apparatus as claimed in claim 1, wherein the agent control unit further comprises a specialist that judges whether a pre-registered schedule to be carried out in the user’s present state exists according to the user position confirming event, and displays the pre-registered schedule depending on the existence of the pre-registered schedule or displays a message for suggesting registration of a schedule and a corresponding character user interface.
5. The apparatus as claimed in claim 1, wherein the agent control unit further comprises a specialist that judges whether any function set more than the predetermined number of times in the present position in the past exists according to the user position information confirming event, and displays a message for suggesting setting of the function and a corresponding character user interface depending on the existence of the set function.
6. The apparatus as claimed in claim 1, wherein the GPS receiving unit is configured to confirm a user’s position for a preset period set by the user.
7. The apparatus as claimed in claim 1, wherein the memory is configured to store the user position information received from the GPS receiving unit, delete the user position information stored in the memory if the specialist judges that the user exists in the present position for longer than a reference time, groups and stores the present position information and the setting state of the mobile terminal that exist for longer than the reference time.
8. The apparatus as claimed in claim 1, wherein the memory is configured to store:
a message for confirming the user position information and a corresponding character user interface; a message for notifying storage of the user position information and the setting state of the mobile terminal and a corresponding character user interface; a message for suggesting a schedule registration according to the user position information and a corresponding character user interface; and a message for suggesting a change of the setting state of the mobile terminal according to the user position information and a corresponding character user interface.
9. A method for processing a function setting event in a mobile terminal according to user position information, the method comprising;
storing user position information confirming event when the user position information confirming event occurs;

confirming specialists preset to process a corresponding user position information confirming event among a plurality of specialists to perform an agent control according to a type of an event, in order to perform an agent control for the event;
performing an agent control for the corresponding event by calling the confirmed specialists;
confirming the results of the process by the specialists that have performed an agent control of the event; and
displaying on the mobile terminal an expression related to the results of the process preset by the specialists according to the results of process.
10. The method as claimed in claim 9, wherein the specialists that confirm the user position information and the state information of the mobile terminal during the user position information confirming event comprise first and second specialists, the method further comprising:
confirming the user position information by the first specialist and judging whether the user has stayed in the position for a preset time;
storing the present position information and setting state of the mobile terminal by the second specialist; and
displaying a message for notifying the present position and the setting state of the mobile terminal and a corresponding character user interface.
11. The method as claimed in claim 9, wherein the setting state of the mobile terminal comprises a reception notifying mode of the mobile terminal, a power onoff state, and setting states of respective menus.
12. The method as claimed in claim 10, further comprising:
confirming the user position information for each preset time period by the first specialist;
storing, preferentially by the second specialist, the user’s present position information confirmed by the first specialist for the present time period in a memory;
judging, by the first specialist, a user’s departure from the present position if the user has stayed in the present position for less than a reference time; and
deleting, by the second specialist, the user position information preferentially stored in the memory by the second specialist.
13. The method as claimed in claim 10, wherein the specialists that stores a schedule confirming event among the user position information confirming event and a setting state confirming event of the mobile terminal comprise third and fourth specialists, the method further comprising:
judging, by the third specialist, whether a pre-registered schedule to be carried out in the user’s position exists when the event occurs;
displaying a message for suggesting registration of a schedule to be carried out in the position and a corresponding character user interface if no schedule exists as a result of judgment;
confirming, by the fourth specialist, the setting state of the mobile terminal;
judging whether the present setting state is identical to the state of the mobile terminal previously set in the present position; and
displaying a message for suggesting a change of the present setting state of the mobile terminal to the previous setting state and a corresponding character user interface if the present setting state is not identical to the previous setting state as determined by the judging.
14. A method for processing a function setting event in a mobile terminal according to user location information, the method comprising:
confirming user location information received through a global positioning system (GPS) receiving unit for a preset period;
judging whether a user has stayed in the location for longer than a reference time;
storing the user location information and a state setting information of the mobile terminal if the user has stayed in the location for longer than the reference time as determined by the judging; and
second judging whether a pre-registered schedule to be carried out in the location exists after storing the user location information and the state setting information of the mobile terminal.
15. The method as claimed in claim 14, further comprising:
confirming and storing the user location information in a memory for the preset period; and
deleting the user location information stored in the memory if the user has stayed in the location for less than the reference time.
16. The method as claimed in claim 14, further comprising:
displaying a message for suggesting registration of a schedule to be carried out in the location and a corresponding character user interface if no schedule exists as determined by the second judging; and
receiving the registration of the schedule to be carried out in the location according to the user’s setting.
17. The method as claimed in claim 16, wherein the pre-registered schedule comprises the schedule pre-registered in the location by the user and the location information registered when the schedule to be carried out in the location is registered.
18. The method as claimed in claim 14, further comprising:
third judging the setting state of the mobile terminal set more than a predetermined number of times in the location after storing the user location information and the state information of the mobile terminal;
displaying a message for suggesting change of the setting state of the mobile terminal and a corresponding character user interface if the set information of the mobile terminal set more than the predetermined number of times in the location as determined by the third judging; and
changing the function of the mobile terminal set in the location according to the user’s setting.
19. The method as claimed in claim 18, wherein the setting state of the mobile terminal comprises a reception notifying mode of the mobile terminal, a power onoff state, and setting states of respective menus.

1. A hydraulic system comprising:
a controller connectable to an operator interface for receiving an operator input;
a pump system including a pump operable in a first direction for supplying pressurized fluid;
a hydraulic circuit having a first side fluidly connecting a first side of the pump to a first port to which a first port of a consumer can be connected and providing a path for flow between the port and the pump, and a second side fluidly connecting the second side of the pump to a second port to which a second port of the consumer can be connected; and
a diverting flow path including a variable restriction controlled by the controller for controlling a rate of flow through the first side of the hydraulic circuit, wherein the diverting flow path diverts at least a portion of flow in the first side of the hydraulic circuit away from the pump,
wherein the controller is configured to receive a requested user command from the operator interface, to evaluate the user command in relation to a maximum capacity of the pump system in response to the requested user command, and to control the pump and variable restriction to implement the user command based on the evaluation, and
wherein the maximum capacity of the pump system is a maximum storage rate or a maximum storage capacity of an electrical storage system of the pump system that is operatively connected to the pump and is configured to recuperate energy from the pump being operated by an external load, and wherein the variable restriction is opened in response to an evaluation in which the user command indicates a desired consumer movement corresponding to a storage rate or storage capacity greater than the maximum storage rate or maximum storage capacity of the electrical storage system.
2. (canceled)
3. (canceled)
4. (canceled)
5. The hydraulic system of claim 1, wherein the diverting flow path fluidly connects the first port to the second port.
6. The hydraulic system of claim 1, wherein the diverting flow path fluidly connects the first port to a boost system.
7. The hydraulic system of claim 1, wherein the diverting flow path fluidly connects the first port to tank.
8. The hydraulic system of claim 1, further comprising
valving fluidly connected between the pump and the ports, the valving controlled by the controller and operative to regulate the pressurized fluid between the pump and the consumer.
9. The hydraulic system of claim 1, wherein the valving includes a first load holding valve disposed between the first port and the pump, and a second load holding valve disposed between the second port and the pump.
10. The hydraulic system of claim 1, wherein the diverting flow path is fluidly parallel with and thereby bypasses the first load holding valve.
11. The hydraulic system of claim 1, wherein the diverting flow path is fluidly parallel with and thereby bypasses the second load holding valve.
12. The hydraulic system of claim 1, wherein the user command is a command for lowering an actuator.
13. The hydraulic system of claim 1, wherein the pump is a bi-directional pump operable in a first direction for supplying pressurized fluid through the first valve to the consumer for operating the consumer in one direction, and operable in a second direction opposite the first direction for supplying pressurized fluid through a second valve to the consumer for operating the consumer in a direction opposite the first direction.
14. The hydraulic system of claim 1, further comprising:
a hydraulic actuator to and from which hydraulic fluid is supplied and returned in opposite directions to operate the actuator in opposite directions.
15. The hydraulic system of claim 1, further comprising:
a boost system for accepting fluid from or supplying fluid to the hydraulic circuit of the hydraulic system,
wherein the boost system includes:
a boost pump for supplying fluid to a fluid make-upreturn line that selectively is in fluid communication with the consumer, and a boost electric machine for driving the boost pump, the electric machine connected to a boost electric power source through a boost inverter.
16. The hydraulic system of claim 1, further comprising:
an electric machine operated by the controller and connected to an electrical source through an inverter to drive the pump.
17. A method of controlling fluid flow through the pump in an electro-hydraulic system, the method comprising the steps of:
receiving a requested user command for a consumer;
evaluating the user command in relation to a maximum capacity of the an electro-hydraulic system in response to the requested user command;
diverting flow around the pump to implement the user command based on the evaluation via a variable restrictor of a diverting flow path, and
wherein the maximum capacity of the electro-hydraulic system is a maximum storage rae or maximum storage capacity of an electrical storage system of the electro-hydraulic system that is operatively connected to the pump and is configured to recuperate energy from the pump being operated by an external load, and wherein the diverting is in response to an evaluation in which the user command indicates a desired consumer movement corresponding to a storage rate or storage capacity greater than the maximum storage rate or maximum storage capacity of the electrical storage system.
18. (canceled)
19. (canceled)
20. (canceled)
21. The method of claim 17, wherein the diverting includes fluidly connecting the first port to the second port.
22. The method of claim 17, wherein the diverting includes fluidly connecting the first port to a boost system.
23. The method of claim 17, wherein the diverting includes fluidly connecting the first port to tank.
24. The method of claim 17, wherein the user command is a command for lowering an actuator
25. The method of claim 17, wherein the consumer is a hydraulic cylinder and the first side of the hydraulic circuit is fluidly connected to a rod-side of the hydraulic cylinder.
26. The method of claim 17, wherein the pump is a bi-directional pump operable in a first direction for supplying pressurized fluid through the first valve to the hydraulic actuator for operating the consumer in one direction, and operable in a second direction opposite the first direction for supplying pressurized fluid through a second valve to the hydraulic actuator for operating the consumer in a direction opposite the first direction.
27. The method of claim 17, wherein the consumer is a hydraulic actuator to and from which hydraulic fluid is supplied and returned in opposite directions to operate the actuator in opposite directions.
28. The method of claim 17, further comprising:
accepting fluid from or supplying fluid to a hydraulic circuit of the electro-hydraulic system via a boost system,
wherein the boost system includes:
a boost pump for supplying fluid to a fluid make-upreturn line that selectively is in fluid communication with the hydraulic actuator, and a boost electric machine for driving the boost pump, the electric machine connected to a boost electric power source through a boost inverter.
29. The method of claim 17, further comprising controlling valving fluidly connected between the pump and the ports to regulate the pressurized fluid between the pump and the consumer.
30. The method of claim 17, wherein the valving includes a load-holding valve connected between the pump and the first port, the load-holding valve controlled by the controller and operative in a first position to allow flow to the actuator to operate the actuator against a load and operative in a second position to block load-induced return flow from the actuator to the pump
31. The method of claim 17, further comprising:
operating the pump in one direction for supplying pressurized fluid to the hydraulic consumer for operating the consumer in a first direction, and operating the pump in a second direction opposite the first direction for supplying pressurized fluid to the consumer for operating the consumer in a direction opposite the first direction.
32. The method of claim 17, further comprising:
driving the pump via an electric machine connected to an electrical source through an inverter.
33. A hydraulic system comprising:
a pump system including a pump operable in a first direction for supplying pressurized fluid;
a hydraulic circuit having a first side fluidly connecting a first side of the pump to a first port to which a first port of a consumer can be connected and providing a path for flow between the port and the pump, and a second side fluidly connecting the second side of the pump to a second port to which a second port of the consumer can be connected; and
a diverting flow path including a variable restriction for controlling a rate of flow through the first side of the hydraulic circuit, wherein the diverting flow path diverts at least a portion of flow in the first side of the hydraulic circuit to tank,
wherein the variable restriction is variable as a function of a sensed system parameter, and
wherein the maximum capacity of the pump system is a maximum storage rate or maximum storage capacity of an electrical storage system of the pump system that is operatively connected to the pump and is configured to recuperate energy from the pump being operated by an external load, and wherein the variable restriction is opened in response to an evaluation in which the user command indicates a desired consumer movement corresponding to a storage rate or storage capacity greater than the maximum storage rate or maximum storage capacity of the electrical storage system.
34. The hydraulic system of claim 33 wherein the diverting flow path fluidly connects the first port to tank via a boost system.
35. The hydraulic system of claim 33, wherein the diverting flow path fluidly connects the first port directly to tank.
36. The hydraulic system of claim 33, further comprising:
a controller connected to an operator interface;
wherein the controller is configured to receive a requested user command, to evaluate the user command in relation to a maximum capacity of the pump system in response to the requested user command, and to control the pump and variable restriction to implement the user command based on the evaluation.
37. (canceled)
38. (canceled)
39. (canceled)
40. The hydraulic system of claim 33, further comprising
valving fluidly connected between the pump and the ports, the valving controlled by the controller and operative to regulate the pressurized fluid between the pump and the consumer.
41. The hydraulic system of claim 33, wherein the valving includes a first load holding valve disposed between the first port and the pump, and a second load holding valve disposed between the second port and the pump.
42. The hydraulic system of claim 33, wherein the diverting flow path is fluidly parallel with and thereby bypasses the first load holding valve.
43. The hydraulic system of claim 33, wherein the diverting flow path is fluidly parallel with and thereby bypasses the second load holding valve.
44. The hydraulic system of claim 33 wherein the user command is a command for lowering an actuator.
45. The hydraulic system of claim 33, wherein the pump is a bi-directional pump operable in a first direction for supplying pressurized fluid through the first valve to the consumer for operating the consumer in one direction, and operable in a second direction opposite the first direction for supplying pressurized fluid through a second valve to the consumer for operating the consumer in a direction opposite the first direction.
46. The hydraulic system of claim 33, further comprising:
a hydraulic actuator to and from which hydraulic fluid is supplied and returned in opposite directions to operate the actuator in opposite directions.
47. The hydraulic system of claim 33, further comprising:
a boost system for accepting fluid from or supplying fluid to the hydraulic circuit of the hydraulic system,
wherein the boost system includes:
a boost pump for supplying fluid to a fluid make-upreturn line that selectively is in fluid communication with the consumer, and a boost electric machine for driving the boost pump, the electric machine connected to a boost electric power source through a boost inverter.
48. The hydraulic system of claim 33 further comprising:
an electric machine operated by the controller and connected to an electrical source through an inverter to drive the pump.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. A focal-plane shutter for cameras, comprising:
two base plates provided with a blade chamber between the two base plates, each having an aperture for exposure at about a center; and
a shutter blade group having a plurality of arms pivotally mounted to one of the two base plates and at least one blade pivotally supported by means of a plurality of joint shanks with respect to the plurality of arms, placed in the blade chamber so that heads of the joint shanks project toward a photographer side,
wherein, of the two base plates, a base plate placed on the photographer side has at least one convex portion metal-plated on an object-side surface thereof, and the arms slide along the convex portion and are shifted to the object side immediately before the heads of the joint shanks moved inside the aperture in an actuation of the shutter blade group reach a position corresponding to an edge of the aperture.
2. A focal-plane shutter for cameras according to claim 1, wherein a surface hardness of the convex portion metal-plated is substantially the same as a surface hardness of each of the arms.
3. A focal-plane shutter for cameras according to claim 2, wherein a material of metal plating of the convex portion is palladium and each of the arms is made in such a way that after carbon tool steel is immersed in an alkaline solution to form a black oxide film, chromate treatment is applied to the steel, or titanium is nitride-treated.
4. A focal-plane shutter for cameras according to any one of claims 1-3, wherein the convex portion is configured so that the object-side surface of a member mounted to the base plate placed on the photographer side is spherical.
5. A focal-plane shutter for cameras according to any one of claims 1-3, wherein the base plate placed on the photographer side is made of synthetic resin, and the convex portion is configured integral with the base plate made of synthetic resin so that the object-side surface is spherical.
6. A focal-plane shutter for cameras according to any one of claims 1-3, wherein space between the two base plates is partitioned by an intermediate plate, the shutter blade group is placed between the intermediate plate and the base plate placed on the photographer side, and an additional shutter blade group pivotally supporting at least one blade by means of joint shanks with respect to a plurality of arms pivotally mounted to the one base plate is placed between the intermediate plate and a remaining base plate.
7. A focal-plane shutter for cameras according to claim 4, wherein space between the two base plates is partitioned by an intermediate plate, the shutter blade group is placed between the intermediate plate and the base plate placed on the photographer side, and an additional shutter blade group pivotally supporting at least one blade by means of joint shanks with respect to a plurality of arms pivotally mounted to the one base plate is placed between the intermediate plate and a remaining base plate.
8. A focal-plane shutter for cameras according to claim 5, wherein space between the two base plates is partitioned by an intermediate plate, the shutter blade group is placed between the intermediate plate and the base plate placed on the photographer side, and an additional shutter blade group pivotally supporting at least one blade by means of joint shanks with respect to a plurality of arms pivotally mounted to the one base plate is placed between the intermediate plate and a remaining base plate.